JPS61203543U - - Google Patents
Info
- Publication number
- JPS61203543U JPS61203543U JP8694585U JP8694585U JPS61203543U JP S61203543 U JPS61203543 U JP S61203543U JP 8694585 U JP8694585 U JP 8694585U JP 8694585 U JP8694585 U JP 8694585U JP S61203543 U JPS61203543 U JP S61203543U
- Authority
- JP
- Japan
- Prior art keywords
- quartz tube
- discharge device
- plasma discharge
- temperature plasma
- radio wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 230000002265 prevention Effects 0.000 claims description 3
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Discharge Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8694585U JPS61203543U (enrdf_load_stackoverflow) | 1985-06-11 | 1985-06-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8694585U JPS61203543U (enrdf_load_stackoverflow) | 1985-06-11 | 1985-06-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61203543U true JPS61203543U (enrdf_load_stackoverflow) | 1986-12-22 |
Family
ID=30638709
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8694585U Pending JPS61203543U (enrdf_load_stackoverflow) | 1985-06-11 | 1985-06-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61203543U (enrdf_load_stackoverflow) |
-
1985
- 1985-06-11 JP JP8694585U patent/JPS61203543U/ja active Pending
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