JPS61188740A - Manufacture of magnetic recording medium - Google Patents

Abstract

PURPOSE:To manufacture stably a magnetic recording medium having no wrinkle by constituting it so that a substrate is brought to pre-heating of >=80 deg.C right before a cylindrical can which has been heated to >=100 deg.C, and on the other hand, it is brought to cooling of <=20 deg.C right behind an outlet of the can. CONSTITUTION:A substrate 2 consisting of a heat resisting high polymer material or PET contacts to a heating roller 10 which has been heated to 80 deg.C, it is brought to pre-heating enough, and in a state that its thermal deformation has been ended, it goes into a cylindrical can 3 which has been heated to 100 deg.C. Therefore, no wrinkle is generated in the substrate 2 on the cylindrical can 3, and 'permalloy(R)' and a Co-Cr alloy are spattered in a part 7 and a part 8, respectively. The substrate 2 to which a metallic layer has been spattered contacts to a cooling roller 11 which has been cooled to 20 deg.C, immediately after it has come out of the cylindrical can 3, delivers heat by spattering to the roller, and it is wound without transmitting the heat to a winding roller.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention is a flexible denosk (hereinafter referred to as FD
The present invention relates to a method for manufacturing high-density magnetic recording media, such as magnetic recording media (hereinafter referred to as "magnetic recording media") and tapes.

BACKGROUND OF THE INVENTION A perpendicular magnetic recording system is a magnetic recording system with excellent short wavelength recording characteristics. This magnetizes the medium in a direction perpendicular to the film surface of the magnetic recording medium. Therefore, in this method, it is necessary to use a perpendicular magnetization film in which residual magnetization remains in the direction perpendicular to the medium film surface. The perpendicular magnetization film is made of carbon whose main components are cobalt (hereinafter abbreviated as Co) and chromium (hereinafter abbreviated as Cr).
o -Cr alloy film has excellent properties. On the other hand, in order to perform high-density recording using a single magnetic pole head (hereinafter abbreviated as SPT), it is necessary to concentrate magnetic flux inside the Co-Cr alloy film, and therefore the underlayer (hereinafter referred to as B and L) is required. A soft magnetic layer is provided as (omitted). Soft magnetic B, L, binding, permalloy or supermalloy are used. The thickness of each film is 0.2 μm for the Co-Cr alloy film, and 0.5 to 0.8 μm for the soft magnetic B and L layers.

The most excellent high-density recording is achieved at the above film thickness.

Conventionally, metal films for perpendicular magnetic recording media have been made of polyester (
The film was formed on a substrate made of PET (hereinafter abbreviated as PET) or a heat-resistant polymer material using a DC magnetron high-speed sputtering method. Hereinafter, a conventional method for manufacturing a perpendicular magnetic recording medium will be explained using FIG.

FIG. 2 shows a method of manufacturing a perpendicular magnetic recording medium using a DC magnetron high speed sputtering method. In FIG. 2, a substrate 2 made of a heat-resistant polymer material or PET is inserted into a can 3 heated to 100° C. or more from a gastrointestinal tube 1.
After permalloy is sputtered at a portion 7 and Co-Cr is sputtered at a portion 8, the sheet is passed through a guide roller 9 and wound up.

5 is a permalloy target, 6 is a Co-Cr alloy target, and 4 is a mask. In addition, permalloy and Co
-The thickness of the Cr film is adjusted by the widths of the mask openings 7 and 8.

Problems to be Solved by the Invention However, when a perpendicular magnetic recording medium was produced in a continuous winding manner using the DC magnetron high speed sputtering method as described above, the following problems occurred.

When a substrate made of a heat-resistant polymer material or PET comes into contact with the circumferential surface of a cylindrical can heated to 100°C or higher, the substrate is rapidly heated and thermally deformed, resulting in wrinkles on the can surface. This does not disappear on the can, so when permalloy or Co-Cr alloy is sputtered onto this, the heat from the sputtering cannot escape to the can due to the wrinkles, causing the substrate to lose heat. This caused the inconvenience of having to do so.

On the other hand, a substrate sputtered with permalloy or a Co--Cr alloy receives considerable heat during sputtering9 and reaches a high temperature. Even if the substrate heated to such a high temperature is separated from the can, the heat cannot be dissipated, so heat is accumulated in the take-up roller, and the temperature of the take-up roller eventually becomes high. When the high-temperature take-up roller is subsequently cooled to room temperature, the substrate shrinks, creating a disadvantage in that tensile stress is generated in the perpendicular magnetic recording medium wound into a roll.

The present invention solves the above-mentioned problems, namely, the wrinkles that occur due to rapid thermal deformation when the substrate contacts the cylindrical can, and the resulting heat negative during sputtering. The present invention aims to stably produce wrinkle-free magnetic recording media by solving the two problems of tightness caused by shrinkage of the substrate when it is cooled to room temperature. When forming a permalloy and cobalt-chromium alloy as a metal film for a magnetic recording medium by DC magnetron high-speed sputtering by running a substrate made of Immediately before the cylindrical can, a heating roller heated to 80° C. or higher is provided to preheat the substrate immediately before entering the can, and immediately after the can, a cooling roller cooled to 20° C. or lower is provided. The above object is achieved by cooling the sputtered substrate immediately after leaving the can.

Effects The present invention, in accordance with the above configuration, uses heat-resistant polymeric material or PE.
A substrate made of T is preheated to 80°C or more just before the cylindrical can heated to 100°C or more, and cooled to 20°C or less just after the exit of the can.
It is designed to stably manufacture wrinkle-free magnetic recording media.

Embodiment FIG. 1 shows an embodiment of the present invention in which a heating roller and a cooling roller are installed before and after a cylindrical can. FIG. 3 is a diagram showing a method for manufacturing a magnetic recording medium.

In FIG. 1, a substrate 2 made of a heat-resistant polymer material or PET is brought into contact with a heating gate 10 heated to 80'C, and is sufficiently preheated to complete thermal deformation. ,
It enters a cylindrical can 3 heated to 100'C. Therefore, on the cylindrical can 3, permalloy is sputtered at the portion 7 and Co--Cr alloy is sputtered at the portion 8 without causing any wrinkles on the substrate 2. The substrate 2 on which the metal layer has been sputtered comes into contact with the cooling row 211 that has been cooled to 20°C immediately after leaving the cylindrical can 3, receives and transfers the heat generated by the sputtering, and the heat goes to the take-up roller. It can be wound up without any problem.

As described above, according to this embodiment, by installing the heating roller and the cooling roller before and after the cylindrical can, it is possible to preheat the substrate and cool it after sputtering.

Effects of the Invention As described above, according to the present invention, a wrinkle-free magnetic recording medium can be stably manufactured in a continuous winding manner, and its effects are significant.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram showing a method for manufacturing a magnetic recording medium according to an embodiment of the present invention, and FIG. 2 is a schematic diagram showing a method for manufacturing a magnetic recording medium by a conventional DC magnetron high-speed sputtering method. 2... Board, 3... Cylindrical can, 4
...Mask, 6 ... Permalloy target, 6 ... Co-Cr alloy target, 1o
... Heating roller, 11... Cooling roller. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Figure 2

Claims (1)

[Claims] 10 substrates made of heat-resistant polymer material or polyester
When forming permalloy and cobalt-chromium alloy as a metal film for a magnetic recording medium by DC magnetron high speed sputtering, the cylinder is run along the circumference of a cylindrical can heated to 0°C or higher. Immediately before the can, a heating roller heated to 80°C or more is provided to preheat the substrate immediately before entering the can, and immediately after the can, a cooling roller cooled to 20°C or less is provided to perform sputtering. A method for manufacturing a magnetic recording medium, characterized in that the substrate is cooled immediately after leaving the can.