JPS61224324A - Dry type thin film processor - Google Patents

Dry type thin film processor

Info

Publication number
JPS61224324A
JPS61224324A JP6456385A JP6456385A JPS61224324A JP S61224324 A JPS61224324 A JP S61224324A JP 6456385 A JP6456385 A JP 6456385A JP 6456385 A JP6456385 A JP 6456385A JP S61224324 A JPS61224324 A JP S61224324A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
vessel
specimen
solenoids
microwaves
connected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6456385A
Inventor
Yasuaki Nagao
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting

Abstract

PURPOSE:To diffuse microwaves on the surface of specimen while making processing effective by a method wherein a metallic vessel encircled with magnetic force line generating means is connected to a reaction tube containing a specimen to vessel or the vessel is provided with electromagnetic shielding sheets with numerous pores in the metallic vessel. CONSTITUTION:Coolers 65 and metallic vessel 63 encircled with solenoids 66 as magnetic force line generating means are connected to the upper part of a reaction tube 69 containing a specimen base 71 whereon a specimen 72 is mounted. Besides, a waveguide 61 is connected to the ceiling of metallic vessel 63 which is fed with N2 gas through the intermediary of a piping 64 while the reaction tube 69 is fed with SiH2 gas through the intermediary of another piping 70 to irradiate the specimen 72 with microwaves through the waveguide 61 for specified processing. In such a constitution, electromagnetic shielding sheets 68 with numerous pores are provided in the metallic vessel 63 to be resonated with the other solenoids 67 encircling the vessel 63 to be resonated with the other solenoids 67 encircling the vessel 63 so that a part of microwaves may be diffused through the pores to disperse the plasma beams reaching the specimen 72.
JP6456385A 1985-03-28 1985-03-28 Dry type thin film processor Pending JPS61224324A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6456385A JPS61224324A (en) 1985-03-28 1985-03-28 Dry type thin film processor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6456385A JPS61224324A (en) 1985-03-28 1985-03-28 Dry type thin film processor

Publications (1)

Publication Number Publication Date
JPS61224324A true true JPS61224324A (en) 1986-10-06

Family

ID=13261822

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6456385A Pending JPS61224324A (en) 1985-03-28 1985-03-28 Dry type thin film processor

Country Status (1)

Country Link
JP (1) JPS61224324A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5099790A (en) * 1988-07-01 1992-03-31 Canon Kabushiki Kaisha Microwave plasma chemical vapor deposition apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5099790A (en) * 1988-07-01 1992-03-31 Canon Kabushiki Kaisha Microwave plasma chemical vapor deposition apparatus

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