JPS61192449U - - Google Patents
Info
- Publication number
- JPS61192449U JPS61192449U JP1985077211U JP7721185U JPS61192449U JP S61192449 U JPS61192449 U JP S61192449U JP 1985077211 U JP1985077211 U JP 1985077211U JP 7721185 U JP7721185 U JP 7721185U JP S61192449 U JPS61192449 U JP S61192449U
- Authority
- JP
- Japan
- Prior art keywords
- arm
- orientation flat
- operating amount
- changes
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985077211U JPS61192449U (enExample) | 1985-05-22 | 1985-05-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985077211U JPS61192449U (enExample) | 1985-05-22 | 1985-05-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61192449U true JPS61192449U (enExample) | 1986-11-29 |
Family
ID=30620067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985077211U Pending JPS61192449U (enExample) | 1985-05-22 | 1985-05-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61192449U (enExample) |
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1985
- 1985-05-22 JP JP1985077211U patent/JPS61192449U/ja active Pending