JPS61215285A - 結晶成長方法 - Google Patents

結晶成長方法

Info

Publication number
JPS61215285A
JPS61215285A JP5717485A JP5717485A JPS61215285A JP S61215285 A JPS61215285 A JP S61215285A JP 5717485 A JP5717485 A JP 5717485A JP 5717485 A JP5717485 A JP 5717485A JP S61215285 A JPS61215285 A JP S61215285A
Authority
JP
Japan
Prior art keywords
melt
crucible
crystal
pulling
single crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5717485A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0480875B2 (ko
Inventor
Sumio Kobayashi
純夫 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Industries Ltd filed Critical Sumitomo Metal Industries Ltd
Priority to JP5717485A priority Critical patent/JPS61215285A/ja
Publication of JPS61215285A publication Critical patent/JPS61215285A/ja
Publication of JPH0480875B2 publication Critical patent/JPH0480875B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP5717485A 1985-03-20 1985-03-20 結晶成長方法 Granted JPS61215285A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5717485A JPS61215285A (ja) 1985-03-20 1985-03-20 結晶成長方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5717485A JPS61215285A (ja) 1985-03-20 1985-03-20 結晶成長方法

Publications (2)

Publication Number Publication Date
JPS61215285A true JPS61215285A (ja) 1986-09-25
JPH0480875B2 JPH0480875B2 (ko) 1992-12-21

Family

ID=13048174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5717485A Granted JPS61215285A (ja) 1985-03-20 1985-03-20 結晶成長方法

Country Status (1)

Country Link
JP (1) JPS61215285A (ko)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01212293A (ja) * 1988-02-19 1989-08-25 Sumitomo Metal Ind Ltd 結晶成長方法
JPH02233581A (ja) * 1989-03-07 1990-09-17 Sumitomo Metal Ind Ltd 結晶成長方法
DE4409296A1 (de) * 1993-03-22 1994-09-29 Sumitomo Sitix Corp Verfahren zur Herstellung von Silicium-Einkristallen
US5363796A (en) * 1991-02-20 1994-11-15 Sumitomo Metal Industries, Ltd. Apparatus and method of growing single crystal
US5435263A (en) * 1993-03-29 1995-07-25 Sumitomo Sitix Corporation Method of producing single crystal
US5840116A (en) * 1994-03-31 1998-11-24 Sumitomo Sitix Corporation Method of growing crystals

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01212293A (ja) * 1988-02-19 1989-08-25 Sumitomo Metal Ind Ltd 結晶成長方法
JPH02233581A (ja) * 1989-03-07 1990-09-17 Sumitomo Metal Ind Ltd 結晶成長方法
US5363796A (en) * 1991-02-20 1994-11-15 Sumitomo Metal Industries, Ltd. Apparatus and method of growing single crystal
DE4409296A1 (de) * 1993-03-22 1994-09-29 Sumitomo Sitix Corp Verfahren zur Herstellung von Silicium-Einkristallen
US5477806A (en) * 1993-03-22 1995-12-26 Sumitomo Sitix Corporation Method of producing silison single crystal
US5435263A (en) * 1993-03-29 1995-07-25 Sumitomo Sitix Corporation Method of producing single crystal
US5551978A (en) * 1993-03-29 1996-09-03 Sumitomo Sitix Corporation Apparatus for producing single crystal
US5840116A (en) * 1994-03-31 1998-11-24 Sumitomo Sitix Corporation Method of growing crystals

Also Published As

Publication number Publication date
JPH0480875B2 (ko) 1992-12-21

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