JPS61206676U - - Google Patents
Info
- Publication number
- JPS61206676U JPS61206676U JP9025985U JP9025985U JPS61206676U JP S61206676 U JPS61206676 U JP S61206676U JP 9025985 U JP9025985 U JP 9025985U JP 9025985 U JP9025985 U JP 9025985U JP S61206676 U JPS61206676 U JP S61206676U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- liquid phase
- preparation room
- phase growth
- board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007791 liquid phase Substances 0.000 claims description 9
- 238000002360 preparation method Methods 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 230000000903 blocking effect Effects 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 239000011261 inert gas Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9025985U JPS61206676U (enExample) | 1985-06-15 | 1985-06-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9025985U JPS61206676U (enExample) | 1985-06-15 | 1985-06-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61206676U true JPS61206676U (enExample) | 1986-12-27 |
Family
ID=30645090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9025985U Pending JPS61206676U (enExample) | 1985-06-15 | 1985-06-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61206676U (enExample) |
-
1985
- 1985-06-15 JP JP9025985U patent/JPS61206676U/ja active Pending