JPS61199860U - - Google Patents
Info
- Publication number
- JPS61199860U JPS61199860U JP8383285U JP8383285U JPS61199860U JP S61199860 U JPS61199860 U JP S61199860U JP 8383285 U JP8383285 U JP 8383285U JP 8383285 U JP8383285 U JP 8383285U JP S61199860 U JPS61199860 U JP S61199860U
- Authority
- JP
- Japan
- Prior art keywords
- target
- electron emission
- beam irradiation
- irradiation device
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims 3
- 238000010884 ion-beam technique Methods 0.000 claims 2
- 230000001133 acceleration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8383285U JPS61199860U (fr) | 1985-06-05 | 1985-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8383285U JPS61199860U (fr) | 1985-06-05 | 1985-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61199860U true JPS61199860U (fr) | 1986-12-13 |
Family
ID=30632813
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8383285U Pending JPS61199860U (fr) | 1985-06-05 | 1985-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61199860U (fr) |
-
1985
- 1985-06-05 JP JP8383285U patent/JPS61199860U/ja active Pending
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