JPS61181228U - - Google Patents

Info

Publication number
JPS61181228U
JPS61181228U JP6314085U JP6314085U JPS61181228U JP S61181228 U JPS61181228 U JP S61181228U JP 6314085 U JP6314085 U JP 6314085U JP 6314085 U JP6314085 U JP 6314085U JP S61181228 U JPS61181228 U JP S61181228U
Authority
JP
Japan
Prior art keywords
clean room
air
purification device
dust removal
blowout port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6314085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6314085U priority Critical patent/JPS61181228U/ja
Publication of JPS61181228U publication Critical patent/JPS61181228U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP6314085U 1985-04-30 1985-04-30 Pending JPS61181228U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6314085U JPS61181228U (enrdf_load_stackoverflow) 1985-04-30 1985-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6314085U JPS61181228U (enrdf_load_stackoverflow) 1985-04-30 1985-04-30

Publications (1)

Publication Number Publication Date
JPS61181228U true JPS61181228U (enrdf_load_stackoverflow) 1986-11-12

Family

ID=30593006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6314085U Pending JPS61181228U (enrdf_load_stackoverflow) 1985-04-30 1985-04-30

Country Status (1)

Country Link
JP (1) JPS61181228U (enrdf_load_stackoverflow)

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