JPS61233934A - Magnetron cathode structure - Google Patents

Abstract

PURPOSE:To simplify the controlling of the parts of a magnetron cathode structure by making the main parts of the first and the second end hats interchangeable. CONSTITUTION:A first end hat 7 consists of a plate having a cylindrical projection 71 in the center. The outer diameter of the cylindrical projection 71, which positions a spiral cathode 1 by encroaching upon its one end, is either equal to or a little smaller than the inner diameter of the cathode 1. A second end hat 8 consists of the main part 8 made of the same material and having the same shape as the first end hat, and a cap-like spacer 10 attached to the part 9. The spacer 10 made of a high-melting-point metal such as molybdenum the entire surface of which is coated with a brazing material layer 11 consisting of a ruthenium-molybdenum alloy or a similar material. The main part 9 and the spacer 10 are connected together by fitting the cylindrical section 10a of the spacer 10 into the cylindrical projection 9a of the part 9.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetron cathode assembly comprising a spiral cathode and a support member that supports the cathode. is constructed as illustrated in FIG. 3, and a spiral cathode 1 made of thorium tungsten wire has a first end hat 2 that fixes one end thereof, and a second end hat 2 that fixes the other end.
an end hat 3, a first lead wire 4 having one end fixed to the lower surface of the first end hat 2, and a first end hat 2;
It is supported by a support member consisting of a second lead wire 6 that passes through the cap 2 and the cathode 1 without contacting it and has one end fixed to the center of the second end cap 3, and is supplied with electricity through this support member. . Note that the first and second end hats 2 and 3 and the first and second end hats 2 and 3 are connected to each other. The second lead wires 4 and 6 are made of a high melting point metal such as molybdenum. Second lead wire 4
, 6 airtightly penetrates the bottom plate of the pot-shaped stem 6 made of ceramic and protrudes to the outside of the tube.

In assembling such a cathode structure, the cathode 1 and the second end hat 3 are sequentially stacked on the first end hat 2 fixed to the first lead wire 4, and the second end hat 3 and the center thereof are stacked. One end of the second lead wire 6 inserted into the hole is fixed by high frequency soldering using a high melting point brazing material or plasma arc welding using a torch.

The first end hat 2 is a flat bottomed cylindrical body having a central hole at the bottom, and is in contact with the outer peripheral surface of one end of the cathode 1 on the inner surface of the side wall. The second end hat 3 is a flat bottomed cylindrical body having a cylindrical protrusion in the center, and is in contact with the inner surface of the other end of the cathode 1 at the outer peripheral surface of the cylindrical protrusion. therefore,
Coaxial positioning of the cathode 1 and the first and second end hats 2 and 3 in the assembly can be achieved relatively easily and with high precision, but two types of end hats are required for the first and second end hats. required and were not compatible. In addition, during the period of high-frequency soldering or arc welding as described above, the jig that supports the second end hat 3 in its own position deteriorates at high temperatures in a short period of time, which reduces the manufacturing cost of the cathode structure and improves assembly accuracy. This was a factor that hindered improvement.

Problems to be Solved by the Invention Accordingly, it is an object of the present invention to provide a low-cost device that has compatible first and second end hats and does not require the above-mentioned jigs for assembly. An object of the present invention is to provide a magnetron cathode structure.

Means for Solving the Problems According to the present invention, the first end knot, which is fixed to the first lead wire and fixes one end of the helical cathode, has a cylindrical projection that enters the one end of the cathode. A second end hat is formed of a dish-shaped body having a portion at the center, and is fixed to a second lead wire passing through the first end hat and the cathode without contacting each other to fix the other end of the cathode, It consists of a main body part having the same shape as the first end hat and a cap-shaped spacer inserted into the cylindrical protrusion of the main body part, and the spacer has a solder material layer on its surface and has an end part of the second lead wire. It is configured to have a cylindrical portion to be inserted.

For this reason, 1. The main body parts of the first end hat and the second end hat can be made compatible without impairing the coaxial positioning effect between the second end hat and the cathode, and parts management can be simplified. . Furthermore, it is not only unnecessary to support the second end hat with a jig during soldering, but also it becomes easier to supply and hold the solder material to the second end hat.

Embodiment Next, the present invention will be explained with reference to the embodiment shown in FIGS. 1 and 2. Both figures show the assembled state before soldering, and parts common to those shown in FIG. 3 are given the same reference numerals. The first end hat 7 made of a high melting point metal such as molybdenum is a dish-shaped body having a cylindrical protrusion 7a in the center. , has an outer diameter equal to or slightly smaller than the inner diameter of the cathode 1. On the other hand, the second end hat 8 consists of a main body part 9 made of the same material and in the same shape as the first end hat 7, and a cap-shaped spacer 10 coupled thereto.The spacer 1° is made of ruthenium-molybdenum alloy or other high melting point material. It is made of molybdenum or other high melting point metal with a solder layer 11 on the entire surface. The above connection is achieved by fitting the cylindrical portion 10a of the strip 1o into the cylindrical protrusion 9a of the main body portion 9.

The inner diameter of the cylindrical portion 10a of the spacer 100 is the same as that of the second lead wire 3.
One end of the second lead wire 3 is tightly fitted into the cylindrical portion 10a with a diameter substantially the same as that of the cylindrical portion 10a. Further, the seventh rank portion 1ob of the spacer 1o has an outer diameter equal to or less than the outer diameter of the cylindrical protrusion 9a, and has an outer diameter equal to or less than the outer diameter of the cylindrical protrusion 9a.
When the thus assembled structure is heated in a furnace and the high melting point brazing material layer 11 is melted, the main body portion 9 of the second end hat 8 and the spacer 10 are integrally soldered. Along with
Each end of the second lead wire 6 and the cathode 1 is soldered to this. In addition, the first lower hat 7 and the cathode 1
Traditionally, a linear solder material is required for soldering to the end of the wire.

Effects of the Invention Since the present invention is constructed as described above, the main body of the first engine, top and second end hat can be easily adjusted without impairing the effect of coaxial positioning of the second end hat and the cathode. It is possible to provide compatibility between parts and simplify parts management. Further, it is not necessary to support the second end hat with a jig during soldering, and it is possible to eliminate a decrease in assembly precision due to high-temperature deterioration of the jig and to eliminate replacement costs.

[Brief explanation of drawings]

Fig. 1 is a side view and side view showing the assembled state of a cathode assembly according to the present invention before soldering, Fig. 2 is a partially cutaway perspective view of the second end hat of the cathode assembly, and Fig. 3 is a conventional cathode assembly. FIG. 3 is a side sectional view of the cathode structure of FIG. 1... cathode, 4... first lead wire,
6...--Second lead wire, A...First entry wire, 8...Second entry wire, 9... Main body part, 10...Spacer. Name of agent: Patent attorney Toshio Nakao and one other persontM
, 3 groups. Figure 1 Figure 2 11 Hibiki 2b ]) l”?

Claims (1)

[Claims] A first end hat, which is fixed to the first lead wire and fixes one end of the spiral cathode, is a dish-shaped body having a cylindrical protrusion in the center that enters the one end of the cathode. A second end hat that is fixed to a second lead wire that passes through the end hat and the cathode without contacting each other to fix the other end of the cathode includes a main body portion having the same shape as the first end hat; It consists of a cap-shaped spacer inserted into the cylindrical protrusion, and the spacer has a brazing material layer on its surface and a cylindrical part into which the end of the second lead wire is inserted. Features a magnetron cathode structure.