JPS61215162A - Positioning device for carrier truck - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a positioning device for a transport vehicle that transports workpieces between IC manufacturing facilities.

Conventional IC manufacturing equipment (hereinafter simply referred to as equipment) l'i is expensive and installed in a lean room. Additionally, advances in equipment are remarkable, and replacements occur frequently.

On the other hand, in order to maintain the level of cleanliness within a clean room, it is preferable that workpieces be transferred between facilities without being manned, rather than being unmanned.Also, it is required to be inexpensive, quick, and reliable, but no definitive system has been found.

Conventionally, rails were fixed to the ceiling, etc., and a trolley such as a train was run there, and a robot was used to pick up and pass workpieces between the equipment and the trolley, and the trolley was used as a self-propelled trolley equipped with a visual robot to move between the equipment. The workpiece is being transported.

Problems to be Solved by the Invention As mentioned above, when the rail is fixed to the ceiling, etc., trash falls down, so the rail needs to be surrounded by an enclosure, which can cause major damage to the equipment and make construction difficult. be. Also,
As mentioned above, if a robot is used to receive and pass workpieces between the equipment and the cart, a robot will be required for each piece of equipment, resulting in high costs and ineffective use of floor space. Furthermore, as mentioned above, when a self-propelled trolley equipped with a visual robot is used to transport workpieces between facilities, the positioning between the trolley and the equipment is not accurate, and the workpieces are transported while being corrected using a visual sensor. It is slow and expensive, m-sensory processing techniques are still not common, and it takes time to adapt to changes in the workpiece.

On the other hand, IC manufacturing equipment and the like are usually lightweight, and are often not fixed to the floor with anchors or the like.

Therefore, the position may shift due to some reason (earthquake, etc.).

Therefore, the present invention has been made in order to solve the above-mentioned problems of conventional collisions, and is a method for positioning a transport vehicle that has a simple structure and can transport workpieces smoothly and reliably. The purpose is to provide equipment.

Means for Solving the Problems In order to achieve this object, a transport vehicle positioning device according to the present invention is provided with a plurality of IC manufacturing equipment installed in a clean room, and a system installed to connect the IC manufacturing equipment. The above-mentioned ■c
It consists of a transport vehicle that transports workpieces between manufacturing facilities.
A trolley positioning block is provided on the front of each IC manufacturing equipment on the rail, and the rail and each IC manufacturing equipment are fixed with a plate, and a teaching play pack type robot is mounted on the transport trolley and the It is characterized in that it is equipped with a cart positioning block and a knock that allows charging.

EXAMPLES Hereinafter, detailed examples of the present invention will be described with reference to the drawings.

In the figure, two IC manufacturing facilities 1a and 1b are installed in the clean room. Each of these manufacturing facilities 1albK is connected to conveyor stations 1a, 1b for carrying in and out of workpieces by rails 2a and 2b laid on the floor. A transport vehicle 3 for transporting workpieces between the IC manufacturing facilities 1a and lb runs on the rails 2a and 20.

Bogie positioning blocks 4a and 4b are provided in front of each IC manufacturing equipment 1a and 1b of the rails 2a and 2b, and
The rails 2a, 2b and each IC manufacturing equipment 1a, 1b are fixed by plates 5a, 5b, respectively.

The blocks 4a and 4b are fixed to the rails 2a and 2b, and have holes 6a and 6o for positioning the transport vehicle 3.
are drilled in each.

The play) 5a and 5b have one end directly connected to the rail 2b.
and the other end is fixed to each of the IC manufacturing installation surfaces 1a and 1.
It is fixed to each IC manufacturing equipment 1a, 1b via leveling poles (7a, 7b) and nuts (not shown) for horizontal or height adjustment of the IC. Each of these IC manufacturing equipment 1a, 11) 1111 is fixed using leveling pole)
It is not limited to the intervention of 7a and 7b. In short, each To II!
! It is sufficient to use a fixing means that utilizes the screw holes already provided in the IC manufacturing equipment 1@1b 11O.

The transport vehicle 3 is battery-driven, and has knocks 8a and 8a with tapered tips that are vertically movable and can be engaged with the holes 6a and 6b of the blocks 4a and 4o, respectively.
8o is installed. A teaching playback type robot 9 is fixed on the upper surface of the cart 3.

Next, the operation of the positioning device for the transport vehicle 3 configured as described above will be explained.

In the figure, the transport vehicle 3 first stops in a rough position in a conventional manner at the transport station la of the IC manufacturing equipment 1a where the workpiece is carried out or carried in.

Thereafter, by lowering the knocks 8a and 8b, they fit straight into the block holes 6a and 60, or the tapered portions at their tips and the peripheries of the holes 6a and 6b fit together while colliding with each other. Precisely position the transport vehicle 3.

Next, the robot 9, which has been taught in advance, is operated to perform a workpiece loading (or unloading) operation, thereby completing a series of cycle operations. Next, perform an operation opposite to the above-mentioned operation to disengage the knocks 8a and 8D and the holes 6a and 6b, move the trolley 3 to another transport station 1b1, and then move the trolley 3 to the other transport station 1b1. A series of cycle operations such as rough position stop, fine positioning, robot operation, etc. are repeated.

During this operation, since the number of devices is small, the rail surface can be used as a passage for workers.

Effect of the invention According to the present invention, there are the following effects.

■ Since the rails are laid on the floor, the air in the clean room usually flows from top to bottom, so there is no need to enclose the rails.

■ Since a cart with a robot is used, there is no need to attach a robot or computer to each IC manufacturing facility.

■ Since the cart and the equipment are always precisely positioned, it can be handled by a regular robot, making it inexpensive and easy to change workpieces without requiring instructions from a vision engineer.

■ When introducing a conveyance system between existing facilities, there are few parts to be assembled on-site, and it is simple, so it is easy to introduce the conveyance system. In addition, there is no need to perform work such as drilling holes in the equipment on-site to generate waste.

[Brief explanation of the drawing]

The drawing is a perspective view showing an example of a positioning device for a transport vehicle according to the present invention. 1aalj) m * JC manufacturing equipment, 2a, 2b...
Rail, 3... Transport trolley, 4a, 4b... Dolly positioning block, 5a, 5b... Plate, 6a, 6b... Hole, 7a, 7b... Leveling bolt, 8a, 8b @ Knock, 9. Fist robot . (7 others)

Claims (1)

[Claims] A plurality of IC manufacturing facilities installed in a clean room, rails laid to connect these IC manufacturing facilities, and a transport vehicle that runs on the rails to transport workpieces between the IC manufacturing facilities. and each I of said rail
A trolley positioning block is provided in front of the C manufacturing equipment, and the rail and each IC manufacturing equipment are fixed with a plate, and a teaching play pack type robot is mounted on the transport trolley and engages with the trolley positioning block. A positioning device for a transport vehicle that is equipped with a knock that can be used.