JPS61202048U - - Google Patents
Info
- Publication number
- JPS61202048U JPS61202048U JP8572485U JP8572485U JPS61202048U JP S61202048 U JPS61202048 U JP S61202048U JP 8572485 U JP8572485 U JP 8572485U JP 8572485 U JP8572485 U JP 8572485U JP S61202048 U JPS61202048 U JP S61202048U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electron microscope
- sample stage
- processing device
- conductive processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000576 coating method Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 3
- 150000001768 cations Chemical class 0.000 claims 2
- 239000004020 conductor Substances 0.000 claims 2
- 150000002500 ions Chemical class 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000001771 vacuum deposition Methods 0.000 claims 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8572485U JPH0244193Y2 (enExample) | 1985-06-06 | 1985-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8572485U JPH0244193Y2 (enExample) | 1985-06-06 | 1985-06-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61202048U true JPS61202048U (enExample) | 1986-12-18 |
| JPH0244193Y2 JPH0244193Y2 (enExample) | 1990-11-22 |
Family
ID=30636377
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8572485U Expired JPH0244193Y2 (enExample) | 1985-06-06 | 1985-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0244193Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012202834A (ja) * | 2011-03-25 | 2012-10-22 | Tokyo Electric Power Co Inc:The | 高分子材料の微細構造の観察方法 |
-
1985
- 1985-06-06 JP JP8572485U patent/JPH0244193Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012202834A (ja) * | 2011-03-25 | 2012-10-22 | Tokyo Electric Power Co Inc:The | 高分子材料の微細構造の観察方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0244193Y2 (enExample) | 1990-11-22 |
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