JPS6122340U - 半導体処理液の熱交換装置 - Google Patents

半導体処理液の熱交換装置

Info

Publication number
JPS6122340U
JPS6122340U JP10734684U JP10734684U JPS6122340U JP S6122340 U JPS6122340 U JP S6122340U JP 10734684 U JP10734684 U JP 10734684U JP 10734684 U JP10734684 U JP 10734684U JP S6122340 U JPS6122340 U JP S6122340U
Authority
JP
Japan
Prior art keywords
semiconductor processing
processing liquid
heat exchange
exchange equipment
exchange device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10734684U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0442915Y2 (enrdf_load_stackoverflow
Inventor
知紘 早坂
Original Assignee
小松エレクトロニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 小松エレクトロニクス株式会社 filed Critical 小松エレクトロニクス株式会社
Priority to JP10734684U priority Critical patent/JPS6122340U/ja
Publication of JPS6122340U publication Critical patent/JPS6122340U/ja
Application granted granted Critical
Publication of JPH0442915Y2 publication Critical patent/JPH0442915Y2/ja
Granted legal-status Critical Current

Links

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  • Weting (AREA)
JP10734684U 1984-07-16 1984-07-16 半導体処理液の熱交換装置 Granted JPS6122340U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10734684U JPS6122340U (ja) 1984-07-16 1984-07-16 半導体処理液の熱交換装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10734684U JPS6122340U (ja) 1984-07-16 1984-07-16 半導体処理液の熱交換装置

Publications (2)

Publication Number Publication Date
JPS6122340U true JPS6122340U (ja) 1986-02-08
JPH0442915Y2 JPH0442915Y2 (enrdf_load_stackoverflow) 1992-10-12

Family

ID=30666593

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10734684U Granted JPS6122340U (ja) 1984-07-16 1984-07-16 半導体処理液の熱交換装置

Country Status (1)

Country Link
JP (1) JPS6122340U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010164277A (ja) * 2009-01-19 2010-07-29 Tekkusu Iijii:Kk 液体温度調節装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5943523A (ja) * 1982-09-03 1984-03-10 Yamagata Nippon Denki Kk 半導体エツチング処理における薬液供給方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5943523A (ja) * 1982-09-03 1984-03-10 Yamagata Nippon Denki Kk 半導体エツチング処理における薬液供給方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010164277A (ja) * 2009-01-19 2010-07-29 Tekkusu Iijii:Kk 液体温度調節装置

Also Published As

Publication number Publication date
JPH0442915Y2 (enrdf_load_stackoverflow) 1992-10-12

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