JPS61189025U - - Google Patents
Info
- Publication number
- JPS61189025U JPS61189025U JP7353385U JP7353385U JPS61189025U JP S61189025 U JPS61189025 U JP S61189025U JP 7353385 U JP7353385 U JP 7353385U JP 7353385 U JP7353385 U JP 7353385U JP S61189025 U JPS61189025 U JP S61189025U
- Authority
- JP
- Japan
- Prior art keywords
- magazine
- positioning
- positioning device
- view
- gripping mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
- Automatic Assembly (AREA)
- Packaging Frangible Articles (AREA)
- Special Conveying (AREA)
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7353385U JPS61189025U (pt) | 1985-05-20 | 1985-05-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7353385U JPS61189025U (pt) | 1985-05-20 | 1985-05-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61189025U true JPS61189025U (pt) | 1986-11-25 |
Family
ID=30612991
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7353385U Pending JPS61189025U (pt) | 1985-05-20 | 1985-05-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61189025U (pt) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03156954A (ja) * | 1989-11-15 | 1991-07-04 | Ebara Corp | ウエハキャリヤの洗浄槽に設けられる位置決め装置 |
JPH03156953A (ja) * | 1989-11-15 | 1991-07-04 | Ebara Corp | 回転式ストッカーの固定装置 |
JPH0710943U (ja) * | 1993-07-07 | 1995-02-14 | 住友精密工業株式会社 | ウエハキャリア位置決め機構 |
JPH0919833A (ja) * | 1995-07-04 | 1997-01-21 | Central Motor Co Ltd | 位置決め装置 |
-
1985
- 1985-05-20 JP JP7353385U patent/JPS61189025U/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03156954A (ja) * | 1989-11-15 | 1991-07-04 | Ebara Corp | ウエハキャリヤの洗浄槽に設けられる位置決め装置 |
JPH03156953A (ja) * | 1989-11-15 | 1991-07-04 | Ebara Corp | 回転式ストッカーの固定装置 |
JPH0710943U (ja) * | 1993-07-07 | 1995-02-14 | 住友精密工業株式会社 | ウエハキャリア位置決め機構 |
JPH0919833A (ja) * | 1995-07-04 | 1997-01-21 | Central Motor Co Ltd | 位置決め装置 |
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