JPS61195060U - - Google Patents
Info
- Publication number
- JPS61195060U JPS61195060U JP7864585U JP7864585U JPS61195060U JP S61195060 U JPS61195060 U JP S61195060U JP 7864585 U JP7864585 U JP 7864585U JP 7864585 U JP7864585 U JP 7864585U JP S61195060 U JPS61195060 U JP S61195060U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer carrier
- facet
- aligner
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 11
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7864585U JPS61195060U (fr) | 1985-05-27 | 1985-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7864585U JPS61195060U (fr) | 1985-05-27 | 1985-05-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61195060U true JPS61195060U (fr) | 1986-12-04 |
Family
ID=30622809
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7864585U Pending JPS61195060U (fr) | 1985-05-27 | 1985-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61195060U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0521444U (ja) * | 1991-08-28 | 1993-03-19 | 大日本スクリーン製造株式会社 | ウエハ保持ホルダ |
-
1985
- 1985-05-27 JP JP7864585U patent/JPS61195060U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0521444U (ja) * | 1991-08-28 | 1993-03-19 | 大日本スクリーン製造株式会社 | ウエハ保持ホルダ |