JPS61233325A - Infrared detector - Google Patents
Infrared detectorInfo
- Publication number
- JPS61233325A JPS61233325A JP60074773A JP7477385A JPS61233325A JP S61233325 A JPS61233325 A JP S61233325A JP 60074773 A JP60074773 A JP 60074773A JP 7477385 A JP7477385 A JP 7477385A JP S61233325 A JPS61233325 A JP S61233325A
- Authority
- JP
- Japan
- Prior art keywords
- flange
- cylinder
- face
- inner cylinder
- infrared
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 10
- 238000010894 electron beam technology Methods 0.000 claims abstract description 6
- 229910000833 kovar Inorganic materials 0.000 claims abstract description 6
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 6
- 238000003466 welding Methods 0.000 claims abstract description 5
- 238000001514 detection method Methods 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 229910001220 stainless steel Inorganic materials 0.000 claims description 7
- 239000010935 stainless steel Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 239000011521 glass Substances 0.000 abstract description 10
- 239000000919 ceramic Substances 0.000 abstract description 4
- 238000009713 electroplating Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 241001061824 Plagopterus argentissimus Species 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000004859 Copal Substances 0.000 description 1
- 241000782205 Guibourtia conjugata Species 0.000 description 1
- 229910000661 Mercury cadmium telluride Inorganic materials 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 101150018289 ska2 gene Proteins 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
- G01J5/061—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、 ＩｎＳｂ、 ＨｇＣｄＴｅ、 Ｐｂ８
ｎＴｅ 等で極低温に冷却して動作させる赤外線検知素
子を具備する赤外線検知器に関するものである。[Detailed Description of the Invention] [Industrial Application Field] This invention is based on InSb, HgCdTe, Pb8
This invention relates to an infrared detector equipped with an infrared detection element that is operated by cooling it to an extremely low temperature with nTe or the like.
第３図は従来の赤外線検知器の構成例を示すもので９図
において（１）は低温保持容器で、ガラス製の内筒（２
１，外筒（３１，フランジ（４）、赤外線透過材料（例
えばＧｅ ）であるウィンド（５）、赤外線検知素子（
６）を具備したパッケージ（７）で構成されている。Figure 3 shows an example of the configuration of a conventional infrared detector.
1, outer cylinder (31, flange (4), window (5) made of infrared transmitting material (e.g. Ge), infrared detection element (
6) is comprised of a package (7).
上記ウィンド（５）は、真空用接着剤（例えばＭＡＲＩ
ＡＮ社商標ＴＯＲＲ５ＥＡＬ）Ｉｃ！つて上記外筒（３
）の端面に接着されている。（８）はジュールトムソン
冷却器で、スパイラル状に巻かれたフィンチューブ（９
）とノズル員を具備しておシ、高圧ガス（例えば窒素）
の充填されたボンベαυと弁α２を介して配管ａ３によ
って連通している。ここで、低温保持容器（１）の内部
は、外部からの侵入熱を遮断するため、１０ 〜１０
ＴＯＲＲ程度の真空に保たれている。赤外線検知素子
（６）の信号は金属線α◆によ〕。The window (5) is made of vacuum adhesive (such as MARI).
AN company trademark TORR5EAL) Ic! With the above outer cylinder (3
) is glued to the end face of the (8) is a Joule-Thomson cooler with spirally wound fin tubes (9).
) and a nozzle member for high-pressure gas (e.g. nitrogen)
It communicates with the filled cylinder αυ through a pipe a3 via a valve α2. Here, the inside of the low temperature holding container (1) has a temperature of 10 to 10 to block heat from entering from the outside.
It is maintained at a vacuum level of about TORR. The signal of the infrared detection element (6) is provided by the metal wire α◆].
端子αＳから低温保持容器【１）の外部に取出すことが
できる。It can be taken out of the cryogenic container [1] from the terminal αS.
次に以上のような構成からなる従来の赤外線検知器の動
作について説明する。弁α２を開放し、ボンベαυから
ジュールトムソン冷却器（８）に高圧ガスを供給すると
、スパイラル状に巻かれたフィンチューブ（９）を通っ
てノズル（ＩＧからガスが噴出する。Next, the operation of the conventional infrared detector having the above configuration will be explained. When the valve α2 is opened and high pressure gas is supplied from the cylinder αυ to the Joule-Thomson cooler (8), the gas is ejected from the nozzle (IG) through the spirally wound fin tube (9).
この時ガスは高圧から低圧（大気圧）に開放され、６７
ｔめ、ジュールトムソン効果によって温度降下する。こ
の温度降下は微々するものであるが、内筒（２）の内側
に沿って排出されるガスと、フィンチューブ（９）の内
部を流れる新たに供給されるガスとの間に熱交換を行な
わせることによ〕、究極的には上記ガスはその液化温度
（窒素の場合でＴ門０に達する。赤外線検知素子り６）
およびパッケージ（７）は上記液化温度に達したガスを
吹きつけられることによル極低温に冷却されることにな
るが、上記ジュールトムソン冷却器の冷却能力は通常１
Ｗ〜５ｗ程度と少ないので、外部からの熱侵入を妨げな
ければノズル顛から噴出するガスを液化温度に到達せし
めることはできない。低温保持容器（１）は外部からの
侵入熱を遮断するための容器であり。At this time, the gas is released from high pressure to low pressure (atmospheric pressure), and 67
Second, the temperature decreases due to the Joule-Thomson effect. Although this temperature drop is slight, heat exchange takes place between the gas discharged along the inside of the inner tube (2) and the newly supplied gas flowing inside the fin tube (9). Ultimately, the above gas will reach its liquefaction temperature (in the case of nitrogen, T gate 0).Infrared sensing element 6)
The package (7) is cooled to an extremely low temperature by being blown with gas that has reached the liquefaction temperature, but the Joule-Thomson cooler usually has a cooling capacity of 1
Since the amount is as small as W~5W, it is not possible to make the gas ejected from the nozzle body reach the liquefaction temperature unless heat intrusion from the outside is prevented. The low temperature holding container (1) is a container for blocking heat from entering from the outside.
内筒（２）、外筒（３１，フランジ（４）、ウィンド（
５１で囲まれている容器内部は外部と密閉され、かつ真
空に保たれている。Inner cylinder (2), outer cylinder (31, flange (4), window (
The inside of the container surrounded by 51 is sealed from the outside and kept in vacuum.
しかし１以上のような構成から成る従来の赤外線検知器
は次のような問題点があった。However, conventional infrared detectors having one or more configurations have the following problems.
０） ウィンド（５）と外筒（３）の接合のため使用し
ている接着剤は有機生成物であるから長期的に見れば、
多量の有機ガスを放出し、低温保持容器（１）の真空度
維持上、特に寿命という面で好ましくない。0) The adhesive used to join the window (5) and outer cylinder (3) is an organic product, so in the long run,
A large amount of organic gas is emitted, which is undesirable in terms of maintaining the degree of vacuum in the cryogenic container (1), especially in terms of life.
←）主要構造部材である内筒（２）、外筒（３）、フラ
ンジ（４）がガラス製で靭性に欠けるので厳しい耐振動
性、耐衝撃性が要求される場合（例えはミサイル、航空
機等に搭載される場合）には機械的強度の面で適さない
。←) In cases where the main structural members, the inner cylinder (2), outer cylinder (3), and flange (4), are made of glass and lack toughness, so severe vibration resistance and impact resistance are required (for example, missiles, aircraft etc.) is not suitable in terms of mechanical strength.
ｅｌ 低温保持容器（１１の内筒（２）Ｋｔ−ｉジュ
ールトムソン冷却器（８）が挿入され、この時上記内筒
（２）とジュールトムソン冷却器（８）との隙間は、ノ
ズル（１１から噴出され外部へ排出されるガスとフィン
チューブ（９）内を流れる新たに供給されるガスとの熱
交換効率に大きな影！＃を与えるので、内筒（２）には
精密な加工寸法精度が要求されるが、内筒（２）がガラ
ス製なので研磨等生産性の悪い加工手段でなければ達成
できない。el Inner cylinder (2) of the low temperature holding container (11) Kt-i Joule-Thomson cooler (8) is inserted, and at this time, the gap between the inner cylinder (2) and the Joule-Thomson cooler (8) is the nozzle (11). The inner cylinder (2) must have precise machining and dimensional accuracy because this will have a big impact on the heat exchange efficiency between the gas ejected from the fin tube (9) and the newly supplied gas flowing inside the fin tube (9). However, since the inner cylinder (2) is made of glass, this can only be achieved by processing methods with poor productivity such as polishing.
この発明は以上のような問題点を改善するためになされ
たもので、真空度維持の寿命が長く１機械的強度が高く
、かつ生産性の曳い赤外線検知器を提案するものである
。This invention was made to improve the above-mentioned problems, and proposes an infrared detector that has a long vacuum maintenance life, high mechanical strength, and high productivity.
この発明に係る赤外線検知器は、主要構造部材である内
筒、外筒、フランジを金属性にし、特に内筒はステンレ
ス、また気密端子を有するフランジは電気ニッケルメッ
キを施し友コバールの材料を用いたものである。In the infrared detector according to the present invention, the main structural members, the inner tube, the outer tube, and the flange, are made of metal.In particular, the inner tube is made of stainless steel, and the flange with the airtight terminal is electro-nickel plated and made of Tomo Kovar's material. It was there.
なお、コバールはガラスと熱膨張係数が接近しており、
その組成は、Ｎ１２Ｂ 〜２９％、ｃｏ１７〜１８チ、
ＭｎＯ，２チ、Ｆｅ残であ夛、一般にガラスやセラミッ
クに接合される封着金属として使用される。Furthermore, Kovar has a coefficient of thermal expansion close to that of glass.
Its composition is N12B ~29%, CO17~18C,
Made of MnO, 2-chip, and Fe residue, it is generally used as a sealing metal to be bonded to glass or ceramics.
この発明においては、ステンレス製の内筒と。 In this invention, the inner cylinder is made of stainless steel.
電気ニッケルメッキを施こしたコバール製のフランジを
電子ビーム溶接することにより、低温保持容器を真空維
持できる構造にした。By electron beam welding the flanges made of Kovar with electrolytic nickel plating, we created a structure that allows the cryogenic container to maintain a vacuum.
第１図はこの発明による赤外線検知器の構成例を示す図
であり、第２図は第１図の一部詳細を示す図である。ｖ
Ｌ１図および第２図ではジュールトムソン冷却器、配管
、弁、ボンベ等この発明と直接係りのない部品は省略し
ている。図において。FIG. 1 is a diagram showing an example of the configuration of an infrared detector according to the present invention, and FIG. 2 is a diagram showing some details of FIG. 1. v
In Figure L1 and Figure 2, parts that are not directly related to this invention, such as a Joule-Thomson cooler, piping, valves, and cylinders, are omitted. In fig.
（２）は内筒で金属（例えばステンレス）を円筒状に成
形したもので、一方の端面には赤外線検知素子（６）を
具備するパッケージ（７）が設けられておフ、もう一方
の端面にはコパール製のフランジ（４）が接合されてい
る。上記円筒（２：の外面には０．１〜０．４ＩＥ１に
のセラミック層ｔ１ｅがあり、金属線Ｑ４はこのセラミ
ック層（Ｉｅに埋設されてお）、金属線Ｉどおし、およ
び内筒（２）と電気的に絶縁状態で支持されている。(2) is an inner cylinder made of metal (e.g. stainless steel) molded into a cylindrical shape, with a package (7) equipped with an infrared detection element (6) on one end face, and a package (7) equipped with an infrared detection element (6) on the other end face. A copal flange (4) is joined to the flange (4). There is a ceramic layer t1e of 0.1 to 0.4IE1 on the outer surface of the cylinder (2:), and the metal wire Q4 is connected to this ceramic layer (embedded in Ie), the metal wire I, and the inner cylinder. (2) and is supported in an electrically insulated state.
（３）は外筒でステンレスを円筒状に成形したもので。(3) is an outer cylinder made of stainless steel molded into a cylindrical shape.
片方の端面は上記フランジ（４１と接合され、もう一方
の端面には赤外線透過材料（例えばＧｅ）である円板状
のウィンド（５）がガラス融着層αηによシ固定されて
いる。さらに、外筒（３）の内側は金属蒸着膜Ｑｌが形
成され、内筒（２）、パッケージ（７）および赤外線検
出素子（６）に外筒（３）からのふく射熱が伝わりにく
いようになっている。One end surface is joined to the flange (41), and the other end surface has a disc-shaped window (5) made of an infrared transmitting material (eg, Ge) fixed to the glass fusion layer αη. A metal vapor deposition film Ql is formed on the inside of the outer cylinder (3), making it difficult for the radiant heat from the outer cylinder (3) to be transmitted to the inner cylinder (2), the package (7), and the infrared detection element (6). There is.
ところで上記フランジ（４）は検出素子（６）からの信
号を低温保持容器（１）の外部に取り出す必要性からガ
ラスで絶縁された気密端子ａ！Ｊを有しており、材質は
ガラスと熱膨張係数の近いコバールが適している。また
、内筒（２）はフランジ（４）から検出素子（６）への
伝導による熱侵入をできるだけ少なくする必要性から、
加工性がよくその厚さを小さくできるような熱伝導率の
小さいステンレスが適している。By the way, the flange (4) is an airtight terminal a! insulated with glass because it is necessary to extract the signal from the detection element (6) to the outside of the cryogenic container (1). J, and the suitable material is Kovar, which has a coefficient of thermal expansion close to that of glass. In addition, the inner cylinder (2) is designed to minimize heat intrusion from the flange (4) to the detection element (6) due to conduction.
Stainless steel is suitable because it has good workability and low thermal conductivity so that its thickness can be reduced.
第４図に主な金属材料の熱伝導率を示す。ここで。Figure 4 shows the thermal conductivity of main metal materials. here.
金属線組４と気密端子ａｌｄマイクロスポット溶接する
が、その接合性をよくする九めと防錆性の面から、一体
で構成される上記フランジ（４）と気密端子ａ！Ｉはニ
ッケルメッキが好ましい。また、フランジ（４）と内筒
（２）は気密接合する必要があるが、熱歪の少ない電子
ビーム溶接（２）が適用され、その接合性をよくするた
めに、フランジ（４）は特に電気ニッケルメッキを施こ
しておくことが重要である。The metal wire set 4 and the airtight terminal ALD are micro-spot welded, but from the viewpoint of improving the bondability and rust prevention, the above-mentioned flange (4) and the airtight terminal a! I is preferably nickel plated. In addition, the flange (4) and the inner cylinder (2) must be airtightly joined together, but electron beam welding (2) with low thermal distortion is applied, and in order to improve the joint, the flange (4) is It is important to apply electro-nickel plating.
この発明による赤外線検知器は以上のような構成から成
るため０次のような利点がある。Since the infrared detector according to the present invention has the above-described configuration, it has the following zero-order advantages.
け）主要構造部材である内筒（２）、外筒（３）、フラ
ンジ（４）が金属性であることから９機械的強度にすぐ
れ、厳しい耐振性、耐衝撃性が要求される場合（例えば
、ミサイルや航空機に搭載される場合）でも、要求を満
足することができる、
（ロ）従来のガラス製の赤外線検知器に比較して。(9) Since the main structural members, the inner cylinder (2), outer cylinder (3), and flange (4), are made of metal, they have excellent mechanical strength, and when severe vibration resistance and impact resistance are required ( For example, when mounted on a missile or aircraft), it can meet the requirements (b) compared to conventional glass infrared detectors.
プレス加工１機械加工が可能なので１寸法精度が容品に
得られ生産性が極めて良くなる。Since press processing and mechanical processing are possible, one-dimensional accuracy can be obtained for the container, and productivity is extremely improved.
ｅ→ 内筒（２）がステンレスで、Ｓカ２機械加工によ
シ極薄にできることから、フランジ（４）方向からの侵
入熱が伝わるのを阻止しているので、極めて冷却効率が
高く１機器の誤動作が少ない。すなわち。e→ The inner cylinder (2) is made of stainless steel and can be made extremely thin by Ska2 machining, which prevents heat from penetrating from the flange (4) direction, resulting in extremely high cooling efficiency. Fewer equipment malfunctions. Namely.
高性能で高信穎性の赤外線検知器とすることができる。It can be a high performance and reliable infrared detector.
第１図はこの発明による赤外線検知器の実施例を示す断
面図、第２図は第１図のＡ部を詳細に説明した断面図、
第３図は従来の赤外線検知器の構成例を示す断面図、第
４図は金属材料の熱伝導率を示す図である。
図において、（１）は低温保持容器、（２１は内筒、（
３）ハ外筒、（４）はフランジ、（５）はウィンド、（
６）は赤外線検知素子、（７）はパッケージ、（８）は
ジュールトムソン冷却器、α４は金属線、Ｑｌは気密端
子、（１）は電子ビーム溶接部である。
なお９図中あるいは相当部分には同一符号を付して示し
ておる。FIG. 1 is a cross-sectional view showing an embodiment of an infrared detector according to the present invention, and FIG. 2 is a cross-sectional view illustrating part A in FIG. 1 in detail.
FIG. 3 is a sectional view showing an example of the configuration of a conventional infrared detector, and FIG. 4 is a diagram showing the thermal conductivity of metal materials. In the figure, (1) is a cryogenic container, (21 is an inner cylinder, (
3) C outer cylinder, (4) flange, (5) window, (
6) is an infrared detection element, (7) is a package, (8) is a Joule-Thomson cooler, α4 is a metal wire, Ql is an airtight terminal, and (1) is an electron beam welding part. Note that the same reference numerals are given to the parts in FIG. 9 or corresponding parts.
Claims (1)
線検知素子と、上記内筒の他端面に設けられ、かつコバ
ールに電気ニッケルメッキが施してあり、さらに上記内
筒と電子ビーム溶接に接合されたフランジと、上記フラ
ンジの外周部と電子ビーム溶接により接合され、かつ上
記内筒を覆うように取りつけられた金属製の外筒と、上
記外筒の上記フランジと接合する端面と相対する端面に
取付けられた赤外線透過材料である平板上に形成したウ
ィンドとから構成されたことを特徴とする赤外線検知器
。An inner cylinder made of stainless steel, an infrared detection element provided on one end face of the inner cylinder, an infrared detection element provided on the other end face of the inner cylinder, and electrolytic nickel plated on Kovar, and electron beam welded to the inner cylinder. a flange joined to the flange; a metal outer cylinder joined to the outer circumference of the flange by electron beam welding and attached to cover the inner cylinder; an infrared detector comprising: a window formed on a flat plate made of an infrared transmitting material; and a window formed on a flat plate made of an infrared transmitting material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60074773A JPS61233325A (en) | 1985-04-09 | 1985-04-09 | Infrared detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60074773A JPS61233325A (en) | 1985-04-09 | 1985-04-09 | Infrared detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61233325A true JPS61233325A (en) | 1986-10-17 |
| JPH0453368B2 JPH0453368B2 (en) | 1992-08-26 |
Family
ID=13556939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60074773A Granted JPS61233325A (en) | 1985-04-09 | 1985-04-09 | Infrared detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61233325A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5089705A (en) * | 1990-02-16 | 1992-02-18 | Fujitsu Limited | Infrared detector having dewar with film coatings to suppress reflections |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103180367B (en) | 2010-10-29 | 2014-08-13 | 东丽株式会社 | Polyarylene sulfide production method and polyarylene sulfide |
-
1985
- 1985-04-09 JP JP60074773A patent/JPS61233325A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5089705A (en) * | 1990-02-16 | 1992-02-18 | Fujitsu Limited | Infrared detector having dewar with film coatings to suppress reflections |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0453368B2 (en) | 1992-08-26 |
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