JPS61162051U - - Google Patents
Info
- Publication number
- JPS61162051U JPS61162051U JP1985043210U JP4321085U JPS61162051U JP S61162051 U JPS61162051 U JP S61162051U JP 1985043210 U JP1985043210 U JP 1985043210U JP 4321085 U JP4321085 U JP 4321085U JP S61162051 U JPS61162051 U JP S61162051U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- arm
- wafer
- section
- sample detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985043210U JPS61162051U (enExample) | 1985-03-27 | 1985-03-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985043210U JPS61162051U (enExample) | 1985-03-27 | 1985-03-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61162051U true JPS61162051U (enExample) | 1986-10-07 |
Family
ID=30554669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985043210U Pending JPS61162051U (enExample) | 1985-03-27 | 1985-03-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61162051U (enExample) |
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1985
- 1985-03-27 JP JP1985043210U patent/JPS61162051U/ja active Pending