JPS61198269U - - Google Patents
Info
- Publication number
- JPS61198269U JPS61198269U JP8028485U JP8028485U JPS61198269U JP S61198269 U JPS61198269 U JP S61198269U JP 8028485 U JP8028485 U JP 8028485U JP 8028485 U JP8028485 U JP 8028485U JP S61198269 U JPS61198269 U JP S61198269U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- etched
- etching liquid
- tank
- conveying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 claims description 17
- 239000007788 liquid Substances 0.000 claims description 6
- 238000002347 injection Methods 0.000 claims description 2
- 239000007924 injection Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 4
- 238000011084 recovery Methods 0.000 claims 1
- 239000000243 solution Substances 0.000 claims 1
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8028485U JPS6336045Y2 (https=) | 1985-05-29 | 1985-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8028485U JPS6336045Y2 (https=) | 1985-05-29 | 1985-05-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61198269U true JPS61198269U (https=) | 1986-12-11 |
| JPS6336045Y2 JPS6336045Y2 (https=) | 1988-09-26 |
Family
ID=30625989
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8028485U Expired JPS6336045Y2 (https=) | 1985-05-29 | 1985-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6336045Y2 (https=) |
-
1985
- 1985-05-29 JP JP8028485U patent/JPS6336045Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6336045Y2 (https=) | 1988-09-26 |
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