JPS6119183U - 回り止め機構付き弁装置 - Google Patents

回り止め機構付き弁装置

Info

Publication number
JPS6119183U
JPS6119183U JP10345084U JP10345084U JPS6119183U JP S6119183 U JPS6119183 U JP S6119183U JP 10345084 U JP10345084 U JP 10345084U JP 10345084 U JP10345084 U JP 10345084U JP S6119183 U JPS6119183 U JP S6119183U
Authority
JP
Japan
Prior art keywords
piston
valve device
prevention member
rotation prevention
rotation mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10345084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0245568Y2 (enrdf_load_stackoverflow
Inventor
知樹 只腰
正好 鵜飼
Original Assignee
シ−ケ−デイ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by シ−ケ−デイ株式会社 filed Critical シ−ケ−デイ株式会社
Priority to JP10345084U priority Critical patent/JPS6119183U/ja
Publication of JPS6119183U publication Critical patent/JPS6119183U/ja
Application granted granted Critical
Publication of JPH0245568Y2 publication Critical patent/JPH0245568Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
JP10345084U 1984-07-09 1984-07-09 回り止め機構付き弁装置 Granted JPS6119183U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10345084U JPS6119183U (ja) 1984-07-09 1984-07-09 回り止め機構付き弁装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10345084U JPS6119183U (ja) 1984-07-09 1984-07-09 回り止め機構付き弁装置

Publications (2)

Publication Number Publication Date
JPS6119183U true JPS6119183U (ja) 1986-02-04
JPH0245568Y2 JPH0245568Y2 (enrdf_load_stackoverflow) 1990-12-03

Family

ID=30662844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10345084U Granted JPS6119183U (ja) 1984-07-09 1984-07-09 回り止め機構付き弁装置

Country Status (1)

Country Link
JP (1) JPS6119183U (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6387485A (ja) * 1986-10-01 1988-04-18 株式会社東芝 群管理エレベ−タの制御装置
JP2005282712A (ja) * 2004-03-30 2005-10-13 Dainippon Screen Mfg Co Ltd 単動空気シリンダ弁およびそれを備えた基板処理装置
JP2008121859A (ja) * 2006-11-15 2008-05-29 Ckd Corp 真空弁

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6387485A (ja) * 1986-10-01 1988-04-18 株式会社東芝 群管理エレベ−タの制御装置
JP2005282712A (ja) * 2004-03-30 2005-10-13 Dainippon Screen Mfg Co Ltd 単動空気シリンダ弁およびそれを備えた基板処理装置
JP2008121859A (ja) * 2006-11-15 2008-05-29 Ckd Corp 真空弁

Also Published As

Publication number Publication date
JPH0245568Y2 (enrdf_load_stackoverflow) 1990-12-03

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