JPS61213635A - Curved piezoelectric oscillator type level sensor - Google Patents

Curved piezoelectric oscillator type level sensor

Info

Publication number
JPS61213635A
JPS61213635A JP5546885A JP5546885A JPS61213635A JP S61213635 A JPS61213635 A JP S61213635A JP 5546885 A JP5546885 A JP 5546885A JP 5546885 A JP5546885 A JP 5546885A JP S61213635 A JPS61213635 A JP S61213635A
Authority
JP
Japan
Prior art keywords
level sensor
piezoelectric
oscillator
piezoelectric vibrator
curved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5546885A
Other languages
Japanese (ja)
Inventor
Akio Kumada
熊田 明生
Sadaji Tashiro
田代 貞二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maxell Ltd
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Hitachi Maxell Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd, Hitachi Maxell Ltd filed Critical Hitachi Metals Ltd
Priority to JP5546885A priority Critical patent/JPS61213635A/en
Publication of JPS61213635A publication Critical patent/JPS61213635A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
  • Dry Development In Electrophotography (AREA)

Abstract

PURPOSE:To obtain a level sensor which has stable resonance characteristics and is manufactured at a high yield by curving a piezoelectric element plate. CONSTITUTION:When an AC voltage is applied between electrodes 5 and 6 from lead lines 8 and 9, the piezoelectric oscillator 1 expands and contracts repeatedly in oscillation mode shown by arrows according to a change in the polarity of the input voltage. The periphery of the oscillator 1, however, is fixed by a ring member 2 and curved, so the oscillator 1 oscillates in the leftward direction of an arrow B when expanding or the rightward direction of the arrow B when contracting. Namely, the oscillation of the oscillator 1 is converted form the mode A to the mode B. When, however, the oscillator 1 is flat, a force required to convert oscillation in the mode A into flexural oscillation in the mode B is large, so the sensor becomes lower in sensitivity. On the other hand, the oscillator 1 is curved, so the sensitivity is extremely high and the Q value of resonance is large.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は容器中の液体または粉体の量が十分か否かを検
出するレベルセンサに関し、特に検出特性が安定してお
り、信頼性が高く、しかも生産歩留りの高いレベルセン
サに関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a level sensor that detects whether the amount of liquid or powder in a container is sufficient, and in particular has stable detection characteristics and reliability. The present invention relates to a level sensor with high production yield.

〔従来の技術及び問題点〕[Conventional technology and problems]

従来、容器中の液体または粉体の量が十分か否かを検出
するレベルセンサとして種々のものが提案されているが
、実用的見地から圧電式レベルセンサが最近注目されて
きている。
Conventionally, various types of level sensors have been proposed for detecting whether the amount of liquid or powder in a container is sufficient, but piezoelectric level sensors have recently been attracting attention from a practical standpoint.

特公昭5B−1371号は、圧電磁器板の両面に電極を
設けるとともに一方の面の電極を2分割し、この分割し
た一方の電極を入力電極とし対向面の電極との間に圧電
磁器板を機械的に振動させる交流電圧またはパルス電圧
を印加し、分割された他方の電極を出力電極とし、上記
対向面の電極との間よりレベル検知信号を取り出すよう
に構成した圧電素子を振動板に貼り付け、流体、粉体、
粒体等の被検知物のレベルの変化する方向に対して圧電
素子がほぼ平行に振動するように駆動し、被検知物のレ
ベルの大小により、レベル検知信号電圧が変化するよう
に構成したレベル)★知器を開示している。かかる構造
のレベル検知器においては、圧電素子の振動モードのう
ち電極と平行な振動モードが利用される。圧電素子は振
動板に貼り合わされているために、上記振動モードは振
動板に垂直な方向の振動セード(ベンディング)に変換
されるようになっている。そこで圧電素子に交流の電気
信号を印加すると振動板は彎曲振動するが、電気信号の
周波数がこの彎曲振動の固有周波数と一致すると共振し
て、振幅は最大となる。このとき、電気的にはアドミッ
タンス最大となるが、共振周波数近傍のアドミッタンス
は場動子の状態にきわめて敏感で、粉体、液体などが接
触すると大幅に変化する。この現象を利用して液体、粉
体等のレベルを検知する。
Japanese Patent Publication No. 5B-1371 provides electrodes on both sides of a piezoelectric ceramic plate, divides the electrode on one side into two, uses this divided electrode as an input electrode, and places a piezoelectric ceramic plate between it and the electrode on the opposite side. A piezoelectric element configured to apply a mechanically vibrating alternating current voltage or pulse voltage, use the other divided electrode as an output electrode, and extract a level detection signal from between the electrodes on the opposing surface is pasted on a diaphragm. attachment, fluid, powder,
A level in which the piezoelectric element is driven to vibrate almost parallel to the direction in which the level of the object to be detected, such as particles, changes, and the level detection signal voltage changes depending on the level of the object to be detected. )★Discloses the detector. In a level detector having such a structure, among the vibration modes of the piezoelectric element, a vibration mode parallel to the electrodes is utilized. Since the piezoelectric element is bonded to the diaphragm, the vibration mode is converted into a vibration shade (bending) in a direction perpendicular to the diaphragm. Therefore, when an alternating current electric signal is applied to the piezoelectric element, the diaphragm vibrates in a curved manner, but when the frequency of the electric signal matches the natural frequency of this curved vibration, it resonates and the amplitude reaches its maximum. At this time, electrically, the admittance is at its maximum, but the admittance near the resonance frequency is extremely sensitive to the state of the field element, and changes significantly when powder, liquid, etc. come into contact with it. This phenomenon is used to detect the level of liquids, powders, etc.

しかしながら、圧電素子の共振特性は振動板の状態にき
わめて敏感であり、振動板と圧電素子との接着層に気泡
や異物等が混入することにより接着状態が変わると共振
特性も著しく変動する。従って、所望の共振特性を有す
るレベルセンサを、上記構造により作製しようとすると
、歩留りが極めて低いという問題があった。また温度、
湿度等の環境条件の変動により圧電素子と撮動板との接
着状態が微妙に変動し、共振特性が低下するという問題
もあった。
However, the resonance characteristics of the piezoelectric element are extremely sensitive to the condition of the diaphragm, and if the bonding condition changes due to air bubbles, foreign matter, etc. entering the adhesive layer between the diaphragm and the piezoelectric element, the resonance characteristics will also vary significantly. Therefore, when attempting to manufacture a level sensor having desired resonance characteristics using the above structure, there is a problem in that the yield is extremely low. Also, the temperature
There is also the problem that the adhesion state between the piezoelectric element and the imaging plate changes slightly due to changes in environmental conditions such as humidity, resulting in a reduction in resonance characteristics.

特開昭57−80898号は圧電セラミック薄膜と、i
i膜の両主面に形成された電極と、薄膜の周囲を保持1
となる枠と、電極に電気信号を印加する電気信号印加手
段とを有し、上記圧電セラミック薄膜が枠に嵌合されて
彎曲面を有している圧電セラミックトランスデエーサを
開示している。
JP-A-57-80898 discloses a piezoelectric ceramic thin film and an i
Holding the electrodes formed on both main surfaces of the i-film and the periphery of the thin film 1
The present invention discloses a piezoelectric ceramic transducer comprising a frame, and an electric signal applying means for applying an electric signal to the electrode, and the piezoelectric ceramic thin film is fitted into the frame and has a curved surface.

しかし、この圧電セラミックトランスデエーサは、スピ
ーカやマイクロフォンに使用されるものであって、粉体
や液体等のレベルセンサではない。
However, this piezoelectric ceramic transducer is used for speakers and microphones, and is not a level sensor for powder, liquid, or the like.

〔問題点を解決するための手段〕[Means for solving problems]

従って、本発明の目的は安定した共振特性を有し、歩留
りよく作製することのできる圧電振動子式レベルセンサ
を提供することである。
Therefore, an object of the present invention is to provide a piezoelectric vibrator type level sensor that has stable resonance characteristics and can be manufactured with a high yield.

上記目的に鑑み鋭意研究の結果、本発明者等は圧電素子
を振動板に貼付した構造が上記問題点の原因であること
に想到し、圧電素子板を彎曲状にすることにより振動板
を貼付することなしに十分に安定な共振特性を有するレ
ベルセンサを得ることができることを発見し、本発明を
完成した。
As a result of intensive research in view of the above purpose, the present inventors came to the conclusion that the structure in which the piezoelectric element is attached to the diaphragm is the cause of the above problem, and the inventors realized that the piezoelectric element plate was curved to attach the diaphragm. The present invention was completed based on the discovery that a level sensor with sufficiently stable resonance characteristics can be obtained without the need for additional steps.

容器中の被検知物のレベルを検知する本発明の圧電振動
子式レベルセンサは、彎曲板状の圧電素子と、圧電素子
の一面に設けられた共通電極と、圧電素子の他面に設け
られた分割電極と、圧電素子の周囲を固定する部材とを
有し、共通電極と一方の分割電極とに励振用入力電圧が
印加されると、共通電極と他方の分割電極とから被検知
物のレベルに応じた出力電圧が得られることを特徴とす
る。
The piezoelectric vibrator type level sensor of the present invention, which detects the level of an object to be detected in a container, includes a curved plate-shaped piezoelectric element, a common electrode provided on one side of the piezoelectric element, and a common electrode provided on the other side of the piezoelectric element. When an excitation input voltage is applied to the common electrode and one of the divided electrodes, an object to be detected is emitted from the common electrode and the other divided electrode. It is characterized by being able to obtain an output voltage according to the level.

〔実施例及び作用〕[Examples and effects]

第1図は本発明のレベルセンサの一実施例の外観を示す
。レベルセンサは外側に凸の彎曲形圧電振動子1と、そ
の周囲を固定するリング部材2と支持枠3とを有する。
FIG. 1 shows the appearance of an embodiment of the level sensor of the present invention. The level sensor has an outwardly convex curved piezoelectric vibrator 1, a ring member 2 and a support frame 3 that fix the periphery of the vibrator.

このレベルセンサは、例えば4で示すような被検知物の
レベルを検出する。
This level sensor detects the level of the object to be detected, as shown by 4, for example.

第2(a)図及び第2(b)図はレベルセンサの要部を
示す0本実施例においては、彎曲形圧電振動子は凸曲面
上に共通電極5を、また凹曲面上に分割電極6.7を有
する。共通電極5に接続されたリード線8は金属製リン
グ部材2に接地される。また分割電極6及び7にそれぞ
れリード線9.10を接続する。共通電極5は被検知物
側にあるので、保護膜11で被覆されている。なお共通
電極5の一部を凹曲面側まで延長してそこからリード線
を引き出すことにより、リード線が表に出ないようにす
るのが好ましい。
2(a) and 2(b) show the main parts of the level sensor. In this embodiment, the curved piezoelectric vibrator has a common electrode 5 on a convex curved surface and a divided electrode on a concave curved surface. 6.7. A lead wire 8 connected to the common electrode 5 is grounded to the metal ring member 2. Further, lead wires 9 and 10 are connected to the divided electrodes 6 and 7, respectively. Since the common electrode 5 is on the side of the object to be detected, it is covered with a protective film 11. Note that it is preferable to extend a part of the common electrode 5 to the concave curved surface side and draw out the lead wire from there so that the lead wire does not come out.

第3図は彎曲形圧電振動子1の振動原理を示す。FIG. 3 shows the vibration principle of the curved piezoelectric vibrator 1.

一般に圧電体の両側に電極を設けて交流電圧を印加する
と、圧電体は電極と垂直な振動及び平行な振動をする。
Generally, when electrodes are provided on both sides of a piezoelectric body and an alternating current voltage is applied, the piezoelectric body vibrates perpendicularly and parallel to the electrodes.

両者の振動周波数は一般に異なる。The vibration frequencies of both are generally different.

本発明の圧電振動子1においては、電極と平行な振動を
利用する。今、電極5.6間にリード線8.9より交流
電圧を印加すると、入力電圧の正負の変動に応じて圧電
振動子lは拡張縮小を繰り返す。
In the piezoelectric vibrator 1 of the present invention, vibration parallel to the electrodes is utilized. Now, when an alternating current voltage is applied between the electrodes 5.6 through the lead wire 8.9, the piezoelectric vibrator 1 repeats expansion and contraction in response to positive and negative fluctuations in the input voltage.

この振動モードは矢印Aで示される。ところが、圧電振
動子1の周囲はリング部材2により固定されており、か
つ彎曲しているので、圧電振動子lが拡大しようとする
ときは振動モードは矢印Bの左向きの振動になり、反対
に、縮小しようとするときは矢印Bの右向きの振動にな
る。つまり本発明の構造においては、圧電振動子lの振
動はモードAからモードBに変換される。ところが、圧
電振動子1が平坦な場合、モードAの振動をモードBの
彎曲振動に変換するのに要する力は大きいので、センサ
として鈍感になり、不満足である。これに対し、本発明
の圧電振動子は彎曲しているので感度が非常に良く、共
振のQ値は高い。
This vibration mode is indicated by arrow A. However, the circumference of the piezoelectric vibrator 1 is fixed by the ring member 2 and is curved, so when the piezoelectric vibrator l tries to expand, the vibration mode becomes a leftward vibration of arrow B, and vice versa. , when trying to reduce the size, it vibrates in the right direction of arrow B. That is, in the structure of the present invention, the vibration of the piezoelectric vibrator l is converted from mode A to mode B. However, if the piezoelectric vibrator 1 is flat, the force required to convert mode A vibration to mode B curved vibration is large, making it insensitive as a sensor and unsatisfactory. On the other hand, since the piezoelectric vibrator of the present invention is curved, it has very good sensitivity and a high resonance Q value.

圧電振動子1の振動が粉体等の被検知物により拘束され
ると、それに応じた出力電圧が電極5.7からリード線
8.10を通って得られる。これにより、被検知物のレ
ベルの検知が行われる。
When the vibration of the piezoelectric vibrator 1 is restrained by an object to be detected such as powder, a corresponding output voltage is obtained from the electrode 5.7 through the lead wire 8.10. Thereby, the level of the object to be detected is detected.

彎曲形圧電振動子は被検知物のレベルを敏感に検知しう
るために薄い方が望ましいが、薄すぎると破損の問題が
あるので、一般に 0.1〜0.5 +u+程度が望ま
しい。また圧電振動子の彎曲塵は曲率半径にして200
〜500 amである。曲率半径が200II11より
小さいと破損しやす(、500+w+mより大きいと振
動子垂直方向への振動モードの変換に大きな力を要する
ようになり、センサとしての感度が低下する。なお圧電
振動子は全体が彎曲している必要はなく、一部が平坦で
あるような形状、例えば周囲が彎曲していて中央部が平
坦なものでもよい。
It is desirable that the curved piezoelectric vibrator be thin so that it can sensitively detect the level of the object to be detected, but if it is too thin, there is a problem of breakage, so it is generally desirable that the piezoelectric vibrator be about 0.1 to 0.5 +u+. Also, the radius of curvature of the piezoelectric vibrator is 200
~500 am. If the radius of curvature is smaller than 200II11, it is likely to be damaged (if it is larger than 500+w+m, a large force will be required to convert the vibration mode to the vertical direction of the vibrator, reducing the sensitivity as a sensor.The piezoelectric vibrator as a whole It does not need to be curved, and may have a partially flat shape, for example, a shape with a curved periphery and a flat central part.

圧電振動子の直径は一般に10〜30m+sであればよ
い。
The diameter of the piezoelectric vibrator may generally be 10 to 30 m+s.

電極は、圧電振動子の振動を妨げないために、導電ペイ
ントで形成するのが好ましく、その厚さは0.1〜0.
3 arm程度である。共通電極上に形成される保護膜
はウレタン系接着剤等で形成することができ、その厚さ
は0.1=0.2++v+程度である。
The electrodes are preferably formed of conductive paint in order not to interfere with the vibration of the piezoelectric vibrator, and have a thickness of 0.1-0.
It is about 3 arms. The protective film formed on the common electrode can be formed using a urethane adhesive or the like, and its thickness is about 0.1=0.2++v+.

リング部材2は圧電振動子を強固に固定するもので、圧
電振動子の外周と一致する内周を有する。
The ring member 2 firmly fixes the piezoelectric vibrator, and has an inner circumference that matches the outer circumference of the piezoelectric vibrator.

またリード線を接地するので金属製である。必要に応じ
、圧電振動子の外周と接着剤により接着することができ
る。リング部材2はまた支持枠3に固定される。
Also, since the lead wire is grounded, it is made of metal. If necessary, it can be bonded to the outer periphery of the piezoelectric vibrator using an adhesive. The ring member 2 is also fixed to the support frame 3.

なお被検知物としては液体、粉体、粒体があるが、特に
複写機のトナー等の粉体のレベル検知に関して優れた機
能を発揮する。圧電振動子の励振用入力は交流電圧又は
パルス電圧のいずれでもよい。
Although the objects to be detected include liquids, powders, and granules, it exhibits an excellent function particularly in detecting the level of powders such as toner in copying machines. The input for excitation of the piezoelectric vibrator may be either an alternating current voltage or a pulse voltage.

第4図は本発明の別の実施例によるレベルセンサを示す
。彎曲形圧電振動子20自身は第1図及び第2図の実施
例のものと同一であるが、凹曲面側が被検知物に接する
よう゛な配置になっている。圧電振動子20の外周はリ
ム付円板21のリム22に固着されている。圧電振動子
の凹曲面上に共通電極が、また凸曲面上に分割電極がそ
れぞれ設けられており、各電極には適当なリード線(図
示せず)が接続されている。圧電振動子は円板21に非
常に近接して設けられているので、圧電振動子が異物等
により強く押されたときに円板21はバックアップとし
て作用し、圧電振動子の破損が防止される。
FIG. 4 shows a level sensor according to another embodiment of the invention. The curved piezoelectric vibrator 20 itself is the same as that of the embodiment shown in FIGS. 1 and 2, but is arranged so that the concave curved surface side is in contact with the object to be detected. The outer periphery of the piezoelectric vibrator 20 is fixed to a rim 22 of a rimmed disc 21. A common electrode is provided on the concave curved surface of the piezoelectric vibrator, and divided electrodes are provided on the convex curved surface of the piezoelectric vibrator, and appropriate lead wires (not shown) are connected to each electrode. Since the piezoelectric vibrator is provided very close to the disk 21, when the piezoelectric vibrator is strongly pressed by a foreign object, the disk 21 acts as a backup and prevents damage to the piezoelectric vibrator. .

本考案を以下の実施例によりさらに詳細に説明する。The present invention will be explained in more detail by the following examples.

実施例 第1図及び第2図に示す構造のレベルセンサを作製した
。彎曲形圧電振動子1は、Pb  (Zr−Ti)03
系圧電セラミツクス製であり、厚さ0.1tm、直径1
6mm、曲率半径300IIIIIlであった。各電極
5〜7は導電ペイントにより形成し、保護膜は紫外線硬
化型ウレタン系接着剤で形成した。
EXAMPLE A level sensor having the structure shown in FIGS. 1 and 2 was manufactured. The curved piezoelectric vibrator 1 is made of Pb (Zr-Ti)03
Made of piezoelectric ceramics, thickness 0.1tm, diameter 1
The diameter was 6 mm, and the radius of curvature was 300 III. Each of the electrodes 5 to 7 was formed using conductive paint, and the protective film was formed using an ultraviolet curing urethane adhesive.

リード線5.7に5■の正弦波電圧を印加し、周波数を
掃引すると5.62 K11zでアドミッタンスの急峻
な山が現われ、Qの高い共振状態が得られた。その状態
のままセンサの振動面を鉛直にして静かに容器中のトナ
ーに入れると、トナー面4が高くなるに従って振動子の
アドミッタンスは低下し、完全に潜ると非共振状態に近
くなった。従って、このレベルセンサはトナーのレベル
検知装置として有効であることがわかる。
When a sine wave voltage of 5cm was applied to the lead wire 5.7 and the frequency was swept, a steep peak of admittance appeared at 5.62K11z, and a high Q resonance state was obtained. When the sensor was gently put into the toner in the container with its vibrating surface vertical, the admittance of the vibrator decreased as the toner surface 4 became higher, and when it was completely submerged, it became close to a non-resonant state. Therefore, it can be seen that this level sensor is effective as a toner level detection device.

〔発明の効果〕〔Effect of the invention〕

以上の通り、本発明の圧電式レベルセンサは彎曲形圧電
素子そのものからなる振動子を用いているので感度が高
く、また、圧電素子と振動板とを接着した構造としてい
ないので、共振特性が安定であり、かつ歩留りよく製造
することができる。
As described above, the piezoelectric level sensor of the present invention has high sensitivity because it uses a vibrator made of a curved piezoelectric element itself, and has stable resonance characteristics because it does not have a structure in which the piezoelectric element and the diaphragm are bonded. and can be manufactured with high yield.

また接着部がないため、温度、湿度等の環境条件の変動
に対しても安定であり、信頼性が高い。
Furthermore, since there is no adhesive part, it is stable against fluctuations in environmental conditions such as temperature and humidity, and is highly reliable.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例による彎曲形圧電振動子式レ
ベルセンサの外観を示す斜視図であり、第2 (81図
は第1図のレベルセンサの要部の縦断面図であり、 第2(b)図は第2(a)図に示す要部の背面図であり
、第3図は第2(a)図の一部省略拡大図であり、第4
図は本発明の別の実施例による彎曲形圧電振動子式レベ
ルセンサの要部の縦断面図である。 l、20  ・・・・・・・・・・・・ 彎曲形圧電振
動子2 ・・・・・・・・・・・・・・・・・・ リン
グ部材5.6.7 ・旧・・ 電極 8.9、lO・・・・・・ リード線 11  ・・・・・・・・・・・・・・・・・・ 保護
膜第1図
FIG. 1 is a perspective view showing the external appearance of a curved piezoelectric vibrator type level sensor according to an embodiment of the present invention, and FIG. 2(b) is a rear view of the main parts shown in FIG. 2(a), FIG. 3 is a partially omitted enlarged view of FIG. 2(a), and FIG.
The figure is a longitudinal cross-sectional view of a main part of a curved piezoelectric vibrator type level sensor according to another embodiment of the present invention. l, 20 ...... Curved piezoelectric vibrator 2 ...... Ring member 5.6.7 Old... Electrode 8.9, lO... Lead wire 11... Protective film Figure 1

Claims (2)

【特許請求の範囲】[Claims] (1)容器中の被検知物のレベルを検知する圧電振動子
式レベルセンサにおいて、彎曲板状の圧電素子と、前記
圧電素子の一面に設けられた共通電極と、前記圧電素子
の他面に設けられた分割電極と、前記圧電素子の周囲を
固定する部材とを有し、前記共通電極と前記一方の分割
電極とに励振用入力電圧が印加されると、前記共通電極
と前記他方の分割電極とから前記被検知物のレベルに応
じた出力電圧が得られることを特徴とする圧電振動子式
レベルセンサ。
(1) A piezoelectric vibrator type level sensor that detects the level of an object to be detected in a container includes a curved plate-shaped piezoelectric element, a common electrode provided on one side of the piezoelectric element, and a common electrode provided on the other side of the piezoelectric element. It has a divided electrode provided and a member that fixes the periphery of the piezoelectric element, and when an excitation input voltage is applied to the common electrode and the one divided electrode, the common electrode and the other divided electrode A piezoelectric vibrator type level sensor characterized in that an output voltage corresponding to the level of the object to be detected is obtained from an electrode.
(2)特許請求の範囲第1項に記載の圧電振動子式レベ
ルセンサにおいて、前記共通電極は前記圧電素子の凸曲
面上に設けられ、前記分割電極は前記圧電素子の凹曲面
上に設けられ、前記共通電極の表面に保護膜が形成され
ており、かつ前記保護膜側が前記被検知物に接するよう
になっている圧電振動子式レベルセンサ。
(2) In the piezoelectric vibrator type level sensor according to claim 1, the common electrode is provided on a convex curved surface of the piezoelectric element, and the divided electrode is provided on a concave curved surface of the piezoelectric element. A piezoelectric vibrator type level sensor, wherein a protective film is formed on the surface of the common electrode, and the protective film side is in contact with the object to be detected.
JP5546885A 1985-03-19 1985-03-19 Curved piezoelectric oscillator type level sensor Pending JPS61213635A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5546885A JPS61213635A (en) 1985-03-19 1985-03-19 Curved piezoelectric oscillator type level sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5546885A JPS61213635A (en) 1985-03-19 1985-03-19 Curved piezoelectric oscillator type level sensor

Publications (1)

Publication Number Publication Date
JPS61213635A true JPS61213635A (en) 1986-09-22

Family

ID=12999432

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5546885A Pending JPS61213635A (en) 1985-03-19 1985-03-19 Curved piezoelectric oscillator type level sensor

Country Status (1)

Country Link
JP (1) JPS61213635A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5862431A (en) * 1997-04-25 1999-01-19 Hewlett-Packard Company Toner powder level sensing using element and pulse signal and toner powder presence sensing using piezoelectric film
DE10357813A1 (en) * 2003-12-10 2005-07-14 Kirstein, Gerhard, Dipl.-Ing. Fluid level sensor for armoured vehicles has fluid displacement plates moved against return force by electric pulse operated relay actuators

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5862431A (en) * 1997-04-25 1999-01-19 Hewlett-Packard Company Toner powder level sensing using element and pulse signal and toner powder presence sensing using piezoelectric film
DE10357813A1 (en) * 2003-12-10 2005-07-14 Kirstein, Gerhard, Dipl.-Ing. Fluid level sensor for armoured vehicles has fluid displacement plates moved against return force by electric pulse operated relay actuators
DE10357813B4 (en) * 2003-12-10 2006-06-14 Kirstein, Gerhard, Dipl.-Ing. Liquid level measuring method and measuring device

Similar Documents

Publication Publication Date Title
JP3141645B2 (en) Pressure sensor
GB2087558A (en) Pressure transducer of vibrating element type
JPH0520692B2 (en)
JPS61213635A (en) Curved piezoelectric oscillator type level sensor
JPS604820A (en) Small sized vibration type level detector
JP2947991B2 (en) Ultrasonic sensor
JPH08247770A (en) Vibration gyroscope
JPS60216210A (en) Angular velocity sensor
JPS6067815A (en) Angular velocity sensor
JPS58120398A (en) Electro-mechanical transducer
JPS59218098A (en) Ultrasonic wave ceramic microphone
JPH0989569A (en) Vibrating gyro
JPH052859Y2 (en)
EP0592987B1 (en) Vibratory gyroscope
JPH08201067A (en) Angular speed sensor
JPH0325424Y2 (en)
JPS6217744Y2 (en)
JP2004056450A (en) Ultrasonic sensor
JPH0136157Y2 (en)
JPS6030160B2 (en) Resonance type vibration pickup device
JPS61280524A (en) Level detector
JPH01190100A (en) Aerial ultrasonic transducer
JPH0582538B2 (en)
JP2001153660A (en) Piezoelectric sensor
JPH09196685A (en) Angular velocity sensor