JPS61195050U - - Google Patents
Info
- Publication number
- JPS61195050U JPS61195050U JP7798385U JP7798385U JPS61195050U JP S61195050 U JPS61195050 U JP S61195050U JP 7798385 U JP7798385 U JP 7798385U JP 7798385 U JP7798385 U JP 7798385U JP S61195050 U JPS61195050 U JP S61195050U
- Authority
- JP
- Japan
- Prior art keywords
- processing
- processing tank
- rack
- tank
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000010992 reflux Methods 0.000 claims 1
- 238000004381 surface treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7798385U JPH0214199Y2 (ru) | 1985-05-25 | 1985-05-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7798385U JPH0214199Y2 (ru) | 1985-05-25 | 1985-05-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61195050U true JPS61195050U (ru) | 1986-12-04 |
JPH0214199Y2 JPH0214199Y2 (ru) | 1990-04-18 |
Family
ID=30621548
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7798385U Expired JPH0214199Y2 (ru) | 1985-05-25 | 1985-05-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0214199Y2 (ru) |
-
1985
- 1985-05-25 JP JP7798385U patent/JPH0214199Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPH0214199Y2 (ru) | 1990-04-18 |