JPS61203337U - - Google Patents
Info
- Publication number
- JPS61203337U JPS61203337U JP8787285U JP8787285U JPS61203337U JP S61203337 U JPS61203337 U JP S61203337U JP 8787285 U JP8787285 U JP 8787285U JP 8787285 U JP8787285 U JP 8787285U JP S61203337 U JPS61203337 U JP S61203337U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- pressure
- measuring
- measuring diaphragm
- sides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 230000006378 damage Effects 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8787285U JPS61203337U (ko) | 1985-06-11 | 1985-06-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8787285U JPS61203337U (ko) | 1985-06-11 | 1985-06-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61203337U true JPS61203337U (ko) | 1986-12-20 |
Family
ID=30640488
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8787285U Pending JPS61203337U (ko) | 1985-06-11 | 1985-06-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61203337U (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994014042A1 (en) * | 1992-12-11 | 1994-06-23 | Nippondenso Co., Ltd. | Semiconductor type pressure sensor |
| JP2016075562A (ja) * | 2014-10-06 | 2016-05-12 | 大日本印刷株式会社 | 力学量センサおよび力学量測定装置 |
-
1985
- 1985-06-11 JP JP8787285U patent/JPS61203337U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994014042A1 (en) * | 1992-12-11 | 1994-06-23 | Nippondenso Co., Ltd. | Semiconductor type pressure sensor |
| JP2016075562A (ja) * | 2014-10-06 | 2016-05-12 | 大日本印刷株式会社 | 力学量センサおよび力学量測定装置 |