JPS61160836A - Production of magnetic recording medium - Google Patents

Production of magnetic recording medium

Info

Publication number
JPS61160836A
JPS61160836A JP28099584A JP28099584A JPS61160836A JP S61160836 A JPS61160836 A JP S61160836A JP 28099584 A JP28099584 A JP 28099584A JP 28099584 A JP28099584 A JP 28099584A JP S61160836 A JPS61160836 A JP S61160836A
Authority
JP
Japan
Prior art keywords
film
roll
magnetic layer
heating
recording medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28099584A
Other languages
Japanese (ja)
Inventor
Takashi Yamada
隆 山田
Reiji Nishikawa
西川 羚二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP28099584A priority Critical patent/JPS61160836A/en
Publication of JPS61160836A publication Critical patent/JPS61160836A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To eliminate the generation of projections owing to oligomer on the surface of a polyethylene terephthalate film by heating said film within a specific temp. range for specific time or below and forming a thin magnetic film consisting essentially of Co-Cr on the film under said conditions. CONSTITUTION:The polyester (PET) film 2 is brought into contact with a roll 1 heated to 100-140 deg.C and is guided in the course by auxiliary rolls 5, 6, 7, 8. The rolls 6, 7 are made vertically movable as shown by an arrow to permit the adjustment of the contact angle theta of the film 2 with the roll 1. The contact time of the film 2 with the roll is set at a few minutes or below. The magnetic material consisting essentially of Co-Cr is sputtered onto the film 2 through an aperture of a mask 9 from a target 10 under the roll to form the magnetic layer. The magnetic layer is thus formed at and for the temp. and time at and for which the oligomer in the PET film forms the projections on the film 2 surface or below. The spacing loss is decreased and the defect such as the easy tendency to the exfoliation of the magnetic layer is eliminated.

Description

【発明の詳細な説明】 〔発明の技術分野〕 この発明は垂直磁気記録方式の記録媒体として最適なC
o−Crを主成分とする磁性層薄膜を有する磁気記録媒
体の製造方法に関する。
[Detailed Description of the Invention] [Technical Field of the Invention] The present invention provides a C
The present invention relates to a method of manufacturing a magnetic recording medium having a magnetic layer thin film containing o-Cr as a main component.

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

最近、高密度の記録を行なうものとして磁気記録媒体の
磁性層に対して垂直方向に磁化を行なう所謂垂直磁気記
録方式が注目されている。
Recently, a so-called perpendicular magnetic recording system, in which the magnetic layer of a magnetic recording medium is magnetized in the perpendicular direction, has been attracting attention as a method for performing high-density recording.

しかして、従来かかる垂直磁気記録方式に用いられる磁
気記録媒体では磁性層として膜面に垂直な方向に磁化容
易軸を有するCo−0r系スパツタ薄膜を用い、これの
基体として各種高分子フィルムを用いているが、特にか
かる高分子フィルムにはポリエチレンテレフタレート(
以下PETと略称する。−)フィルムが、表面性が良好
で、しなや力1でありヘッド当りにすぐれ、しかも量産
性にすぐ札品質が安定しており、さらに価格的にもポリ
イミド系耐熱性フィルムの約1/10であるなど他の高
分子フィルムに比べすぐれた点を有することから多く用
いられている。
Conventionally, magnetic recording media used in such perpendicular magnetic recording systems use a Co-0r sputtered thin film having an axis of easy magnetization in a direction perpendicular to the film surface as a magnetic layer, and various polymer films are used as a substrate for this. However, in particular, such polymeric films include polyethylene terephthalate (
Hereinafter, it will be abbreviated as PET. -) The film has good surface properties, flexibility and strength of 1, excellent per head, and is easy to mass-produce and has stable bill quality.Furthermore, the price is about 1/2 that of polyimide heat-resistant film. It is widely used because it has superior properties compared to other polymer films, such as a rating of 10.

ところで、このような垂直磁気記録媒体では磁気的性質
として膜組成によって決まる飽和磁化Msと膜面に垂直
な磁気異方性エネルギーKuとが大きいことと、膜面に
垂直方向の保磁力HC−Lが大きいことが要求されてい
る。
Incidentally, in such a perpendicular magnetic recording medium, as magnetic properties, the saturation magnetization Ms determined by the film composition and the magnetic anisotropy energy Ku perpendicular to the film surface are large, and the coercive force HC-L perpendicular to the film surface is large. is required to be large.

このうち、特に保磁力He上は再生出力の大きさを左右
するため十分に大きいことが重要であり、このため膜形
成時の基体面の温度をある程度高くすることが必要であ
る。
Among these, it is particularly important that the coercive force He is sufficiently large because it affects the magnitude of the reproduction output, and for this reason, it is necessary to raise the temperature of the substrate surface to a certain degree during film formation.

そこで、従来かかるCo−Cr垂直磁気記録媒体の製造
方法で、予め加熱される円筒状ロールを用いた連続形成
法においては磁気記録媒体に要求される磁気特性を満た
すCo−Crを主成分とする薄膜を形成するためスパッ
タ時のロール温度を100〜140℃の領域まで上昇さ
せている。
Therefore, in the conventional manufacturing method of such a Co-Cr perpendicular magnetic recording medium, in a continuous forming method using a preheated cylindrical roll, the main component is Co-Cr which satisfies the magnetic properties required for a magnetic recording medium. In order to form a thin film, the roll temperature during sputtering is raised to a range of 100 to 140°C.

ところが、このようにロール温度が100〜140℃の
領域にあると、磁気記録媒体の基体としてPETフィル
ムを使用した場合加熱ロールとPETフィルムが接触す
ることによりPETフィルムに内在するオリゴマー成分
がフィルム表面に拡散され、フィルム表面に微小な突起
状の析出物として形成される。このためこの析出物によ
ってフィルムの表面性が著しく劣化し、特にオリゴマー
による微小突起は磁気記録媒体とこれに摺接されるヘッ
ドとの間に単純なスペーシングの増加をもたらすだけで
なく磁性層が基体から剥れやすくなるなど磁性層の付着
強度を著しく低下させる。また、オリゴマーによる微小
突起の中で粗大化したものは磁気記録媒体のヘッド面走
行によりヘッド表面に付着し磁気記録媒体およびヘッド
面に傷を生じさせる原因となり耐久性に対し悪影響を及
ぼす。さらにヘッドの表面に付着したオリゴマーはヘッ
ドと磁気記録媒体との間のスペーシングをさらに増加さ
せるように作用し再生出力の低下を招くおそれもあった
0 〔発明の目的〕 この発明は上記事情に鑑みてなされたもので、PETフ
ィルムに内在するオリゴマー成分による突起状析出物の
発生を抑制し良質な垂直磁気記録媒体が得られる磁気記
録媒体の製造方法を提供することを目的とする。
However, when the roll temperature is in the range of 100 to 140°C, when a PET film is used as the substrate of a magnetic recording medium, the oligomer components inherent in the PET film are exposed to the surface of the film due to contact between the heating roll and the PET film. , and are formed as minute protrusion-like precipitates on the film surface. For this reason, the surface properties of the film are significantly deteriorated by these precipitates, and in particular, microprotrusions caused by oligomers not only cause a simple increase in the spacing between the magnetic recording medium and the head that slides on it, but also cause the magnetic layer to deteriorate. This significantly reduces the adhesion strength of the magnetic layer, making it more likely to peel off from the substrate. Further, among the minute protrusions formed by the oligomer, those that have become coarse adhere to the head surface as the head surface of the magnetic recording medium runs, causing scratches on the magnetic recording medium and the head surface, and having an adverse effect on durability. Furthermore, the oligomers attached to the surface of the head act to further increase the spacing between the head and the magnetic recording medium, which may lead to a reduction in reproduction output. It is an object of the present invention to provide a method for manufacturing a magnetic recording medium that suppresses the generation of protruding precipitates due to oligomer components inherent in a PET film and provides a high-quality perpendicular magnetic recording medium.

〔発明の概要〕[Summary of the invention]

まずこの発明の考え方を述べると最初PETフィルムの
熱的挙動を詳しく調べたところ、PUTフィルムを加熱
することによってP胛フィルムの表面に析出するオリゴ
マーの平均高さyは、フィルムの加熱温度と加熱時間に
関係し、加熱温度を一定とすると近似的に下式で表わせ
ることが実験にて確昭された。
First, to describe the concept of this invention, we first investigated the thermal behavior of PET film in detail and found that the average height y of oligomers precipitated on the surface of PET film by heating the PET film is determined by the heating temperature of the film and the heating temperature. It has been confirmed through experiments that it is related to time and can be approximately expressed by the following formula if the heating temperature is constant.

y =に/1t−)−c 但しtは加熱時間、腫およびCは定数で加熱温度とフィ
ルム中の残留オリゴマー量によって決定される値である
。ここで、現在市販されている比較的表面性の良い数種
類のPETフィルムについて、k及びCの値を求めたと
ころk>O,C(0となることがわかった。すなわちオ
リゴマーの析出過徨には、潜伏期間Δtが存在し、Δを
以内の加熱ではオリゴマーはほとんど析出しないが加熱
時間がΔtをすぎると急激にオリゴマーの析出が生じる
。そこで、PETフィルム基板上へ磁性層薄膜を形成す
る段階において、PETフィルムの加熱時間を最長でも
Δを程度にすれば、オリゴマーの析出による特性劣化を
極力おさえることが出来る。ここで、加熱温度が140
℃の場合における加熱時間とオリゴマー平均高さとの関
係を第1図に示す。図より加熱温度が140℃の場合の
Δtは2,3分S度となることがわかる。またΔtは加
熱温度が低下すると増大する傾向を示すことがわかった
y = ni/1t-)-c where t is the heating time, and C and C are constant values determined by the heating temperature and the amount of residual oligomer in the film. Here, when we calculated the values of k and C for several types of PET films currently on the market that have relatively good surface properties, we found that k > O, C (0. In other words, due to excessive precipitation of oligomers, There is a latent period Δt, and oligomers hardly precipitate when heated within Δ, but oligomers rapidly precipitate when the heating time exceeds Δt.Therefore, in the step of forming a thin magnetic layer on a PET film substrate. In this case, if the heating time of the PET film is set to about Δ at the maximum, property deterioration due to oligomer precipitation can be suppressed as much as possible.
The relationship between heating time and average oligomer height in the case of ℃ is shown in FIG. From the figure, it can be seen that when the heating temperature is 140° C., Δt is 2 to 3 minutes S degrees. It was also found that Δt tends to increase as the heating temperature decreases.

本発明では上記オリゴマー析出の潜伏期間Δtに着目し
、 PETフィルム基板を加熱しながら磁性層薄膜の形
成を行なうに際して、PETフィルム基板が所定温度に
加熱される時間をたかだかΔを程度にすることによりて
、オリゴマーの析出による特性劣化を極力おさえかつ必
要な磁気特性を確保することができるものである。すな
わち、本発明において要求される磁気特性を満たすため
に必要な基板温度におけるΔtの値は140℃において
要分程度であることから、 PETフィルム基板が加熱
される時間を2,3分以内に設定することによってオリ
ゴマーの析出による特性の劣化を極力おさえることがで
きる。
In the present invention, we focus on the incubation period Δt of oligomer precipitation, and when forming a thin magnetic layer while heating a PET film substrate, the time during which the PET film substrate is heated to a predetermined temperature is adjusted to at most Δt. This makes it possible to suppress property deterioration due to oligomer precipitation as much as possible while ensuring necessary magnetic properties. In other words, since the value of Δt at the substrate temperature necessary to satisfy the magnetic properties required in the present invention is about the same at 140°C, the time for heating the PET film substrate is set within a few minutes. By doing so, deterioration of properties due to oligomer precipitation can be suppressed as much as possible.

〔発明の効果〕〔Effect of the invention〕

この発明によれば100〜140℃に加熱されたPET
フィルム基体上にCo−Crを主成分とする磁性層薄膜
がスパッタ等の方法を用いて形成されるので磁気特性を
満たした垂直磁気記録媒体が得られる。
According to this invention, PET heated to 100-140°C
Since a thin magnetic layer mainly composed of Co--Cr is formed on a film substrate by a method such as sputtering, a perpendicular magnetic recording medium satisfying magnetic properties can be obtained.

しかも、このようにして得られる媒体はPETフィルム
基体の加熱時間のトータルを2,3分以下になるように
しているのでオリゴマー成分によるフイ、ルム表面の突
起状析出物の生成はほとんど生じないことからスペーシ
ングロスによる再生出力の低下を抑えることができると
ともに磁性層の耐久性も充分確保することができる。
Moreover, since the total heating time of the PET film substrate in the medium obtained in this manner is set to be less than 2 to 3 minutes, the formation of protruding precipitates on the surface of the film and the lumen due to oligomer components is almost non-existent. Therefore, it is possible to suppress a decrease in reproduction output due to spacing loss, and to ensure sufficient durability of the magnetic layer.

〔発明の実施例〕[Embodiments of the invention]

以下、この発明の一実施例を図面に従い説明する。 An embodiment of the present invention will be described below with reference to the drawings.

第2図はこの発明を円筒状の加熱ロールを用いた連続形
成法の装置に適用した例を示している。
FIG. 2 shows an example in which the present invention is applied to an apparatus for a continuous forming method using a cylindrical heating roll.

図において1は主ロールで、このロール1は常時100
〜140℃に加熱されている。この主ロール1周面に接
触するようにPETフィルム2.が走行される。このフ
ィルム2は巻出しロール3より送り出され、巻取りロー
ル4にて巻取られ、走路を補助ロール5,6,7,8に
て案内されている。
In the figure, 1 is the main roll, and this roll 1 is always 100.
Heated to ~140°C. PET film 2. is run. This film 2 is sent out from an unwinding roll 3, wound up by a take-up roll 4, and guided along a running path by auxiliary rolls 5, 6, 7, and 8.

ここで、補助ロール6.7は図示矢印方向にて上下動で
きるようになっており、フィルム2の主ロール1への接
触角θを調整できるようにしでいる。
Here, the auxiliary roll 6.7 can be moved up and down in the direction of the arrow shown in the figure, so that the contact angle θ of the film 2 with the main roll 1 can be adjusted.

一方主ロール1のフィルム2接触部に対応してマスク9
を介してCo−C:rターゲット10を設けている。こ
のターゲット10はフィルム2面上にC。
On the other hand, the mask 9 corresponds to the contact part of the main roll 1 with the film 2.
A Co-C:r target 10 is provided via the . This target 10 is placed on the second side of the film.

−Cr を主成分とする磁性層薄膜をスパッタリングに
より形成するためのものである。
This is for forming a magnetic layer thin film containing -Cr as a main component by sputtering.

しかして、このような装置では巻出しロール3より送り
出されたPETフィルム2が補助ロール5゜6を介して
主ロール1に案内され同ロール1の周面に接触は2,3
分以下に設定している。
In such a device, the PET film 2 fed out from the unwinding roll 3 is guided to the main roll 1 via the auxiliary roll 5.
It is set to less than 1 minute.

このようにすれば100〜140℃に加熱したロールl
にPETフィルム2が接触した状態でスパッタリングに
よる磁性層薄膜が形成されるので磁気特性を充分滴定す
る磁気記録媒体が得られる。またロール1とPETフィ
ルム2との接触時間を2,3分以下とすることでオリゴ
マー成分によるフィルム表面の突起状析出物の発生をお
さえることができるのでスペーシングロスによる再生出
力の低下を極力抑制できるとともに磁性層のPUTフィ
ルム面への付着強度の劣化もなく磁性層の耐久性を充分
に確保でき、さらに良好なヘッドタッチも得られる。
In this way, the roll l heated to 100-140℃
Since a magnetic layer thin film is formed by sputtering with the PET film 2 in contact with the PET film 2, a magnetic recording medium whose magnetic properties are sufficiently titrated can be obtained. In addition, by keeping the contact time between the roll 1 and the PET film 2 to 2 to 3 minutes or less, it is possible to suppress the formation of protruding precipitates on the film surface due to oligomer components, thereby minimizing the reduction in playback output due to spacing loss. At the same time, sufficient durability of the magnetic layer can be ensured without deterioration of the adhesion strength of the magnetic layer to the PUT film surface, and furthermore, a better head touch can be obtained.

ちなみに、第2図で述べた連続形成法の装置において主
ロール1の加熱温度を140℃とし、この状態でフィル
ム2の送り速度および主ロール1とフィルム2の接触角
を変化させて主ロール1とフィルム2の接触時間つまり
フィルム2の加熱時間を43分を中心に2,3分以下、
2,3分以上の複数設定し、これら各設定時間の下で夫
々フィルム2上にスパッタリングによる0、5μmの薄
膜を形成した媒体を得、これらの媒体についてリングヘ
ッドを用いて垂直記録、再生を行なったときの再生出力
の状態を調べたところ第3図の結果が得られた。
Incidentally, in the apparatus for the continuous forming method described in FIG. The contact time between the film 2 and the film 2, that is, the heating time of the film 2, is 2 to 3 minutes or less, centered around 43 minutes.
A plurality of settings of 2 to 3 minutes or more were made, and under each of these setting times, media with a thin film of 0 to 5 μm formed by sputtering on the film 2 were obtained, and these media were subjected to perpendicular recording and reproduction using a ring head. When the state of the reproduced output was investigated, the results shown in FIG. 3 were obtained.

同図において、フィルム加熱時間が1分の場合の再生出
力を100%としている。
In the figure, the reproduction output when the film heating time is 1 minute is set to 100%.

この結果f43図より明らかなようにPETフィルムの
加熱時間を2,3分以下とすればスペーシングロスによ
る再生出力の低下を抑制できることが確認された。また
これと同時に各媒体についてPETフィルム上iこ形成
された薄膜の状態についても調べたところ加熱時間2,
3分以下のものは耐久性、ヘッドタッチにおいても良好
な結果が得られた。
As a result, as is clear from Fig. f43, it was confirmed that if the heating time of the PET film was set to 2 to 3 minutes or less, the reduction in reproduction output due to spacing loss could be suppressed. At the same time, we also investigated the state of the thin film formed on the PET film for each medium.
When the time was 3 minutes or less, good results were obtained in terms of durability and head touch.

なお、この発明は上記実施例にのみ限定されず要旨を変
更しない範囲で適宜変形して実施できる。
It should be noted that the present invention is not limited to the above-mentioned embodiments, but can be implemented with appropriate modifications without changing the gist.

例えば上述では円筒状の加熱ロールを用いた連続形成法
について述べたが、これ以外の方式のものにも適用する
ことができる。また上述ではPETフィルムの加熱は一
度だけの場合を述べたが、例えばスパッタリングを複数
回に分けて行ない、この都度フィルムを加熱する場合に
はこれら加熱のトータル時間が2,3分以下になるよう
にすればよい。
For example, although the continuous forming method using a cylindrical heating roll has been described above, it is also possible to apply other methods. Furthermore, in the above, we have described the case where the PET film is heated only once, but if, for example, sputtering is performed multiple times and the film is heated each time, the total time for these heating steps should be 2 to 3 minutes or less. Just do it.

またスパッタリングによりフィルム面上に薄膜を形成し
たのち後処理として加熱を行なう場合にはこのときの加
熱時間も2,3分以下の範囲に加えることろ勿論である
Further, when heating is performed as a post-treatment after forming a thin film on the film surface by sputtering, it goes without saying that the heating time at this time should also be within a range of 2 to 3 minutes or less.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の詳細な説明するための特性図、第2
図はこの発明の一実施例を示す概略的構成図、$3図は
同実施例を説明するための特性図である。 1・・・主ロール    2・++ PETフィルム3
.4,5,6,7,8  ・・・ロール  9・・・マ
スク10・・・ターゲット
Figure 1 is a characteristic diagram for explaining the invention in detail, Figure 2 is a characteristic diagram for explaining the invention in detail.
The figure is a schematic configuration diagram showing one embodiment of the present invention, and the figure $3 is a characteristic diagram for explaining the embodiment. 1... Main roll 2.++ PET film 3
.. 4, 5, 6, 7, 8...Roll 9...Mask 10...Target

Claims (3)

【特許請求の範囲】[Claims] (1)ポリエチレンテレフタレートフィルムよりなる基
体を供給する工程と、この工程にて供給された基体面を
100〜140℃に加熱するとともにこの加熱時間を2
、3分以下に設定する工程と、上記加熱された基体面上
にCo−Crを主成分とする磁性層薄膜を形成する工程
とを具備したことを特徴とする磁気記録媒体の製造方法
(1) A step of supplying a substrate made of polyethylene terephthalate film, heating the surface of the substrate supplied in this step to 100 to 140°C, and heating for 2
, 3 minutes or less, and forming a magnetic layer thin film containing Co--Cr as a main component on the heated substrate surface.
(2)上記基体面を100〜140℃に加熱するととも
にこの加熱時間を2、3分以下に設定する工程は100
〜140℃に加熱された円筒状ロールの周面に基体を接
触させるとともにこの接触時間が2、3分以下になるよ
う設定したことを特徴とする特許請求の範囲第1項記載
の磁気記録媒体の製造方法。
(2) The step of heating the substrate surface to 100 to 140°C and setting the heating time to 2 to 3 minutes or less is 100°C.
The magnetic recording medium according to claim 1, wherein the substrate is brought into contact with the circumferential surface of a cylindrical roll heated to ~140°C, and the contact time is set to be 2 to 3 minutes or less. manufacturing method.
(3)上記基体上に磁性層薄膜を形成する工程はスパッ
タ法を用いたことを特徴とする特許請求の範囲第1項又
は第2項記載の磁気記録媒体の製造方法。
(3) The method for manufacturing a magnetic recording medium according to claim 1 or 2, wherein the step of forming a thin magnetic layer on the substrate uses a sputtering method.
JP28099584A 1984-12-29 1984-12-29 Production of magnetic recording medium Pending JPS61160836A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28099584A JPS61160836A (en) 1984-12-29 1984-12-29 Production of magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28099584A JPS61160836A (en) 1984-12-29 1984-12-29 Production of magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS61160836A true JPS61160836A (en) 1986-07-21

Family

ID=17632791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28099584A Pending JPS61160836A (en) 1984-12-29 1984-12-29 Production of magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS61160836A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5200018A (en) * 1990-12-19 1993-04-06 Hercules Incorporated Ribbonizing apparatus for individually heating a plurality of laterally adjacent tows in a fiber placement device
WO1993023586A1 (en) * 1992-05-11 1993-11-25 Sumitomo Electric Industries, Ltd. Vapor deposition material and production method thereof
US5273602A (en) * 1990-12-19 1993-12-28 Hercules Incorporated Ribbonizing method for selectively heating a respective one of a plurality of fiber tows
US5290389A (en) * 1990-12-19 1994-03-01 Hercules Incorporated Fiber placement delivery system with modular cut/add actuators
US5698066A (en) * 1990-12-19 1997-12-16 Alliant Techsystems Inc. Band fiber forming and placement delivery head
US6752190B1 (en) 1991-07-31 2004-06-22 Alliant Techsystems Inc. Cure-on-the-fly system

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5200018A (en) * 1990-12-19 1993-04-06 Hercules Incorporated Ribbonizing apparatus for individually heating a plurality of laterally adjacent tows in a fiber placement device
US5273602A (en) * 1990-12-19 1993-12-28 Hercules Incorporated Ribbonizing method for selectively heating a respective one of a plurality of fiber tows
US5290389A (en) * 1990-12-19 1994-03-01 Hercules Incorporated Fiber placement delivery system with modular cut/add actuators
US5698066A (en) * 1990-12-19 1997-12-16 Alliant Techsystems Inc. Band fiber forming and placement delivery head
US6752190B1 (en) 1991-07-31 2004-06-22 Alliant Techsystems Inc. Cure-on-the-fly system
WO1993023586A1 (en) * 1992-05-11 1993-11-25 Sumitomo Electric Industries, Ltd. Vapor deposition material and production method thereof
US5441010A (en) * 1992-05-11 1995-08-15 Sumitomo Electric Industries, Ltd. Evaporation material and method of preparing the same
US6126760A (en) * 1992-05-11 2000-10-03 Sumitomo Electric Industries, Ltd. Evaporation material

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