JPS61195060U - - Google Patents
Info
- Publication number
- JPS61195060U JPS61195060U JP7864585U JP7864585U JPS61195060U JP S61195060 U JPS61195060 U JP S61195060U JP 7864585 U JP7864585 U JP 7864585U JP 7864585 U JP7864585 U JP 7864585U JP S61195060 U JPS61195060 U JP S61195060U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer carrier
- facet
- aligner
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 11
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Description
第１図および第２図は本考案の実施例を示し、
第１図はこの実施例のフアセツトアライナの斜視
図、第２図はその使用状態の縦断正面図、第３図
はウエハーキヤリアの斜視図、第４図は第３図に
おける切断線―に沿う断面図、第５図は縦来
例のフアセツトアライナの斜視図、第６図はその
使用状態の縦断正面図である。
１……ウエハー、１ａ……フアセツト、２……
ウエハーキヤリア、３……フアセツトアライナ、
４……ウエハーキヤリアの一端開放部、５……フ
レーム、８……アライナローラ、１６……フアセ
ツト固定軸、ｈ……オフセツト。
1 and 2 show an embodiment of the present invention,
Fig. 1 is a perspective view of the facet aligner of this embodiment, Fig. 2 is a longitudinal sectional front view of its usage state, Fig. 3 is a perspective view of the wafer carrier, and Fig. 4 is taken along the cutting line in Fig. 3. 5 is a vertical perspective view of a conventional facet aligner, and FIG. 6 is a vertical sectional front view of the facet aligner in use. 1...Wafer, 1a...Facet, 2...
Wafer carrier, 3...Facet aligner,
4... One open end of wafer carrier, 5... Frame, 8... Aligner roller, 16... Facet fixing shaft, h... Offset.
Claims (1)
態で収納するウエハーキヤリアの一端開放部に装
着されて、該ウエハーキヤリア内の各ウエハーの
フアセツトを前記開放部に臨む所定位置に位置揃
えするためのフアセツトアライナであつて、前記
ウエハーキヤリアの開放部に嵌合されるフレーム
を備え、このフレーム内に前記ウエハーキヤリア
内のウエハーの周縁に転接するアライナローラを
回転可能に枢支してなるフアセツトアライナにお
いて、前記ウエハーのフアセツトに当接して該ウ
エハーの回転を阻止するためのフアセツト固定軸
を前記フレーム内に、前記アライナローラの軸方
向に沿つて取り付けたことを特徴とするフアセツ
トアライナ。 A wafer carrier for storing a plurality of wafers aligned in the thickness direction, the wafer carrier being attached to an opening at one end of the wafer carrier, and for aligning the facets of each wafer in the wafer carrier at a predetermined position facing the opening. A facet aligner comprising a frame fitted into the opening of the wafer carrier, and rotatably supported within the frame an aligner roller that rolls into contact with the periphery of the wafer in the wafer carrier. A facet aligner characterized in that a facet fixing shaft for abutting against the facet of the wafer and preventing rotation of the wafer is mounted within the frame along the axial direction of the aligner roller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7864585U JPS61195060U (en) | 1985-05-27 | 1985-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7864585U JPS61195060U (en) | 1985-05-27 | 1985-05-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61195060U true JPS61195060U (en) | 1986-12-04 |
Family
ID=30622809
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7864585U Pending JPS61195060U (en) | 1985-05-27 | 1985-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61195060U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0521444U (en) * | 1991-08-28 | 1993-03-19 | 大日本スクリーン製造株式会社 | Wafer holder |
-
1985
- 1985-05-27 JP JP7864585U patent/JPS61195060U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0521444U (en) * | 1991-08-28 | 1993-03-19 | 大日本スクリーン製造株式会社 | Wafer holder |