JPS61177785A - バイモルフ素子 - Google Patents
バイモルフ素子Info
- Publication number
- JPS61177785A JPS61177785A JP60018508A JP1850885A JPS61177785A JP S61177785 A JPS61177785 A JP S61177785A JP 60018508 A JP60018508 A JP 60018508A JP 1850885 A JP1850885 A JP 1850885A JP S61177785 A JPS61177785 A JP S61177785A
- Authority
- JP
- Japan
- Prior art keywords
- plate
- shim plate
- electrostrictive
- bimorph element
- thermal expansion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims abstract description 3
- 229910052751 metal Inorganic materials 0.000 claims abstract description 3
- 239000000853 adhesive Substances 0.000 claims description 12
- 230000001070 adhesive effect Effects 0.000 claims description 12
- 229910045601 alloy Inorganic materials 0.000 claims description 9
- 239000000956 alloy Substances 0.000 claims description 9
- 229910020598 Co Fe Inorganic materials 0.000 claims description 6
- 229910002519 Co-Fe Inorganic materials 0.000 claims description 6
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910018499 Ni—F Inorganic materials 0.000 claims description 2
- 239000002245 particle Substances 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 230000010287 polarization Effects 0.000 abstract description 20
- 238000006073 displacement reaction Methods 0.000 abstract description 14
- 229910003271 Ni-Fe Inorganic materials 0.000 abstract description 6
- 229910052737 gold Inorganic materials 0.000 abstract description 2
- 229910052759 nickel Inorganic materials 0.000 abstract description 2
- 229910052709 silver Inorganic materials 0.000 abstract description 2
- 238000000034 method Methods 0.000 abstract 1
- 229910001369 Brass Inorganic materials 0.000 description 9
- 239000010951 brass Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 9
- 230000006866 deterioration Effects 0.000 description 5
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 229910000640 Fe alloy Inorganic materials 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 239000012790 adhesive layer Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 229920006332 epoxy adhesive Polymers 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 230000028161 membrane depolarization Effects 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- MOFOBJHOKRNACT-UHFFFAOYSA-N nickel silver Chemical compound [Ni].[Ag] MOFOBJHOKRNACT-UHFFFAOYSA-N 0.000 description 1
- 239000010956 nickel silver Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005482 strain hardening Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60018508A JPS61177785A (ja) | 1985-02-04 | 1985-02-04 | バイモルフ素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60018508A JPS61177785A (ja) | 1985-02-04 | 1985-02-04 | バイモルフ素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61177785A true JPS61177785A (ja) | 1986-08-09 |
| JPH0317231B2 JPH0317231B2 (enrdf_load_stackoverflow) | 1991-03-07 |
Family
ID=11973564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60018508A Granted JPS61177785A (ja) | 1985-02-04 | 1985-02-04 | バイモルフ素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61177785A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63197386A (ja) * | 1987-02-12 | 1988-08-16 | Murata Mfg Co Ltd | 圧電アクチユエ−タ |
| WO2001075987A1 (de) * | 2000-04-04 | 2001-10-11 | Siemens Aktiengesellschaft | Piezokeramischer biegewandler |
| JP2017195249A (ja) * | 2016-04-19 | 2017-10-26 | 株式会社リコー | 強誘電体素子及びその製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6048259U (ja) * | 1983-09-10 | 1985-04-04 | 株式会社トーキン | 変位素子 |
-
1985
- 1985-02-04 JP JP60018508A patent/JPS61177785A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6048259U (ja) * | 1983-09-10 | 1985-04-04 | 株式会社トーキン | 変位素子 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63197386A (ja) * | 1987-02-12 | 1988-08-16 | Murata Mfg Co Ltd | 圧電アクチユエ−タ |
| WO2001075987A1 (de) * | 2000-04-04 | 2001-10-11 | Siemens Aktiengesellschaft | Piezokeramischer biegewandler |
| JP2017195249A (ja) * | 2016-04-19 | 2017-10-26 | 株式会社リコー | 強誘電体素子及びその製造方法 |
| US10801113B2 (en) | 2016-04-19 | 2020-10-13 | Ricoh Company, Ltd. | Ferroelectric element and method of manufacturing ferroelectric element |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0317231B2 (enrdf_load_stackoverflow) | 1991-03-07 |
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