JPS61227161A - 蒸着フイルムの製造方法 - Google Patents

蒸着フイルムの製造方法

Info

Publication number
JPS61227161A
JPS61227161A JP6716685A JP6716685A JPS61227161A JP S61227161 A JPS61227161 A JP S61227161A JP 6716685 A JP6716685 A JP 6716685A JP 6716685 A JP6716685 A JP 6716685A JP S61227161 A JPS61227161 A JP S61227161A
Authority
JP
Japan
Prior art keywords
film
tape
deposited
vacuum
vapor deposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6716685A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0545668B2 (enrdf_load_stackoverflow
Inventor
Yutaka Okudaira
奥平 裕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Mitsubishi Plastics Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Plastics Industries Ltd filed Critical Mitsubishi Plastics Industries Ltd
Priority to JP6716685A priority Critical patent/JPS61227161A/ja
Publication of JPS61227161A publication Critical patent/JPS61227161A/ja
Publication of JPH0545668B2 publication Critical patent/JPH0545668B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
JP6716685A 1985-03-30 1985-03-30 蒸着フイルムの製造方法 Granted JPS61227161A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6716685A JPS61227161A (ja) 1985-03-30 1985-03-30 蒸着フイルムの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6716685A JPS61227161A (ja) 1985-03-30 1985-03-30 蒸着フイルムの製造方法

Publications (2)

Publication Number Publication Date
JPS61227161A true JPS61227161A (ja) 1986-10-09
JPH0545668B2 JPH0545668B2 (enrdf_load_stackoverflow) 1993-07-09

Family

ID=13337037

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6716685A Granted JPS61227161A (ja) 1985-03-30 1985-03-30 蒸着フイルムの製造方法

Country Status (1)

Country Link
JP (1) JPS61227161A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008001959A (ja) * 2006-06-23 2008-01-10 Sumika Chemical Analysis Service Ltd 電極パターン形成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008001959A (ja) * 2006-06-23 2008-01-10 Sumika Chemical Analysis Service Ltd 電極パターン形成方法

Also Published As

Publication number Publication date
JPH0545668B2 (enrdf_load_stackoverflow) 1993-07-09

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