JPS61195221A - Clean room - Google Patents

Abstract

PURPOSE:To make a partitioning work easy in a short time at low cost, and to make scaling up and down of the area of a room easy, by partitioning an airtight room by wall panels and ceiling panels after building in air conditioning units and controlling units in the spaces between gate frames which are set upright on the floor on both sides of a room. CONSTITUTION:A plurality of gate frames 5 are set upright in parallel on both sides of a floor 9. Air conditioning units A1 and A2 are built in the spaces 5a, or 5b, 5b between neighboring frames 5. Controlling units B to control the air conditioning units are also built in the other spaces between the frames 5. The frames are covered with wall panels 13 except the ones in which the air conditioning units A1 and A2 are built-in. The inside wall of an airtight room 1 is constituted in such a manner. The top of an airtight room 1 is covered with ceiling panels 24, which are supported by supporting means 6, 7 and 25. The air sucked from the airtight room 1 is filtered and cleaned by high- power filters 8j built in the air conditioning units A1 and A2 and is discharged again to the airtight room 1.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a clean room that can be easily and quickly constructed inside an existing building.

(Conventional technology) In a conventional clean room, a machine room is separately provided adjacent to the airtight room, an air conditioner is installed in this machine room, and, for example, when the airflow is a vertical flow type, the ceiling and the grid floor are installed separately. It was connected to an air conditioner through a duct to circulate the air in the airtight room.

(Problems to be solved by the invention) In the conventional example, construction is complicated because it requires a large number of work items and labor, such as installing equipment for air conditioners, installing piping and ducts, etc. There is a problem that construction cannot be carried out, and the space becomes larger due to the space required for the machine room, resulting in an increase in scale.

By the way, in various industries, the cleanliness level required for clean rooms varies from high class to low class. For example, clean rooms in advanced technology industries that handle semiconductor assembly, microorganisms, and bacteria require a high level of cleanliness, such as Class 1, whereas industries that handle dust-free laundry, food packaging, etc. require a high level of cleanliness, such as Class 10. 000
A certain level of cleanliness is sufficient, and the high level of cleanliness required in high-tech industries is not necessarily required. In clean rooms in special fields where high cleanliness is required, the emphasis is on improving performance, so it is unavoidable to use conventional examples with the above problems, but for general fields where low cleanliness is sufficient. , the conventional example is not compatible. Furthermore, in recent years, there have been expectations for the development of clean rooms that can be constructed inexpensively and in a small space in a short period of time.

An object of the present invention is to provide a clean room that can be easily constructed in a short period of time, at low cost, and in a small space.

(Means for Solving the Problems) In the clean room of the present invention, a plurality of gate-shaped frames 5 are arranged side by side in a predetermined direction at intervals on the floor surface 9 of the building. This frame functions as the main structural member of the clean room. An air conditioning unit AI is installed between the side parts 5a and 5a of adjacent frames 5 and between 5b and 5b.
, A2 are built in, and a control unit B for controlling the operation of the air conditioning unit is built in between the other sides. One air conditioning unit A or one control unit B is installed between one side part, and there is a one-to-one correspondence between the sides and the unit. When multiple 4-unit air conditioning units are installed, one air conditioning unit has heat exchangers 8e and 8f.
It is desirable to have the following. The above air conditioning unit AI,
All the spaces between the sides and inside the sides except for the space between the sides where A2 is located are covered with wall panels 13. The inside of the outer part of the frame located on the outside is covered with a wall panel 13. wall panel 1
3 and air conditioning units AI and A2 constitute the inner wall of the airtight chamber 1. The upper part of the airtight room 1 is covered with a ceiling plate 24, and this ceiling plate is attached to the horizontal part 5c of the frame with supporting means 6, 7.25.
I support it. Inside the airtight chamber 1, sealing means 26, 27.2
It is sealed by 9.

The air conditioning units AI and A2 are equipped with a thin exterior casing 8, and a suction port 8al is provided at the lower part of the indoor side of the casing.
and an air outlet 8 equipped with a high-performance filter 8j at the top.
bl is provided, and a blower 8h is disposed inside the casing, so that airflow from the blower can be blown out to the above-mentioned outlet.

When the air conditioning unit includes heat exchangers 8e and 8f, the heat exchangers are installed on the side of the inlet Bal in the casing 8, and the blower 8h is located on the side of the outlet 8b1. The control unit B has control equipment built into a thin exterior casing 12.

(Function) The air in the airtight chamber 1 enters the casing 8 through the suction ports 8al of the air conditioning units AI and A2, becomes a blowout airflow by the blower 8h, is guided by the guide 81, passes through the filter 8j of the blowout port, and The air is blown out into the airtight chamber 1 again from the air outlet 8b1. The dust contained in the air is filtered by a high-performance filter 8j to become clean air and blown into the room.

(Example) In Figs. 1 to 4, the clean room comprises an airtight room 1 and an auxiliary room 2 adjacent to the outside of the airtight room. Front room 2
b, The left side is the rear chamber 2c. Each room can be accessed by 1°2 through a door 4 provided in the partition wall 3.

In the airtight room 1, three gate-shaped frames 5 have a length of 1000 m.
These frames are arranged in parallel in the depth direction (vertical direction in FIG. 2) with an interval of m, and these frames are the main structural members of the airtight chamber.

As shown in FIGS. 5 to 7, each gate-shaped frame 5 has mouth-shaped side frames 5a and 5b that form the side parts, and 3 parts that form the horizontal part 5C.
Two mouth-shaped horizontal frames 5cl, 5c2.

5c3, and the span (distance between opposing side frames 5a and 5b) is 7000 mm.

The height is 3000m. Horizontal frame 5c1.5c2.

Of 5G3, both ends of the horizontal frame 5C1 located in the center are connected to one ends of the horizontal frames 5c2 and 5c3 located on both sides by connecting plates 5d and 5d, angles 5e and 5e, and bolts 5f. The other ends of the horizontal frames 5c2 and 5c3 on both sides are fixed to the inside of the upper ends of the side frames 5a and 5b, and are fixed on the angles 5Q and 5Q with bolts 5h, and the outer surfaces are fixed to the side frames for connection. It is held by plates 5i, 5i and fixed to the connecting plate with bolts 5h. Each horizontal portion 5C of each frame 5 is connected by a long support member 6 (Figs. 18 and 19) made of channel material located on the lower surface, and the horizontal portion and the long support member are connected with a clip (not shown). The elongated support member 6 has a bar 7 (first
Figure) is supported.

As shown in Figures 1 to 4, among the spaces (between side frames) partitioned by the side frames 5a, 5b, and 5b of adjacent frames 5, there is a space between the side frames on the right side of Figure 1. A first air conditioning unit A1 is installed, and a second air conditioning unit A2 is installed between the side frame 5b on the left side in FIG. Between the first air conditioning unit A1 and the side frame 5a on the same side, both air conditioning units AI
, A2 is incorporated therein. The control unit B is adjacent to the first air conditioning unit A1 with the side frame 5a of the frame in between, and is located opposite to the second air conditioning unit A2.

As shown in Figures 8 and 9, the first air conditioning unit A1 has a height of approximately 2730 mm, a width of 995 mm, and a thickness of 250 mm.
It is equipped with an exterior casing 8, and glass wool is pasted inside the casing 8. The front surface of the casing 8 (left side in FIG. 9) is covered with a lower front plate 8a and an upper front plate 8b, and each front plate is fixed with bolts 8C. An inlet 8a1 is provided at the bottom of the lower front plate 8a, and an outlet 8b is provided at the upper front plate 8b.
1 is provided. In the casing 8 there is a suction port 8a.
A rough filter 8d is attached close to the back of 1. A cooling coil 8e is attached to the back of this filter, an electric heater 8f is provided above the coil, and a humidifier 8g is provided above and to the side of the heater.

Furthermore, an air blower 118h is attached above the electric heater 8f, and a guide vane 81 is provided adjacent to the blower cylinder 8h1 of this air blower. Air blower 8 with this guide vane
The airflow from h is rectified and guided to the air outlet 8bl. The blower 8h has a thin blower casing,
The blades are set large and driven by a low-speed rotating motor to suppress noise generation during operation. Air outlet 8b
HEPA (formerly GH Efficiency) is on the back of l.
Penetration Air) filter 8j is attached. Replace filter 8d.

Work such as repairing the blower 8h is performed by removing the lower front plate 8a of the casing 8TD, and removing the high-performance filter 8j.
The replacement is performed by removing the upper front plate 8b. The mounting condition of the casing 8 will be explained below. The bottom surface of the casing 8 is fixed to the floor surface 9 (Fig. 4) with an anchor member (not shown), and the side part of the casing is fixed to the frame 5 by a fixing plate 10 and bolts 11 as shown in Fig. 10. side frame 5
It is fixed at a.

Further, as shown in FIG. 11, the second air conditioning unit A2 is substantially the same as the first air conditioning unit A1 in its main parts, but the heat exchanger color e, 8
f and humidifier 8q are not provided. Note that the reference numerals indicating the constituent parts of the second air conditioning unit A2 are made to match those of the parts corresponding to those of the first air conditioning unit A1. The second air conditioning unit A2 is installed in the same manner as the first air conditioning unit A1.

As shown in FIGS. 1, 2 and 12-13, the control unit B has a casing 12 that is approximately the same size as the casing 8 of the air conditioning unit At, A2, and through the control equipment incorporated therein, Air conditioning unit AI, A2 blower 8h, heat exchanger 8e.

8f and the air shower room 2a are electrically controlled.

The installation status of control unit B is also the same as the above air conditioning unit AI.
, A2, the side portion of the casing 12 is fixed to the side frame 5a of the frame 5 with a fixing plate 10 and bolts 11 as shown in FIG. A plate 12a protrudes from the front of the casing 12, and a back 112b is attached to the back so that it can be opened and closed. Inspection of the number of devices, etc. is performed by removing the back cover 12b.

The inner wall of the airtight room 1 has a wall panel 1 as shown in FIGS.
3, air conditioning unit AI, and the front of A2.

The structure of the inner walls on both the left and right sides in FIG. 1 of the airtight chamber 1 will be explained. A wall panel 13 covers all the spaces between the side frames of the frame 5 except for the space between the side frames where the air conditioning units AI and A2 are located. As shown in FIG. 10 and FIGS. 13 to 17, the wall panel 13 consists of a decorative steel plate 13a and a plaster board 13b attached to the entire back surface of the steel plate. The steps are reinforced with reinforcing frames 13G made of channel steel. Corresponding to both side frames of each frame 5, posts 14 standing up on the floor surface 9 are located in front of the side frames. The post 14 is made of a square pipe, and a holding fitting 15 (Figures 15 and 16) is attached to the lower end, and the post is fixed on the floor by fixing this fitting to the floor 9 with bolts 16. .

A wall panel 13 is incorporated between each post. post 1
A side reinforcing frame 13C1 attached to both sides of the wall panel 13 holds the post from both sides of the wall panel 13, thereby stably holding the post at the side of the wall panel. Further, the lower part of the wall panel 13 is connected to a support bolt 1 that stands upright on a seat plate 17 installed on the floor surface 9, as shown in FIGS. 14-15 and 17.
It is supported on a base/receiving member 20 fixed to B with a single nut. Two support bolts 18 correspond to one wall panel 13. The receiving member 20 is made of channel steel and is mounted in a horizontal state with support bolts 18.
The upper part of the receiving member receives the lower reinforcing frame 13C2 of the wall panel 13 in a fitted state (Fig. 17).The height of the wall panel 13 can be adjusted by turning the nut 19 to move the level of the receiving member 20 up and down. The upper part of the wall panel 13 is supported by a long holding member 21 having a groove-shaped cross section as shown in FIGS. 4 and 18.

Also, as shown in FIGS. 2 and 19, among the wall panels covering the outer surface of the airtight room 1, the method of supporting the wall panel constituting the inner wall on the right side of FIGS. 3 and 19 is as follows:
substantially identical to that of the side wall panels. The left wall panel 13 is combined with the wall panel 22 of the preliminary chamber 2 to form a partition wall 3 that partitions the airtight chamber 1 and the preliminary chamber 2. The structure of the wall panel 22 is substantially the same as that of the wall panel 13, as shown in FIGS. 19-22. The wall panels 13 and 22 fit together via reinforcing frames 13C and 22C, and the reinforcing frames 13cl on the sides of both panels.

22C1 holds a post 14 that is fixed upright on the floor surface 9. The method of fixing the post 14 to the floor surface 9 is substantially the same as the method of fixing the post described above (FIG. 16). The lower part of the panel 13.22 is supported by fitting the lower reinforcing frame 13C1 onto the base receiving member 20 attached to the bolt 18, as shown in FIG. 22C
2 is a lower reinforcing frame. The level of the receiving member 20 can be adjusted by operating the nut 19. The upper part of the panel 13.22 is held by a holding member 23 having substantially the same structure as the holding member 21 described above (FIG. 18).

Furthermore, the ceiling plate 24 of the airtight room 1 is made of a glass wool plate.

As shown in FIGS. 1 and 18 and 19, a holding bar 25 for holding the ceiling plate 24 is supported by a bar 7 having an M-shaped cross section and suspended from a long support member 6. As shown in FIGS.

Furthermore, the method of sealing the airtight chamber 1 is as follows. In other words, the gap between the first air conditioning unit A1 and the wall panel 13 is
The side surface of the casing 8 and the post 14 as shown in FIG.
Elastic sealing material 2 on the front of the backup material in the gap between
7 to seal the gap. The gap between the second air conditioning unit A2 and the wall panel 13 is sealed in a similar manner. The gaps between the joints of the wall panels 13 are sealed by placing back-up material 26 and elastic sealing material 27 in the gaps between adjacent panels, as shown in FIGS. 13, 14 and 21. A part of the corner of the airtight room 1, for example, the windowed wall panel 13A (first
23, a back-up material 26 and an elastic sealing material 27 are arranged between the side surface of the wall panel and the front surface of the side end of the wall panel. It is sealed by setting it. 28 is a cover plate. Other corner portions are sealed in substantially the same manner.

The method for sealing the gap between the floor surface 9 and the lower part of the inner wall is as follows:
As shown in Figure 4, Figure 12 and Figures 14 to 17, the floor surface 9
A sealing sheet 29 made of vinyl chloride is spread over the entire upper surface, and the outer periphery of the sheet is adhered to the lower surface of the inner wall to seal the above-mentioned gap.

The outer periphery of the sheet 29 also serves as a baseboard. Ceiling board 2
The outer periphery of 4 is also sealed with an elastic sealing material 27 as shown in Figures 18 and 19.

Note that the wall 31 having the entrance door 30 of the preliminary chamber 2 has the same structure as the partition wall 3 described above, and the other walls have substantially the same structure as the outer wall facing the partition wall of the airtight chamber 1.

Next, the assembly of the clean room will be explained.

First, three frames 5 are installed on the floor surface 9 at equal intervals, and the horizontal parts 5C of the frames are connected by a long support member 6.

Next, as shown in FIG. 2, the posts 14 are set up at equal intervals along each side frame 5a and 5b of the frame 5, and between the opposing side frames 5a and 5b of the outermost frame. The lower ends of the posts are fixed to the floor surface 9 with bolts 16. Thereafter, the first air conditioning unit A1 and the control unit B are installed between predetermined side frames on one side frame 5a side, and the second air conditioning unit is installed between the control unit B and the opposite side frame on the other side frame 5b side. Incorporate A2. At this time, the air conditioning unit A1 and the control unit B are not placed next to each other, but are always positioned with the side frame 5a in between.

Then, the support bolt 18 and the receiving member 20 are set on the floor surface 9 between the posts 14, and after setting, the wall panel 13 is set between the posts.
is assembled, the lower part of the panel is placed on the receiving member, the side reinforcing frames 13C1 are placed on both sides of the post, and the upper part of the panel is supported by the holding members 21.23. After that, a ceiling board 24 is installed, a sealing sheet 29 is spread over the entire surface of the floor 9, the outer peripheral part of the sheet is glued to the lower part of the inner wall, and a back-up material 26 and an elastic sealing material 27 are used inside the airtight room. and seal tightly. The preliminary chamber 2 is assembled in parallel with the airtight chamber 1.

Next, the effect will be explained.

When the control unit B is operated to operate the blower 8h of the first air conditioning unit A1, the heat exchangers 8e and 8f, the humidifier 8g, and the blower 8h of the second air conditioning unit A2, the airtight chamber 1
The air inside passes through the suction port 8a1 of the casing 8 of the first air conditioning unit A1, as shown by the arrow in FIG. 8, the filter 8d, the cooling coil 8e, and the electric heater 8f.
Enters the blower 8h, becomes a blown airflow, and moves to the guide vane 81.
passes through the HEPA filter 8j,
The clean air is blown out horizontally into the room from the outlet 8b1. The air is cooled by a cooling coil 8e or relaxed by an electric heater 8f.

At the same time, indoor air is sucked into the casing 8 from the suction port 8al of the second air conditioning unit A2 as shown by the arrow in FIG. It's blown out.

The airflow distribution in the airtight chamber of the air blown out from the second air conditioning unit A2 is shown in FIG. 24, and the dust concentration distribution is shown in FIG. 25, respectively. 32 is a desk placed in the room. It can be seen that the airflow is stagnant on the indoor air conditioning unit A1 side. In Figure 25, circle 33 represents dust,
The longer the radius, the greater the dust. It can be seen that large particles of dust are floating near the dust source.

The cleanliness inside the airtight room 1 is 1500 mm at each point on the floor.
The results of measurement at three levels of 1000 mm and 500 mm are shown in FIGS. 26 and 27. Figure 26 shows the case where one air conditioning unit is operated, and Figure 27 shows the case where two air conditioning units are operated.
You can win if you drive the car. 3 in the room in both figures.
The cleanliness was measured at 5 locations, the measurement points were identified by circles, each location was numbered from 1 to 35, and the odd numbered locations were marked with their cleanliness.

First, FIG. 26 will be explained. This figure shows the cleanliness at each measurement point when only the air conditioning unit A1 is operated. Figure 26 (1) is 1500m above the floor.
For example, the cleanliness level is class 760 at measurement point 1 and class 1100 at measurement point 25.
and the average value is class 1190. Figure 26 (1
In 1), the average value of cleanliness is class 960, as measured at a level of 1000 mm above the floor. Figure 26 (
In iii), the average value of cleanliness was measured at a level of 500 mm above the floor, and was class 770.

Comparing the cleanliness at measurement point 25, the highest cleanliness level was 500mm above the floor at class 260, followed by 100.
The 0mm level is class 1070, and the 1500mm level is the lowest, class 1100.

Next, FIG. 27 will be explained. This figure shows a case where two air conditioning units A1 and A2 are operated. 27th
Figure (1) shows the cleanliness measured at a level of 1,500 mm above the floor, and the average value is class 970.
00mm, the average value is class 1
120 and class 850.

Comparing the cleanliness level when two air conditioning units are operated and when one air conditioning unit is operated at a level of 1500mm above the floor, for example, at measurement point 25, in the former case, the cleanliness level is class 770.
However, in the latter case, it is class 1100. From this, increasing the number of air conditioning units will increase the cleanliness level, and if it is necessary to further increase the cleanliness level, as shown in the chain line in Figure 2, between the side frames facing the air conditioning unit A1. An air conditioning unit A3 similar to the air conditioning unit A2 is provided.

The number of air conditioning units to be installed is appropriately selected depending on the span of the airtight room (distance between the side frames 5a and 5b), the required cleanliness, or the amount of dust generated.

Also, if you want to add more airtight chambers 1, extend them upwards in Figure 2. When expanding the example shown in Figure 2, the fourth frame should be installed 1000 mm away from the third frame (the frame located at the top of Figure 2) with frame 5 on the preliminary room 2 side as a reference. Bye. If an air conditioning unit is required due to expansion, the air conditioning unit may be installed between both sides or one side of the third and fourth frames.

Although only one air conditioning unit may be installed in the airtight room, cleanliness can be improved by installing two air conditioning units as shown above. If the installation positions of the 1.2 units are set on opposite sides, it is suitable for cases where the span of the airtight room is long and when high cleanliness is required. If the above-mentioned sealing sheet 29 is used as a sealing means between the floor surface 9 and the inner wall of the airtight room, the sealing will be ensured and the sealing operation can be performed easily and quickly.

(Effects of the Invention) According to the present invention, construction can be carried out by simply incorporating an air conditioning unit and a control unit between the sides of the frame and partitioning an airtight room with a wall panel and a ceiling board. Since only the construction work is required, the construction can be done easily and in a short period of time, and the construction cost is also low.

And since there is no need for a mechanical space like in the past, the scale of the building can be reduced. The scale can be expanded (expanded) or reduced as necessary.

[Brief explanation of drawings]

Fig. 1 is a partially omitted perspective view, Fig. 2 is a cross-sectional view, Fig. 3 is a sectional view taken along the line m-m of Fig. 1, Fig. 4 is a sectional view taken along the line IV-IV of Fig. 2, and Fig. 5 is a sectional view taken along the line IV-IV of Fig. 2. An assembled view and an exploded view of the gate frame. Figure 6 is an enlarged front view of the upper part of the gate frame. Figure 7 is an enlarged plan view of a portion of the horizontal part of the gate frame. Figure 8 is the first air conditioning unit. 9 is a sectional view taken along the line IX-IX in FIG. Partially cutaway front view of the unit, No. 12
The figure is a vertical cross-sectional view showing an enlarged state of the control unit in an upright position. Figure 13 is a cross-sectional view taken along the line xm-xm in Figure 12. Figure 14 is a cross-sectional view of the joint part of the wall panel. Figure 15 is a wall sectional view. A partially cutaway front view showing the lower part of the joint part of the panel, Figure 16 is a cross-sectional view taken along the line XVI-XVI in Figure 15, Figure 17 is a cross-sectional view taken along the line X■-X■ in Figure 15, and Figure 18 is the Figure X■
-X■ line enlarged sectional view, Figure 19 is Figure 2 XIX-XIX
20 is a partially exploded perspective view of the partition wall, FIG. 21 is an enlarged sectional view taken along the line XXI-XXI of FIG. 20, FIG. 22 is an enlarged sectional view taken along the line XXN-XXN of FIG. 20, FIG. 23 24 is an explanatory diagram showing the airflow distribution in the airtight chamber. FIG. 25 is an explanatory diagram showing the dust concentration distribution in the airtight chamber. Figure 26 shows the cleanliness in an airtight room measured at three levels when one air conditioning unit is operated, and Figure 27 shows the cleanliness in an airtight room when two air conditioning units are operated. It is a figure which shows the value measured at the level of a stage. 1... Airtight chamber, 5... Frame, 5a, 5b...
Side part, 5G...Horizontal part, 8...Exterior casing, 8
al...Suction port, 8b1...Blowout port, 8e, 8f
...Heat exchanger, 8h...Blower, 8j...High performance filter, 9...Floor surface, 12...Exterior casing, 13...Wall panel, 24...Ceiling board, 26 .27
．． 29... Sealing means, AI, A2, A3... Air conditioning unit, B... Control unit. Above Φe, br - Figure 10 Al1

Claims (1)

[Claims] 1. A plurality of gate-shaped frames arranged side by side in a predetermined direction at intervals on the floor of a building, and at least one gate-shaped frame installed between the sides of the adjacent frames and forming a part of an inner wall. One air conditioning unit, a control unit that controls the air conditioning unit that is installed between the sides other than the side where this air conditioning unit is located, and a control unit that controls the air conditioning unit that is installed between the sides of the adjacent frames. A wall panel that covers the sides of the frame excluding the side where the unit is located and the inside of the frame, a wall panel that covers the outside of the frame located outside, and an airtight room partitioned by the wall panel. The air conditioning unit includes a ceiling plate that covers the upper part, and a sealing means that seals the inside of the airtight room, and the air conditioning unit has a thin exterior casing, and a suction port is provided at the lower part of the indoor side of the casing, and a high-performance filter is provided at the upper part. Each outlet is equipped with a
A blower is disposed within the casing, and airflow from the blower can be blown out to the outlet, and the control unit is characterized in that control equipment is incorporated in the thin exterior casing. clean room. 2. A clean room according to claim 1, characterized in that there are at least two air conditioning units, and a heat exchanger is built into the casing of one of the air conditioning units. 3. A clean room according to claim 2, characterized in that one air conditioning unit and the other air conditioning unit are installed on opposite sides. 4. The clean room according to claim 1, wherein the sealing means for sealing the gap between the lower part of the inner wall of the airtight room and the floor surface is a sheet that covers the gap and the entire floor surface.