JPS61236974A - 流体制御弁 - Google Patents

流体制御弁

Info

Publication number
JPS61236974A
JPS61236974A JP60076929A JP7692985A JPS61236974A JP S61236974 A JPS61236974 A JP S61236974A JP 60076929 A JP60076929 A JP 60076929A JP 7692985 A JP7692985 A JP 7692985A JP S61236974 A JPS61236974 A JP S61236974A
Authority
JP
Japan
Prior art keywords
piezoelectric element
shaped piezoelectric
disc
valve
applied voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60076929A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0326300B2 (cs
Inventor
Yoshio Yamamoto
山本　芳雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60076929A priority Critical patent/JPS61236974A/ja
Publication of JPS61236974A publication Critical patent/JPS61236974A/ja
Publication of JPH0326300B2 publication Critical patent/JPH0326300B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/025—Actuating devices; Operating means; Releasing devices electric; magnetic actuated by thermo-electric means

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
JP60076929A 1985-04-11 1985-04-11 流体制御弁 Granted JPS61236974A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60076929A JPS61236974A (ja) 1985-04-11 1985-04-11 流体制御弁

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60076929A JPS61236974A (ja) 1985-04-11 1985-04-11 流体制御弁

Publications (2)

Publication Number Publication Date
JPS61236974A true JPS61236974A (ja) 1986-10-22
JPH0326300B2 JPH0326300B2 (cs) 1991-04-10

Family

ID=13619410

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60076929A Granted JPS61236974A (ja) 1985-04-11 1985-04-11 流体制御弁

Country Status (1)

Country Link
JP (1) JPS61236974A (cs)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4903732A (en) * 1989-01-19 1990-02-27 A. K. Allen Company Piezoelectric valve
US6065688A (en) * 1998-03-09 2000-05-23 The United States Of America As Represented By The Secretary Of The Navy Mass-flux actuator with high frequency response
US6086041A (en) * 1997-04-07 2000-07-11 Mccord Winn Textron Inc. Multi-valve module having a ceramic piezoelectric actuator
EP1653133A1 (en) * 2004-10-28 2006-05-03 C.R.F. Società Consortile per Azioni Valve
EP1762764A1 (en) * 2005-09-08 2007-03-14 C.R.F. Societa Consortile per Azioni Diaphragm valve with shape memory actuator
EP1881272A1 (de) * 2006-07-20 2008-01-23 Siemens Aktiengesellschaft Vorrichtung und Verfahren zur Versorgung eines Brenners mit einem Brennstofffluid

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4903732A (en) * 1989-01-19 1990-02-27 A. K. Allen Company Piezoelectric valve
US6086041A (en) * 1997-04-07 2000-07-11 Mccord Winn Textron Inc. Multi-valve module having a ceramic piezoelectric actuator
US6065688A (en) * 1998-03-09 2000-05-23 The United States Of America As Represented By The Secretary Of The Navy Mass-flux actuator with high frequency response
EP1653133A1 (en) * 2004-10-28 2006-05-03 C.R.F. Società Consortile per Azioni Valve
US7198248B2 (en) 2004-10-28 2007-04-03 C.R.F. Societa Consortile Per Azioni Valve for fluids, liquids or powder material having a diaphragm shutter controlled by shape memory means
EP1762764A1 (en) * 2005-09-08 2007-03-14 C.R.F. Societa Consortile per Azioni Diaphragm valve with shape memory actuator
US7422192B2 (en) 2005-09-08 2008-09-09 C.R.F. Societa Consortile Per Azioni Valve for fluids having a diaphragm shutter controlled by shape memory means acting also as defrosting means
EP1881272A1 (de) * 2006-07-20 2008-01-23 Siemens Aktiengesellschaft Vorrichtung und Verfahren zur Versorgung eines Brenners mit einem Brennstofffluid

Also Published As

Publication number Publication date
JPH0326300B2 (cs) 1991-04-10

Similar Documents

Publication Publication Date Title
EP0544405B1 (en) Piezoelectric fluid flow control valve
US5785295A (en) Thermally buckling control microvalve
US5176358A (en) Microstructure gas valve control
US5441597A (en) Microstructure gas valve control forming method
KR0159490B1 (ko) 마이크로 밸브
JPS62220782A (ja) 流体制御弁
US5325880A (en) Shape memory alloy film actuated microvalve
EP0512521B1 (en) Thermally actuated microminiature valve
US5216273A (en) Microvalve of multilayer silicon construction
EP0469749A1 (en) Control valve utilizing mechanical beam buckling
US7011288B1 (en) Microelectromechanical device with perpendicular motion
US4142553A (en) Electrothermally operated valve
JPS61236974A (ja) 流体制御弁
JP4265965B2 (ja) 小型電磁弁の製造方法
JPH10318385A (ja) 金属ダイアフラム式流量調節弁
JP4042244B2 (ja) 半導体マイクロアクチュエータ及び半導体マイクロバルブ及び半導体マイクロリレー
EP1060338B1 (en) Piezo-actuated high response valve
JPH0415377A (ja) 静電駆動型マイクロバルブ
JPS63106475A (ja) 圧電素子を用いた流体制御弁
JPS6065970A (ja) 電歪素子を用いた弁装置
JPH0314616Y2 (cs)
JPS63111382A (ja) 電歪駆動型ノ−マリ−クロ−ズ弁
JPH0313658Y2 (cs)
GB2285672A (en) Fluid flow control valve
JPH0810035B2 (ja) 圧電弁