JPS61235625A - Clean room - Google Patents
Clean roomInfo
- Publication number
- JPS61235625A JPS61235625A JP60077453A JP7745385A JPS61235625A JP S61235625 A JPS61235625 A JP S61235625A JP 60077453 A JP60077453 A JP 60077453A JP 7745385 A JP7745385 A JP 7745385A JP S61235625 A JPS61235625 A JP S61235625A
- Authority
- JP
- Japan
- Prior art keywords
- clean
- lattice
- sagging
- clean space
- transparent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Abstract
Description
【発明の詳細な説明】 「産業上の利用分野」 本発明は、クリーンルームに関するものである。[Detailed description of the invention] "Industrial application field" The present invention relates to clean rooms.
「従来の技術と発明が解決しようとする問題点」塵埃を
極度に嫌う半導体等の精密電子機器の製造には、クリー
ンルームが用いられ、このクリーンルームには、主とし
て部分層流型と全面層流型とが用いられ、前者の場合、
製造プロセスに従かい必要な高清浄度のクリーンスペー
スが設けられる。しかし、この製造プロセスは、ライフ
サイクルが短く、数年に一度の改変が行われる。この改
変に対して、従来のクリーンルームは空間のフレキシビ
リティに乏しく、大幅な改ｉ１：Ｉ’、巾かセ・要とさ
れでいる。また、後者の場合には、その点での面倒は少
ないが、同一空間に作業者とＭ造うインとが共存するた
め、作業者からの発塵が！ｉｔ！Ｊ造装置に汚染をもた
らす欠点がある。``Problems to be solved by conventional technology and inventions'' Clean rooms are used in the manufacture of precision electronic equipment such as semiconductors, which are extremely sensitive to dust. and in the former case,
A clean space with high cleanliness is provided according to the manufacturing process. However, this manufacturing process has a short life cycle and is modified once every few years. In response to this modification, conventional clean rooms lack space flexibility and require significant changes in width, width, and size. In the latter case, there is less trouble in that respect, but since the worker and the M-Building Inn coexist in the same space, dust is generated by the worker! It! It has the disadvantage of causing contamination to the J-building equipment.
そこで、本発明は、両者の利点を活かして、優れたクリ
ーンルームをＩＨようとするものであり、短工期、ロー
コストの小規模な改造によって必要なりリーンスペース
を簡易に確保できるようにしようとするものである。Therefore, the present invention aims to utilize the advantages of both to create an excellent clean room with IH, and to easily secure the necessary lean space through small-scale modification with short construction period and low cost. It is.
「問題点を解決するための手段」
本発明は、全面層流型のクリーンルームにおいて、天井
に、フィルタ取（；Ｉ用格子を下方へ露出させて設け、
該格子から一部乃至全部が透明の垂下部材を着脱自在に
垂設して成る。"Means for Solving the Problems" The present invention provides a method for installing a filter holder (;
A partially or completely transparent hanging member is removably suspended from the grid.
「実施例」
第１図、第２図は、全面層流型の本発明に係るクリーン
ルームを示し、図において、１は、スラブ、２・・・は
、天）］Ｇこ配した多数のフィルタ、３は、これらのフ
ィルタを支持するフィルタ取（−１用格子でＦ方へ露出
さ口て設けている。``Example'' Figures 1 and 2 show a laminar flow type clean room according to the present invention, and in the figures, 1 is a slab, 2... is a ceiling)] , 3 are provided with filter holders (-1 grids exposed in the F direction) that support these filters.
４・・・は、床に配した多数のグレーチング、５・・は
、これらのグレーチングを支持する支持部材、６は、天
井チャンバ、７は、床チャンバである。4... is a large number of gratings arranged on the floor, 5... is a support member that supports these gratings, 6 is a ceiling chamber, and 7 is a floor chamber.
８・・・は、フィルタ取付用格子３から着脱自在に垂設
した一部乃至全部が透明の垂下部材である。8 is a partially or entirely transparent hanging member that is removably hung from the filter mounting grid 3.
垂下部材８・・・は、適宜であるが、第１図、第２図の
場合では、不透明の垂壁８１・・・をフィルタ取付用格
子３から重設し、該垂壁の下端面に直管型置光灯等の照
明器具９・・・を取付け、垂壁８１・・・がら更に透明
合成１封脂扱で目つ帯電防止処理さ朝たアイリット８２
・・・を垂設している。垂壁８１・・の内側には、パン
チングメタル１０を横設している。The hanging members 8... may be formed as appropriate, but in the case of FIGS. 1 and 2, an opaque hanging wall 81... is superimposed from the filter mounting grid 3, and the lower end surface of the hanging wall is Lighting fixtures 9 such as straight tube type lamps were installed, and the hanging walls 81 were further treated with transparent synthetic 1 sealant to prevent static electricity.The eyelits 82
...is installed vertically. A punching metal 10 is installed horizontally inside the hanging walls 81.
なお、パンチングメタルは無くてもよい。Note that the punching metal may be omitted.
第３図乃至第７図は、垂下部材８の他の例を示している
。3 to 7 show other examples of the hanging member 8.
第３図は、第１図、第２図のものにおいて、アイリット
８２を上下に７分して、蝶番８３により開閉自在に蝶着
連係して成る。In FIG. 3, the eyelit 82 in FIGS. 1 and 2 is divided into seven parts vertically and connected to each other by a hinge 83 so as to be openable and closable.
第４図は、第１図、第２図のものにおいて、アイリツ［
８２を床面にｆご達するＪ４ ＪＬ： ０））Ｌ 明パ
イ、ル８４に代え、下部にガラリまたは開＋１１＋４１
を１１つ中途部に１１朶用のＡ几８４２を穿設しく
成イ、。Figure 4 shows the Airitsu [
82 to the floor.
An A-box 842 for 11 tubes will be drilled in the middle of each of the 11 tubes.
第５図は、第４図のものにおいて、丸（Ｌ８４２にグロ
ーブ８５を装着して成る。FIG. 5 shows a glove 85 attached to a circle (L842) of the one shown in FIG. 4.
第６図は、第１図、第２図のものにおい゛（、アイリッ
ト８２に代え−Ｃ透明のビニールカーテン８〔）として
成る。FIG. 6 shows a transparent vinyl curtain 8 in place of the eyelit 82 in FIGS. 1 and 2.
第７図は、垂壁を用いないで、フィルタＩＩＺ （ｔＩ
ＩＩ格子３の下面に直接に！！＜！明器其９を取付け、
また、取付金物３１をＪ（に装備させて、該取（・ｊ金
物からアイリツ１８２を重設して成る。FIG. 7 shows the filter IIZ (tI
Directly on the bottom surface of II grid 3! ! <! Install Meiki 9,
In addition, a mounting hardware 31 is mounted on J(, and an eyelid 182 is superimposed from the mounting hardware.
なお、照明器具９を垂壁８Ｉやソイルタ取（ＪＩＩＩ格
了３に取付はムい場合は、室内の各部で適宜ζこ装備さ
−υ杓ばよい。In addition, if it is not possible to install the lighting fixture 9 on the hanging wall 8I or on the soil filter (JIII grade 3), it is sufficient to install it in each part of the room as appropriate.
「作用１
如十の構成であるから、室内ζこおいて、アイシン１方
式またはクリーンチューブ方式Ａ、クリーントンネル方
式Ｂ等の高清浄度のクリーンスペースを任意に構成でき
、ごの場合、全面層流へりのクリーンルームであっても
、垂下部材８の存在並びにそれらのクリーンスペースに
設置される製造装置ｔｍの存在によって、クリーンスペ
ースから流出する空気の流路が実質的に狭くなる結果、
クリーンスペース内の気圧が周辺より高くなり、クリー
ンスペース内へ川辺の空気が混入することはない。``Effect 1: Because of the various configurations, a high-cleanliness clean space such as Aisin 1 method, clean tube method A, clean tunnel method B, etc. can be configured in the indoor space as desired. Even in a clean room at the edge of the flow, the presence of the hanging members 8 and the presence of the manufacturing equipment tm installed in those clean spaces substantially narrows the flow path of the air flowing out of the clean space.
The air pressure inside the clean space will be higher than the surrounding area, and air from the riverside will not get mixed into the clean space.
「発明の効果−１
本発明によれば、フィルタ取付用格子のモジュールに従
かう任意な形状のクリーンスペースを簡易に構成でき、
製造プロセスの改変が短い工期で容易に行え、また、改
変に発塵作業が少ないので、運転開始に必要なりリーン
アップも短時間で且つ簡単に行え、改修費のコストダウ
ンを図ることができる。“Effects of the Invention-1 According to the present invention, it is possible to easily configure a clean space of any shape according to the module of the filter mounting grid,
Modification of the manufacturing process can be easily carried out in a short construction period, and since the modification requires little dust-generating work, the lean-up necessary for starting operation can be carried out quickly and easily, and the cost of modification can be reduced.
更に、クリーンスペース内の気圧が周辺よりも高いため
、作業者からの発塵がクリーンスペース内に入り込むこ
とがなく、勿論、従来の全面層流型クリーンルームのよ
うに同一空間に作業者、製造ラインが共存することもな
いので、高い清浄度を維持でき、高品質で信頼性の高い
ものとすることができる。Furthermore, since the air pressure inside the clean space is higher than the surrounding area, dust generated by workers will not enter the clean space, and of course, unlike conventional laminar flow clean rooms, workers and production lines can be placed in the same space. Since these substances do not coexist, high cleanliness can be maintained and high quality and reliability can be achieved.
図面は、本発明の実施例を示し、第１図は、−例の室内
立体図、第２図は、同側の裁断側面図、第３図乃至第７
図は、それぞれ要部の他の例を示す拡大截断側面図であ
る。
１・・・スラブ ２・・・フィルタ３・・・
フィルタ取付用格子
４・・・グレーチング ５・・・支持部材６・・・
天井チャンバ ７・・・床チャンバ８・・・垂下部
材 ９・・・照明器具］０・・・パンチングメ
タル ８】・・・垂壁８２・・・アイリッド ８
３・・・蝶番８４・・・パネル ８５・・・グ
ローブ８６・・・ビニールカーテンThe drawings show an embodiment of the present invention, and FIG. 1 is a three-dimensional view of the interior of the example, FIG. 2 is a cutaway side view of the same side, and FIGS. 3 to 7.
The figures are enlarged cross-sectional side views showing other examples of essential parts. 1... Slab 2... Filter 3...
Filter mounting grid 4... Grating 5... Support member 6...
Ceiling chamber 7... Floor chamber 8... Hanging member 9... Lighting fixture] 0... Punching metal 8]... Hanging wall 82... Eyelid 8
3... Hinge 84... Panel 85... Globe 86... Vinyl curtain
Claims (1)
タ取付用格子を下方へ露出させて設け、該格子から一部
乃至全部が透明の垂下部材を着脱自在に垂設したことを
特徴とするクリーンルーム。A clean room of laminar flow type throughout the entire surface, characterized in that a filter mounting grid is provided on the ceiling and exposed downward, and a partially or completely transparent hanging member is removably suspended from the grid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60077453A JPS61235625A (en) | 1985-04-10 | 1985-04-10 | Clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60077453A JPS61235625A (en) | 1985-04-10 | 1985-04-10 | Clean room |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61235625A true JPS61235625A (en) | 1986-10-20 |
Family
ID=13634430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60077453A Pending JPS61235625A (en) | 1985-04-10 | 1985-04-10 | Clean room |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61235625A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4838150A (en) * | 1985-11-26 | 1989-06-13 | Shimizu Construction Co., Ltd. | Clean room |
| JPH02153546A (en) * | 1988-03-31 | 1990-06-13 | N M B Semiconductor:Kk | Semiconductor dust-free manufacturing system |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS597836A (en) * | 1982-07-06 | 1984-01-17 | Oshitari Kenkyusho:Kk | Vertical laminar flow type dust-free chamber |
-
1985
- 1985-04-10 JP JP60077453A patent/JPS61235625A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS597836A (en) * | 1982-07-06 | 1984-01-17 | Oshitari Kenkyusho:Kk | Vertical laminar flow type dust-free chamber |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4838150A (en) * | 1985-11-26 | 1989-06-13 | Shimizu Construction Co., Ltd. | Clean room |
| JPH02153546A (en) * | 1988-03-31 | 1990-06-13 | N M B Semiconductor:Kk | Semiconductor dust-free manufacturing system |
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