JPS61206649U - - Google Patents

Info

Publication number
JPS61206649U
JPS61206649U JP8953085U JP8953085U JPS61206649U JP S61206649 U JPS61206649 U JP S61206649U JP 8953085 U JP8953085 U JP 8953085U JP 8953085 U JP8953085 U JP 8953085U JP S61206649 U JPS61206649 U JP S61206649U
Authority
JP
Japan
Prior art keywords
plasma processing
gas introduction
processing apparatus
processing chamber
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8953085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8953085U priority Critical patent/JPS61206649U/ja
Publication of JPS61206649U publication Critical patent/JPS61206649U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP8953085U 1985-06-13 1985-06-13 Pending JPS61206649U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8953085U JPS61206649U (enrdf_load_html_response) 1985-06-13 1985-06-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8953085U JPS61206649U (enrdf_load_html_response) 1985-06-13 1985-06-13

Publications (1)

Publication Number Publication Date
JPS61206649U true JPS61206649U (enrdf_load_html_response) 1986-12-27

Family

ID=30643694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8953085U Pending JPS61206649U (enrdf_load_html_response) 1985-06-13 1985-06-13

Country Status (1)

Country Link
JP (1) JPS61206649U (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016509526A (ja) * 2012-11-08 2016-03-31 ザウアー ウルトラソニック ゲーエムベーハーＳａｕｅｒ Ｕｌｔｒａｓｏｎｉｃ Ｇｍｂｈ 工具、工作機械、機械加工方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59155441A (ja) * 1983-02-25 1984-09-04 Toyota Motor Corp プラズマ処理方法および装置
JPS59164340A (ja) * 1983-03-10 1984-09-17 Toyota Motor Corp プラズマ処理装置
JPS59189131A (ja) * 1983-04-13 1984-10-26 Toyota Motor Corp プラズマ処理装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59155441A (ja) * 1983-02-25 1984-09-04 Toyota Motor Corp プラズマ処理方法および装置
JPS59164340A (ja) * 1983-03-10 1984-09-17 Toyota Motor Corp プラズマ処理装置
JPS59189131A (ja) * 1983-04-13 1984-10-26 Toyota Motor Corp プラズマ処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016509526A (ja) * 2012-11-08 2016-03-31 ザウアー ウルトラソニック ゲーエムベーハーＳａｕｅｒ Ｕｌｔｒａｓｏｎｉｃ Ｇｍｂｈ 工具、工作機械、機械加工方法

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