JPS61218827A - Linear guiding mechanism - Google Patents

Abstract

PURPOSE:To obtain a simple and dustless linear guiding mechanism by arranging the permanent magnets with the same pole so as to be opposite at a proper places in a guide body and a guided body so that the guide body and the guided body are brought into noncontact. CONSTITUTION:A guided body is constituted by a pair of flat-plate-shaped permanent magnets 1a and 1b having rectangular flat-plate surfaces which are magnetized in the direction perpendicular to the flat-plate surface, and a nonmagnetic spacer 2 of the same shape. On the other hand, a guide body is constituted by nonmagnetic holders 8, spacers 11a and 11b, and permanent magnets 10a, 10b and 12a-12d of which four faces opposing to the flat-plate- shaped permanent magnets 1a and 1b have the same pole and the same shapes respectively. Thus, the guided body 4 floats noncontactedly in the guide body 6 by magnetic force, which is same in the case of the other cross-sectional shapes such as a cylinder, triangular prism, and so forth, and dustless linear motion can be simply obtained.

Description

[Detailed description of the invention] [Technical field of invention] The present invention relates to a linear guide mechanism.

[Technical background of the invention and its problems]

When working in a clean room where semiconductor manufacturing equipment is located, it is required to suppress dust generation as much as possible in order to maintain a high level of cleanliness within the clean room. Linear guide mechanisms such as those used in automated machines in ream rooms may include a mechanism with a rigid bearing or a static pressure bearing using high-pressure air, but in a linear guide mechanism using bearings, the shaft, guide surface, and ball As the bearing surfaces move while in contact with each other, dust is generated from each contact area, which causes a reduction in cleanliness. Further, in the case of a static pressure bearing that uses high-pressure air, the air flow generated in the bearing portion raises dust in the clean room, which also causes a reduction in cleanliness.

This reduction in cleanliness is one of the factors that increases dust contamination on the wafer surface and lowers the yield of semiconductor products. Therefore, conventional linear guide mechanisms are used only in clean rooms where semiconductor manufacturing equipment is located. It cannot be used in environments where dust is extremely averse.

Magnetic levitation vehicles use electromagnets to maintain non-contact between the track and the vehicle and drive in a straight line, but the device is complicated to use as a linear guide mechanism, and there are problems with volume and T-view. .

[Purpose of the invention]

The present invention has been made in view of the above problems.

The objective is to provide a linear guide mechanism that does not generate dust.

[Summary of the invention]

In order to achieve the above object, the present invention provides.

A linear guide mechanism consisting of a guide body and a guided body surrounded by the guide body and guided in a straight line, characterized in that permanent magnets of the same polarity are placed opposite each other at appropriate positions on the guide body and the guided body. A linear guide mechanism is provided.

[Embodiments of the invention]

An embodiment of the present invention will be described below with reference to the drawings. 1st
The figure shows a first embodiment of the linear guide mechanism according to the present invention, and the configuration of this embodiment will be explained with reference to the figure.

A pair of flat permanent magnets (la
) and (lb) are connected by a non-magnetic spacer (2) having an aperture isomorphism to form a guided body (4) having a quadrangular prism shape as a whole. These flat permanent magnets (1a) and (ib) are magnetized in a direction perpendicular to the flat plate surface. This guided body (4) is fitted into a rectangular cylindrical guide body (6) to constitute a linear guide mechanism. The guide body (6) has a holder (8) whose four corners are made of magnetic material, and flat permanent magnets (la), (tb) when inserted between these holders (8).
Permanent magnets (10a) and (10b) held with their same polar faces facing each other, and a flat permanent magnet (xa),
(xb) having side surfaces of the same width and having the same magnetic field as each side surface of (xb).

Non-magnetic spacers (tla) are placed so that these side faces face the sides of the flat permanent magnets (la) and (ib).
), (ub) (stacked through i7, permanent magnet (1o
Permanent magnets (x2a), (t
zb), (t2c), and (tzd).

The linear guide mechanism with the above configuration always maintains a non-contact state due to the reaction of permanent magnets arranged with the same poles facing each other on the guide body (6) and the guided body (4). Therefore, the guided body (4) can move linearly in the axial direction of the guided body (4) while floating within the guide body (6). Even if a force perpendicular to the axial direction acts on the tip of the guided body (4), the reaction force between the guided body (6) and the guided body (4) will be proportional to the distance between them. Since it increases in inverse proportion to the square, the non-contact state between the guide body (6) and the guided body (4) can be maintained very stably.

In this way, the guided body (4) can always move linearly without contacting the guide body (6), so unlike the conventional sliding linear guide mechanism, there is no friction between the guide body and the guided body. No dust is generated from such sources. Therefore, since it does not contaminate the outside air, it can be used even in the clean room of semiconductor manufacturing equipment that requires high cleanliness.

Next, a second embodiment of the linear guide mechanism according to the present invention t-2
This will be explained with reference to the figures.

A pair of cylindrical bodies (20a) and (20b) having the same shape are held in parallel by a holder @ to form a guide body 4.

Inside the cylinders (zoa) and (2ob), cylindrical guided bodies (26a) and (26b) made of magnetic material are fitted, respectively, to constitute a linear guide mechanism. Guided object (2
One tip of 6a) and (2sb) is connected to a connecting rod (
2).

The side walls of the cylinder (2oa) and (2ob) are the cylinder (20a)
, (20b) are magnetized in a direction perpendicular to the axis of the connecting rod (to) so that the same polarity continues in the axial direction and the opposing side walls have different polarity. Maku guided body (26a)
, (26b) are magnetized in the direction perpendicular to the axis, and the same poles as the magnetic poles of the side walls of the opposing cylinders (2oa) and (2ob) face each other. According to the above configuration, the guided bodies (26a) and (26b) ) are always maintained in a non-contact state due to the reaction of permanent magnets placed with the same poles facing each of the surrounding cylinders (20a) and (20b). Therefore, the guided body (26a), (
26b) can move linearly in the axial direction of the guided bodies (26a) and (2ob) while floating within the cylinder bodies (2oa') and (20b).

In addition, the pair of guided bodies (zaa), (2s
b) are restrained by the connecting rods (to) so that they cannot rotate about their respective axes, so the nine guided bodies (26a) and (26b) receive the reaction force from the magnets and rotate, causing the cylinder to rotate. The body (zoa) and (2ob) do not come into contact with each other due to transfer.

Next, a third embodiment of the linear guide mechanism according to the present invention will be described.
This will be explained with reference to the figures.

Three flat permanent magnets with rectangular flat surfaces (to)
is a triangular cylindrical spacer 0' which is a non-magnetic material! They are connected at J to form a guided body (b) which has a triangular cylindrical shape as a whole.

These flat permanent magnets are magnetized in a direction perpendicular to the flat plate. This guided body (b) is a triangular cylindrical guide body (
(to) to form a linear guide mechanism. The guiding body temperature is held by a holder whose three corners are made of non-magnetic material.A permanent magnet (AO) is held between each of them, with the same polar surface facing the flat permanent magnet. .

According to this configuration, the guided body (b) is the guide body (to).
Can move linearly in the axial direction without touching the

It should be noted that the linear guide mechanism according to the present invention is not limited to the embodiments described above, and it is clear that modifications can be made without changing the gist of the present invention.

For example, it is easily possible to configure the cross-sectional shapes of the guide side and the guided side to be other polygons.

〔Effect of the invention〕

According to the present invention, the guide side and the guided side of the linear guide mechanism are always kept in a non-contact state by the reaction force of the magnetic force, so the linear guide mechanism can be used without generating dust.

[Brief explanation of drawings]

FIG. 1 is a perspective view showing a first embodiment of the linear guide mechanism according to the invention, FIG. 2 is a perspective view showing a second embodiment of the invention, and FIG. 3 is a third embodiment of the invention. FIG. la, tb...Flat permanent magnet, 4r...Guided body 6
...guide body, toa, tob...permanent magnet 12
···permanent magnet

Claims (1)

[Claims] In a linear guide mechanism consisting of a guide body and a guided body surrounded by the guide body and guided in a straight line, permanent magnets of the same polarity are placed opposite each other at appropriate positions on the guide body and the guided body. Features a linear guide mechanism.