JPS61199038U - - Google Patents

Info

Publication number
JPS61199038U
JPS61199038U JP8096085U JP8096085U JPS61199038U JP S61199038 U JPS61199038 U JP S61199038U JP 8096085 U JP8096085 U JP 8096085U JP 8096085 U JP8096085 U JP 8096085U JP S61199038 U JPS61199038 U JP S61199038U
Authority
JP
Japan
Prior art keywords
plasma
processing gas
microwave
plasma generation
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8096085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8096085U priority Critical patent/JPS61199038U/ja
Publication of JPS61199038U publication Critical patent/JPS61199038U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP8096085U 1985-05-31 1985-05-31 Pending JPS61199038U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8096085U JPS61199038U (enExample) 1985-05-31 1985-05-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8096085U JPS61199038U (enExample) 1985-05-31 1985-05-31

Publications (1)

Publication Number Publication Date
JPS61199038U true JPS61199038U (enExample) 1986-12-12

Family

ID=30627299

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8096085U Pending JPS61199038U (enExample) 1985-05-31 1985-05-31

Country Status (1)

Country Link
JP (1) JPS61199038U (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56129322A (en) * 1980-03-14 1981-10-09 Fujitsu Ltd Detection of microwave leakage for microwave plasma device
JPS6016424A (ja) * 1983-07-08 1985-01-28 Fujitsu Ltd マイクロ波プラズマ処理方法及びその装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56129322A (en) * 1980-03-14 1981-10-09 Fujitsu Ltd Detection of microwave leakage for microwave plasma device
JPS6016424A (ja) * 1983-07-08 1985-01-28 Fujitsu Ltd マイクロ波プラズマ処理方法及びその装置

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