JPS61236634A - Production of transparent electrode for display device - Google Patents

Abstract

PURPOSE:To produce easily a transparent electrode for a fine and precise display device by coating a photosensitive resin on a glass substrate, drying it, thereafter exposing and developing it, forming an electrically-conductive transparent film thereon and removing the residual part of the photosensitive resin. CONSTITUTION:A photosensitive resin film 2 is formed on the whole surface of one side by coating a photosensitive resin on a glass substrate 1 and drying it. A negative 4 of an electrically-conductive picture is superposed thereon, exposed and developed and the surface of the substrate of a part in which a film of the electrically-conductive picture is formed is exposed. Then the above-mentioned substrate 1 is heated in the high temp. of >=450 deg.C and a methanol soln. incorporating metallic salt such as stannic chloride as an essential component is blown thereon to form an electrically-conductive transparent film 3 on the whole surfaces of one side. Thereafter the picture of the film 3 is formed on the substrate 1 and remains by cooling the substrate 1 and removing the residual part of the film 2 together with the film 3 thereon with a method such as the water washing and the transparent electrode for a display element is obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION A conventional method for forming a transparent conductive image film on a glass substrate as a display element by spraying is as follows.

As shown in FIG. 1, the glass substrate f1. heated to 400°C to 600°C. A metal salt solution (for example, a methanol solution containing stannic chloride as a main component) is sprayed onto L1 to form a transparent conductive film (3) with a thickness of, for example, 05 to 07 μm over the entire surface of one side of the substrate.

Next, as shown in Fig. 2, a photosensitive resin (2) was applied to the entire surface of this conductive film (3), and the original plate of the electrode image was brought into close contact with the photosensitive resin (2) and exposed. After that, the unexposed areas were removed by washing with water, and a photosensitive resin image film (2
) to form.

Next, using this photosensitive resin image film (2) as a mask, the exposed conductive film (3) is etched away by, for example, a zinc-hydrochloric acid reduction method, leaving a conductive image film (coating) as shown in FIG. ) to form.

Finally, remove the photosensitive resin image film by treating it with a stripping solution.
As shown in FIG. 5, a transparent conductive image film is formed on a glass substrate (1).

Such conventional methods have the following drawbacks.

1) During the etching process, the side etching phenomenon of the conductive image film is unavoidable, which hinders the creation of fine and precise images.

2) Etching solution maintenance, waste solution treatment, etc. require pollution prevention equipment and care, which increases the number of steps and increases costs.

The present invention is a method of manufacturing a transparent glass which eliminates the above-mentioned drawbacks of the conventional glass substrate, as shown in FIG.
A photosensitive resin film (2) is formed on the entire negative side, and a conductive image original plate (4) (the pattern of the original plate is opposite to the desired pattern of the conductive image film) is superimposed on the second. Exposure and development are performed to expose the portion of the substrate surface on which a conductive image film is to be formed, as shown in FIG.

Next, while heating the substrate (1), a solution of a metal salt mixed with an alcohol solution or a lower ester solution is sprayed to form a conductive film (3) as shown in FIG. 8 on the entire negative side.

Thereafter, the substrate (1) is cooled and the photosensitive resin corneal image film (
)) with the conductive film (3) formed on its second part.
If it is removed by washing with water or other convenient methods (polishing, etc.), a desired positive image (3') of the conductive film shown in FIG. 9 will remain on the substrate (1).

Compared to the conventional method, this method eliminates the need for etching treatment, eliminates the use of photosensitive resin as an etching mask, and eliminates all of the drawbacks of the conventional method mentioned above, allowing the creation of fine and precise conductive image films. It is effective in forming the material and also simplifies the manufacturing process.

Examples of the present invention will be described in detail below.

A) Photosensitive resin
1 M-6 manufactured by Nihon Kankoshi Kogyo Co., Ltd. B) Metal salt solution Stannic chloride 13% by weight Antimony trichloride 2×10% by weight Methyl alcohol 86% by weight The operations shown in FIGS. 6 to 9 were performed using the two solutions A and B.

Solution A was applied to the entire surface of the soda lime glass substrate (1) to a thickness of 2 μm using the Mayer bar coating method, and then heated at 50°C for 1 hour.
Drying was carried out for 0 minutes to form a photosensitive resin layer (2) as shown in FIG.

The image original plate (4) is placed on top of this photosensitive resin layer (2), contact exposure is carried out for 8 seconds, the unexposed area is developed with water, washed away, and dried with an air knife to form a photosensitive resin image as shown in FIG. 2') was formed.

This substrate was placed in a spraying device and heated to 500° C., and liquid B was sprayed for 30 seconds to form a transparent conductive film (3) of tin oxide. (Fig. 8) Next, this substrate was taken out from the spraying device and cooled, and the photosensitive resin film ( ) and the tin oxide film (3) on it were removed by only washing with water to obtain a conductive image film (3'l). Ta.

In this case, the photosensitive resin film (2) was reduced to about 0.5 μm, but there was no damage as an ashed image, and there was no deformation of the formed image film.

Claims (1)

[Claims] By applying a photosensitive resin on a glass substrate, exposing it after drying, and then developing it, the glass surface is exposed only in the area where the conductive film is to be attached, and this glass substrate is heated to a high temperature of 450°C or higher, For example, a method for manufacturing a transparent electrode for a display element, which comprises spraying a methanol solution containing tinnic chloride as a main component, cooling the substrate, and then removing the remaining portion of the photosensitive resin.