JPS61188152U - - Google Patents

Info

Publication number
JPS61188152U
JPS61188152U JP7074785U JP7074785U JPS61188152U JP S61188152 U JPS61188152 U JP S61188152U JP 7074785 U JP7074785 U JP 7074785U JP 7074785 U JP7074785 U JP 7074785U JP S61188152 U JPS61188152 U JP S61188152U
Authority
JP
Japan
Prior art keywords
light source
light
integrator
optical axis
irradiated object
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7074785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7074785U priority Critical patent/JPS61188152U/ja
Publication of JPS61188152U publication Critical patent/JPS61188152U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Light Sources And Details Of Projection-Printing Devices (AREA)
JP7074785U 1985-05-15 1985-05-15 Pending JPS61188152U (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7074785U JPS61188152U (it) 1985-05-15 1985-05-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7074785U JPS61188152U (it) 1985-05-15 1985-05-15

Publications (1)

Publication Number Publication Date
JPS61188152U true JPS61188152U (it) 1986-11-22

Family

ID=30607610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7074785U Pending JPS61188152U (it) 1985-05-15 1985-05-15

Country Status (1)

Country Link
JP (1) JPS61188152U (it)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01152411A (ja) * 1987-09-17 1989-06-14 Olympus Optical Co Ltd 半導体露光装置の照明光学系
JPH01259533A (ja) * 1988-04-11 1989-10-17 Nikon Corp 露光装置
WO2014188746A1 (ja) * 2013-05-20 2014-11-27 山下電装株式会社 ソーラシミュレータ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5850510A (ja) * 1981-09-21 1983-03-25 Mikasa Kk Ｉｃパタ−ン転写装置における照明光学系
JPS5850511A (ja) * 1981-09-21 1983-03-25 Mikasa Kk Ｉｃパタ−ン転写装置における照明光学系
JPS60102737A (ja) * 1983-11-10 1985-06-06 Canon Inc シヤツタ−装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5850510A (ja) * 1981-09-21 1983-03-25 Mikasa Kk Ｉｃパタ−ン転写装置における照明光学系
JPS5850511A (ja) * 1981-09-21 1983-03-25 Mikasa Kk Ｉｃパタ−ン転写装置における照明光学系
JPS60102737A (ja) * 1983-11-10 1985-06-06 Canon Inc シヤツタ−装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01152411A (ja) * 1987-09-17 1989-06-14 Olympus Optical Co Ltd 半導体露光装置の照明光学系
JPH01259533A (ja) * 1988-04-11 1989-10-17 Nikon Corp 露光装置
WO2014188746A1 (ja) * 2013-05-20 2014-11-27 山下電装株式会社 ソーラシミュレータ

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