JPS61180121A - Force detecting device - Google Patents

Force detecting device

Info

Publication number
JPS61180121A
JPS61180121A JP60020724A JP2072485A JPS61180121A JP S61180121 A JPS61180121 A JP S61180121A JP 60020724 A JP60020724 A JP 60020724A JP 2072485 A JP2072485 A JP 2072485A JP S61180121 A JPS61180121 A JP S61180121A
Authority
JP
Japan
Prior art keywords
resistor
detection device
terminal
pressure
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60020724A
Other languages
Japanese (ja)
Other versions
JPH0660851B2 (en
Inventor
Toshiaki Sakai
利明 酒井
Kazuyuki Kato
和之 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP60020724A priority Critical patent/JPH0660851B2/en
Publication of JPS61180121A publication Critical patent/JPS61180121A/en
Publication of JPH0660851B2 publication Critical patent/JPH0660851B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2268Arrangements for correcting or for compensating unwanted effects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/225Measuring circuits therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)

Abstract

PURPOSE:To detect an abnormal state such as the breaking of a conductor automatically, easily, and distinctively from the alarm of a saturation area by providing the 1st - the 3rd resistors, etc. CONSTITUTION:The 1st resistor R1, the 2nd resistor R2, the 3rd resistor R3, etc., are provided. Then, the resistor R1 is connected between a terminal 2b and a positive potential line 6 so that the positive potential of a driving power source which drives an operational amplifier 2 is supplied to the positive power source terminal 2b of the amplifier 2. The resistor R2, on the other hand, is connected between the line 6 and the output terminal 2 of a device and the resistor R3 is connected between the terminal 3 and a reference potential line 5. Further, the driving power source is incorporated in a signal processing part 10 and when an abnormal state such as the breaking of a wire, etc., occurs in conductors 3a, 7a, and 8a, lines 5 and 6, etc., a pressure monitoring device 15 outputs an upper or lower side abnormal voltage from the terminal 3 by a mechanism provided to a pressure detecting device 14; and a processing part 10 detects this abnormal voltage and outputs an alarm signal.

Description

【発明の詳細な説明】 〔発明の属する技術分野〕 本発明は、信号処理部より給電され該信号処理部に出力
信号を送出する、たとえば拡散形シリコン半導体歪みセ
ンサを用いた圧力等の力検出装置、特に該力検出装置と
信号処理部とを接続する導線における断線のような異常
状態の自動検出を容易にする装置構成に関する。
[Detailed description of the invention] [Technical field to which the invention pertains] The present invention relates to a method for detecting force such as pressure using a diffused silicon semiconductor strain sensor, which is supplied with power from a signal processing section and sends an output signal to the signal processing section. The present invention relates to a device, and particularly to a device configuration that facilitates automatic detection of an abnormal state such as a disconnection in a conductive wire connecting the force detection device and a signal processing unit.

C従来技術とその問題点〕 第3図は従来の圧力検出装置を用いた自動車エンジンの
圧力監視装置の構成図で、図において1は受圧ダイヤフ
ラムとしてのシリコン基板上に拡散によって形成した複
数個の歪み抵抗素子を用いて構成された受圧センサ、2
は、加えられた圧力に応じて出力される受圧センサ1の
出力電圧Eが入力される演算増幅器、R3は本圧力検出
装置の出力端子3と演算増幅器2の出力側端子2aとの
間に接続された抵抗値固定の第5抵抗器で、R4は出力
端子3の電位を演算増幅器2の反転入力端子Iζ帰還す
る、増幅器2と第5抵抗器R1と本抵抗器R4とからな
る差動増幅器4の帰還抵抗器である。抵抗器鳥は、たと
えば、出力端子3が演算増幅器2の駆動電源の基準電位
ライン5に接触す□るというような異常状態が発生した
時、演算増幅器2の出力回路に過電流が流れて該増幅器
2が破壊されるということのないようにする演算増幅器
保護機能と、差動増幅器4の発振防止機能とを有してお
り、帰還抵抗器也の抵抗値は差動増幅器4の増幅度を端
子で、この場合正電源端子2bは前記駆動電源の正電位
ライン6に接続され、基準電源端子2Cは基準電位ライ
ン5に接続されている。7,8はそれぞれ電位ライン5
,61ζ所定の電位を供給する電源端子で、9は上述の
各部からなる圧力検出装置である。圧力検出装置9は上
記のように構成されているので受圧センサ1で検知した
圧力に応じた信号が差動増幅器4の出力端子としての装
置出力端子3に現れる。10は、圧力検出装置9に上述
の演算増幅器駆動電源を供給し、かつ該検出装置の出力
する信号を受信して適宜信号処理を行う信号処理部で、
3a、7a、8aは該信号処理部10と圧力検出袋f9
とを接続する電線である。
C. Prior art and its problems] Figure 3 is a block diagram of a pressure monitoring device for an automobile engine using a conventional pressure detection device. Pressure sensor configured using strain resistance element, 2
is an operational amplifier to which the output voltage E of the pressure sensor 1 output according to the applied pressure is input, and R3 is connected between the output terminal 3 of this pressure detection device and the output side terminal 2a of the operational amplifier 2. R4 is a differential amplifier consisting of the amplifier 2, the fifth resistor R1, and the main resistor R4, which feeds back the potential of the output terminal 3 to the inverting input terminal Iζ of the operational amplifier 2. 4 feedback resistor. For example, when an abnormal condition occurs such as when the output terminal 3 comes into contact with the reference potential line 5 of the drive power source of the operational amplifier 2, an overcurrent flows through the output circuit of the operational amplifier 2 and It has an operational amplifier protection function to prevent the amplifier 2 from being destroyed and a function to prevent oscillation of the differential amplifier 4, and the resistance value of the feedback resistor also controls the amplification degree of the differential amplifier 4. In this case, the positive power terminal 2b is connected to the positive potential line 6 of the driving power source, and the reference power terminal 2C is connected to the reference potential line 5. 7 and 8 are potential lines 5, respectively.
, 61ζ are power supply terminals for supplying a predetermined potential, and 9 is a pressure detection device consisting of the above-mentioned parts. Since the pressure detection device 9 is configured as described above, a signal corresponding to the pressure detected by the pressure receiving sensor 1 appears at the device output terminal 3 as an output terminal of the differential amplifier 4. 10 is a signal processing unit that supplies the above-mentioned operational amplifier drive power to the pressure detection device 9, receives the signal output from the detection device, and processes the signal as appropriate;
3a, 7a, 8a are the signal processing section 10 and the pressure detection bag f9
It is an electric wire that connects the

11は圧力検出装置9と信号処理部10とからなる圧力
監視装置である。図においては一台の信号処理部10に
一台の圧力検出装置9のみが接続されているが、通常自
動車エンジン等の圧力監視装置においては一台の信号処
理部10に吸入負圧検出用や燃焼排ガス圧力検出用など
の複数台の圧力検出装置が接続されるのが通例である。
11 is a pressure monitoring device consisting of a pressure detection device 9 and a signal processing section 10. In the figure, only one pressure detection device 9 is connected to one signal processing section 10, but normally in a pressure monitoring device such as an automobile engine, one signal processing section 10 is used for detecting suction negative pressure, etc. It is usual that a plurality of pressure detection devices, such as one for detecting combustion exhaust gas pressure, are connected.

第4図は第3図の圧力監視装[11における各部の動作
説明図で、図の横軸は受圧センサ1に加えられる圧力P
1縦軸は圧力検出装置の出力端子3から出力される電圧
Vを示している。第3図および第4図において、特性線
12は圧力検出装置9が正常な動作状態にある時の該検
出装置の出力特性を示すもので、13は圧力検出装置9
における正常な圧力検出範囲、Pu、Pdはそれぞれ検
出範囲13における最大圧力、最小圧力、Vmu。
FIG. 4 is an explanatory diagram of the operation of each part in the pressure monitoring device [11] shown in FIG.
1 The vertical axis indicates the voltage V output from the output terminal 3 of the pressure detection device. In FIGS. 3 and 4, a characteristic line 12 indicates the output characteristic of the pressure detection device 9 when the pressure detection device 9 is in a normal operating state, and a characteristic line 13 indicates the output characteristic of the pressure detection device 9.
The normal pressure detection range, Pu, and Pd are the maximum pressure, minimum pressure, and Vmu in the detection range 13, respectively.

V m dはそれぞれ圧力Pu 、Pdに対応する出力
電圧である。特性線12は、受圧センサ1に加えられる
圧力Pが最大圧力Puを越えて増加すると出力電圧Vが
上昇して遂に上限胞和電圧vhに達し、圧力Pが最小圧
力Pdを越えて減少すると出力電圧Vが下降して遂に下
限飽和電圧Viに達することを示している。FHは下側
電圧がVfhdであってかつ電圧幅がΔVfhであるよ
うに信号処理部10に設定した上限フェールセーフ電圧
領域、PLは上側電圧がVfluであってかつ電圧幅が
ΔVflであるように信号処理部10に設定した下限フ
ェールセーフ電圧領域で、Vflu(Vfhdであるよ
うに設定されており、信号処理部10は、電圧領域FH
またはFL内にある電圧が、出力端子3等を介して複数
台の圧力検出装置のいずれから入力されても警報信号を
出力するように構成されている。V e h 、 V 
e 1は、第3図における電線3a。
V m d are output voltages corresponding to pressures Pu and Pd, respectively. The characteristic line 12 shows that when the pressure P applied to the pressure sensor 1 increases beyond the maximum pressure Pu, the output voltage V increases and finally reaches the upper limit summation voltage vh, and when the pressure P decreases beyond the minimum pressure Pd, the output voltage V increases. This shows that the voltage V decreases and finally reaches the lower limit saturation voltage Vi. FH is the upper limit fail-safe voltage region set in the signal processing unit 10 so that the lower voltage is Vfhd and the voltage width is ΔVfh, and PL is the upper limit fail-safe voltage region set so that the upper voltage is Vflu and the voltage width is ΔVfl. In the lower limit fail-safe voltage range set in the signal processing unit 10, it is set to be Vflu (Vfhd), and the signal processing unit 10 is set to be Vflu (Vfhd).
Alternatively, the alarm signal is output even if the voltage in the FL is inputted from any one of the plurality of pressure detection devices via the output terminal 3 or the like. V e h , V
e1 is the electric wire 3a in FIG.

7a、8aや電位ライン5,6等に断線や相互間短絡等
の異常状態が発生した場合に、圧力検出袋f9に設けら
れた図示していない機構によって出力端子3に出力され
る上側異常電圧、下側異常電圧で、通常圧力監視装置1
1は、電圧Vehが領域FHにあり、電圧Yetが領域
FLにあるように関係各部が構成されている。
7a, 8a, potential lines 5, 6, etc., when an abnormal state such as disconnection or mutual short circuit occurs, an upper abnormal voltage is output to the output terminal 3 by a mechanism (not shown) provided in the pressure detection bag f9. , with abnormal voltage on the lower side, normal pressure monitoring device 1
1, the related parts are configured so that the voltage Veh is in the region FH and the voltage Yet is in the region FL.

圧力監視装置11では各部が上述のように構成されてい
るので、特性線12がフェールセーフ領内 域FHまたはPLのいずれかまたは双方與に入っている
と、電線3a、7a、8aや電位ライン5゜6等に上述
のような異常状態が発生していなくても、信号処理部1
0から上記警報信号が出力され□ るという現象が発生する。すなわちこの場合、上記警報
信号によって圧力検出装置9の正常状態、異常状態を判
別することは不可能であり、一方、下側電圧Vfhd、
電圧幅ΔVfh、上側電圧Vflu1電圧幅ΔVflは
複数の圧力検出装置9が接続される信号処理部10の側
で一方的に設定されるのが通例であるため、特性線12
がフェールセーフ領域1i’H,PLのいずれにも入ら
ないようにする必要があるが、圧力検出装置9は上述の
ように構成されているので、このような検出装置tこは
特性線12を調整して領域F’I(、FLに入らないよ
うにすることができないという問題がある。
Since each part of the pressure monitoring device 11 is configured as described above, if the characteristic line 12 is in either or both of the fail-safe area FH and PL, the electric wires 3a, 7a, 8a and the potential line 5 Even if the above-mentioned abnormal condition does not occur in the ゜6 etc., the signal processing unit 1
A phenomenon occurs in which the above-mentioned alarm signal is output from □. That is, in this case, it is impossible to determine whether the pressure detection device 9 is in a normal state or an abnormal state based on the above-mentioned alarm signal.
Since the voltage width ΔVfh and the voltage width ΔVfl of the upper voltage Vflu1 are usually set unilaterally on the side of the signal processing unit 10 to which a plurality of pressure detection devices 9 are connected, the characteristic line 12
It is necessary to prevent the pressure from entering either of the fail-safe regions 1i'H and PL, but since the pressure detection device 9 is configured as described above, such a detection device t does not cause the characteristic line 12 to There is a problem in that it cannot be adjusted to prevent it from entering the region F'I(, FL).

〔発明の目的〕[Purpose of the invention]

本発明は、上述したような拡散形半導体歪みセンサを用
いた圧力等の力検出装置における従来の問題を解消して
、第4図におけるような特性線12の上限飽和電圧vh
および下限飽和電圧Vlを調整して該特性線12が領域
FH,FLのいずれにも入らないようにすることができ
、もって力検出装置と信号処理部とを接続する導線の断
線というような異常状態の検出を自動的かつ容易に飽和
領域に入ったことの警報と区別して行うことができる力
検出装置を提供することを目的とする。
The present invention solves the conventional problems in a force detection device such as pressure using a diffusion type semiconductor strain sensor as described above, and improves the upper limit saturation voltage vh of the characteristic line 12 as shown in FIG.
By adjusting the lower limit saturation voltage Vl, it is possible to prevent the characteristic line 12 from entering either of the regions FH and FL, thereby preventing abnormalities such as disconnection of the conductor connecting the force detection device and the signal processing section. It is an object of the present invention to provide a force detection device that can automatically and easily detect a state and distinguish it from a warning that the saturation region has been entered.

〔発明の要点〕[Key points of the invention]

本発明は、上述の目的を達成するために、演算増1は器
の出力側端子に第5抵抗器が接続された差動増幅器と、
この差動増幅器に出力電圧を入力する拡散形半導体歪み
センサと、からなり、差動増幅器の出カシ圧により半導
体歪みセンサに加えられた力を検出する力検出装置にお
いて、演算増幅器 器を駆動する駆動電源1位を第1抵抗器を介して該演算
増幅器の正電源端子に供給し、かつ、前記正電位が印加
された駆動電源の正電位ラインと差動増幅器の出力端子
とを接続する第2抵抗器と;差動槽1商器の出力端子と
駆動電源の基準電位ラインとを接続する第3抵抗器と;
を設けたもので、このように構成することによって、第
1ないし第3抵抗器の各抵抗値を調整することによって
、差動増幅器の出力電圧を該出力電圧が上述したフェー
ルセーフ領域FH,PLのいずれにも入らないように設
定するようにして、もってこの力検出装置と信号処理部
とからなり力検出装置の出力電圧が前記フェールセーフ
領域FH,PLにあると信号処理部から警報信号を出力
するようにした力監視装置のような装置における、該力
検出装置と該信号処理部とを接続する導線の断線、とい
うような異常状態の検出を自動的かつ容易に飽和領域の
警報と区別して行うことができる力検出装置が得られる
ようにしたものである。
In order to achieve the above-mentioned object, the present invention includes a differential amplifier in which the operational amplifier 1 has a fifth resistor connected to its output terminal;
and a diffused semiconductor strain sensor that inputs an output voltage to the differential amplifier. In a force detection device that detects the force applied to the semiconductor strain sensor by the output pressure of the differential amplifier, the operational amplifier is driven. A first drive power supply is supplied to the positive power supply terminal of the operational amplifier via the first resistor, and the positive potential line of the drive power supply to which the positive potential is applied is connected to the output terminal of the differential amplifier. 2 resistors; and a 3rd resistor connecting the output terminal of the differential tank 1 unit and the reference potential line of the drive power supply;
With this configuration, by adjusting the resistance values of the first to third resistors, the output voltage of the differential amplifier can be adjusted so that the output voltage falls within the above-mentioned fail-safe region FH, PL. If the output voltage of the force detection device is in the fail-safe region FH, PL, the signal processing section will issue an alarm signal. In a device such as a force monitoring device that outputs an output signal, the detection of an abnormal condition such as a disconnection of a conductor connecting the force detection device and the signal processing section can be automatically and easily distinguished from a saturation region alarm. The present invention provides a force detection device that can be operated separately.

〔発明の実施例〕[Embodiments of the invention]

第1図は本発明の一実施例である圧力検出装置14の構
成図で、図においては説明の便宜上圧力検出装置14は
信号処理部106ζ接続されて該信号処理部10と共に
圧力監視装置15を形成している。第1図の第3図と異
なる所は第1抵抗器R8、第2抵抗器馬、第3抵抗器R
3が設けられていることで、この場合、第1抵抗器R1
は演算増幅器2を駆動する駆動電源の正電位を該演算増
幅器2の正電源端子2bに供給するように該端子2bと
正電位ライン6との間に接続され、第2抵抗器R2は正
電位ライン6と装置出力端子3との間に接続され、第3
抵抗器几、は出力端子3と基準電位ライン5との間に接
続されている。上記駆動電源は第3図の場合と同様ζζ
信号処理部10内に組み込まれており、また第3図の場
合と同様に圧力監視装置15は、電線3a、7a、8a
や電位ライン5,6等に断線あるいは相互間短絡等の異
常状態が発生した場合、圧力検出装置14に設けられた
図示していない機構によって第4図の場合と同様な上側
または下側異常電圧Veh、Velが出力端子3から出
力され、信号処理部10がこれらの異常電圧を検出して
警報信号を出力するように構成されている。
FIG. 1 is a configuration diagram of a pressure detection device 14 which is an embodiment of the present invention. In the figure, for convenience of explanation, the pressure detection device 14 is connected to a signal processing section 106ζ, and together with the signal processing section 10, a pressure monitoring device 15 is connected. is forming. The differences between Fig. 1 and Fig. 3 are the first resistor R8, the second resistor R8, and the third resistor R.
3, in this case the first resistor R1
is connected between the terminal 2b and the positive potential line 6 so as to supply the positive potential of the drive power supply for driving the operational amplifier 2 to the positive power supply terminal 2b of the operational amplifier 2, and the second resistor R2 is connected to the positive potential line 6. connected between line 6 and device output terminal 3;
A resistor 3 is connected between the output terminal 3 and the reference potential line 5. The above drive power source is the same as in Figure 3.
The pressure monitoring device 15 is incorporated in the signal processing unit 10, and as in the case of FIG.
If an abnormal state such as disconnection or mutual short circuit occurs in the potential lines 5, 6, etc., a mechanism (not shown) provided in the pressure detection device 14 generates an upper or lower abnormal voltage similar to that shown in FIG. Veh and Vel are output from the output terminal 3, and the signal processing section 10 is configured to detect these abnormal voltages and output an alarm signal.

すなわち信号処理部10には異常電圧Veh、Velの
各大きさをそれぞれ含むフェールセーフ領域FH,FL
が設けられている。
That is, the signal processing unit 10 has fail-safe areas FH and FL that include the respective magnitudes of the abnormal voltages Veh and Vel.
is provided.

第1図においては各部が上述のように構成されているの
で、圧力検出装置14は第3図の圧力検出装置9と同様
に動作して出力端子3に受圧センサ1に加えられる圧力
に応じた電圧信号を出力し、この場合の圧力検出装置1
4の出力電圧特性は第2図の特性線16のようになる。
In FIG. 1, each part is configured as described above, so the pressure detection device 14 operates in the same manner as the pressure detection device 9 in FIG. Pressure detection device 1 in this case outputs a voltage signal
The output voltage characteristic of No. 4 is as shown by the characteristic line 16 in FIG.

第2図においてVsh、Vslはそれぞれ特性線16の
上限飽和、電圧、下限飽和電圧で、これらの飽和電圧は
圧力検出装置14が第1図のように構成されているので
(1)式および(2)式のように表される。これらの(
1) 、 (2)式において、Vh、Vlはそれぞれ第
4図に示した上限飽和電圧、下限飽和電圧、工、は正電
位ライン6から第1抵抗器馬を介して演算増幅器2に流
入する電流、vCCは正電位ライン6の基準電位ライン
5に対する電圧、Voutは端子3の基準電位ライン5
に対する電圧、■4は演算増幅器2の反転入力端子電位
の基準電位ライン5に対する電圧である。このとき電流
I、 、 I8. I、はそれぞれ次の(1へ゛(2)
式のように表わされる章立番≠*。
In FIG. 2, Vsh and Vsl are the upper limit saturation, voltage, and lower limit saturation voltage of the characteristic line 16, respectively, and since the pressure detection device 14 is configured as shown in FIG. 2) It is expressed as follows. these(
1) In equations (2), Vh and Vl are the upper and lower saturation voltages shown in FIG. 4, respectively, and flow into the operational amplifier 2 from the positive potential line 6 via the first resistor. Current, vCC is the voltage of the positive potential line 6 with respect to the reference potential line 5, and Vout is the voltage of the reference potential line 5 of the terminal 3.
4 is the voltage of the inverting input terminal potential of the operational amplifier 2 with respect to the reference potential line 5. At this time, the currents I, , I8. I, respectively, are the following (1) (2)
Chapter number ≠* expressed as the formula.

Vsh=Vh−R+”It+(It−I、−I4)@R
,1(1)式および(2)式から明らかなように、飽和
電圧Vsh、Vslは抵抗益鳥、 R1,R1,の各抵
抗値を調整することによって適宜設定することが可能で
ある。
Vsh=Vh-R+"It+(It-I, -I4)@R
, 1 (1) and (2), the saturation voltages Vsh and Vsl can be appropriately set by adjusting the resistance values of the resistors R1 and R1.

故に圧力検出装置14においては、このように抵抗器氏
、鳥、 R3を調整することによって、特性線16が信
号処理部10に設定されたフェールセーフ領域FH,F
Lのいずれにも入らないようにすることが容j悟き、こ
のようにして出力電圧特性が領域FH,FLのいずれに
も入らないように設定された圧力検出装置14は導線3
a、7a、8a等の断線や相互間短絡のような異常状態
の自動検出が特性線16の飽和領域の警報とは確実に区
別されるので容易に行える力検出装置となる。
Therefore, in the pressure detection device 14, by adjusting the resistors R3 and R3 in this way, the characteristic line 16 can be set in the fail-safe regions FH and FH set in the signal processing section 10.
The pressure sensing device 14, whose output voltage characteristics are set so as not to fall into either of the regions FH and FL, is
The force detecting device can easily automatically detect abnormal states such as disconnections and short circuits of wires a, 7a, 8a, etc. since they are reliably distinguished from alarms in the saturated region of the characteristic line 16.

上述した実施例は圧力検出装f14であったが、本発明
はこのような圧力検出装置に限定されるものではなく、
受圧センサ1の構成を変えて、拡散形半導体歪みセンサ
を用いて圧力以外の他の種の力を検出するようにした力
検出装置にも適用できるものであることは明らかである
Although the embodiment described above was a pressure detection device f14, the present invention is not limited to such a pressure detection device.
It is clear that the present invention can also be applied to a force detection device in which the configuration of the pressure sensor 1 is changed and a diffusion type semiconductor strain sensor is used to detect other types of force than pressure.

〔発明の効果〕〔Effect of the invention〕

本発明においては、上述したように、演算増幅器の出力
側端子に第5抵抗器が接続された差動増幅器と、この差
動増幅器に出力電圧を入力する拡散形半導体歪みセンサ
と、からなり、差動増幅器の出力電圧により半導体歪み
センサに加えられた力を検出する力検出装置において、
演算増幅器を駆動する駆動電源の正電位を第1抵抗器を
介して該演算増幅器の正電源端子に供給し、かつ、前記
正電位が印加された駆動電源の正電位ラインと差動増幅
器の出力端子とを接続する第2抵抗器と:差動増幅器の
出力端子と駆動電源の基準電位ラインとを接続する第3
抵抗器と;を設けたので、このように構成することによ
りて、第1ないし第3抵抗器の各抵抗値を調整すること
によって、差動増幅器の出力電圧を該出力電圧が上述し
たフェールセーフ領域FH,PLのいずれ(ζも入らな
いように設定することができる結果、この力検出装置と
信号処理部とからなり力検出装置の出力電圧が前記フェ
ールセーフ領域にH,FLにあると信号処理部から警報
信号を出力するようにした力監視装置のような装置にお
ける、該力検出装置と該信号処理部とを接続する導線の
断線、というような異常状態の検出を自動的かつ容易に
飽和領域の警報と;ば区別して行うことができる力検出
装置が得られる効果がある。
As described above, the present invention includes a differential amplifier in which the fifth resistor is connected to the output terminal of the operational amplifier, and a diffused semiconductor strain sensor that inputs an output voltage to the differential amplifier. In a force detection device that detects the force applied to a semiconductor strain sensor by the output voltage of a differential amplifier,
A positive potential of a drive power supply that drives an operational amplifier is supplied to a positive power supply terminal of the operational amplifier via a first resistor, and a positive potential line of the drive power supply to which the positive potential is applied and the output of the differential amplifier. a second resistor that connects the terminal; and a third resistor that connects the output terminal of the differential amplifier and the reference potential line of the drive power supply.
Since the resistors and; are provided, with this configuration, by adjusting the respective resistance values of the first to third resistors, the output voltage of the differential amplifier can be adjusted to the above-mentioned fail-safe condition. As a result, when the output voltage of the force detection device composed of the force detection device and the signal processing section is in the fail-safe region H or FL, a signal is generated. Automatically and easily detect abnormal conditions such as disconnection of a conductor connecting a force detection device and a signal processing section in a device such as a force monitoring device that outputs an alarm signal from a processing section. This has the effect of providing a force detection device that can distinguish between warnings in the saturated region and other areas.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例の構成図、第2図は第1図f
こおける各部の前作説明図、第3図は従来の圧力検出装
置を用いた圧力監視装置の構成図、第4図は第3図にお
ける各部の動作説明図である。 電源端子、3・・・差動増幅器の出力端子としての装置
出力端子、4・・・差動増幅器、5・・、基準電位ライ
ン、6・・・正電位ライン、9,14・、・力検出装置
と第 1  図 第 3 口
Figure 1 is a configuration diagram of an embodiment of the present invention, and Figure 2 is a diagram of Figure 1 f.
3 is a block diagram of a pressure monitoring device using a conventional pressure detection device, and FIG. 4 is an explanatory diagram of the operation of each part in FIG. 3. Power supply terminal, 3... Device output terminal as output terminal of differential amplifier, 4... Differential amplifier, 5... Reference potential line, 6... Positive potential line, 9, 14... Power Detection device and Figure 1, Figure 3

Claims (1)

【特許請求の範囲】[Claims] 演算増幅器の出力側端子に第5抵抗器が接続された差動
増幅器と、前記差動増幅器に出力電圧を入力する拡散形
半導体歪みセンサと、からなり、前記差動増幅器の出力
電圧により前記半導体歪みセンサに加えられた力を検出
する力検出装置において、前記演算増幅器を駆動する駆
動電源の正電位を第1抵抗器を介して該演算増幅器の正
電源端子に供給し、かつ、前記正電位が印加された前記
駆動電源の正電位ラインと前記差動増幅器の出力端子と
を接続する第2抵抗器と;前記差動増幅器の前記出力端
子と前記駆動電源の基準電位ラインとを接続する第3抵
抗器と;を設けたことを特徴とする力検出装置。
It consists of a differential amplifier in which a fifth resistor is connected to the output terminal of the operational amplifier, and a diffused semiconductor strain sensor that inputs an output voltage to the differential amplifier, and the output voltage of the differential amplifier causes the semiconductor strain sensor to In a force detection device that detects a force applied to a strain sensor, a positive potential of a drive power source that drives the operational amplifier is supplied to a positive power supply terminal of the operational amplifier via a first resistor, and the positive potential a second resistor that connects the positive potential line of the drive power supply to which is applied and the output terminal of the differential amplifier; a second resistor that connects the output terminal of the differential amplifier and the reference potential line of the drive power supply; A force detection device characterized by comprising three resistors and;
JP60020724A 1985-02-05 1985-02-05 Force detector Expired - Lifetime JPH0660851B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60020724A JPH0660851B2 (en) 1985-02-05 1985-02-05 Force detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60020724A JPH0660851B2 (en) 1985-02-05 1985-02-05 Force detector

Publications (2)

Publication Number Publication Date
JPS61180121A true JPS61180121A (en) 1986-08-12
JPH0660851B2 JPH0660851B2 (en) 1994-08-10

Family

ID=12035119

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60020724A Expired - Lifetime JPH0660851B2 (en) 1985-02-05 1985-02-05 Force detector

Country Status (1)

Country Link
JP (1) JPH0660851B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02135831U (en) * 1989-04-17 1990-11-13
JP2003304633A (en) * 2002-04-09 2003-10-24 Fuji Electric Co Ltd Wire breakage detecting circuit

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4883289B2 (en) * 2006-08-25 2012-02-22 Tdk株式会社 Current sensor disconnection detector
JP4761080B2 (en) * 2008-02-01 2011-08-31 Tdk株式会社 Disconnection detection system between current sensor and electronic control unit

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02135831U (en) * 1989-04-17 1990-11-13
JP2003304633A (en) * 2002-04-09 2003-10-24 Fuji Electric Co Ltd Wire breakage detecting circuit
US7046013B2 (en) 2002-04-09 2006-05-16 Fuji Electric Co., Ltd. Open-circuit failure detection circuit
KR100784593B1 (en) * 2002-04-09 2007-12-11 후지 덴키 홀딩스 가부시끼가이샤 Open-circuit failure-detection circuit

Also Published As

Publication number Publication date
JPH0660851B2 (en) 1994-08-10

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