JPH041623Y2 - - Google Patents

Info

Publication number
JPH041623Y2
JPH041623Y2 JP18850486U JP18850486U JPH041623Y2 JP H041623 Y2 JPH041623 Y2 JP H041623Y2 JP 18850486 U JP18850486 U JP 18850486U JP 18850486 U JP18850486 U JP 18850486U JP H041623 Y2 JPH041623 Y2 JP H041623Y2
Authority
JP
Japan
Prior art keywords
metal
metal member
bellows
rust
lead rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18850486U
Other languages
Japanese (ja)
Other versions
JPS6393036U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18850486U priority Critical patent/JPH041623Y2/ja
Publication of JPS6393036U publication Critical patent/JPS6393036U/ja
Application granted granted Critical
Publication of JPH041623Y2 publication Critical patent/JPH041623Y2/ja
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H33/00High-tension or heavy-current switches with arc-extinguishing or arc-preventing means
    • H01H33/60Switches wherein the means for extinguishing or preventing the arc do not include separate means for obtaining or increasing flow of arc-extinguishing fluid
    • H01H33/66Vacuum switches
    • H01H33/662Housings or protective screens
    • H01H33/66207Specific housing details, e.g. sealing, soldering or brazing
    • H01H2033/66215Details relating to the soldering or brazing of vacuum switch housings

Landscapes

  • High-Tension Arc-Extinguishing Switches Without Spraying Means (AREA)

Description

【考案の詳細な説明】 A 産業上の利用分野 本考案は真空インタラプタに係り、特に金属ベ
ローズと真空容器の一部を形成する金属部材内壁
の大気接触部分の防錆力を強化させた真空インタ
ラプタに関する。
[Detailed description of the invention] A. Industrial application field The present invention relates to a vacuum interrupter, and in particular to a vacuum interrupter that has enhanced anti-corrosion ability for the metal bellows and the atmospheric contact portion of the inner wall of the metal member forming a part of the vacuum container. Regarding.

B 考案の概要 本考案は、真空容器の一部を形成する金属部材
に金属ベローズと軸受保持部とを各々接合し、金
属部材内壁の大気に接触する部分にろう材による
防錆層を設けて構成した真空インタラプタであ
り、従来塗装や樹脂モールドによる防錆が困難な
箇所の防錆力を強化して、真空インタラプタとし
ての耐久性や信頼性の向上を企図したものであ
る。
B. Summary of the invention The invention consists of joining a metal bellows and a bearing holding part to a metal member that forms part of a vacuum vessel, and providing a rust-preventive layer using a brazing filler metal on the part of the inner wall of the metal member that comes into contact with the atmosphere. This is a vacuum interrupter designed to improve the durability and reliability of a vacuum interrupter by strengthening the rust prevention ability in areas where it is difficult to prevent rust with conventional painting or resin molding.

C 従来の技術 真空インタラプタは真空遮断器の主要部を構成
するものとしてその駆動装置と共に非常に重要な
ものである。
C. Prior Art A vacuum interrupter constitutes the main part of a vacuum circuit breaker, and together with its driving device, it is very important.

かかる真空インタラプタの概略構造を表す第2
図に示すように、相互に一直線状をなす一対のリ
ード棒11,12の対向内端面には、それぞれ電
極13,14が一体的に設けてある。一方のリー
ド棒11は絶縁筒15の一端に接合された金属端
板16、即ち真空容器を形成する一方の金属部材
を貫通した状態でこの金属端板16に一体的に固
定されている。図示しない駆動装置に連結される
他方のリード棒(以下、可動リード棒と呼称す
る)12は、絶縁筒15の他端に接合されて前記
真空容器を形成する他方の金属部材である金属端
板17に金属ベローズ18を介して連結され、駆
動装置の作動に伴つて電極13,14の対向方向
に往復動可能にその電極14が固定側の電極13
に対して当接し得るようになつている。そして、
真空に保持された絶縁筒15内の真空室19内に
は、金属端板16に保持されて電極13,14を
囲むシールド20が組込まれ、電極13,14の
近接時に発生するアークによつて電極13,14
を構成する金属の蒸気が絶縁筒15の内壁に付着
し、絶縁不良を起こすのを防止している。
The second diagram representing the schematic structure of such a vacuum interrupter
As shown in the figure, electrodes 13 and 14 are integrally provided on opposing inner end surfaces of a pair of lead rods 11 and 12 that are in a straight line with each other, respectively. One lead rod 11 is integrally fixed to a metal end plate 16 joined to one end of an insulating cylinder 15, that is, one metal member forming a vacuum container, in a state of penetrating the metal end plate 16. The other lead rod (hereinafter referred to as a movable lead rod) 12 connected to a drive device (not shown) is a metal end plate that is the other metal member that is joined to the other end of the insulating cylinder 15 to form the vacuum container. 17 via a metal bellows 18, and the electrode 14 is connected to the fixed electrode 13 so that it can reciprocate in the opposite direction of the electrodes 13 and 14 as the drive device operates.
It is designed so that it can come into contact with. and,
A shield 20 that is held by the metal end plate 16 and surrounds the electrodes 13 and 14 is built into the vacuum chamber 19 in the insulating cylinder 15 that is kept in a vacuum. Electrodes 13, 14
This prevents metal vapor constituting the insulating cylinder 15 from adhering to the inner wall of the insulating cylinder 15 and causing insulation failure.

ところで、絶縁筒15としてアルミナ等のセラ
ミツクスや硼硅酸系の硬質ガラスが採用される
が、これに接合される金属端板16,17はこの
絶縁筒15と熱膨張係数の近似した材質の金属、
例えばFe−Ni合金、Fe−Ni−Co合金等の鉄基合
金が多用されている。
Incidentally, ceramics such as alumina or borosilicate-based hard glass are used as the insulating tube 15, but the metal end plates 16 and 17 to be joined to this are made of metal with a coefficient of thermal expansion similar to that of the insulating tube 15. ,
For example, iron-based alloys such as Fe-Ni alloy and Fe-Ni-Co alloy are often used.

このような真空インタラプタにおけるベローズ
と端板との接合部分(第2図中、矢視部)の断
面構造の一例を第3図に示す。一端部が可動リー
ド棒12に接合される金属ベローズ18の他端部
は、金属端板17の環状をなすベローズ接合部2
1にろう付けされる。なお、可動リード棒12の
往復動を円滑化するため、金属端板17の内周端
部にナイロンや四弗化エチレン樹脂等の樹脂製の
軸受22を接着剤層23を介して保持する軸受保
持部24を形成したものも知られており、図中の
符号で25は塗装や樹脂モールドによる防錆保護
層である。
FIG. 3 shows an example of the cross-sectional structure of the joint portion (in the direction of the arrow in FIG. 2) between the bellows and the end plate in such a vacuum interrupter. The other end of the metal bellows 18, whose one end is joined to the movable lead rod 12, is connected to the annular bellows joint 2 of the metal end plate 17.
1 is brazed. In order to smooth the reciprocating motion of the movable lead rod 12, a bearing 22 made of resin such as nylon or tetrafluoroethylene resin is held at the inner peripheral end of the metal end plate 17 via an adhesive layer 23. It is also known that a holding portion 24 is formed, and the reference numeral 25 in the figure is a rust-proofing protective layer formed by painting or resin molding.

D 考案が解決しようとする問題点 第2図及び第3図に示した真空インタラプタに
おいて、一般に金属端板17として用いられる
Fe−Ni合金、Fe−Ni−Co合金等の金属は、大気
にさらされると錆が発生しやすいので防錆処理を
行う必要がある。
D Problems to be solved by the invention In the vacuum interrupter shown in FIGS. 2 and 3, the metal end plate 17 is generally used.
Metals such as Fe-Ni alloys and Fe-Ni-Co alloys tend to rust when exposed to the atmosphere, so they need to be treated to prevent rust.

ところが、ベローズ接合部21側のこのベロー
ズ接合部21よりも径方向内側の端面となる軸受
保持部24は、可動リード棒12と金属端板17
との隙間が小さいこともあつて塗装や樹脂モール
ド等による防錆処理を行うことが困難であり、例
えできたとしても防錆処理が不充分となる場合が
多い。このため、長期的には可動リード棒12と
軸受22との微小隙間を通る大気により金属端板
17の軸受保持部24の内壁に錆が発生し、これ
が進行してベローズ接合部21の気密が損なわれ
てしまい、真空インタラプタとして真空度の維持
が困難になると共に耐久性の低下を招来する欠点
があつた。
However, the bearing holding portion 24 , which is the end face radially inner than the bellows joint 21 on the side of the bellows joint 21 , is connected to the movable lead rod 12 and the metal end plate 17 .
Due to the small gap between the two parts, it is difficult to perform anti-rust treatment by painting, resin molding, etc., and even if it is possible, the anti-rust treatment is often insufficient. For this reason, over a long period of time, the atmosphere passing through the small gap between the movable lead rod 12 and the bearing 22 will cause rust to form on the inner wall of the bearing holding part 24 of the metal end plate 17, and this will progress and the airtightness of the bellows joint part 21 will deteriorate. As a result, it becomes difficult to maintain the degree of vacuum as a vacuum interrupter, and its durability is reduced.

そこで第4図に示すように、軸受保持部24を
含む金属端板26を錆にくいオーステナイト系ス
テンレス鋼やインコネル合金にて形成し、錆やす
いFe−Ni合金、Fe−Ni−Co合金等の金属は外部
から防錆処理が行える絶縁筒15と端板26との
気密接合の封着金具27としてのみに使用すよう
に構成した真空インタラプタが実開昭61−24929
号で知られている。なお、前述の第3図と同一符
号を付するものは、これらと同等品を示すので、
これらの説明は省略する。
Therefore, as shown in FIG. 4, the metal end plate 26 including the bearing holding part 24 is made of rust-resistant austenitic stainless steel or Inconel alloy. A vacuum interrupter configured to be used only as a sealing fitting 27 for airtight connection between an insulating tube 15 and an end plate 26, which can be subjected to anti-corrosion treatment from the outside, was developed in U.S. Patent No. 61-24929.
Known by the number. Items with the same reference numerals as those in Figure 3 above indicate products equivalent to these.
Descriptions of these will be omitted.

ところが、この真空インタラプタではろう付け
による新たな気密シール部が金属端板26と封着
金具27との接合部分Aに形成されることとな
り、信頼性低下の一因となつてしまう。
However, in this vacuum interrupter, a new airtight seal part by brazing is formed at the joint part A between the metal end plate 26 and the sealing fitting 27, which becomes a cause of a decrease in reliability.

本考案はかかる従来の真空インタラプタにおけ
る上述した不具合に鑑み、新たな気密シール部を
増加することなく端板の防錆を確実に行つて信頼
性及び耐久性の向上を企図し得る真空インタラプ
タを提供することを目的とする。
In view of the above-mentioned problems in the conventional vacuum interrupter, the present invention provides a vacuum interrupter that can reliably prevent rust on the end plate without adding a new airtight seal part and improve reliability and durability. The purpose is to

E 問題点を解決するための手段 本考案は、真空容器の一部を構成する金属部材
の内壁側に金属ベローズの一端側を気密接合し、
前述真空容器内に位置する該金属ベローズの他端
側を内端部に電極を具備する可動リード棒に気密
接合し、前記金属ベローズと可動リード棒との間
に位置してこの可動リード棒をガイドする軸受が
取付けられる軸受保持部を設けた真空インタラプ
タにおいて、前記金属部材と前記軸受保持部とを
別材料にて両者をろう付接合し、前記金属部材及
び前記金属ベローズの接合部と前記金属部材及び
前記軸受保持部の接合部との間における大気接触
部分の金属部材の内壁にろう材による防錆層を設
けたものである。
E Means for solving the problem The present invention airtightly connects one end side of a metal bellows to the inner wall side of a metal member constituting a part of a vacuum container,
The other end of the metal bellows located in the vacuum container is hermetically connected to a movable lead rod having an electrode at the inner end, and the movable lead rod is positioned between the metal bellows and the movable lead rod. In a vacuum interrupter provided with a bearing holding part to which a guiding bearing is attached, the metal member and the bearing holding part are joined by brazing using different materials, and the joint part between the metal member and the metal bellows and the metal A rust-preventing layer made of a brazing material is provided on the inner wall of the metal member at the part of the metal member that is in contact with the atmosphere between the member and the joint portion of the bearing holding portion.

なお、前記金属部材はFe−Ni合金、Fe−Ni−
Co合金等の合金からなるものであり、板状のい
わゆる端板に限らずカツプ状のものであつても差
し支えない。またろう材はNi系、Cu系、Al系、
Au系、Pd系のものを使用する更に軸受保持部は
金属部材の内壁側にろう付けする場合に限らず、
外壁側にろう付けするようにしても良い。
Note that the metal member is Fe-Ni alloy, Fe-Ni-
It is made of an alloy such as a Co alloy, and is not limited to a so-called plate-shaped end plate, but may also be a cup-shaped one. In addition, brazing filler metals include Ni-based, Cu-based, Al-based,
Furthermore, the bearing holding part is not limited to brazing to the inner wall side of the metal member.
It may be brazed to the outer wall side.

F 作用 金属部材における金属ベローズと軸受保持金具
との接合部間の内壁側をろう材による防錆層で覆
つたので、このろう材の膜が防錆層として機能
し、可動リード棒と軸受との摺動隙間を通る大気
によつて金属部材の内壁面が錆びることは防止さ
れる。
F Effect Since the inner wall side of the metal member between the joint between the metal bellows and the bearing holding fitting is covered with a rust-preventing layer made of brazing material, this brazing material film functions as a rust-preventing layer and prevents the movable lead rod and bearing from interfering with each other. This prevents the inner wall surface of the metal member from rusting due to the atmosphere passing through the sliding gap.

G 実施例 本考案を第1図に示す実施例に基づいて説明す
る。なお、前述の第2図〜第4図と同一符号を付
する部分はこれらと同等品を示すので、これらの
詳細な説明は省略する。
G. Example The present invention will be explained based on the example shown in FIG. Note that parts given the same reference numerals as those in FIGS. 2 to 4 described above indicate equivalent products, and detailed explanations thereof will be omitted.

アルミナセラミツクス製の絶縁筒15の一端に
は、環状をなすベローズ接合部21を形成した金
属部材、即ち金属端板(以下、単に端板と略称す
る)28の外周端部がメタライズ層29を介して
ろう付けされており、この端板28のベローズ接
合部21には一端を可動リード棒12に接合した
オーステナイト系ステンレス鋼製の金属ベローズ
(以下、単にベローズと略称する)18の他端が
ろう付けされている。
At one end of the insulating tube 15 made of alumina ceramics, the outer circumferential end of a metal member (hereinafter simply referred to as an end plate) 28 having an annular bellows joint 21 formed thereon is connected via a metallized layer 29. The bellows joint 21 of the end plate 28 has one end joined to the movable lead rod 12 and the other end of a metal bellows (hereinafter simply referred to as bellows) 18 made of austenitic stainless steel is brazed. It is attached.

前記端板28の内周端部には、ベローズ18と
同等の材質の円筒状をなす軸受保持金具30がろ
う付けされており、この軸受保持金具30には可
動リード棒12を摺動自在に貫通させる樹脂製の
軸受22が接着剤層23を介して一体的に装着さ
れている。そして、端板28とベローズ18及び
軸受保持金具30とのそれぞれ接合部の間のこの
端板28の内壁表面には、ろう材による防錆層3
1が形成され、この端板28の外壁面(外表面)
には、塗装や樹脂モールド等による防錆保護層2
5が設けてある。
A cylindrical bearing holding fitting 30 made of the same material as the bellows 18 is brazed to the inner peripheral end of the end plate 28, and the movable lead rod 12 is slidably attached to the bearing holding fitting 30. A penetrating resin bearing 22 is integrally attached with an adhesive layer 23 interposed therebetween. The inner wall surface of the end plate 28 between the joint parts of the end plate 28 and the bellows 18 and the bearing holding fitting 30 is covered with a rust-preventing layer 3 made of a brazing material.
1 is formed, and the outer wall surface (outer surface) of this end plate 28
Rust-preventive protective layer 2 is applied by painting or resin molding.
5 is provided.

前記防錆層31を構成するろう材としては、
Fe−Ni合金、Fe−Ni−Co合金等の大気にさらさ
れると錆やすい金属で形成される端板28に対し
て流動性が良く、しかも真空炉中でろう付けを行
う必要上から高蒸気圧成分(揮発成分)が少な
く、端板28の応力腐食割れを起こする虞のない
もの、例えばニツケル系や銅等、アルミニウム
系、金系、パラジウム系のろう材を使用すること
が望ましい。なお、銀系のろう材は銀が鉄基合金
内に粒界侵入し、粒界割れを起こす虞れがあるた
めに使用できない。
The brazing material constituting the anti-rust layer 31 is as follows:
The end plate 28 is made of a metal that easily rusts when exposed to the atmosphere, such as Fe-Ni alloy or Fe-Ni-Co alloy, which has good fluidity and high steam as it is necessary to braze in a vacuum furnace. It is desirable to use a brazing material that has a low pressure component (volatile component) and is free from the risk of causing stress corrosion cracking of the end plate 28, such as a nickel-based, copper, aluminum-based, gold-based, or palladium-based brazing material. Note that silver-based brazing filler metals cannot be used because there is a risk that silver will enter the grain boundaries within the iron-based alloy and cause grain boundary cracks.

前記ろう材による防錆層31の形成手段として
は、ベローズ18と端板28とを接合するろう
材、又は軸受保持金具30と端板28とを接合す
るろう材にて形成しても良い。或いは、防錆層3
1を形成するために特別に板ろうや線ろうを配置
しても良い。
The anti-rust layer 31 may be formed using a brazing filler metal for bonding the bellows 18 and the end plate 28 or a brazing filler metal for bonding the bearing holding fitting 30 and the end plate 28. Or rust prevention layer 3
In order to form 1, a plate solder or a wire solder may be specially arranged.

H 考案の効果 本考案の真空インタラプタによると、真空容器
の一部を形成する金属部材と、可動リード棒をガ
イドする軸受が取付けられる軸受保持金具とを別
部材にて形成し、しかも金属部材と金属ベローズ
及び軸受保持金具とのそれぞれ接合部の間のこの
金属部材の内壁面をろう材による防錆層にて覆つ
たので、従来大気に晒されていた金属部材の内壁
面が直接大気に晒されることはなく、錆の発生を
効果的に防止でき、これによつて耐久性及び信頼
性の高い真空インタラプタを得ることができる。
この結果、金属部材としてアルミナセラミツクス
に直接接合できるけれども錆の発生しやすいFe
−Ni合金、Fe−Ni−Co合金を使用でき、これに
よつて金属部材を単一材料で且つ単一構造にて形
成できるので、気密シール部の消減に寄与できる
と共に信頼性が向上する。
H. Effects of the invention According to the vacuum interrupter of the invention, the metal member forming a part of the vacuum container and the bearing holding fitting to which the bearing for guiding the movable lead rod is attached are formed as separate members, and the metal member and Since the inner wall surface of this metal member between the joints with the metal bellows and the bearing holding fittings is covered with a rust-preventive layer made of brazing material, the inner wall surface of the metal member, which was conventionally exposed to the atmosphere, is now directly exposed to the atmosphere. Therefore, the occurrence of rust can be effectively prevented, and thereby a vacuum interrupter with high durability and reliability can be obtained.
As a result, although Fe can be directly bonded to alumina ceramics as a metal component, it is prone to rust.
-Ni alloy and Fe-Ni-Co alloy can be used, and this allows the metal member to be formed of a single material and a single structure, which contributes to the elimination of airtight seals and improves reliability.

更に、軸受保持金具を大気側の気密シールに無
関係な箇所に設けることができるので、この軸受
保持金具を金属部材とは異なつた材料で錆の発生
し難い例えばオーステナイト系ステンレス鋼等に
て形成できる。
Furthermore, since the bearing holding fitting can be provided at a location unrelated to the airtight seal on the atmosphere side, the bearing holding fitting can be made of a material different from the metal member, such as austenitic stainless steel, which is unlikely to rust. .

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案による真空インタラプタの一実
施例における主要部の構造を表す断面図、第2図
は真空インタラプタの概略構造を表す断面図、第
3図及び第4図はその端板とベローズとの接合部
分のそれぞれ一例を表す拡大断面図である。 又、図中の符号で12は可動リード棒、15は
絶縁筒、18は金属ベローズ、22は軸受、25
は防錆保護層、28は金属端板、30は軸受保持
金具、31は防錆層である。
Fig. 1 is a sectional view showing the structure of the main parts of an embodiment of the vacuum interrupter according to the present invention, Fig. 2 is a sectional view showing the schematic structure of the vacuum interrupter, and Figs. 3 and 4 are the end plate and bellows thereof. FIG. 3 is an enlarged cross-sectional view showing an example of a joint portion with the above. Also, in the figure, 12 is a movable lead rod, 15 is an insulating cylinder, 18 is a metal bellows, 22 is a bearing, 25
28 is a metal end plate, 30 is a bearing holding fitting, and 31 is a rust preventive layer.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空容器の一部を構成すると共に可動リード棒
が貫通する金属部材の内壁側に金属ベローズの一
端側を気密接合して設け、該金属ベローズを真空
容器内に位置させると共に該金属ベローズの他端
側を内端部に電極を具備する可動リード棒に気密
接合して設け、前記金属ベローズと前記可動リー
ド棒との間に位置してこの可動リード棒をガイド
する軸受が取付けられる軸受保持部を設けて構成
した真空インタラプタにおいて、前記金属部材と
前記軸受保持部とを別材料にて形成すると共に両
者をろう付接合して設け、前記金属部材及び前記
金属ベローズの接合部と前記金属部材及び前記軸
受保持部の接合部との間における大気接触部分の
前記金属部材の内壁にろう材による防錆層を設け
たことを特徴とする真空インタラプタ。
One end of a metal bellows is provided in airtight contact with the inner wall side of a metal member that constitutes a part of the vacuum container and through which the movable lead rod passes, and the metal bellows is positioned within the vacuum container, and the other end of the metal bellows is provided. a bearing holder, the side of which is in airtight contact with a movable lead rod having an electrode at the inner end thereof, and a bearing that is located between the metal bellows and the movable lead rod and that guides the movable lead rod is mounted; In the vacuum interrupter, the metal member and the bearing holding portion are formed of different materials and are joined by brazing, and the joint portion of the metal member and the metal bellows is connected to the metal member and the bearing holding portion. A vacuum interrupter characterized in that a rust-preventing layer made of a brazing material is provided on the inner wall of the metal member at a portion in contact with the atmosphere between the joint portion and the joint portion of the bearing holding portion.
JP18850486U 1986-12-09 1986-12-09 Expired JPH041623Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18850486U JPH041623Y2 (en) 1986-12-09 1986-12-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18850486U JPH041623Y2 (en) 1986-12-09 1986-12-09

Publications (2)

Publication Number Publication Date
JPS6393036U JPS6393036U (en) 1988-06-16
JPH041623Y2 true JPH041623Y2 (en) 1992-01-21

Family

ID=31139934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18850486U Expired JPH041623Y2 (en) 1986-12-09 1986-12-09

Country Status (1)

Country Link
JP (1) JPH041623Y2 (en)

Also Published As

Publication number Publication date
JPS6393036U (en) 1988-06-16

Similar Documents

Publication Publication Date Title
JPH0438715B2 (en)
US3395993A (en) Titanium activated nickel seal and method of forming it
US3988825A (en) Method of hermetically sealing an electrical component in a metallic housing
SE445549B (en) SET TO CARRY OUT A VACUUMED HARD SOLUTION BETWEEN A METALLIZED CERAMIC PART AND A PART OF STAINLESS STEEL
JPH041623Y2 (en)
JPS59214122A (en) Vacuum interrupter
JPH0422507Y2 (en)
JPH0455398Y2 (en)
KR860002081B1 (en) A vacuum breaker
JP3690979B2 (en) Metal-ceramic joint and vacuum switch unit using the same
JPH05144351A (en) Vacuum valve
JP3690981B2 (en) Metal-ceramic joint and vacuum switch unit using the same
JPH0239326Y2 (en)
JPH0112356Y2 (en)
JPH0433759B2 (en)
JP2755659B2 (en) Vacuum valve
JPS6030588A (en) Welded joint of pipes consisting of different materials
JPH03269923A (en) Vacuum interrupter
JPH06251736A (en) Vacuum container formed by using beryllium foil in window and manufacture thereof
JPS59175675A (en) Mechanical seal
JPH0426426Y2 (en)
JPH0146978B2 (en)
JPH07172948A (en) Adhesion of metallic material to ceramic material
KR830001011B1 (en) Electronic tube
JP2023110688A (en) airtight terminal