JPS61200383U - - Google Patents
Info
- Publication number
- JPS61200383U JPS61200383U JP1985085024U JP8502485U JPS61200383U JP S61200383 U JPS61200383 U JP S61200383U JP 1985085024 U JP1985085024 U JP 1985085024U JP 8502485 U JP8502485 U JP 8502485U JP S61200383 U JPS61200383 U JP S61200383U
- Authority
- JP
- Japan
- Prior art keywords
- flexible sheet
- board
- pellicle
- support frame
- storage container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000000853 adhesive Substances 0.000 claims description 2
- 230000001070 adhesive effect Effects 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985085024U JPH0542073Y2 (US06633600-20031014-M00021.png) | 1985-06-05 | 1985-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985085024U JPH0542073Y2 (US06633600-20031014-M00021.png) | 1985-06-05 | 1985-06-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61200383U true JPS61200383U (US06633600-20031014-M00021.png) | 1986-12-15 |
| JPH0542073Y2 JPH0542073Y2 (US06633600-20031014-M00021.png) | 1993-10-22 |
Family
ID=30635041
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985085024U Expired - Lifetime JPH0542073Y2 (US06633600-20031014-M00021.png) | 1985-06-05 | 1985-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0542073Y2 (US06633600-20031014-M00021.png) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63178973A (ja) * | 1986-12-27 | 1988-07-23 | 株式会社ジャパンエナジー | 半導体ウェーハー包装容器 |
| JP2004361647A (ja) * | 2003-06-04 | 2004-12-24 | Asahi Kasei Electronics Co Ltd | 大型ペリクルの収納方法 |
| JPWO2006059388A1 (ja) * | 2004-12-02 | 2008-08-07 | 旭化成エレクトロニクス株式会社 | 大型ペリクルの収納方法 |
-
1985
- 1985-06-05 JP JP1985085024U patent/JPH0542073Y2/ja not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63178973A (ja) * | 1986-12-27 | 1988-07-23 | 株式会社ジャパンエナジー | 半導体ウェーハー包装容器 |
| JP2004361647A (ja) * | 2003-06-04 | 2004-12-24 | Asahi Kasei Electronics Co Ltd | 大型ペリクルの収納方法 |
| JP4497845B2 (ja) * | 2003-06-04 | 2010-07-07 | 旭化成イーマテリアルズ株式会社 | 大型ペリクルの収納方法 |
| JPWO2006059388A1 (ja) * | 2004-12-02 | 2008-08-07 | 旭化成エレクトロニクス株式会社 | 大型ペリクルの収納方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0542073Y2 (US06633600-20031014-M00021.png) | 1993-10-22 |
