JPS61228336A - Apparatus for automatic analysis of x-ray kossel diffraction image - Google Patents

Abstract

PURPOSE:To enable the successive automatic irradiation of electron beam, the automatic formation of a polar figure and color mapping, by connecting an image processing/analysis exclusive image processor to an X-ray Kossel diffraction image observation apparatus. CONSTITUTION:The X-ray Kossel diffraction image formed to the image receiving surface of an X-ray image intensifier 1-5 is detected by a high sensitivity sensor 1-5-1 to be inputted to an input interface 5 as an electric signal. In this interface, signal level processing, the matching of the capacity of the fiber of the sensor 1-5-1 and that of the image memory 6-1 of CPU6 and A/D conversion are performed and, thereafter, the obtained data are inputted to the memory 6-1 to be stored in the disc of a display group 8 prior to image processing or subjected to display or image picking-up if necessary. The input data of the memory 6-1 receive image processing necessary for image analysis on the basis of a standard data.

Description

Detailed Description of the Invention (Industrial Application Field) The present invention automatically drives a measurement sample according to a digital image obtained by image processing a scanning electron microscope image or a light microscope image of a sample for measuring crystal orientation in a minute area, and measures each measurement point. X-ray Kotsu cell diffraction images are sequentially input into the image memory, and after image processing, the crystal orientation of the digitized micro region of the measurement sample is automatically analyzed, and a pole figure and crystal orientation color map are created. This relates to a device for

(Prior art) As a method for measuring crystal orientation in minute regions, the Kotsu cell line analysis method using scanning electron microscope images (hereinafter referred to as SEM images) is used in place of the conventional micro-Lawe method and Etchbit method. It's coming.

This method was first developed by the inventors in Japanese Patent Application Laid-Open No. 55-33660.
As disclosed in Japanese Utility Model No. 57-47791 and Japanese Utility Model Publication No. 57-47791, a scanning electron microscope and a Kotsu cell camera are combined, and an electron beam focused to a diameter of several microns for a scanning electron microscope is applied to the microscopic region to be crystallized. A Kotsu cell camera is used to take images of Kotsu cell lines generated by excitation of atoms in a micro region.

However, because XvA film is used, it takes time and effort to set the film in the equipment, develop and fix the film, analyze the film, etc., and it is very difficult to obtain information on a wide range of textures. Ta.

In order to solve the above-mentioned drawbacks, the inventors
No. 26248 discloses an X-ray Kossel diffraction image observation device using an X-ray image intensifier.

This device replaces the conventional X'4fA film with
The output of the line image intensifier can be converted into digital data and displayed on a cathode ray tube.

However, the Kotsu cell diffraction images obtained in this way cannot be used as experimental data as is, and in order to minimize errors in Kotsu cell diffraction image analysis and to save labor, it is necessary to automate the analysis. was essential.

Image analysis methods using computers have been developed since the early 1960s, and automatic measurement of the distance of diffraction spots using the X-ray Laue method and electron diffraction method has been carried out. We thought that by connecting an analysis device it would be possible to automate the analysis of the orientation and distortion amount of the Kotsu cell line image, and we filed a patent application in 1982 for the purpose of processing a large amount of data with high precision and in a short time.
By eliminating the above-mentioned drawbacks in No. 21580 and automatically analyzing the orientation and distortion amount of the Kotsu cell line image, we have created an X-ray Kotsu cell diffraction image analyzer that can process a large amount of data with high precision in a short time and has few errors. Proposed.

This X-ray Kotsu cell diffraction pattern analysis device consists of an X-ray image intensifier and a signal processing device that reads data stored in an image memory that stores the output and performs signal processing. In an X-ray Kotsu cell diffraction image observation device that can observe the Kotsu cell diffraction line as a digital image by signal processing the data obtained by projecting the Kotsu cell diffraction line, the shortest distance part from the origin on the screen on the Kotsu cell diffraction line an image processing device that performs the necessary processing to determine the distance, an image analysis device that determines the line width and curvature of the Kotsu cell diffraction line at the shortest distance, and an image analysis device that calculates the amount of distortion and crystal orientation from the line width and curvature of the Kotsu cell diffraction line that have been obtained. This device includes a conversion device for calculating the amount of strain and a display device for displaying the calculated strain amount and crystal orientation.

(Problems to be Solved by the Invention) However, with this X-ray Kossel diffraction image analyzer, (1) Since each crystal grain is driven to a measurement position manually according to a light microscopic image or an SEM image, it is difficult to complete the measurement. Cannot be automated. In addition, (2) the display output by analyzing the digitized Kotsu cell diffraction image only obtains the (hkl) poles by stereo projection arbitrarily extracted from the Kotsu cell diffraction digital image, and this alone is not enough to describe the crystal orientation. It cannot be said that it is perfect.

These must be resolved in order to realize the ultimate goal of automatically measuring the crystal orientation of individual grains existing in a microscopic area and clearly displaying the results (for example, creating a map of the metallographic structure). This is a problem.

(Means for solving the problem) In the 1980s, image processing and analysis equipment became faster in data processing with the introduction of dedicated processors using personal computers instead of the conventional general-purpose computers.
In addition, it has become possible to create software programs that are suitable for the field, and it has become widely used in fields such as industry, communications, medicine, and commerce.Also, with the increase in memory capacity, it has become possible to write different types of input data in parallel. In addition to being able to perform processing and analysis (multi-memory channels), color image memory can also be provided, making it possible to display processing and analysis results in color.

The inventors have developed an image processor dedicated to image processing/analysis, an autofocus/stage controller, and a color sensor that incorporates the above-mentioned multi-memory channel system into the X-ray Kotsu cell diffraction image observation device disclosed in Japanese Patent Application Laid-open No. 56-26248. Sequential automatic irradiation of electron beams by connecting a display device (CRT, printer, etc.)
We have developed an automatic X-ray Kossel diffraction image analyzer that can automatically create pole figures and perform color mapping.

That is, the present invention relates to an X-ray Kotsel diffraction image observation device comprising an X-ray image intensifier, an image memory for storing its output, and a signal processing device for reading data stored in the image memory and performing signal processing; an image processing device that determines the shortest distance from the origin on the screen; an image analysis device that determines the curvature of the Kotsu cell diffraction line at the shortest distance; a conversion device that determines the crystal orientation from the curvature of the Kotsu cell diffraction line obtained; The X-ray Kossel diffraction image analysis device includes a display device that displays the crystal orientation of the sample, and an optical microscope image detection device 3 that detects the crystal structure of the sample;
A SEM image detection device 4 that detects an SEM image of reflected electron beams scattered from a sample, and these optical microscope images and SEM
an input interface 5 for processing and converting signals of images and Kotsu cell diffraction images; a grayscale image memory for storing image data; a binary memory for storing binarized data of grain boundaries; and a color memory for storing color image data. an image memory 6-1 consisting of an image memory 6-1, a CPU 6-2 dedicated to image processing/analysis, which binarizes the Kotsu cell diffraction image and performs crystal orientation analysis, and a CPU 6-2 dedicated to control/editing, which inputs crystal orientation measurement coordinates and starts and controls the entire system. An image processor 6 comprising a CPU 6-3 and an output signal from the control/editing CPU 6-3 move the sample position within the Kotsu cell diffraction image observation apparatus 1, and
An X-ray device characterized by comprising a stage drive/electron gun start/stop device 9 that automatically starts and stops the electron gun, a color display device 8 that displays a color image, and a plotter that creates a pole figure. This is a Kotsu cell diffraction image analyzer.

The configuration of the present invention will be explained in more detail below with reference to the drawings.

FIG. 1 shows an example of a block diagram of an automatic X-ray Kotsu cell diffraction image analyzer according to the present invention. In Figure 1,
Electron gun 1- inside the main body of the X-ray Kotsu cell diffraction image observation device 1
The electron beam emitted from sample 1-4 is focused on a minute area on sample 1-4 via converging lens 1-2 and objective lens 1-3.

Sample 1-4 is excited by this electron beam irradiation and has the characteristic
'frfA (Kotsel line) is emitted.

As a result of this XvA being diffracted by each sample 1-4, the diffraction x'4IA forms various conical surfaces, and the cross sections of these conical surfaces on certain planes become Kotsu cell diffraction images.

Kotsu cell diffraction image is X-ray image intensifier 1-
High-sensitivity XBI sensor 1-5- installed on the image receiving surface of 5
1.

In order to simplify the analysis of the Kotsel diffraction image, the image receiving surface of the X-ray image intensifier 1-5 is normally set parallel to the measurement sample surface either below the sample (transmission Kotsel method) or above the sample (reflection Kotsel method). will be installed in

The portion from the electron gun 1-1 to the chi-ray image intensifier 1-5 described above is placed in a vacuum container.

The binarized image processing of the crystal structure is performed along the arrow Q in FIG. The crystal structure of the measurement sample 1-4 is image-processed/analyzed by connecting an image pickup tube equipped with a high-sensitivity image sensor, in this case a television camera 3-2, to the optical microscope 3-1 of the optical microscope image detection device 3. In addition to being input to the dedicated image processor 6, the SEM image of the reflected electron beam scattered from the measurement sample 1-4 is detected by the detector 4-1 of the SEM image detection device 4, and is sent to the image processor through the scanning converter 4-2. 6 is input.

Note that the input interface 5 performs necessary signal processing, A/D conversion, etc. for inputting these SEM images and light microscope images to the image processor 6.

The image processor 6 dedicated to image processing/analysis includes an image memo IJ6-L CPU 6-2 dedicated to image processing/analysis, control,
It is composed of an editing CPU 6-3.

Among these, the image memory 6-1 is divided into grayscale image memory, binary image memory, color-only memory, etc., and the memory capacity can be increased to input multiple images in parallel (multi-memory channel ).

The image processing/analysis dedicated CPU 6-2 has an image memory 6-1.
Various processes (e.g., spatial filters,
After performing gradation conversion, binarization, masking, area division, etc.), the processed image is analyzed (eg, inter-image calculation, feature extraction, measurement, numerical analysis, etc.).

The CPU 6-3 dedicated to control and editing starts and controls the entire system of the automatic X-ray diffraction image analyzer of the present invention, and performs processing as necessary by connecting the external storage device group 11 and the external input device group 12. The data in the image memory 6-1 can be saved on a disk, programs can be created, and the entire system can be controlled using a graphic terminal or digitizer.

The crystal structure image input to the image processor 6 is
After performing interactive image processing using a digitizer, light pen, etc. in the external input device group 12, it is output as a binarized image of only the grain boundaries, which is stored in the external storage device group 11 and displayed on the display via the output interface 7. Displayed on group 8 CRT.

Next, we will discuss the mechanism for automating sample stage drive and electron beam irradiation.

The electron beam irradiation position (crystal orientation measurement position) is directly instructed to the binarized screen on the CRT by the external input device group 12. The crystal grains to be measured are labeled in order to establish a correspondence between the orientation and its color image.

That is, the first side of the image memory, which has ixj pixels, contains the label number n indicating the label of the crystal grain, and the second side contains the sample stage, focusing, and electron beam irradiation (
A transmission signal (Ilo) indicating YES/NO is input.

For example, (i, j) pixels and (i+3.D
The label number of the pixel and the emitted signal are (m,
1) and (m, O), the (i, j) pixel and the (i÷3.j) pixel belong to the same crystal grain, but the electron beam' irradiation is performed only at the former position. The transmission signal indicating electron beam irradiation is transmitted through the CPU 6-3 dedicated to control and editing to the autofocus/stage controller 9-1 of the stage drive/electron gun start/stop device 9, and is transmitted to the autofocus/stage controller 9-1 of the stage drive/electron gun start/stop device 9, which generates pulses for three axes (X-Y-Z). Drive the sample stage 1-8 of the X-ray Kossel diffraction image observation device l by the motor 9-2,
Align the electronic probe to the position indicated by the (IIJ) pixel on the CRT.

Furthermore, this signal is transmitted to the high voltage power supply unit 9-3 for electron beam generation and control.
As a result, 0N10FF of the electron gun 1-1 is performed.

(Function) Image analysis of the X-ray Kossel diffraction image formed on the image receiving surface of the X-ray image intensifier 1-5 will be described.

The crystal orientation of the X-ray Kossel diffraction image is analyzed along the arrow → in FIG.

That is, the X-ray Kotsu cell diffraction image is detected by the high-sensitivity X-ray sensor 1-5-1 provided on the image receiving surface of the X-ray image intensifier 1-5, and is input as an electrical signal to the input interface.

Here, signal level processing is performed, the fiber of the X-ray sensor 1-5-1 and the image memory 6-1 of the image processor 6 are processed.
After performing matching of the capacity (number of pixels of one screen), A/D conversion, etc., the image memory 6 of the image processor is
-1 is input.

Since this input image corresponds to that transferred onto conventional X-ray film as raw data, it is stored on the disk of the display group 8 before being subjected to image processing, and is also displayed on a CRT as necessary and photographed with a camera. .

The original image data of the XvA Kotsel diffraction image input into the image memory 6-1 is subjected to image processing necessary for image analysis based on the standard sample. X'! In the b\kotsu cell diffraction image, the line width and intensity of the diffraction lines are not constant due to the probe diameter of the electron beam, the shape of the X-ray source, and the plane mapping of the Ewald sphere.

For this reason, a program is created in advance to perform preprocessing necessary for analysis (for example, gradation conversion, noise cutting) using a standard sample, and inputted into the control/editing CPU. According to the instructions of this program, the X-ray Kossel diffraction image is binarized by the CPU 6-2 dedicated to image processing/analysis, and crystal orientation analysis is performed.

The method for determining crystal orientation from a Kotsu cell diffraction image is by
The method by an et al. (G, Ferran & R, A, W
ood: J, Appl, crystal, vol, 3(1
970)). In other words, when an electron beam is irradiated perpendicularly to a sample, pear-shaped characteristic X-rays are generated within the sample, and as they pass through the sample, they cause Bragg diffraction due to the crystal lattice, forming a diffraction cone with the X-ray source at the apex. is formed. This image is perpendicular to the XvA source!
On the horizontal image receiving surface 1-5-1 of the distant X-ray image intensifier 1-5, it is approximated as a quadratic curve expressed by the fl1 equation.

Here, the intersection beam is an orthogonal coordinate system on the sample surface (rolled surface) parallel to the image receiving surface 175-1, and the y-axis is the intersection line between the sample surface and the (hk N ) diffraction surface. θhkff is the Bragg angle of the (hkN) diffraction surface, and T is the angle between the (hk l ) diffraction surface and the sample surface. (hkl) The positive pole figure is the sample coordinate system x-y
-z (x axis = R, D, y axis = T, D, z axis = N, D,
) is a description of the crystal coordinate system X-Y-Z (equivalent to a unit cell vector in the case of a cubic crystal), and is expressed as stereo projection points of all (hkl) surface normals.

In other words, (the sentence-bu coordinate system of equation 11 and the sample coordinate system x-
The extreme point (hkN) is determined by determining the rotation angle ψ of y (P and 2 match) and the value of γ.

(If we consider 1-0 in equation 11, X becomes xo in equation (2).

This ma. corresponds to the shortest distance from the origin to the (hkN) diffraction line. Let this point be p, the coordinates of point p in the x-y coordinate system are (xp, 3'p), and (hk j
2) Letting the curvature of the diffraction line be ξ2, γ and ψ are (3
) and (4). (However, 0≦ψ≦2
π, 0≦T≦-) (3) According to 2, in order to determine γ, the diffraction surface index (hkl) of an arbitrarily selected diffraction line must be determined. For example, in the case of the Kotsel diffraction line of α-iron, the diffraction planes that satisfy the Brang condition are (200), (110) (21
, 1) , (limited to 4 types of (2201).The curvature ξ2 of the diffraction line at point p is, so if you create a lookup table for each θhkff for T, by measuring ξ, (
hkA) can be determined.

Next, any (hk A ) determined by image analysis
A method of creating a (hk/) pole figure from (γ, ψ) of a diffraction line will be described.

The stereo projection shows the diffraction surface normal (hk # ”
) The pole point is represented by point A in FIG. That is, point A is a point on the ma-axis rotated ψ clockwise from R and D.

(hk l ) The pole figures are spatially equivalent (hk N )
It is necessary to show all the pole points of the combination of
0) If it is a pole, once three points are determined, the positions of all remaining poles can be determined.

(200) An example of creating a t'M point diagram is shown in FIG.

Points A and B are the (200) and (002) poles obtained from the Kotsu cell diffraction line, and their measured values are (γ,, ψA
) and (γ8.ψ,). From these two points to point C (
γ0. ψC) is determined.

The zone axis (stereo projection of a great circle) passing through two points A and B is OA
RAQ by the 0 mouth perpendicular to the intersection line ROS of the B surface and the rolling surface.
BS is decided. If the point Q (r,, ψ.) is OA
The angle ψ1′ formed by and OQ is the angle ψ by stereo projection
OQ is expressed by equation (6).

・・・・・・(6) ・・・・・・(7) π However, 0≦TA+ γa, ro≦ −10≦ψ4.
ψ6. ψ0≦2π In stereo projection, equation (81, (9) holds true for −i.

tan γ, = tan 7,, Go straight ψ. −ψA)
-(8) m an r , = tan r ,
cos (ψ 8− ψQ) − (91(8), f9)
By substituting equations into equations (6) and (7), the angle between OA and OB is ψ1゛+ψ2゛=-, so To can be calculated from equation 00.

By substituting this into equation (8) or (9), ψ0 becomes (1
1) It can be calculated using the formula.

Since OC which is perpendicular to both OA and OB is also perpendicular to OQ and 1QOC=π, point C is (12), (1
3) Determined by Eq.

ψ. -ψ0+π-π+ψe+cos-1(tan(cos-”t)/1an7A
)...(13) To convert this (200) pole figure to a (110) pole figure, the zone axes of points A and B1 points B and C1 points C and A are converted from (6) to
(11), and six (110) poles necessary for display can be determined from the relationship between the (200+ plane and the (110) plane).

Next, conversion from a positive pole figure to an inverse pole figure will be explained.

Generally, in the case of BCC crystal system, N from the (200) positive pole figure
,D and R,D, can be easily converted into inverse pole figures.

From the (200) positive pole figure in Figure 3, N, D and R, D,
An example of creating an inverse pole figure is shown in FIGS. 4(i) and (ii).

The inverse pole figure is N, D, and R when the (200) positive pole figure is equiangularly rotated to match the (200) standard projection.
, D, is expressed by the coordinates of (points N and R in Figure 4),
Typically, 48 spatially equivalent (001) - (Ol
l) −(1111 Among the stereo triangles, let it be represented by the one closest to the origin. Therefore, N, D and l?,
In D, the movement route is different. First of all, N, D 7i
We will explain how to create a dot map.

Of the three (2001) pole points, N and D, that is, the one closest to the origin 0 in Figure 3, is moved to the origin, and since it is a rotational movement, the point C moves to the origin C' as shown in Figure 4 (i). .Point A
Point 1 B and point 0 (N, D) move equiangularly around the axis of rotation and become point A', point B', point N, and point A'. In the stereo triangle containing point N, point N is (14)
, (15) Displayed as C'N determined by 2.

IsuゝICN l-10CI-ttan (Jdan) ・
(14) Next, a method for creating R, D, and inverse pole figures will be explained.

Among the three (7) (200) poles, rotate the one closest to R and D, that is, point A in Figure 3, to the origin and get point A.
shall be. Point B1, point C, R, and D become point B, point C', and point R by equiangular movement around the rotation axis, respectively. /RA'A and /AAC (Fig. 4 θ and θ2
) becomes equations (16) and (17).

In the stereo triangle containing point R, point R is (1B).

It is expressed as A''R determined by equation (19).

The analysis results obtained from the above-mentioned calculations are stored on a disk together with the Kotsu cell diffraction image and the measured values, and if necessary, normal and inverse pole figures are drawn by a bronchter.

Next, a method for creating a color map based on the crystal orientation of the metal Mi weave will be explained.

This color map can accurately and clearly display the texture of metals, especially the state of preferential formation of crystal orientation (for example, the state of secondary recrystallization nucleation in grain-oriented silicon steel, the state of (111) texture formation in cold-rolled steel sheets). , intra-thickness heterogeneity of hot rolling texture, etc.) can be understood in detail and accurately.

The color display on a CRT is made up of three planes, R (red), G (green), and B (blue), which are provided in the image memory in the image processor. Color mixing is done by manually adding gray tones and overlapping them. According to this, R
If the number of gray tone levels for each GB is 256, then 2
It is possible to display 563 colors.

As a color display method for crystal orientation, the three primary colors R, G, and B are each represented by (011) of the basic stereo triangle of the inverse pole figure.
, (111), (001) are placed at the extreme points, and color mixing is performed using the angle from each vertex as the gray level.

That is, the coordinates of any point P in the stereo triangle are (ω
, φ), (ω: latitude, φ: longitude), the color function C2 at point P is expressed by equation (20).

C9 (('lφ) = aR + bG + CB ・(20) where C = 1- (a + b ) R = Red- = Green - B = Blue c7)
When primary colors a-b-c display gray levels N and D of R-G-B, point P corresponds to point N in Fig. 4, so from equations (14) and (15), ( 21),
Find the point N (ω, φ) from equation (22) and a of equation (20)
, b, c, the CM is determined.

Similarly, +11.0. When displaying , point P corresponds to point R in Figure 4, so from equations (16) to (19), 1-
cosφC03(111-CO5ψ^sin T m1
+cosφCO5ω1+cosφ6S1n TA...
...(23) Find the point R (ω, φ) from equations (23) and (24),
By calculating a, b, c in equation (20), Oc*fJ
<Determined.

5, 4 (a, b, c) and CR determined in this way
(a, b, c) are N, D, and R, G of R, D.

B. A, b, and c are input in parallel to pixel regions corresponding to crystal grains whose crystal orientations are measured in a color image memory that exists on each of three sides. For each measurement area, these R, G, and B individual color screens and the binarized screen of the grain boundaries are displayed on a color CRT.
A color map of the crystal orientation is created by superimposing the above images.

In summary, using the configuration of a scanning electron microscope, the As a line cell diffraction image analyzer, the image memory of the image processor not only stores the output from the X-ray image intensifier, but also inputs and records scanned images and optical microscope images through a scanning converter or image pickup tube. It is a channel system that, after image processing of the metallographic structure, uses the digital image output to the display device to manually input crystal orientation measurement coordinates to the image processor's editing/control dedicated CPU, which drives the sample stage using the autofocus/stage controller. By automatically controlling the focal point and sample position, and automatically performing 0N10FF of the electron beam by high pressure control, the sequentially input Kotsu cell diffraction images are binarized, and two or three 200 or 110 By measuring the coordinates of the foot of the perpendicular to the diffraction line and the curvature of the diffraction line at this point, (hk A) positive pole figure, N, D, inverse pole figure, R, D, inverse pole figure and metallographic structure. N using the binarized image of
After automatically analyzing the color image of the crystal orientation due to the opposite poles of ,D, and R,D, using an image processor,
The display device including the block, color CR, and T displays the measurement data as well as the analysis data, the pole figure, and the color map.

(Effects of the Invention) The automatic X-ray Kotsu cell diffraction image analyzer of the present invention can realize sequential automatic irradiation of electron beams, automatic creation of pole figures, and color mapping in the diffraction image observation system. .

[Brief explanation of drawings]

Figure 1 is a block diagram of the automatic X-ray Kossel diffraction image analyzer of the present invention, Figure 2 is a relationship diagram between measured values and positive pole figures, Figure 3 is an explanatory diagram of an example of creating a (200) pole figure, FIG. 4 is an explanatory diagram of an example of creating N, D, R, D, and inverse pole figures from the positive pole figure. 1... X-ray Kotsu cell diffraction image observation device 1-1... Electron gun, 1-2... Converging lens 1-3... Objective lens 1-4... Sample 1-
5...X-ray image intensifier 1-5-1.
... High sensitivity X-ray sensor 3 ... Optical microscope image detection device 3-1 ... Optical microscope 3-2 ... Television camera 4 ... SEM image detection device 4-1 ... Detector 4
-2...Scanning converter 5...Input interface 6...Image processor 6-1...Image memory 6-2...CPU dedicated to image processing/diffraction 6-3...CPU dedicated to control/editing 7 ...Output interface 8...Display 9...Stage drive/electron gun drive stop device 9-1...
・Autofocus/stage controller 9-2・・
・X-Y-Z pulse motor patent applicant Kawasaki Steel Co., Ltd. Representative Patent Attorney Akatsuki Sugimura Examiner Patent Attorney Kosaku Sugimura R, D, (χ axis), 1 ,ψ)

Claims (1)

[Scope of Claims] 1.
A line Kossel diffraction image observation device, an image processing device that determines the shortest distance from the origin on the screen on the Kossel diffraction line, an image analysis device that determines the curvature of the Kossel diffraction line at the shortest distance, and In an X-ray Kossel diffraction image analysis device that includes a conversion device that calculates crystal orientation from curvature and a display device that displays the determined crystal orientation, there is an optical microscope image detection device 3 that detects the crystal structure of the sample, and an optical microscope image detection device 3 that detects the crystal structure of the sample. SE by reflected electron beam
An SEM image detection device 4 that detects the M image, an input interface 5 that processes and converts the signals of these optical microscope images, SEM images, and Kossel diffraction images, a grayscale image memory that stores image data, and a binary value of crystal grain boundaries. an image memory 6-1 consisting of a binarization memory for storing color image data and a color memory for storing color image data; a CPU 6-2 dedicated to image processing/analysis for binarizing Kossel diffraction images and performing crystal orientation analysis; An image processor 6 consisting of a control/editing CPU 6-3 that inputs the azimuth measurement coordinates and starts and controls the entire system; It includes a stage drive/electron gun start/stop device 9 that moves the sample position and automatically starts and stops the electron gun, a color display device 8 that displays a color image, and a plotter that creates a pole figure. An X-ray Kossel diffraction image analyzer characterized by: