JPS61188349U - - Google Patents
Info
- Publication number
- JPS61188349U JPS61188349U JP6163885U JP6163885U JPS61188349U JP S61188349 U JPS61188349 U JP S61188349U JP 6163885 U JP6163885 U JP 6163885U JP 6163885 U JP6163885 U JP 6163885U JP S61188349 U JPS61188349 U JP S61188349U
- Authority
- JP
- Japan
- Prior art keywords
- photosensitizer
- sample
- spin
- cover
- reflecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002904 solvent Substances 0.000 claims description 4
- 239000003504 photosensitizing agent Substances 0.000 claims description 3
- 238000004528 spin coating Methods 0.000 claims description 3
- 238000007664 blowing Methods 0.000 claims 1
- 238000004140 cleaning Methods 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6163885U JPS61188349U (enExample) | 1985-04-24 | 1985-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6163885U JPS61188349U (enExample) | 1985-04-24 | 1985-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61188349U true JPS61188349U (enExample) | 1986-11-25 |
Family
ID=30590096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6163885U Pending JPS61188349U (enExample) | 1985-04-24 | 1985-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61188349U (enExample) |
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1985
- 1985-04-24 JP JP6163885U patent/JPS61188349U/ja active Pending