JPS61207030U - - Google Patents
Info
- Publication number
- JPS61207030U JPS61207030U JP9017585U JP9017585U JPS61207030U JP S61207030 U JPS61207030 U JP S61207030U JP 9017585 U JP9017585 U JP 9017585U JP 9017585 U JP9017585 U JP 9017585U JP S61207030 U JPS61207030 U JP S61207030U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- testing
- chucking
- preheating
- standby
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9017585U JPS61207030U (sv) | 1985-06-17 | 1985-06-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9017585U JPS61207030U (sv) | 1985-06-17 | 1985-06-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61207030U true JPS61207030U (sv) | 1986-12-27 |
Family
ID=30644936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9017585U Pending JPS61207030U (sv) | 1985-06-17 | 1985-06-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61207030U (sv) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6052031A (ja) * | 1983-08-31 | 1985-03-23 | Sharp Corp | 半導体装置の高温テスト装置 |
-
1985
- 1985-06-17 JP JP9017585U patent/JPS61207030U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6052031A (ja) * | 1983-08-31 | 1985-03-23 | Sharp Corp | 半導体装置の高温テスト装置 |
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