JPS61215021A - Manufacture of mutilayer printed circuit board and its manufacturing device - Google Patents

Manufacture of mutilayer printed circuit board and its manufacturing device

Info

Publication number
JPS61215021A
JPS61215021A JP60055886A JP5588685A JPS61215021A JP S61215021 A JPS61215021 A JP S61215021A JP 60055886 A JP60055886 A JP 60055886A JP 5588685 A JP5588685 A JP 5588685A JP S61215021 A JPS61215021 A JP S61215021A
Authority
JP
Japan
Prior art keywords
steam
heating
cooling
temperature
cooling water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60055886A
Other languages
Japanese (ja)
Inventor
Kaoru Ono
薫 小野
Takeshi Shimazaki
嶋崎 威
Hideyasu Murooka
室岡 秀保
Akemi Miyashita
宮下 明己
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60055886A priority Critical patent/JPS61215021A/en
Publication of JPS61215021A publication Critical patent/JPS61215021A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a multilayer printed circuit board with stabilized high-quality, by a method wherein a temperature rise and heating of a hot press are performed by a separate heat source after the same has been heated through steam, which is cooled through the steam after that and cooled further by making use of the steam and cooling water jointly. CONSTITUTION:A tube course wherein steam and water flow commonly is formed within a pair of a top and bottom hot platens 2, 3, which are provided with a built-in electric heater controlled by an adjusting device. A plurality of sheets of inner layer bases unified through an insulating adhesive layer are heated and pressurized between the hot platens 2, 3, laminated and stuck according to an established pressure pattern and temperature pattern after they have been carried in on the hot platen 3. The temperature is risen up to a preset one t1 deg.C through steam heating while an opening of a steam inlet valve 10 is being controlled after that, and at the time of cooling after holding for a fixed period of time at a preset temperature t2 deg.C through electric heater heating, the steam is streamed for the fixed period of time based on a preset value and then cooling is perform by making use of the steam and cooling water jointly.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は多層プリント配線板の製造方法およびその製造
装置に係り、特にプリント配線板の積層接着に好適な多
層化成形方法およびその装、 置に関する。     
          1.1〔発明の背景〕 従来の多層プリント配線板の積層接着工程における冷却
方法として、例えば特開昭56−58299号公報に示
されるように、冷却時に冷却水供給弁を全開とし、冷却
水供給電磁弁を間欠的に開閉してホットプレスを冷却す
るための冷却水を間欠的に供給し、降温速度を遅くする
方法が知られている。この方法は、多層プリント配線板
の寸法伸縮量を小さくすることには有効であったO しかし、この方法は降温速度を定量的に制御しているわ
けではないので、任意の降温速度で冷却することはでき
ない。すなわち冷却水が流れている間の降温速度は大き
くなり、冷却水が流れていない間の降温速度は小さくな
り、一定の降温速度を得ることは難しい。また冷却水の
温度の変化によっても降温速度が変ってくるという問題
もある。この降温速度は、多層プリント配線板のそり、
ねじれ量、寸法伸縮量および内部残留応力に微妙な影響
を与えるので、接着する多層プリント板ごとに降温速度
が変化すると、そり、ねじれ量、寸法伸縮量および内部
残留応力も変化し、品質管理上問題であった。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a method for manufacturing a multilayer printed wiring board and an apparatus for manufacturing the same, and more particularly to a method for multilayer molding suitable for lamination bonding of printed wiring boards, and an apparatus and apparatus for the same. .
1.1 [Background of the Invention] As a conventional cooling method in the lamination bonding process of multilayer printed wiring boards, for example, as shown in Japanese Patent Laid-Open No. 56-58299, the cooling water supply valve is fully opened during cooling, and the cooling water is A known method is to intermittently open and close a supply solenoid valve to intermittently supply cooling water for cooling a hot press, thereby slowing down the temperature drop rate. This method was effective in reducing the amount of dimensional expansion and contraction of multilayer printed wiring boards.However, since this method does not quantitatively control the cooling rate, it is possible to cool at an arbitrary cooling rate. It is not possible. That is, the temperature drop rate increases while the cooling water is flowing, and the temperature decrease rate decreases while the cooling water is not flowing, making it difficult to obtain a constant temperature drop rate. There is also the problem that the rate of temperature drop changes depending on changes in the temperature of the cooling water. This cooling rate is due to the warpage of the multilayer printed wiring board,
This has a subtle effect on the amount of torsion, amount of dimensional expansion and contraction, and internal residual stress, so if the cooling rate changes for each multilayer printed board to be bonded, the amount of warpage, amount of twist, amount of dimensional expansion and contraction, and internal residual stress will also change, which is a problem for quality control. That was a problem.

また、冷却媒体として冷却水だけを用いることは、加熱
媒体を蒸気とし加熱温度を例えば最高170°C程度と
したホットプレスには適轟であるが、その他の加熱媒体
、例えば電気ヒータを用いて加熱温度を最高300’C
程度にするホットプレスについては、冷却初期に配管や
熱盤内の管経路で大きなウオータノ・ンマを引き起こし
安全上問題であった。
In addition, using only cooling water as a cooling medium is suitable for hot presses where the heating medium is steam and the heating temperature is, for example, about 170°C maximum, but using other heating media, such as an electric heater, is suitable. Heating temperature up to 300'C
Regarding hot presses that reduce heat to a certain degree, large amounts of water were generated in the pipes and the pipe paths inside the heating plate during the early stage of cooling, which was a safety problem.

〔発明の目的〕[Purpose of the invention]

本発明の目的は、かかる従来方法における多層プリント
配線板の品質管理上の問題点や装置の安全上の問題を解
決した多層プリント配線板・の多層化成形方法とその製
造装置を提供することにある。
An object of the present invention is to provide a multilayer molding method for a multilayer printed wiring board and an apparatus for manufacturing the same, which solves the problems in quality control of multilayer printed wiring boards and the safety problems of the equipment in the conventional methods. be.

〔発明の概要〕[Summary of the invention]

本発明は、ホットプレスを蒸気加熱した後、別の加熱源
によってさらに昇温加熱し、その後・。
In the present invention, after heating the hot press with steam, the temperature is further heated using another heating source, and then...

蒸気によって冷却し、その後蒸気と冷却水とを併用する
ことによって冷却する多層プリント配線板の製造方法を
特徴とする。
The present invention is characterized by a method for manufacturing a multilayer printed wiring board that is cooled by steam and then cooled by using steam and cooling water in combination.

また本発明は、ホットプレスを蒸気加熱する手段と、さ
らに昇温加熱する別の加熱手段と、ホットプレスを冷却
水によって冷却する手段と、ホットプレスの熱盤の温度
を検出しながら蒸気加熱後に上記側の加熱手段によって
加熱し、その後蒸気によって冷却し、その後蒸気と冷却
水とを併用することによって熱盤を冷却するよう制御す
る手段とを有する多層プリント配線板の製造装置を特徴
とする。
The present invention also provides a means for heating the hot press with steam, another heating means for further heating the hot press, a means for cooling the hot press with cooling water, and a means for heating the hot press with steam while detecting the temperature of the hot platen of the hot press. The present invention is characterized by an apparatus for manufacturing a multilayer printed wiring board, which includes means for controlling the heating plate to be heated by the above-mentioned heating means, then cooled by steam, and then cooled by using both steam and cooling water.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の一実施例について図面を用いて説明する
An embodiment of the present invention will be described below with reference to the drawings.

第1図は、加熱冷却機構を示し、蒸気、水および空気の
配管経路および弁の配置を表わしている。第2図は、蒸
気の制御機構を示す。第3図は、冷却水の制御機構を示
す。第4図は、多層プリント配線板の収容されたホット
プレスを・・温度制御をしながら積層接着する時の設定
温度パターンのモデルおよびそれに対応した加熱冷却機
構の制御(各弁の開閉、電気ヒータのオン/オフのタイ
ムチャートを示す。
FIG. 1 shows the heating and cooling mechanism, and represents the piping routes for steam, water and air, and the arrangement of valves. FIG. 2 shows the steam control mechanism. FIG. 3 shows the cooling water control mechanism. Figure 4 shows a model of the set temperature pattern for laminating and bonding a hot press containing multilayer printed wiring boards while controlling the temperature, and the corresponding control of the heating and cooling mechanism (opening/closing of each valve, electric heater, etc.). The on/off time chart is shown below.

第1図において、1はホットプレスであり、2.3は上
下一対の熱盤(一般には複数組であるが、1組の例を図
示する)である。熱盤2.3内には、蒸気および水が共
通に流れる管経路が形成されている。また、熱盤内には
調節器(図示せず)で制御される電気ヒータが内蔵され
ている。絶縁性接着剤層を介して一体化された複数枚の
内層基板は、熱盤3上に搬入された後、油圧装置(図示
せず)の作用で押し上げられ、設定された圧カバターン
および温度パターンに従い、熱盤2.6間で加熱加圧さ
れ、積層接着される。
In FIG. 1, numeral 1 is a hot press, and numeral 2.3 is a pair of upper and lower heating plates (generally there are a plurality of sets, but one set is shown as an example). A pipe path is formed in the hot platen 2.3 through which steam and water commonly flow. Further, an electric heater controlled by a regulator (not shown) is built into the heating plate. The plurality of inner-layer substrates integrated via an insulating adhesive layer are carried onto the heating platen 3, and then pushed up by the action of a hydraulic device (not shown) to create a set pressure cover turn and temperature pattern. According to the above, heat and pressure are applied between the hot platens 2 and 6, and the layers are laminated and bonded.

次に同じく第1図によって各弁の開閉制御について説明
する。37はドライエアー源(たとえば5 KJI/ 
cllGのエアーの供給源)であり、ドライエアーはス
トップ弁38およびフィルタ69゜を通って、減圧弁4
0でたとえば3.5’r/iGに減圧された後、各電磁
弁16.17・1B・19・20および21に供給され
る。41は圧力計である。22はサイレンサーである。
Next, the opening/closing control of each valve will be explained with reference to FIG. 1 as well. 37 is a dry air source (for example, 5 KJI/
cllG air supply source), and the dry air passes through the stop valve 38 and the filter 69° to the pressure reducing valve 4.
After the pressure is reduced to, for example, 3.5'r/iG at 0, it is supplied to each electromagnetic valve 16, 17, 1B, 19, 20 and 21. 41 is a pressure gauge. 22 is a silencer.

各電磁弁はシーケンス制御によりオン/オフ制御が行わ
れ、電磁弁16がオンの時は電空ポジショナ26を通じ
てダイヤフラム弁(以下蒸気人口弁10とよぶ)に、電
磁弁17がオンの時は電空ポジショナ24を通じてダイ
ヤフラム弁(以下冷却水人口弁12とよぶ)に、電磁弁
18がオンの時はダイヤフラム弁(以下ブロー絞り弁1
3とよぶ)に、電磁弁19がオンの時はダイヤフラム弁
(以下ブロー出目弁14とよぶ)に、電磁弁20がオン
の時はダイヤフラム弁(以下ドレン出口弁15とよぶ)
に、それぞれドライエアーを供給する。ここでダイヤフ
ラム弁とは、空気圧で作動する流量調節弁のことである
。また、電空ポジショナとは、ダイヤプラム弁に取付け
、後述する指示調節計からの信号電流により内蔵の空気
圧パイロットパルプを作動させ、供給されたドライエア
ー圧を調節してダイヤフラム弁に供給する機構であり、
ダイヤプラム弁の動きを制御しドライエアーの流量を制
御する機器のことである。
Each solenoid valve is on/off controlled by sequence control, and when the solenoid valve 16 is on, the diaphragm valve (hereinafter referred to as steam population valve 10) is connected to the diaphragm valve (hereinafter referred to as steam population valve 10) through the electropneumatic positioner 26 when the solenoid valve 16 is on, and when the solenoid valve 17 is on, the electric power is When the solenoid valve 18 is on, the diaphragm valve (hereinafter referred to as the cooling water valve 12) is connected to the diaphragm valve (hereinafter referred to as the cooling water valve 12) through the empty positioner 24.
3), when the solenoid valve 19 is on, the diaphragm valve (hereinafter referred to as the blow outlet valve 14), and when the solenoid valve 20 is on, the diaphragm valve (hereinafter referred to as the drain outlet valve 15).
Supply dry air to each. Here, the diaphragm valve refers to a flow control valve operated by air pressure. An electro-pneumatic positioner is a mechanism that is attached to a diaphragm valve and uses a signal current from an indicating controller (described later) to operate a built-in pneumatic pilot pulp to adjust the supplied dry air pressure and supply it to the diaphragm valve. can be,
This is a device that controls the movement of the diaphragm valve and the flow rate of dry air.

次に同じく第1図によって蒸気および冷却水の流れる経
路について説明する。たとえば9V4f/dG、175
°Cの蒸気は図示する蒸気入口から流入し、ストップ弁
25、ストレーナ26および蒸気人口弁10を通り、ヘ
ッダー4に流れ込む。そして蒸気は、各熱盤2.5に均
等に分配されるように流入される。第1図の例では、蒸
気の一方の流れは、ヘッダー4からストップ弁6を通り
熱盤2内の管経路を流れて熱交換を行い、ストップ弁8
を通ってヘッダー5に流れ込む。もう一方の蒸気の流れ
は、ヘッダー4か−らストップ弁7を通り熱盤3内の管
経路を流れて熱交換を行い、ストップ弁9を通ってヘッ
ダー5に流れ込む。熱盤の温度が蒸気温度より低い時は
、熱交換により蒸気は凝縮水になる。ヘッダー5に集ま
った蒸気は、流れ出てストレー1゜ナ32を通り、ブロ
ー絞り弁13またはブロー出口弁14あるいはドレン出
口弁15のウチでシーケンス制御により開いている弁を
通過する。
Next, the paths through which steam and cooling water flow will be explained with reference to FIG. For example, 9V4f/dG, 175
Steam at 0.degree. C. enters from the steam inlet shown, passes through the stop valve 25, the strainer 26 and the steam manifold valve 10, and flows into the header 4. The steam then flows into each hot platen 2.5 so as to be evenly distributed. In the example shown in FIG. 1, one stream of steam flows from the header 4 through the stop valve 6 and through the pipe path inside the heating platen 2 to exchange heat, and
flows into header 5 through. The other stream of steam flows from the header 4 through the stop valve 7 through the pipe path in the hot platen 3 for heat exchange, and then flows through the stop valve 9 into the header 5. When the temperature of the hot platen is lower than the steam temperature, the steam becomes condensed water due to heat exchange. The steam collected in the header 5 flows out, passes through the strainer 1° 32, and passes through the blow throttle valve 13, the blow outlet valve 14, or the drain outlet valve 15, which are opened under sequence control.

ブロー絞り弁1′5を通った蒸気は絞り弁33を通り図
示したブロー出口の方へ流れる。またブロー出口弁14
を通った蒸気は、ストップ弁34を通って図示したブロ
ー出口の方へ流れる。またドレン出口弁15を通った蒸
気は、スチームトラップ66を通り凝縮水になってスト
ップ弁55を通り図示したドレン出口の方へ流れる。
The steam passing through the blow throttle valve 1'5 flows through the throttle valve 33 towards the blow outlet shown. Also, the blow outlet valve 14
The steam thus passed flows through the stop valve 34 towards the blow outlet shown. Further, the steam that has passed through the drain outlet valve 15 passes through a steam trap 66, becomes condensed water, and flows through the stop valve 55 toward the illustrated drain outlet.

たとえば4 Ky f / r、tl O120cCノ
冷却水&’! 図示した冷却水入口から流入し、ストッ
プ弁30、ストレーナ61および冷却水人口弁12を通
ってヘッダー5に流れ込む。そして冷却水は各熱盤2、
ろに均等に分配されこれらを冷却″fろ。
For example, 4 Ky f/r, tl O120cC cooling water &'! The cooling water enters from the illustrated cooling water inlet and flows into the header 5 through the stop valve 30, the strainer 61, and the cooling water artificial valve 12. And the cooling water is for each heating plate 2,
Cool them by evenly distributing them into the filter.

第1図の例では、上記した蒸気の流れとまったく逆経路
で熱盤2.3内を流れて熱変換を行い、ヘッダー4に流
れ込む。ヘッダ4に集まった冷却水は、これを流れ出て
ストレーナ29、冷却水出口弁11およびストップ弁2
8を通って図、1示した冷却水出口の方へ流れる。
In the example shown in FIG. 1, the steam flows through the hot platen 2.3 in a path completely opposite to the flow of steam described above, undergoes heat conversion, and then flows into the header 4. The cooling water collected in the header 4 flows out to the strainer 29, the cooling water outlet valve 11 and the stop valve 2.
8 and flows toward the cooling water outlet shown in Figure 1.

ここで蒸気をヘッダ4からヘッダ5に流す理由は、熱交
換の結果発生した凝縮水を重力の作用で早期排出する為
である。また冷却水をヘッダ5からヘッダ41C向けて
流す理由は、管経路内に十分冷却水を満たし管内面から
均等に熱交換を行う為である。
The reason why the steam is allowed to flow from the header 4 to the header 5 is to quickly discharge condensed water generated as a result of heat exchange by the action of gravity. The reason why the cooling water flows from the header 5 toward the header 41C is to sufficiently fill the pipe path with cooling water and to perform heat exchange evenly from the inner surface of the pipe.

次に第2図によって蒸気の制御機構について説明する。Next, the steam control mechanism will be explained with reference to FIG.

101はあらかじめ設定温度パターンを入力してあり、
運転時設定温度パターンを指令するパーソナルコンビー
ータであ6゜103は高温用のポテンショメーター07
および低温用のボテンシロメータ108の蒸気加熱用の
ポテンショ変換器であり、一定の信号電流を発生する。
101 has the set temperature pattern input in advance.
6゜103 is a personal converter that commands the set temperature pattern during operation. Potentiometer 07 for high temperature.
and a potentiometer converter for steam heating of the potentiometer 108 for low temperatures, which generates a constant signal current.

パーソナルコンピューター01にヨル運転と蒸気加熱用
のポテンショ変換器106による運転とは、切換スイッ
チにより選択される。
The automatic operation of the personal computer 01 and the operation using the potentiometer converter 106 for steam heating are selected by a changeover switch.

106は、熱盤2の温度を検出する熱電対である。なお
熱盤2の代りに熱盤3の温度を検出してもよい。102
は、パーソナルコンピューター01あるいは蒸気加熱用
のポテンショ変換器10ろから指令された温度と熱電対
106で検出した温度とを比較し、PiD制御により電
空ポジショナ26に信号電流を送る蒸気指示調節計であ
る。104は、蒸気冷却温度設定用のポテンショメータ
ー09の蒸気冷却用のポテンショ変換器であり、蒸気冷
却時に電空ポジショナ25に一定の信号電流を送る。電
空ポジショナ25は蒸気指示調節計102あるいは蒸気
冷却用のポテンショ変換器104の信号電流に基づき、
第1図に示した蒸気人口弁10の動きを制御する。
106 is a thermocouple that detects the temperature of the heating plate 2. Note that the temperature of the heating platen 3 may be detected instead of the heating platen 2. 102
is a steam indicating controller that compares the temperature commanded from the personal computer 01 or the steam heating potentiometer 10 with the temperature detected by the thermocouple 106, and sends a signal current to the electropneumatic positioner 26 by PiD control. be. 104 is a potentiometer converter for steam cooling of the potentiometer 09 for steam cooling temperature setting, and sends a constant signal current to the electropneumatic positioner 25 during steam cooling. The electropneumatic positioner 25 is based on the signal current of the steam indicating controller 102 or the potentiometer converter 104 for steam cooling.
The movement of the steam valve 10 shown in FIG. 1 is controlled.

次に第3図によって冷却水の制御機構につい・て説明す
る。113は熱盤3の温度を検出する熱電対である。な
お熱盤6の代Vに熱盤2の温。
Next, the cooling water control mechanism will be explained with reference to FIG. A thermocouple 113 detects the temperature of the heating plate 3. In addition, the temperature of heating plate 2 is in the range V of heating plate 6.

度を検出してもよい。110は、パーソナルコンビーー
タ101から指令された温度と熱電対113で検出した
温度とを比較し、P 1.D制御により電空ポジショナ
24に信号電流を送る冷却水指示調節計である。111
は冷却水量設定1、のためのポテンショメータ114に
ついでのボテンシ冒変換器であり、冷却水による熱盤の
冷却時に電空ポジショナ24に一定の信号電流を送る。
The degree may also be detected. 110 compares the temperature commanded from the personal converter 101 and the temperature detected by the thermocouple 113, P1. This is a cooling water indicating controller that sends a signal current to the electro-pneumatic positioner 24 under D control. 111
is a potentiometer converter next to the potentiometer 114 for setting the amount of cooling water 1, and sends a constant signal current to the electropneumatic positioner 24 when the hot platen is cooled by the cooling water.

電空ポジショナ24は冷却水指示調節計110あるいは
冷却水用のポテンショ交換器 。
The electro-pneumatic positioner 24 is a cooling water indicating controller 110 or a cooling water potentiometer exchanger.

111の信号電流に基づき、第1図に示した冷却水人口
弁12の動きを制御する。
Based on the signal current 111, the movement of the cooling water artificial valve 12 shown in FIG. 1 is controlled.

次に第4図によって多層プリント配線板をホットプレス
で温度制御しながら積層接着する時の設定温度パターン
のモデルおよびそれに対応した加熱冷却機構の制御方法
(各弁の開閉、電気ヒータのオン/オフ)について説明
する。第4図(atは縦軸に温度、横軸に時間をとって
設定温度パターンのモデルを図示したものである。
Next, Figure 4 shows a model of the set temperature pattern when laminating and bonding multilayer printed wiring boards while controlling the temperature using a hot press, and a corresponding control method for the heating and cooling mechanism (opening/closing each valve, turning on/off the electric heater). ) will be explained. FIG. 4 (at shows a model of a set temperature pattern with temperature on the vertical axis and time on the horizontal axis.

また、時間の経過とともに区間を設け、各区間jにおけ
る加熱および冷却の方法を示している。
Furthermore, sections are provided over time, and heating and cooling methods in each section j are shown.

第4図1alは第4図1alの時間経過に対応させて、
時間の経過および区間の推移とともに行われる各弁の開
閉および電気ヒーターオン/オフの制御の推移を示すも
のである。        1・・まず最初に蒸気人口
弁10およびドレン出口弁15を全開にして初期ブロー
を10秒行い・熱盤内の残留水を蒸気で押し流f、その
後蒸気人口弁10の開度を制御しながら蒸気加熱を行い
、蒸気設定温度t、。cまで昇温した後一定温度を保持
する。蒸気加熱を行っている間ブロー出口弁14を30
秒に1回2秒間だけ全開にして新しい蒸気な熱盤2.3
内に引き込み、ブロー出口弁14が開になると同時にド
レン出口弁15を2.5秒間だけ閉じ、それまで同舟を
全開にすることによって熱盤内で熱交換した後出てきた
蒸気あるいは凝縮水を水に変えて流す。
FIG. 4 1al corresponds to the time course of FIG. 4 1al,
It shows the opening/closing of each valve and the on/off control of the electric heater as time passes and the interval changes. 1. First, the steam population valve 10 and the drain outlet valve 15 are fully opened and initial blowing is performed for 10 seconds, and the residual water in the hot plate is pushed away by steam f, and then the opening degree of the steam population valve 10 is controlled. Steam heating is performed while the steam temperature is set at t. After raising the temperature to c, a constant temperature is maintained. While performing steam heating, the blow outlet valve 14 is closed at 30°C.
A new steam heating plate that opens fully for 2 seconds once every second 2.3
At the same time as the blow outlet valve 14 opens, the drain outlet valve 15 is closed for 2.5 seconds, and the steam or condensed water that comes out after heat exchange in the hot platen is removed by keeping the boat fully open until then. Change it to water and flush it away.

一般に熱盤2.3を蒸気設定温度t 、 ’cに保持し
てから、絶縁性接着剤層を介して一体化された複数枚の
内層基板をホットプレスの熱盤2、−。
Generally, the hot platen 2.3 is held at a steam set temperature t,'c, and then a plurality of inner layer substrates integrated via an insulating adhesive layer are hot-pressed into the hot platen 2.3.

3間に搬入し、加熱加圧により積層接着を開始する。そ
の後熱盤温度を一定に保ち、その間絶縁性接着剤層の粘
度が一度下がり、ゲル化が開始する前に昇圧し、複数枚
の内層基板間の空間を完全に埋め接着する。その後絶縁
性接着剤層、。
3, and laminated adhesion is started by applying heat and pressure. Thereafter, the temperature of the heating platen is kept constant, during which time the viscosity of the insulating adhesive layer decreases once, and before gelation begins, the pressure is increased to completely fill the spaces between the plurality of inner layer substrates and bond them together. Insulating adhesive layer, then.

の重合反応が進み硬化収縮していくが、重合反応をより
速くより十分に行わせる為に昇温する。
As the polymerization reaction progresses, the material hardens and shrinks, but the temperature is raised in order to make the polymerization reaction occur faster and more fully.

一般に本機構で使用される蒸気は、9Ktf/dG17
5cc程度なので、それ以上の温度で加熱を必要とする
材料に対しては、その他の加熱媒体を必要とし、本実施
例では電気ヒータを用いて電気ヒータ設定温度t2まで
昇温する。この間172’Cから180°Cまでは蒸気
と電気ヒータとを併用して加熱する。熱電対106が1
800Cを検出すると、蒸気人口弁10およびドレン、
12 出口弁15を閉じる。しかしブロー出目弁14は、熱盤
内管経路の圧力を開放する為60秒に1回2秒間だけ全
開にする。
Generally, the steam used in this mechanism is 9Ktf/dG17
Since the temperature is approximately 5 cc, other heating medium is required for materials that require heating at a temperature higher than that, and in this embodiment, an electric heater is used to raise the temperature to the electric heater set temperature t2. During this time, it is heated from 172'C to 180°C using both steam and an electric heater. Thermocouple 106 is 1
When 800C is detected, the steam valve 10 and the drain,
12 Close outlet valve 15. However, the blow outlet valve 14 is fully opened for only 2 seconds once every 60 seconds in order to release the pressure in the pipe path inside the heating plate.

次に電気ヒータ加熱によって一定時間電気ヒータ設定温
度t2゜cに保持した後、電気ヒータを−・オフにし、
冷却前にブロー出目弁14を10秒。
Next, after heating the electric heater to maintain it at the electric heater set temperature t2゜c for a certain period of time, the electric heater is turned off.
Before cooling, close the blow valve 14 for 10 seconds.

間全開にし、ブローを行う。次に蒸気人口弁10を蒸気
冷却温度を設定したポテンショメータ109で設定した
値に基づいて開き、一定時間蒸気を流す。なお蒸気冷却
時にブロー絞り弁’ 31f1は全開であり、第1図で
示した絞り弁33を適。
Fully open and blow. Next, the steam manifold valve 10 is opened based on the value set by the potentiometer 109 that sets the steam cooling temperature, and steam is allowed to flow for a certain period of time. Note that the blow throttle valve 31f1 is fully open during steam cooling, so the throttle valve 33 shown in FIG. 1 is suitable.

当に調節することにより、毎分2°C程度の冷却速度を
得る。また蒸気冷却時、ブロー出口弁14は60秒に1
回2秒間だけ全開にし、ドレン出口弁15はブロー出目
弁14が開になると同時1−1に2.5秒間だけ閉じ、
蒸気冷却中のそれ以外は全開にする。
By proper adjustment, cooling rates of the order of 2°C per minute can be obtained. Also, during steam cooling, the blow outlet valve 14 closes once every 60 seconds.
The drain outlet valve 15 is fully opened for 2 seconds at the same time as the blow outlet valve 14 is opened, and the drain outlet valve 15 is closed for 2.5 seconds at 1-1 at the same time.
Open fully except during steam cooling.

次に熱電対106が172℃を検出すると、それ以後1
00℃に降温するまでは蒸気と冷却水とを併用して冷却
する。まず冷却水人口弁12゜および冷却水出口弁11
が60秒間開いて、冷却し、この間はその他の弁は閉じ
ている。なお冷却水人口弁12の開度は、パーソナルコ
ンピュータ101の指令に基づき冷却水指示調節計11
0により電空ポジショナ24を介して制御−1している
。そして次に蒸気人口弁10およびド。
Next, when the thermocouple 106 detects 172°C, 1
Steam and cooling water are used together for cooling until the temperature drops to 00°C. First, the cooling water population valve 12° and the cooling water outlet valve 11
is open for 60 seconds to cool, while the other valves are closed. The opening degree of the cooling water population valve 12 is determined by the cooling water indication controller 11 based on the command from the personal computer 101.
0, it is controlled -1 via the electropneumatic positioner 24. And next, steam population valve 10 and de.

レン出口弁15が10秒間開き、冷却速度を小さくする
ことによって冷却水だけの冷却では得られない降温速度
を得る。この間はその他の弁は閉じている。この動作を
温度100°Cを検出、1するまで繰り返し、100°
Cを検出してからは冷却水だけで冷却を行5゜熱電対1
16が60℃を検出すると制御は終了し、積層接着終了
時間まで冷却水人口弁12および冷却水出目弁11を全
開にして冷却する。積層接着終了時間、−。
The drain outlet valve 15 is opened for 10 seconds, and by reducing the cooling rate, a temperature lowering rate that cannot be obtained by cooling only with cooling water is obtained. During this time, other valves are closed. This operation is repeated until a temperature of 100°C is detected and 1 is reached.
After detecting C, cool it with only cooling water and connect 5゜thermocouple 1.
16 detects 60° C., the control ends, and the cooling water population valve 12 and the cooling water outlet valve 11 are fully opened to continue cooling until the end time of lamination adhesion. Lamination adhesion end time, -.

になるとホットプレスの圧力抜きが行われ、熱盤2.6
間が開き、積層接着を終了する。
When the pressure of the hot press reaches 2.6, the pressure of the hot press is released, and the
A gap opens and the lamination adhesion is completed.

本実施例によれば、精密な温度制御システムの下に冷却
時に蒸気および冷却水を併用したことにより、室温から
250cc程度までの間で昇温速度および降温速度を毎
分2°Cから8°Cまで。
According to this example, by using steam and cooling water together during cooling under a precise temperature control system, the temperature increase rate and temperature decrease rate can be increased from 2°C to 8°C per minute from room temperature to about 250cc. Up to C.

の間において任意に設定し、かつ高精度に制御゛できる
。また昇温時および冷却時の熱盤の表面・温度のばらつ
きについて、従来と比較して昇温・時ハ30°Cカラ6
°Cvc、冷却時は50°cカラ20)0Cに大幅に低
減することができる。よって木製。
It can be set arbitrarily and controlled with high precision between the two. In addition, with regard to variations in the surface and temperature of the heating plate during heating and cooling, the heating and cooling times were 30°C compared to the conventional method.
°Cvc can be significantly reduced to 50 °C (20) 0C during cooling. So it's wooden.

置で積層接着した多層プリント配線板は、そり、ねじれ
等の基板変形、寸法伸縮量および基板内部残留応力が従
来と比較して小さく、安定した。
The multilayer printed wiring board, which is laminated and bonded at the same time, is stable and has less board deformation such as warpage and twisting, dimensional expansion and contraction, and residual stress inside the board compared to conventional boards.

品質を得ることができる。         i。You can get quality. i.

また高温域での冷却方法として、蒸気冷却を。Steam cooling is also used as a cooling method in high temperature ranges.

適用したことにより、ウォータハンマ等の危険。Risk of water hammer etc. due to application.

かたく安全な作業を行うことができる。Able to perform hard and safe work.

〔発明の効果〕〔Effect of the invention〕

以上述べたように、本発明によれば、精密な1゜温度制
御システムの下に冷却時の冷却媒体とし。
As described above, according to the present invention, the cooling medium is used as a cooling medium under a precise 1° temperature control system.

て蒸気および冷却水を併用するので、安定した。It is stable because steam and cooling water are used together.

高品質の多層プリント配線板を得られるという。It is said that high-quality multilayer printed wiring boards can be obtained.

効果がある。effective.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は加熱冷却機構を示す配管図、第2図は蒸気の制
御機構を示すブロック図、第3図は冷却水の制御機構を
示すブロック図、第4図1al・は設定温度パターンの
モデルを示す図、第4図・(b+は対応する加熱冷却機
構の制御の推移を示−「コタイムチャートである。 1・・・ホットプレス、2.6・・・熱盤、10・・・
蒸気。 大口弁、11・・・冷却水出口弁、12・・・冷却水人
口弁、16・・・ブロー絞り弁、14・・・ブロー出口
。 弁、15・・・ドレン出口弁、25.24・・・電空ボ
II+ジショナ、101・・・パーソナルコンピュータ
、。 102・・・蒸気指示調節計、106.104・・・ポ
。 テンシ日変換器、106.113・・・熱電対、 。 107.108.109・・・ボテンシ厘メータ、11
0・・・冷却水指示調節計、111・・・ポテンシ、。 1変換器、114・・・ポテンショメータ、16 ・
Fig. 1 is a piping diagram showing the heating and cooling mechanism, Fig. 2 is a block diagram showing the steam control mechanism, Fig. 3 is a block diagram showing the cooling water control mechanism, and Fig. 4 is a model of the set temperature pattern. Figure 4 (b+ is a time chart showing the control transition of the corresponding heating/cooling mechanism. 1... Hot press, 2.6... Hot plate, 10...
vapor. Large mouth valve, 11... Cooling water outlet valve, 12... Cooling water population valve, 16... Blow throttle valve, 14... Blow outlet. Valve, 15...Drain outlet valve, 25.24...Electro-pneumatic valve II + positioner, 101...Personal computer. 102...Steam indicating controller, 106.104...Po. Temperature converter, 106.113...Thermocouple, . 107.108.109...Potency meter, 11
0...Cooling water indicator controller, 111...Potency. 1 converter, 114...potentiometer, 16 ・

Claims (1)

【特許請求の範囲】 1、ホットプレス内で複数の内層基材を加熱および加圧
することによって多層プリント配線板を製造する方法に
おいて、前記ホットプレスを蒸気加熱した後、別の加熱
源によってさらに昇温加熱し、その後蒸気によって冷却
し、その後蒸気と冷却水とを併用することによって冷却
することを特徴とする多層プリント配線板の製造方法。 2、ホットプレス内で複数の内層基材を加熱および加圧
することによって多層プリント配線板を製造する装置に
おいて、前記ホットプレスを蒸気加熱する手段と、さら
に昇温加熱する別の加熱手段と、前記ホットプレスを冷
却水によって冷却する手段と、前記ホットプレスの熱盤
の温度を検出しながら蒸気加熱後に前記別の加熱手段に
よって加熱し、その後蒸気によって冷却し、その後蒸気
と冷却水とを併用することによって前記熱盤を冷却する
よう制御する手段とを有することを特徴とする多層プリ
ント配線板の製造装置。
[Claims] 1. In a method for manufacturing a multilayer printed wiring board by heating and pressurizing a plurality of inner layer substrates in a hot press, after the hot press is heated with steam, the temperature is further increased by another heating source. A method for manufacturing a multilayer printed wiring board, which comprises heating the board, then cooling it with steam, and then cooling it by using a combination of steam and cooling water. 2. In an apparatus for manufacturing a multilayer printed wiring board by heating and pressurizing a plurality of inner layer base materials in a hot press, a means for heating the hot press with steam, another heating means for further heating the hot press to an elevated temperature; A means for cooling a hot press with cooling water, heating with steam by the other heating means after heating with steam while detecting the temperature of a hot plate of the hot press, and then cooling with steam, and then using steam and cooling water together. A manufacturing apparatus for a multilayer printed wiring board, comprising means for controlling the heating platen so as to cool the heating platen.
JP60055886A 1985-03-22 1985-03-22 Manufacture of mutilayer printed circuit board and its manufacturing device Pending JPS61215021A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60055886A JPS61215021A (en) 1985-03-22 1985-03-22 Manufacture of mutilayer printed circuit board and its manufacturing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60055886A JPS61215021A (en) 1985-03-22 1985-03-22 Manufacture of mutilayer printed circuit board and its manufacturing device

Publications (1)

Publication Number Publication Date
JPS61215021A true JPS61215021A (en) 1986-09-24

Family

ID=13011582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60055886A Pending JPS61215021A (en) 1985-03-22 1985-03-22 Manufacture of mutilayer printed circuit board and its manufacturing device

Country Status (1)

Country Link
JP (1) JPS61215021A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006159643A (en) * 2004-12-07 2006-06-22 Shisuko:Kk Heating/cooling system for mold for hot press and heating/cooling method
JP2012245745A (en) * 2011-05-30 2012-12-13 Japan Steel Works Ltd:The Melt fine-transfer molding method, and melt fine-transfer molding device
JPWO2019138862A1 (en) * 2018-01-12 2020-11-19 東レ株式会社 Heating device for thermoplastic resin sheet and manufacturing method for thermoplastic resin molded product

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006159643A (en) * 2004-12-07 2006-06-22 Shisuko:Kk Heating/cooling system for mold for hot press and heating/cooling method
JP2012245745A (en) * 2011-05-30 2012-12-13 Japan Steel Works Ltd:The Melt fine-transfer molding method, and melt fine-transfer molding device
JPWO2019138862A1 (en) * 2018-01-12 2020-11-19 東レ株式会社 Heating device for thermoplastic resin sheet and manufacturing method for thermoplastic resin molded product

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