JPS61183551U - - Google Patents
Info
- Publication number
- JPS61183551U JPS61183551U JP5790086U JP5790086U JPS61183551U JP S61183551 U JPS61183551 U JP S61183551U JP 5790086 U JP5790086 U JP 5790086U JP 5790086 U JP5790086 U JP 5790086U JP S61183551 U JPS61183551 U JP S61183551U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chuck
- guide rod
- slider
- substrate
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 239000013013 elastic material Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000003550 marker Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
Landscapes
- Radiation Pyrometers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5790086U JPS61183551U (enExample) | 1986-04-17 | 1986-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5790086U JPS61183551U (enExample) | 1986-04-17 | 1986-04-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61183551U true JPS61183551U (enExample) | 1986-11-15 |
Family
ID=30582879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5790086U Pending JPS61183551U (enExample) | 1986-04-17 | 1986-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61183551U (enExample) |
-
1986
- 1986-04-17 JP JP5790086U patent/JPS61183551U/ja active Pending