JPS61186158U - - Google Patents
Info
- Publication number
- JPS61186158U JPS61186158U JP6907885U JP6907885U JPS61186158U JP S61186158 U JPS61186158 U JP S61186158U JP 6907885 U JP6907885 U JP 6907885U JP 6907885 U JP6907885 U JP 6907885U JP S61186158 U JPS61186158 U JP S61186158U
- Authority
- JP
- Japan
- Prior art keywords
- objective
- sample
- aperture
- electron gun
- objective lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims 1
- 238000005086 pumping Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6907885U JPH0511643Y2 (https=) | 1985-05-10 | 1985-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6907885U JPH0511643Y2 (https=) | 1985-05-10 | 1985-05-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61186158U true JPS61186158U (https=) | 1986-11-20 |
| JPH0511643Y2 JPH0511643Y2 (https=) | 1993-03-23 |
Family
ID=30604416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6907885U Expired - Lifetime JPH0511643Y2 (https=) | 1985-05-10 | 1985-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0511643Y2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013179808A1 (ja) * | 2012-05-31 | 2013-12-05 | 株式会社 日立ハイテクノロジーズ | 荷電粒子装置 |
-
1985
- 1985-05-10 JP JP6907885U patent/JPH0511643Y2/ja not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013179808A1 (ja) * | 2012-05-31 | 2013-12-05 | 株式会社 日立ハイテクノロジーズ | 荷電粒子装置 |
| JP2013251088A (ja) * | 2012-05-31 | 2013-12-12 | Hitachi High-Technologies Corp | 荷電粒子装置 |
| CN104350575A (zh) * | 2012-05-31 | 2015-02-11 | 株式会社日立高新技术 | 带电粒子装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0511643Y2 (https=) | 1993-03-23 |