JPS61195050U - - Google Patents

Info

Publication number
JPS61195050U
JPS61195050U JP7798385U JP7798385U JPS61195050U JP S61195050 U JPS61195050 U JP S61195050U JP 7798385 U JP7798385 U JP 7798385U JP 7798385 U JP7798385 U JP 7798385U JP S61195050 U JPS61195050 U JP S61195050U
Authority
JP
Japan
Prior art keywords
processing
processing tank
rack
tank
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7798385U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0214199Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7798385U priority Critical patent/JPH0214199Y2/ja
Publication of JPS61195050U publication Critical patent/JPS61195050U/ja
Application granted granted Critical
Publication of JPH0214199Y2 publication Critical patent/JPH0214199Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP7798385U 1985-05-25 1985-05-25 Expired JPH0214199Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7798385U JPH0214199Y2 (enrdf_load_stackoverflow) 1985-05-25 1985-05-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7798385U JPH0214199Y2 (enrdf_load_stackoverflow) 1985-05-25 1985-05-25

Publications (2)

Publication Number Publication Date
JPS61195050U true JPS61195050U (enrdf_load_stackoverflow) 1986-12-04
JPH0214199Y2 JPH0214199Y2 (enrdf_load_stackoverflow) 1990-04-18

Family

ID=30621548

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7798385U Expired JPH0214199Y2 (enrdf_load_stackoverflow) 1985-05-25 1985-05-25

Country Status (1)

Country Link
JP (1) JPH0214199Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0214199Y2 (enrdf_load_stackoverflow) 1990-04-18

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