JPS6117766B2 - - Google Patents
Info
- Publication number
- JPS6117766B2 JPS6117766B2 JP56199972A JP19997281A JPS6117766B2 JP S6117766 B2 JPS6117766 B2 JP S6117766B2 JP 56199972 A JP56199972 A JP 56199972A JP 19997281 A JP19997281 A JP 19997281A JP S6117766 B2 JPS6117766 B2 JP S6117766B2
- Authority
- JP
- Japan
- Prior art keywords
- flame
- reaction
- gas
- silicon
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 278
- 239000000377 silicon dioxide Substances 0.000 claims description 134
- 238000006243 chemical reaction Methods 0.000 claims description 113
- 239000007789 gas Substances 0.000 claims description 112
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 claims description 90
- 238000001816 cooling Methods 0.000 claims description 72
- 235000012239 silicon dioxide Nutrition 0.000 claims description 70
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 44
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 43
- 238000000034 method Methods 0.000 claims description 42
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims description 32
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 29
- 239000001301 oxygen Substances 0.000 claims description 29
- 229910052760 oxygen Inorganic materials 0.000 claims description 29
- 239000011541 reaction mixture Substances 0.000 claims description 26
- 238000002485 combustion reaction Methods 0.000 claims description 22
- 239000002912 waste gas Substances 0.000 claims description 22
- 238000004519 manufacturing process Methods 0.000 claims description 16
- 230000007246 mechanism Effects 0.000 claims description 16
- 229910052739 hydrogen Inorganic materials 0.000 claims description 15
- 238000006460 hydrolysis reaction Methods 0.000 claims description 13
- 230000007062 hydrolysis Effects 0.000 claims description 12
- 239000001257 hydrogen Substances 0.000 claims description 11
- 230000008569 process Effects 0.000 claims description 11
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 10
- 239000012808 vapor phase Substances 0.000 claims description 10
- 239000012809 cooling fluid Substances 0.000 claims description 7
- 239000012071 phase Substances 0.000 claims description 5
- 230000008531 maintenance mechanism Effects 0.000 claims 1
- 239000002245 particle Substances 0.000 description 39
- 239000000203 mixture Substances 0.000 description 29
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 20
- LRCFXGAMWKDGLA-UHFFFAOYSA-N dioxosilane;hydrate Chemical compound O.O=[Si]=O LRCFXGAMWKDGLA-UHFFFAOYSA-N 0.000 description 12
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 12
- 238000010521 absorption reaction Methods 0.000 description 10
- PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Chemical compound [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 description 10
- 239000000243 solution Substances 0.000 description 10
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 9
- 238000002156 mixing Methods 0.000 description 9
- 239000005049 silicon tetrachloride Substances 0.000 description 9
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 239000007788 liquid Substances 0.000 description 8
- 239000004576 sand Substances 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000002253 acid Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 239000012716 precipitator Substances 0.000 description 7
- 239000007795 chemical reaction product Substances 0.000 description 6
- 239000000112 cooling gas Substances 0.000 description 6
- 239000000047 product Substances 0.000 description 6
- 238000011084 recovery Methods 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 230000002776 aggregation Effects 0.000 description 5
- 238000009833 condensation Methods 0.000 description 5
- 230000005494 condensation Effects 0.000 description 5
- 239000002737 fuel gas Substances 0.000 description 5
- 239000011261 inert gas Substances 0.000 description 5
- 229920000728 polyester Polymers 0.000 description 5
- 235000013024 sodium fluoride Nutrition 0.000 description 5
- 239000011775 sodium fluoride Substances 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 4
- 238000005054 agglomeration Methods 0.000 description 4
- 239000006227 byproduct Substances 0.000 description 4
- 229910002091 carbon monoxide Inorganic materials 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 229920001971 elastomer Polymers 0.000 description 4
- JTJMJGYZQZDUJJ-UHFFFAOYSA-N phencyclidine Chemical class C1CCCCN1C1(C=2C=CC=CC=2)CCCCC1 JTJMJGYZQZDUJJ-UHFFFAOYSA-N 0.000 description 4
- 239000001294 propane Substances 0.000 description 4
- 239000005060 rubber Substances 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000009835 boiling Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 239000000567 combustion gas Substances 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 239000012717 electrostatic precipitator Substances 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 239000004922 lacquer Substances 0.000 description 3
- 239000003973 paint Substances 0.000 description 3
- 239000000376 reactant Substances 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 230000008719 thickening Effects 0.000 description 3
- 239000002562 thickening agent Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 239000011449 brick Substances 0.000 description 2
- 239000001273 butane Substances 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- -1 carbon monoxide Chemical class 0.000 description 2
- 239000003034 coal gas Substances 0.000 description 2
- 239000003085 diluting agent Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000010436 fluorite Substances 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 2
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
- 239000003345 natural gas Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000012744 reinforcing agent Substances 0.000 description 2
- 150000003377 silicon compounds Chemical class 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000009974 thixotropic effect Effects 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 235000008733 Citrus aurantifolia Nutrition 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 235000011941 Tilia x europaea Nutrition 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 238000010420 art technique Methods 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- YYRMJZQKEFZXMX-UHFFFAOYSA-N calcium;phosphoric acid Chemical compound [Ca+2].OP(O)(O)=O.OP(O)(O)=O YYRMJZQKEFZXMX-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 238000005345 coagulation Methods 0.000 description 1
- 230000015271 coagulation Effects 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 238000009841 combustion method Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000002939 deleterious effect Effects 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011067 equilibration Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 229940104869 fluorosilicate Drugs 0.000 description 1
- 239000008246 gaseous mixture Substances 0.000 description 1
- 239000003502 gasoline Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- 239000003350 kerosene Substances 0.000 description 1
- 239000004571 lime Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 239000012263 liquid product Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000002367 phosphate rock Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000012429 reaction media Substances 0.000 description 1
- 230000003134 recirculating effect Effects 0.000 description 1
- 239000012763 reinforcing filler Substances 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- MNTPMEHIQKUBIC-UHFFFAOYSA-N silicon;hydrofluoride Chemical compound F.[Si] MNTPMEHIQKUBIC-UHFFFAOYSA-N 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- BFXAWOHHDUIALU-UHFFFAOYSA-M sodium;hydron;difluoride Chemical compound F.[F-].[Na+] BFXAWOHHDUIALU-UHFFFAOYSA-M 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002426 superphosphate Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- 239000005061 synthetic rubber Substances 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B7/00—Halogens; Halogen acids
- C01B7/19—Fluorine; Hydrogen fluoride
- C01B7/191—Hydrogen fluoride
- C01B7/193—Preparation from silicon tetrafluoride, fluosilicic acid or fluosilicates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J12/00—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor
- B01J12/005—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor carried out at high temperatures, e.g. by pyrolysis
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/113—Silicon oxides; Hydrates thereof
- C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
- C01B33/18—Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof
- C01B33/181—Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof by a dry process
- C01B33/183—Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof by a dry process by oxidation or hydrolysis in the vapour phase of silicon compounds such as halides, trichlorosilane, monosilane
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/113—Silicon oxides; Hydrates thereof
- C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
- C01B33/18—Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof
- C01B33/181—Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof by a dry process
- C01B33/183—Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof by a dry process by oxidation or hydrolysis in the vapour phase of silicon compounds such as halides, trichlorosilane, monosilane
- C01B33/184—Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof by a dry process by oxidation or hydrolysis in the vapour phase of silicon compounds such as halides, trichlorosilane, monosilane by hydrolysis of tetrafluoride
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/12—Surface area
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/22—Rheological behaviour as dispersion, e.g. viscosity, sedimentation stability
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Silicon Compounds (AREA)
Description
ãçºæã®è©³çŽ°ãªèª¬æã
æ¬çºæã¯è¯å¥œãªãããœããããŒæ§ãæãã埮现
åäºé žåã±ã€çŽ ã補é ããæ¹æ³åã³ãã®è£ 眮ã«é¢
ãããã®ã§ããã çè²éæã®ã·ãªã«ã補é ããã«çšããããççŒ
æ¹æ³ã¯ç³çã¬ã¹ãŸãã¯æ°Žæ§ã¬ã¹ã®ããšãå¯çæ§ã¬
ã¹ã®çã«ãããŠç©ºæ°ãŸãã¯é žçŽ äžã§ã®æ®çºæ§ã±ã€
çŽ ååç©ã®ççŒã䌎ããé žçŽ ã¯ã±ã€çŽ ååç©ãé ž
åããã®ã«äœ¿çšãããããã®æ¹æ³ã¯1926幎ïŒæ15
æ¥ä»ã®è±åœç¹èš±ç¬¬258313å·ããã³1935幎11æ23æ¥
ä»ã®è±åœç¹èš±ç¬¬438782å·æ现æžã«èšèŒãããŠã
ããã·ãªã«ã¯ä»¥äžã®åå¿ã«åŸã€ãŠåœ¢æãããåã
ãåã±ã€çŽ ããã³ã¡ã¿ã³ãç³çã¬ã¹ã®æåã¯ä»£è¡š
çãªãã®ãšããŠç€ºãããŠããã SiF4ïŒCH4ïŒ2O2âSiO2ïŒCO2ïŒ4HF ãã®åå¿ã¯ãçºç±ã§ããççŒã«ããç±ãåå¿æ··
åç©ã«äŸçµŠãããã®ã§ãååé«ãåå¿æž©åºŠãéæ
ããèžæ°çžå æ°Žå解ã«ãããŠã¯å°é£ã瀺ãããšã¯
ãªãã ããããªããããã®ççŒåå¿ã«ãããŠã¯ãã·ãª
ã«ã®ç²åºŠãå¶åŸ¡ããããšã¯å°é£ã§ãããäºå®ççŒ
ãç匷床ãéåžžã®å¶åŸ¡ãã倧ããããªãã§éåžžã®
ç¶æ³äžã§å®æœããããšãã·ãªã«ã¯æ¯èŒçå¯ã«ãªã
ãããŠ100nmãå€å°è¶ããŠã400nmãŸã§ããã³ã
ã以äžã®å¹³åç²åºŠãæãããè±åœç¹èš±ç¬¬258313å·
æ现æžã«èšèŒãããæå°å¹³åç²åºŠã¯150nmã§ã
ãããã¡ãããããã¯ãŽã çšã®è£åŒ·å€ã«é¢ããŠã¯
倧ãéãããåæã«åçã¯çè«å€ã®10ã40çšåºŠãš
äœããããã¯ãåŸãããçæç©ããŽã å å¡«å€ãšã
ãŠãã€ã°ãªãŒã¹ãå¡æããã³ã©ãã«ãŒã«ãããå¢
ç²å€ãšããŠã®äœ¿çšã®ããšãæãéèŠãªçšéã«å¯Ÿã
ãŠäžæºè¶³ã§ãããåæã«äœåçã®ããäŸ¡æ Œãæ¯èŒ
çé«ãããšãæå³ããã 1950幎12æ25æ¥ä»ã®ãã©ããã³æ°ã®ç±³åœç¹èš±ç¬¬
2535036å·æ现æžã«ãããŠã¯ã以äžã®ååŠçåå¿
åŒ SiF4ïŒ2H2OããSiO2ïŒ4HF ã«åŸã€ãŠèžæ°çžå æ°Žå解ã䌎ãããããçè²éæ
ã®ç¡å®åœ¢åŸ®çŽ°åœ¢ç¶ã«ãããã·ãªã«ã®è£œé æ¹æ³ãèš
èŒãããŠããã èžæ°çžå æ°Žå解ã¯ãåèšãã©ããã³æ°ã®ç¹èš±ã
ææããããã«ã液çžå æ°Žå解以äžã®å¹Ÿã€ãã®å©
ç¹ãæããŠããããããªãããå æ°Žå解ã¯åžç±å
å¿ã§ããããããŠããåç©ãã·ãªã«ã«å€æããã«
ã¯ç±ã®å°å ¥ãå¿ èŠãšããããŸããè¯å¥œãªåå¿ãè¡
ãªãã«ã¯å°ãªããšãåå¿äœã450âã«ãããããš
ãäžå¯æ¬ ã§ããã ãã®åå¿ã«é¢ãã平衡å®æ°ã¯é·ãéç¥ãããŠã
ããããŠã¢æ°ã¯çµæ¶åž¯ç©çååŠ48ã®ç¬¬483é ã第
503é ïŒ1904幎ïŒã«ãããŠ104âããã³270âã§ã®
平衡ã«é¢ããå®éšããŒã¿ãå ±åãããåå¿çšå¹³è¡¡
å®æ°ã¯ã¬ã³ããšã¹ãã€æ°çã®å·¥æ¥æè¡ååŠ44ã®ç¬¬
1448é ã第1450é ïŒ1952幎ïŒã«ãã€ãŠ200ãã800
âã®ç¯å²ã«ããã幟ã€ãã®æž©åºŠã«ãããŠå®éšçã«
決å®ããããåå¿ã¯600âããã³ãã以äžã®æž©åºŠ
ã«ãããŠã®ã¿é¡èãªæ¹æ³ã§æ£ããçããããšãå
èšã¬ã³ããšã¹ãã€æ°çã®è³æããæããã§ããã
ãã®ãããªæž©åºŠã¯åå¿ç©è³ªå šäœã«ããã€ãŠåäžæ§
ãéæããããšãåºé£ã§ããã ãã®ç¹èš±çºæã«ãããŠã¯ãã·ãªã«ã®ç²åºŠãå¶åŸ¡
ããããšãã§ãããšãã瀺åã¯çŸãããŠããªãã
äºå®äžããã®åå¿ã«ãããŠã¯ããŸãçžåœçãéç
å ã«ã·ãªã«ã®ç²åºŠãå¶åŸ¡ããããšã¯å°é£ã§ããã
ãã®éçã¯ã·ãªã«ã該ã·ãªã«ãå¹³åç²åºŠ50nmãŸ
ãã¯ãã以äžãæãããŽã ååç©ã«ãããŠè£åŒ·å€
ãšããŠäœ¿çšãããšãæãŸããããã®èžæ°çžå æ°Žå
解ã«ãããŠåŸãããã·ãªã«ç²ã®å€§ããªæ¯çã¯éåžž
400nmçšåºŠãšå€§ããããããŠå¹³åç²åºŠã¯éåžž100
ã200nmçšåºŠã§ããã 1958幎ïŒæïŒæ¥ä»ã®ãã¬ã¡ã«ãæ°ã®ç±³åœç¹èš±ç¬¬
2819151å·ã«ããã°ãããåã±ã€çŽ ãå¯çæ§ã¬ã¹
ããã³é žçŽ ãçäžã§å ±ã«åå¿ãããããããã«ã
ãã·ãªã«ããã³ããåæ°ŽçŽ ã圢æãããç匷床ã¯
枩床ãå¢å€§ããã€å€ææéãæžå°ããããã«æ£èŠ
ã®åŒ·ããè¶ããŠå¢å€§ãããŠãããç匷床ã¯èª¬æã
ããçš®ã ã®æ¹æ³ã«ãã€ãŠå¢å€§ãããããšãã§ãã
ãããŠãã®åŒ·ãã¯çŽïŒãçŽ50nmã®ç¯å²å ã®ç®è¡
å¹³åçŽåŸãæããçç¶ç¡å®åœ¢ç²åã®åœ¢æ ã®ã·ãªã«
ãçããããã«ç¹å®ã®éçå ã«å¶åŸ¡ãããã åå¿ã¯å€åçã®å¹Ÿã€ãã®é åå ã§çããããã
ãã®åå¿é åäžã®çã®åŒ·åºŠã¯ã·ãªã«ã®ç²åºŠã決å®
ããããšã«ãããŠæãéèŠã§ããããã®çç±ã®ã
ãåå¿ã®åŒ·ãã«çãããšã¿ãªãããããšãã§ã
ããããããªãããåå¿é åã«ãããçã®åŒ·ã
ã¯ããã¡ããçã«ãã€ãŠæŸåºãããç±ã«æ£æ¯äŸã
ãåå¿ã«ãã€ãŠæŸåºãããç±ãé€ããŠæž¬å®ããã
ãšãå°é£ã§ãããããããæ¬çºæã®ç®çã®ãã
ã«ãåå¿ã®åŒ·ãã¯çèªäœã®åŒ·ãã«ãã€ãŠæž¬å®ãã
ãã çã®åŒ·ãã¯åäœå®¹ç©åœãã®ããã³åäœæéåœã
ã®æŸåºãããç±éã«é¢ããŠæž¬å®ãããããšãã§ã
ããå³ã¡ ïŒïœïŒïœïŒïŒïŒ£ïœïŒïœïŒïœïœïœïŒ æ¬çºæã®ç®çã®ãããããã®éã¯ã€ã®ãªã¹ç±å
äœãç¥ããŠB.t.uãããŠãŒããã¯ã»ãã€ãŒãã»ã
ãããã§æž¬å®ãããã衚瀺ã®å¥å®ã®ãããéæ°ã®
B.t.uåäœã䜿çšãããŠãããããªãã¡ãïŒïŒïŒ¢ïŒïœïŒ
ïœã ãŸãã¯B.t.u-1ã䜿çšããããããŠçšèªãéæ°ã®
B.t.uãããã³ãB.t.u-1ãã¯çäžã§ïŒåéåœãæŸ
åºãããB.t.uã«å¯ŸããCuïŒïœãã«ãããçã®
容ç©ã«é¢ãããã®ãšç解ãããŠããã åŸã€ãŠãã¬ããŒãæ°ã®æ¹æ³ã«ãããŠçã®åŒ·ãã¯
çŽ0.1ããçŽ1.3Ã10-5B.t.u-1ã®ç¯å²å ã«ç¶æãã
ãããã®ç¯å²ã¯æ¬è³ªçã«ã¯ããåã±ã€çŽ ãæ¬çºæ
ã«ããåå¿ãåããæ£èŠã®çã®åŒ·ã以äžã«ããã
ãããã®åŒ·ãã®éçã¯ããããã®éç以äžããã³
ãã以äžã®ç匷床ã«ãããŠã·ãªã«ã®ç²åºŠãåã³å¢
倧ããã®ã§éèŠã§ããã ãã®æ¹æ³ã¯ã50ãã400m2ïŒïœã®ç¹æ®ãªè¡šé¢ç©
ã«å¯Ÿå¿ããŠãïŒãã50nmã®å¹³åç²åºŠãæãã極
埮现åäºé žåã±ã€çŽ ãçããã ïŒã€ã®æã容æã«å©çšãåŸãåããã²ã³åã±ã€
çŽ ã®åææãåããåã±ã€çŽ ãŸãã¯åå¡©åã±ã€çŽ
ãããåããåã±ã€çŽ ã¯ã·ãªã«ã®å·¥æ¥èŠæš¡ã®çç£
ã«ããè¯ãé©åããå€ãã®å©ç¹ãæãããåãã
åã±ã€çŽ ã¯ãªã³é±ããã®ãªã³é žããã³éãªã³é žç³
ç°ã®è£œé ã«ãããŠå€éã«åŸãããå®äŸ¡ãªå»æ£ç©ã§
ããã±ã€ããåæ°ŽçŽ é žãã容æã«è£œé ããããšã
ã§ãããä»æ¹ãåå¡©åã±ã€çŽ ã¯ãéåžžã±ã€çŽ ãšå¡©
çŽ ã®åå¿ã«ãã€ãŠè£œé ãããæ¯èŒçé«äŸ¡ãªç©è³ªã§
ãããåã æ¯èŒçé«äŸ¡ãªç©è³ªã¯ãããã®è£œé ã«å€
éã®é»æ°çãšãã«ã®ãŒãå¿ èŠãšãããã€åå¡©åã±
ã€çŽ ã圢æããã®ã«åæ§ã«é«äŸ¡ãªåå¿ãå¿ èŠãšã
ãã ç±³åœç¹èš±ç¬¬2819151å·æ现æžã«ã¯äºé žåã±ã€çŽ
ã®ç¹æ®ãªè¡šé¢ç©ãšçäžã®ããåã±ã€çŽ åçž®ç©ãšã®
éã«é¢ä¿ãããããŸãç匷床ãšäºé žåã±ã€çŽ ã®ç²
床ãšã®éã«é¢ä¿ãããããšã瀺ããŠãããããã
ãªãããæå€ã«ããåºçºç©è³ªãåå¡©åã±ã€çŽ ããŸ
ãã¯åããåã±ã€çŽ ã«ãã€ãŠåŸãããã·ãªã«ã«å·®
ç°ãããã åå¡©åã±ã€çŽ ãã補é ãããã·ãªã«ã¯æ¶²äœããª
ãšã¹ãã«å¡æãææããã³ã©ãã«ãŒã®ããšã液äœ
補åçšã®æ¿åå€ãšããŠåããåã±ã€çŽ ãã補é ã
ããã·ãªã«ããã¯åªããŠãããããã¯åããåã±
ã€çŽ ãã補é ãããã·ãªã«ã®æ¹ãæµäœå ã§ææã®
ãããœããããŒå¹æããã³ææã®ç²æ§ãåŸããã
ã«åå¡©åã±ã€çŽ ãã補é ãããã·ãªã«ããå¿ èŠãš
ããããšããäºå®ããæçœã§ããã åæ§ãªå·®ç°ã¯ã·ãªã«ãåæãŽã ããã³ã·ãªã³ã³
ãŽã çµæç©ã«ãããŠè£åŒ·å å¡«å€ãšããŠäœ¿çšããã
ãšã泚ç®ããããåããåã±ã€çŽ ãã補é ããã
äºé žåã±ã€çŽ ã®ããé«ãæ¯çã¯åå¡©åã±ã€çŽ ãã
補é ãããã·ãªã«ã䜿çšãããšãããææã®ç¡¬ã
ããã³çãåŸãããšãèŠæ±ãããã ããå€ãã®ã·ãªã«ãèŠæ±ããããšããäºå®ã¯å€
æ°ã®åé¡ãæèµ·ãããšãããåé¡ã®ïŒã€ã¯å€å€§ã®
è²»çšã§ããããŸããã倧ããªæ¯çã®ã·ãªã«ã¯ãã
ãã也ç¥æ極ããŠå®¹ç©ã倧ããã®ã§ãã倧ããªæ··
ååšãå¿ èŠãšãããããã«ããé·ãæ··åæéãå¿
èŠãšããããã®çµæããé«ãšãã«ã®ãŒæ¶è²»ãæã
ããã·ãªã«ã®ååšã«ä»éããææããªãåŽé¢å¹æ
ã¯ãŸãã·ãªã«ã®éããã倧ãããšãå¢å€§ãããã
極埮现åã·ãªã«ã¯æ¯èŒçé«äŸ¡ãªææã§ããããã
ãããã®æ¬ ç¹ã¯åããåã±ã€çŽ ãã補é ãããã·
ãªã«ã®åžå Žã«é倧ãªåœ±é¿ãåãŒããŠããã æ¬çºæ以åã«ã¯ã·ãªã«ã®ç¹æ§äžã®å·®ç°ã®ããã®
çç±ã¯ç解ãããªãã€ããããããæ¬çºæã«ã
ãããã®çç±ã¯åŸæ¥ã®çåå¿æ¹æ³ã䜿çšããåã
ãåã±ã€çŽ ãã補é ãããã·ãªã«ã¯ããäœåºŠã®çµ
åã§ããããšãæãšãªããããªãã¡ã·ãªã«ç²åã¯
åããåã±ã€çŽ ãã補é ãããã·ãªã«ããå°ãªã
çšåºŠã«åºãåæãããéç¶åçž®ç©ã«çµåãããã
æ¬çºæã®æ¹æ³åã³è£ 眮ã§åŸãããã·ãªã«ã¯é«åºŠã®
åçž®ãæããåŸæ¥ã®æ¹æ³ã§åããåã±ã€çŽ ãã補
é ãããã·ãªã«ãåæ§ã«åå¡©åã±ã€çŽ ãã補é ã
ããã·ãªã«ãããåªããŠãã極ããŠè¯å¥œãªé«æ¿å
容éåã³è¯å¥œãªãããœããããŒæ§ãæããã æ¬çºæã«ããã°ãäºé žåã±ã€çŽ åã³ããåæ°ŽçŽ
ã圢æããããããå°ãªããšãäžã€ã®ããŒãã«ã
ãçºçãããçåå¿é åã«ãããŠããåã±ã€çŽ ã
èžæ°çžäžã§æ°Žèžæ°ãšãå¯çæ§ã¬ã¹ãšãèªç±é žçŽ å«
æã¬ã¹ãšã«åå¿ãããåå¿å®€ã®å£éšã®å·åŽã«å ã
ãŠ500â以äžã§ãããçåå¿ã«ãããŠçºçããå
å¿å»ã¬ã¹ã®é²ç¹ä»¥äžã®æž©åºŠã«ç¶æãããããŒãã
å å²ããå·åŽé¢ãšã®æ¥è§Šã«ããçã®åºéšã«é£æ¥ã
ãçåå¿é åã®éšåã«ãããŠã¬ã¹åå¿æ··åç©ãå·
åŽããŠãªãé«æ¿å容éã®è¯å¥œãªãããœããããŒæ§
ãæãã埮现åäºé žåã±ã€çŽ ã補é ããæ¹æ³ãæ
äŸãããã®ã§ããã æ¬çºæã«ããã°ã (1) èªç±é žçŽ å«æã¬ã¹ã§å¯çæ§ã¬ã¹ãççŒããã
ããšã«ããçåå¿é åã圢æããçãçºçãã
ãåå¿å®€å ã«é 眮ããå°ãªããšãïŒã€ã®ããŒã
ãšã (2) åããåã±ã€çŽ ãçã§ççŒãããããããŒã
ã«éãæµéæ©æ§ãšã (3) å¯çæ§ã¬ã¹åã³èªç±é žçŽ å«æã¬ã¹ãççºçã®
ããããŒãã«éãæµéæ©æ§ãšã (4) çåå¿é åããã¬ã¹åå¿æ··åç©ãååãäžã€
åæäºé žåã±ã€çŽ ãåé¢ååããååæ©æ§ãšã (5) åå¿å®€ã®å£éšãå·åŽãããããã®å·åŽæ©æ§
ãšã (6) æŽã«ãçåå¿é åã®åºéšãå·åŽããããããŒ
ãã«ããçºçãããçã®åºéšã«é£æ¥ããçåå¿
é åã«ãããŠã¬ã¹åå¿æ··åç©ãšæ¥è§Šããå·åŽé¢
ãåããå·åŽæ©æ§ãšã (7) å·åŽé¢ãçåå¿é åã«ãããŠçºçãããççŒ
åå¿å»ã¬ã¹ã®é²ç¹ä»¥äžã§ããã500â以äžã®æž©
床ã«ç¶æããç¶ææ©æ§ãšã ããæ§æããåããåã±ã€çŽ ã®èžæ°çžå æ°Žå解ã«
ãã€ãŠé«æ¿å容éã®è¯å¥œãªãããœããããŒæ§ãæ
ãã埮现åäºé žåã±ã€çŽ ã補é ããããã®è£ 眮ã
æäŸãããã®ã§ããã æ¬çºæã®è£ 眮ã®å¥œé©ãªå®æœäŸãæ·»ä»å³é¢ã«ç€ºã
ãŠããã çåå¿ã¯ïŒã€ãŸãã¯å¹Ÿã€ãã®çäžã§å®æœããã
ãšãã§ãããããããªãããå€æ°ã®å°ããªçãã
ïŒã€ãŸãã¯ãã®å€§ããªçã«å ã ã€ãŠã䜿çšããã
ãªãã°çã容æã«å·åŽãããããããã«ããåå¿
枩床ãå¶åŸ¡ããããããã çã®åºéšã«ãããŠãããªãã¡ããŒãããºã«ã«æ
ãè¿ãçã®éšåã«ãããŠçåå¿é åãå·åŽããã
ãšãéèŠã§ããããçã®å 端ãå·åŽããããã©ã
ãã¯éèŠã§ã¯ãªããçã倧ãããªãã°ãå 端ã®å·
åŽã¯ããäœã枩床ã«ç¶æããã®ã«æçšã§ãããç
ãå°ãããªãã°ãæ¹åã¯ã»ãšãã©ãªãããªãã æ¬çºæã®æ¹æ³ããã³è£ 眮ã«ãã€ãŠã·ãªã«ç²åã®
åéãå¢å€§ãããããšã¯çã®åºéšã«ãããçåå¿
é åã®å·åŽã«ãããçã®åºéšã«ãããŠçåå¿é å
ãå·åŽããããšãæ¯èŒçå°æ°ã®äºé žåã±ã€çŽ åçµ
æ¶ç²åãçã®åºéšã®çåå¿é åã«åœ¢æããããã
ããã®åçµæ¶ç²åãçã®åºéšããçã®å 端ãŸã§ã®
çåå¿é åãééäžæŒžæ¬¡æé·ãããããŠãããã®
ç²åãè¡çªãããšããããã¯äºãã«ä»çãããã
ãŠåå¿äžã®äºé žåã±ã€çŽ ã®é£ç¶æ²æŸ±ã«ããããšã
ã«æé·ããããã®çµæãäºé žåã±ã€çŽ ç²åã®æ¯èŒ
ç倧ããªéç¶éåäœãçåå¿é åããã®åå¿çæ
ç©ãšããŠåºçŸããã ããããåŸæ¥ã®æ¹æ³ã«ãããããã«çã®åºéšã«
ãããçåå¿é åãå·åŽãããªãå Žåã«ãå€æ°ã®
äºé žåã±ã€çŽ åçµæ¶ç²åã圢æããããããŠåå¿
äžã«å€§ããªäºé žåã±ã€çŽ ç²åã«æ¥éã«æé·ããã
å€æ°ã®åçµæ¶ç²ååã³ã·ãªã«ãåå¿äžã«æ²æŸ±ã§ã
ã倧ããªè¡šé¢ç©ã®ãããåããåã±ã€çŽ ã®åäžæ¿
床ã«ãããŠæ¯èŒçå°ãªãäºé žåã±ã€çŽ ãåç²åäž
ã«æ²ç©ããããããã倧ããªåéç©ã®åœ¢æãåæ§
ã«å°ãªããªãããã®çµæãåŸæ¥ã®çåå¿æ¹æ³ã«ã
ããŠåŸãããäºé žåã±ã€çŽ ã¯æ¯èŒçå°ããªç²åºŠã
å³ã¡é«ç¹æ®è¡šé¢ç©åã³äœåºŠã®åéãæããã æ¬çºæã«ãããŠã¯ïŒã€ã®ããŒãããºã«ãå·åŽé¢
ã«ããå å²ãããããåã¯äžçŸ€ã®ããŒãããºã«ã
å ±éã®å·åŽé¢ã«ããå å²ããããã®ããããã§å·
åŽé¢ãæ§æãããããšãã§ãããããŒããå å²ã
ãå·åŽé¢ã®æž©åºŠã¯çåå¿ã«ãããŠåœ¢æãããå»ã¬
ã¹ã®é²ç¹ä»¥äžã«ä¿æãããã°ãªããªãããã以äž
ã§ããã°ãåçž®ç©ãåçµããå·åŽé¢ã®è é£ãšäºé ž
åã±ã€çŽ ã®ç¹æ§ã®å£åãšãçããèãããããæž©
床ãé«ããã°ãå·åŽé¢ã®å·åŽå¹æãæžå°ããåŸã€
ãŠäºé žåã±ã€çŽ ã®æ¿å容éãæ¹åããå·åŽé¢ã®èœ
åãæžå°ããããã®ããå·åŽé¢ã®æž©åºŠã500â以
äžã«ä¿æãããã°ãªããªãã çåå¿é åã«ãããèžæ°çžå æ°Žå解åå¿ã¯ç±³åœ
ç¹èš±ç¬¬2819151å·æ现æžã«èšèŒãããæ¡ä»¶ã«ãã
è¡ãªãããã çã®åŒ·ããã€ããã«ããåå¿ã®åŒ·ãã¯å¹Ÿã€ãã®
æ¹çã«ããå¶åŸ¡ãããããšãã§ããã倧å€æ°ã®ã
ã®ã¯åœæ¥è ã«ã¯æçœã§ããã以äžã«ãã®å¥œé©ãªã
ã®ã説æããã éåžžã®æ¹æ³ã«ãããŠãå¯çæ§ã¬ã¹ããã³ããå
ã±ã€çŽ å«æã¬ã¹ã¯ççŒãæ¯æããã«ååãªé žçŽ ãš
çé åäžã§æ··åãããããã®æè¡ã¯ãïŒãŸãã¯ã
ã以äžã®ã¬ã¹ãäºãå ç±ãããå ŽåãããŸãã¯ã¬
ã¹ã倧ããªä¹±æµã§çåå¿é åã«ãããŠæ··åããã
å Žåã«ãæ¬çºæã«ãããŠäœ¿çšããããšãã§ããã
ä»ã®æ¹æ³ã§ã¯ãããåã±ã€çŽ ããã³å¯çæ§ã¬ã¹ã
ãšãã«çã«å°å ¥ããåã«é žçŽ å«æã¬ã¹ã®äžéšãŸã
ã¯å šéšãšæ··åããããšãæãŸãããäºã圢æãã
æ··åç©ã25ïŒ ã®é žçŽ å«æã¬ã¹ãå å«ãããšããç
ã®åŒ·ããå¢å€§ããã ããåã±ã€çŽ ãå¯çæ§ã¬ã¹ããã³é žçŽ å«æã¬ã¹
ã¯ã埮现ãžãšãããå©çšããã€ã¬ã¹ãå§åäžã§ç
äžã«æŸåºããããšã«ãããçé åäžã§ååã«æ··å
ãããããšãã§ããããžãšãããå°ããäžã€ïŒã€
åã¯è€æ°ã®å ±éçŠç¹ã«ã€ãåœãããã«åºå®ããã
å Žåã«æ··åãäºå®äžå®å šã«ãªããããè¯å¥œãªæ··å
ã確å®ã«ããããã«ã¬ã¹æ··åç©ã«æžŠå·»éåãä»äž
ããããšãã§ããã å¯çæ§ã¬ã¹ããã³åããåã±ã€çŽ ããã³é žçŽ å«
æã¬ã¹ã®äžéšããšãã«æ··åãã次ãã§ãã®æ··åç©
ãè€æ°ã®å°ãžãšããããçé åå ã«æŸåºããã®ã
æå©ã§ããããã®æ¹æ³ã«ãããŠå°åŒ·åºŠã®çãåãž
ãšããã«ãããŠåŸãããã ããåã±ã€çŽ 察å¯çæ§ã¬ã¹ã®æ¯çã¯ããé«ãé
ã®ããåã±ã€çŽ ãäœãç匷床ãäžããããã«çã®
匷ãã«åœ±é¿ãåãŒããããã«åããåã±ã€çŽ ã®é
ã¯å容ãããåã±ã€çŽ ã®éãå¢å ããããšã«ãã
æžå°ããããã«äºé žåã±ã€çŽ ã®åéã«çžåœãªåœ±é¿
ãåãŒãããããããããã¯ä»¥äžã«ç€ºãããäŸã
ãèŠãããããã«ãçžåœé床ã®å¯çæ§ã¬ã¹ã䜿çš
ããã®ã«é©ãããããããªãããããã®èŠå ãè
ãã«ãããŠãããåã±ã€çŽ ã®éã¯åºãéçå ã§å€
åãããããšãã§ãããå¯çæ§ã¬ã¹ãšããŠæ°ŽçŽ ã
çšããå Žåã«ãè¯å¥œãªåéã¯ïŒãªããã«ã®æ°ŽçŽ ã«
察ããŠåããåã±ã€çŽ çŽ0.5ïœä»¥äžã䜿çšãããš
ãã«åŸãããããŠåžè²©ãããã³ã¬ã¹ã䜿çšããã
ãšãã¬ã¹ã®ïŒãªããã«åœãçŽ1.5ïœä»¥äžã®åãã
åã±ã€çŽ ãæé©ã§ãããççŒãããã¬ã¹éã®ãã
ã®å®çšçãªæ¹æ³ã圢æããããã«å°éã®ããåç©
ã«ãã€ãŠå¹çãäœäžããããããçµæžççç±ã«ã
ãèŠå®ããããã®ãé€ãäœãé床ã¯ãªãã é žçŽ åã¯é žçŽ å«æã¬ã¹éã¯é床ã®é žçŽ ïŒçè«é
ã«æ¯ã¹ãŠïŒãé垞匷ããæ倧ã«å¢å€§ããããã®ç¹
ãè¶ãããšãããã«é床ã®é žçŽ å«æã¬ã¹ã¯çã®åŒ·
ããäœäžããã€çãããäžå®å®ã«ããããã«ãç
ã®åŒ·ãã«çžåœãªåœ±é¿ãåãŒããçäžã«å°å ¥ããã
ã¬ã¹ã®æ··åããã匷ããªãã»ã©ãæé©ãªçã®åŒ·ã
ãåŸãããã«å¿ èŠãªé床ã®é žçŽ ãäœäžãããå®é
äžã10ã75ïŒ ä»¥äžã®é žçŽ ã奜ãŸããããšãããã€
ãã åžéã¬ã¹ãäŸãã°çªçŽ ãããæ°ŽåçŽ ãŸãã¯æ°Žèž
æ°ã®çäžãžã®å°å ¥ã¯ç匷床ãããªãæžå°ãããã
ãããäžæŽ»çºãªã¬ã¹ãçäžã«å€å°ã®éã§ååšãã
ãšãã極ããŠåŒ·ãæ··åãäŸçµŠããã€ãŸãå€åææ
ãããçã®åŒ·åºŠãåŸãããã«äºãå ç±ãããã¬ã¹
ã䜿çšããããšãå¿ èŠã§ãããä»æ¹ãçäžã«å°å ¥
ãããã¬ã¹ãåžéãããªãããŸãã¯äžæŽ»çºãªã¬ã¹
ã«ããäžéšåã®ã¿åžéããããªãã°ãçã®åŒ·ãã¯
0.1Ã10-3B.t.u-1ãè¶ããããç¥ããã50nmãã
ç²ãå¹³åç²åºŠã瀺ãã äžè¿°ããéããçé åã«å°å ¥ããåã«ïŒãŸãã¯
ãã以äžã®ã¬ã¹ãŸãã¯ã¬ã¹æ··åç©ãäºãå ç±ãã
ããšãã§ããããã®éžæã¯äžè¿°ã®æ¹æ³ã®ãããã
ãšçµã¿åããããšãã§ããã枩床ãé«ããªãã°ãª
ãçšãäºç±å¹æã¯äžå±€å€§ãããªããããããªã
ããåããåã±ã€çŽ ããã³æ°Žèžæ°ãå«ãã¬ã¹æ··å
ç©ãäºãå ç±ãããšã枩床ã¯ã¬ã¹ãã·ãªã«ã圢æ
ããã®ã«åå¿ãã枩床以äžã«ãã¹ãã§ãããéåžž
400âããããåå¿ã«é¢ããéŸæž©åºŠã§ããã çã®ç±ããã³åŒ·ãã¯ç±åå°é¢å ã§çã®åºéšã«ã
ããŠå·åŽé¢ã®å€åŽã®çé åã®å šéšãŸãã¯äžéšãå²
ãããšã«ããããã«å¢å€§ãããããšãã§ãããäŸ
ãã°ã»ã©ããã¯ãè¡šé¢ã«åŒµã€ãã¬ã³ã¬ã䜿çšãã
ããšãã§ããã äžèšæ¹æ³ã®ïŒã€ãŸãã¯ãã以äžã®çµåãã¯ç匷
床ãããã«å¢å€§ããã å šäœã«ããã€ãŠäžæ§ãªåŒ·ãã®çãæããã®ãæ
ãŸããããã®ç®çã®ããã«ãè€æ°ã®å°ããªçãã
匷ããããå°ããªçã«ãããŠããäžæ§ã§ãããšã
ãåŸåãæããã®ã§ãïŒã€ã®å€§ããªçããããã
奜é©ã«äœ¿çšããããšãã§ãããé«ä¹±æµã§ã®ã倧ã
ãããŸãã¯å°ãããçäžãžã®ã¬ã¹æ··åç©ã®å°å ¥ã¯
ãŸãäžæ§æ§ãå¢å€§ãããããªåŸåããããçãã
ãäžæ§ã«ãªãã°ãªãã»ã©ã·ãªã«ã®ç²åºŠååžããã
äžå±€äžæ§ã«ãªããå³ã¡æ倧ããã³æå°ç²åãšå¹³å
ç²åºŠãšã®éã®å·®ãäžå±€å°ãããªããåœç¶ãªããã
ãã®ç²åã®äžæ§æ§ã¯äœ¿çšãããããŒãã®åã«å€å°
ã®ç¯å²ãŸã§äŸåããã æ¬çºæã«ãããç匷床ã®é åã瀺ãç±³åœç¹èš±ç¬¬
2819151å·ã®ç¬¬ïŒå³ã®ã°ã©ãã®ïŒã50mÎŒã®åºå
ã«ãããŠãé žçŽ å«æã¬ã¹ãåããåã±ã€çŽ ããã³
å¯çæ§ã¬ã¹ã®æ¯çã®å®¹ç©å€åã¯ç²åºŠã®åãªãå°ã
ãªå€åãè¡ãªããšããããšãææãããã¹ãã§ã
ããããããªããã1.3Ã10-5B.t.u-1以äžã®åºå
ã«ãããŠãå³ã¡å¿ èŠãšãããããäœã匷ããæã
ãçã«ãããŠã¯ããããæ¯çã®æ¯èŒçå°ããªå€å
ã¯ç²åºŠã®å€§ããªå€åãçãããããŠç²åºŠååžã¯ãŸ
ããã倧ããã ããåã±ã€çŽ ãšããŠã¯ãåããåã±ã€çŽ ãæ¬çº
æã«ãããŠã¯å¥œãŸããçšãããããã±ã€ããåæ°Ž
çŽ é žH2SiF6ããã³Si2F6ã®ããšãèžæ°çžäžã§åã
ãåç©ãçºçããååç©ããŸã䜿çšããããšãã§
ãããããŠããåæ°ŽçŽ ã±ã€çŽ ãHSiF3ïŒH2SiF2ã
ãã³H3SiFã¯ããããã容æã«å©çšã§ãããã€å
ããåç©ããäžå±€é«äŸ¡ã§ããããã©ããå¥ã®å¯èœ
æ§ã瀺ãã æ¬çºæã®æ¹æ³ãããŠäœ¿çšãããåããåã±ã€çŽ
ã¯çš®ã ã®å ¬ç¥ã®æ¹æ³ã®ããããã«ãã€ãŠçºçãã
ãããšãããã äžæ¹æ³ã¯æç®ã«ãããŠè¯ãç¥ããäžã€å ±åãã
ãŠããããã¿ã«ç³ãåæãšããŠäœ¿çšããããšãã§
ãããããã¯ä»¥äžã®åå¿ã«åŸã€ãŠç¡«é žæº¶æ¶²ããã³
ç ãšåå¿ããã 2CaF2ïŒSiO2ïŒ2H2SO4âSiF4ïŒ2CaSO4ïŒ
2H2O 70ïŒ ç¡«é žæº¶æ¶²ã䜿çšããäžã€ç©è³ªãæ··åããäž
ã€å ç±ããããšãåããåã±ã€çŽ ã¬ã¹ãæŸåºãã
ãã€ãããäžè¿°ããããããªå¯çã¬ã¹ããã³é žçŽ
å«æã¬ã¹ãšæ··åãããããšãã§ããã è±åœç¹èš±ç¬¬438782å·ã«èšèŒãããä»ã®æ¹æ³ã¯æ°Ž
æ§ããåæ°ŽçŽ é žã«ãããç²åãå»ã¬ã¹çã®ããšã
埮ç²ç åã¯ã±ã€ã€é žå¡©ã®åŠçã䌎ãããã®åŸãã
åã±ã€çŽ ãã¬ã¹ãšããŠçºçãããããã®æ¹æ³ã¯ã
åããåã±ã€çŽ ã圢æããããã«ç ãšåã³åå¿ã
ãã¹ãææã®ã±ã€çŽ 圢æåå¿ã®å¯çç©ãšããŠæŸåº
ãããããåæ°ŽçŽ ãå埪ç°ãã埪ç°æ¹æ³ã«ããã
æ¬çºæã®åå¿ã®å©çšãå¯èœã«ãããå®éã«ã¯ãã
ã®å Žåã«ãããæ¹æ³ã¯ç ããŽã åæç©ã«äœ¿çšãã
ã«æãŸããç¡å®åœ¢ç·ç²åºŠã«æžå°ããããã«ãã
ã³ã»ãããªãã·ã³ã°ã»ã«ã³ãããŒã1943幎çºè¡ã®
ãšãã¬ã€ã ã¹èç¡æ©ååŠç¬¬ïŒçã第774é ã第781
é åç §ã 埪ç°æ¹æ³ã«ãããŠæçšãªä»ã®æ¹æ³ã«ãããŠã¯ã
ããåæ°ŽçŽ é žã®æ°Žæº¶æ¶²ã¯ã·ãªã«ã§å å¡«ããã宀ã«
éããããïŒïŒïŒïŒïŒãŸãã¯ãã以äžã§ããã±
ã€ããåæ°ŽçŽ é žïŒïŒHFïŒXã»SiF4ïŒã®æº¶æ¶²ãçºçã
ããããã¯èšèŒã®ããšãèžçºããäžã€åå¿ãèµ·ã
ãããççŒåå¿ããã®æµåºæ¶²äžã®ããåæ°ŽçŽ ãã
ã³åããåã±ã€çŽ ã¯æ°ŽäžãŸãã¯è€åããåæ°ŽçŽ ã
ããªãŠã ã圢æããããã«åºäœã®ããåãããªãŠ
ã äžã«ãŸãã¯æ°Žæ§ã±ã€ããåæ°ŽçŽ é žäžããã³æç®
ã«é瀺ãããä»ã®ãã®ã®äžã«åžåããããããŠå¿
èŠãªãã°åçž®ããããã€æ¬¡ãã§åã³æ°ããªéã®ã±
ã€ããåæ°ŽçŽ é žã補é ããããã«å©çšãããããš
ãã§ããã åºäœã®ããåãããªãŠã ãå©çšãã埪ç°æ¹æ³ã«
ãããŠã以äžã®åå¿ãçããã çŽ300â以äžãã€ãŸã105âã§ã®åžå NaFïŒHFâNaHF2ïŒãŸãã¯NaH2FïŒ 2NaFïŒïŒéå°SiF4ïŒâNa2SiF6 çŽ325âãŸãã¯ãã以äžãã€ãŸã350âã§ã®è±ç NaHF2ïŒãŸãã¯NaH2FïŒâNaFïŒHF ããããŠåŸãããããåæ°ŽçŽ ã¯æ¬¡ãã§åŸªç°ãã
ãã€åããåã±ã€çŽ ã圢æããããã«ãé垞氎溶
液äžã§ã·ãªã«ãšåã³åå¿ãããããã æ¬çºæã®æ¹æ³ã«ãããå¯çæ§ã¬ã¹ãšããŠã¯æ°ŽçŽ
ãå«æããããèªäœæ°ŽçŽ ãå«ãããŸãã¯æ°ŽçŽ ãä»
ã®åœ¢æ ãäŸãã°ã±ã€ããåæ°ŽçŽ é žãŸãã¯æ°Žèžæ°ãš
ããŠçã«äŸçµŠããããªãã°ããããªãã¬ã¹ã䜿çš
ããããšãã§ããäžé žåççŽ ã®ããšãæ°ŽçŽ ãå«æ
ããªãä»ã®å¯çã¬ã¹ã䜿çšããããšãã§ãããæ®
çºæ§çåæ°ŽçŽ ããã³ãã®æ··åç©ã¯ããããè±å¯ã§
ãã€å®äŸ¡ã§ãããã奜éœåãªäŸçµŠæºã§ããããã
ãŠãããã®éã«èèªæãèç°åŒããã³è³éŠæçå
æ°ŽçŽ ãèšèŒããããšãã§ãããççŒã¬ã¹ã®äŸã¯ã
ãã¹ãŠèžæ°çžã«ãããŠã補é æ¥ã¬ã¹ã倩ç¶ã¬ã¹
ïŒäž»ãšããŠã¡ã¿ã³ããã³ãšã¿ã³ïŒãåæ¥çšãããã³
ã¬ã¹ïŒã¡ã¿ã³ããšã¿ã³ããããã³ããã³ãã¿ã³ã®
æ··åç©ïŒãåæ¥çšãã¿ã³ã¬ã¹ããã³ãŒã³ãæ°Žæ§ã¬
ã¹ïŒæ°ŽçŽ ãšäžé žåççŽ ã®æ··åç©ïŒãã±ãã·ã³ãã¡
ã¿ã³ããšã¿ã³ããããã³ããã³ã¬ãœãªã³ã§ããã
çã«èžæ°ãå ãããããªãã°ãäžé žåççŽ ã®ããš
ãæ°ŽçŽ ã®ãªãå¯çæ§ã¬ã¹ãåæ§ã«äœ¿çšã§ããããš
ãã«è¯å¥œãªã·ãªã«çæç©ã¯çŽç²ãªæ°ŽçŽ ã¬ã¹ãŸãã¯
æ°ŽçŽ ã¬ã¹ã容ç©ïŒ ã§60ïŒ ä»¥äžå«æããã¬ã¹æ··åç©
ã䜿çšãããšãåŸãããã å¯çæ§ã¬ã¹ã®æ§è³ªã¯ãæãããªããšããã¬ã¹ã®
ççŒã«æŸåºãããç±éãéèŠã§ã¯ããããé倧ã§
ã¯ãªããèšèŒãããç匷ãã®ç¯å²ã¯æ°ŽçŽ ãäžé žå
ççŽ ããã³äŸãšããŠçåæ°ŽçŽ ã®æ··åç©ã䜿çšããŠ
èšç®ããããå¯çæ§ã¬ã¹ãé žçŽ ãšã®ççŒã«ãããŠ
æŸåºãããç±éã«ãããŠãããã®ç©è³ªãã倧ãã
ç°ãªããªãã°ã瀺åãããäœæ¥æ¹æ³ã«å€æŽããªã
ãã°ãªããªããäŸãã°ãã®ç©è³ªããã倧ããç±é
ãæŸåºããç©è³ªãšæ··åããããšãæãŸããããã®
çµæå¹³åã¯ãããã³ãŸãã¯æ°ŽçŽ ã®ççŒã«ãããŠæŸ
åºããããã®ã«ã»ãšãã©è¿ããªãã äžèšã®æ¹æ³ã«ãããé žçŽ å«æã¬ã¹ãšããŠã¯ç©ºæ°
ãªãã³ã«çªçŽ ããã³äºé žåççŽ ã®ããšãäžæŽ»çºãª
ã¬ã¹ãšã®ä»ã®é žçŽ æ··åç©ããã³é žçŽ ããèªäœãå
æ§ã«äœ¿çšããããšãã§ãããçã®åŒ·ãã¯ããã空
æ°ã«ä»£ããŠçŽç²ãªé žçŽ ãŸãã¯é žçŽ ãå€ãå«ãã 空
æ°ã䜿çšããããªãã°åŒ·åã«å¢å€§ãããã ç ããã®åããåã±ã€çŽ ã®çºçãè¡ãªãã®ã«äœ¿
çšã§ããè£ çœ®ã¯ååŒã«ãããŠã¯éåžžã®ãã®ã§ã
ããåããåã±ã€çŽ çºçåšã¯æ¹æåšããã³å€éšå·
åŽãåããéåžžã®åå¿çã§ããããã®äžã«ããå
æ°ŽçŽ é žããã³ç ã®é£ç¶æµãå°å ¥ãããç ã¯å°ãªã
ãšã98ïŒ ã®äºé žåã±ã€çŽ ãé©åœã«å«æããŠããå
å¿çå ã®æº¶æ¶²ã¯éå°ã®æº¶è§£äºé žåã±ã€çŽ ãå«æã
ãŠããã溶液ã¯å¹Ÿããã®æ°Žèžæ°ããã³å¹Ÿããã®å
å¿ããªãããåæ°ŽçŽ ãšå ±ã«ãåããåã±ã€çŽ ãæŸ
åºããããã«å ç±ãããèžçºåšã«æ¡å ããããå
ããåã±ã€çŽ ãšæ°Žèžæ°ã®æ··åç©ã¯ãã€ããéã€ãŠ
ççŒå®€ã«éã°ããã ãã¿ã«ç³ãç ããã³ç¡«é žããåããåã±ã€çŽ ã
çºçãããã®ã«äœ¿çšããããšãã§ããè£ çœ®ã¯ååŒ
ã«ãããŠã¯éäŸã®ãã®ã§ãããåããåã±ã€çŽ çº
çåšã¯æ¹æåšããã³å€éšå ç±ãåããéåžžã®åå¿
çã§ããããããŠåããåã±ã€çŽ ã¯èžæ°çžäžã«çŽ
æ¥æŸåºãããã ã¬ã¹ã¯å€éšå ç±ã«ãã€ãŠäºãå ç±ããäžã€æåŸ
ã«ååã«åŒ·åãªçãåŸãããã«æ··åãããããšã
ã§ããã ççŒå®€ã¯çé åã®ç±ãå¢å€§ããããã«ã»ã©ãã
ã¯ãŸãã¯éå±åå°é¢ãæããèç«æ§ã¬ã³ã¬ã§è£æ
ã¡ãããéå±è£œã®å¯éåå¿å®€ã§ããããã®å®€ã®äž
ã«åæ§ã«ç©ºæ°ã®ããšãé žçŽ å«æã¬ã¹ããã³å€©ç¶ã¬
ã¹ãŸãã¯æ°ŽçŽ ã®ããšãå¯çã¬ã¹ãå°å ¥ãããã ååã«åŒ·åãªçãåŸãããã«å€æ°ã®çš®ã ã®ååŒ
ã®ããŒãã䜿çšããããšãã§ããå¿ é ã®èŠå ã¯å
å¿ã¬ã¹ãäºãã«å¯æ¥ããŠæ¥µããŠè¿ éã«ç§»åããã
ããšã«ãããããããŠæ¥µããŠåŒ·åãªåå¿ãå¯èœã«
ããã倧ããªããŒãã䜿çšããããªãã°ã該ããŒ
ãã¯æ倧ç匷床ã200KWã§ããçãçºçãã¹ã
ã§ãããå°ããªããŒãã䜿çšããããªãã°ã該ã
ãŒãã¯æ倧ç匷床ã10KWãè¶ããªãçãçºçã
ã¹ãã§ããã è¯å¥œãªçµæã¯çç¶æ··å宀ãããªãããŒãã«ãã
åŸãããåèšçç¶æ··å宀å ã§åããåã±ã€çŽ ãå¯
çæ§ã¬ã¹ããã³ç©ºæ°ãæ··åãããããŠæ··åç©ã¯ã¹
ã¯ãªãŒã³ãŸãã¯å€æ°ã®åŸ®çŽ°ãªåãæããåæãã
ã¬ãŒããééããã該混åç©ã¯çãæ··å宀å ã«é
æµããã®ãé»æ¢ããã¹ã¯ãªãŒã³ãŸãã¯ãã¬ãŒãã®
å€åŽã§ç¹ç«ãããã æºè¶³ã®ããä»ã®ååŒã®ããŒãã¯ïŒã€ã®åå¿ç®¡ã
åããé žçŽ å«æã¬ã¹ã¯æå æ¹ç®¡ããã³æå€æ¹ç®¡ã
éã€ãŠäŸçµŠãããå¯çã¬ã¹ããã³æãŸããã¯é žçŽ
å«æã¬ã¹ã®äžéšåãšã®åããåã±ã€çŽ ã®æ··åç©ã¯
äžé管ãéã€ãŠå°å ¥ãããã 第ïŒå³ããã³ç¬¬ïŒå³ããæãããªããã«ãå·åŽ
é¢ããããããã®ããŒãããºã«ãçç¶å·åŽæ©æ§ã«
ãã€ãŠå®å šã«å å²ããããããŸãã¯äžçŸ€ã®ããŒã
ããºã«ãå ±éã®å å²å·åŽæ©æ§ã«ãã€ãŠå²ç¹ããã
ããšãã§ããããã«é 眮ããããšãã§ãããå·åŽ
æ©æ§ã¯ãçåå¿é åã«åãåãé¢ãå·åŽä¿æãã
ããã«ãå·åŽæµäœãæµäœãŸãã¯ã¬ã¹ã埪ç°ããã
ãã€ã©ãŸãã¯ç±äº€æåšã®åœ¢ç¶ã«ãããããšãã§ã
ãã å·åŽé¢ã¯çåå¿é åãå šäœçãŸãã¯éšåçã«å²
ç¹ãŸãã¯å²ãããšãã§ãããå·åŽæ©æ§ã¯ã第ïŒå³
ã«ãããããã«ãå·åŽé¢ã®å€é¢äžã®åäžå¿ç®¡éã«
埪ç°ãããå·åŽç¡«äœãåããŠã管ç¶ã«ããããšã
ã§ãããå·åŽæ©æ§ã¯ãå€å²ç®¡ãåããŒãã®ãŸãã
ã®çåå¿é åã®å°ãªããšãåºéšéšåãå²ããããª
æ¹æ³ã§ãããŒããæ¿å ¥ãããå€å²ç®¡ã貫éããå€
æ°ã®éæŸç®¡ãæããæµäœããããéã€ãŠåŸªç°ãã
ãå€å²ç®¡ã®åœ¢ç¶ã«ãããããšãã§ããã å·åŽé¢ã®æž©åºŠã¯éèŠã§ããã該枩床ã¯çåå¿é
åã«åœ¢æãããççŒå»ã¬ã¹ã®é²ç¹ä»¥äžã«ãã¹ãã§
ãããä»ã®æ¹æ³ã§ã¯ãåçž®äœãå·åŽé¢äžã«ãè è
ãçºçããã€äºé žåã±ã€çŽ çæç©äžã®æ害ãªäœçš
ãæãããå·åŽç¹æ§ã®æ倱ã圢æããã ä»æ¹ã«ãããŠãå·åŽé¢ã®æž©åºŠãé«ããã°é«ãã»
ã©ãã·ãªã«ã®ç²åºŠããã³éå床ã«é¢ãã圱é¿ãã
ãäžå±€å°ãªããªããå·åŽå¹æãæžå°ãããšãåå¿
枩床ãå¢å€§ããã€ã·ãªã«ã®ç²åºŠãæžå°ãããåŸã€
ãŠå·åŽé¢ã¯500â以äžã®æž©åºŠã«ä¿æãããã¹ãã§
ããã çã®å·åŽã¯çããå·åŽé¢ãžã®ç±æŸå°ã«ãã€ãŠäž»
ãšããŠçãããããã¯çããã®å·åŽé¢ã®è·é¢ã¯é
èŠã§ãªãããšãæå³ãããããããªããéåžžãã®
è·é¢ã¯200nm以äžã«ä¿æãããã ãã¡ããçäžã®æž©åºŠã¯ããããªã枩床ã§ãäºå®
äžæž¬å®ããããšã¯ã§ããªããã500âããããªã
é«ããããããªããå·åŽé¢ã«ãããçåå¿é åã®
枩床ã¯ãã·ãªã«ã®ç²åºŠäžã®å¹æã®ãããããªãäœ
ãããšãæããã§ãããããããåå¿ãå¶åŸ¡ãã
ã€ã·ãªã«ã®åéãæ¹åããçã®æž©åºŠãããããå·
åŽé¢ã®æž©åºŠãå¶åŸ¡ããã«ååã§ããããããŠçè²
åå¿é åäžã®æž©åºŠã¯ã·ãªã«ã®åéãå¢å€§ãããã
ã«èŠæ±ããããšãåå¿ãå¶åŸ¡ããããã«ãã®æ段
ã«ãã€ãŠååæ£ç¢ºã«æž¬å®ãããããšãã§ããã ãã®ããã«äžæãã枩床ã«ãããå·åŽã¯ããã
ããªæ¶²äœããã®ãããªé«æž©ã«ãããŠæ¶²ç¶ã§ããã
ããäŸå€çãªå·åŽæµäœãå¿ èŠãšãããéåžžå·åŽã¬
ã¹ãŸãã¯æ²žéš°ããã®ãèªç±ã§äžã€å·åŽæ©æ§ã«ç¢ºç«
ãããå§åã«ãããŠãã®æ²žéš°ç¹ã®ããã«å·åŽæž©åºŠ
ã確ç«ããããšãèªç±ã§ãã液äœãå©çšããã
ããåŸã€ãŠãäŸãã°æ²žéš°æ°Žã¯ä»»æã®å§åäžã§ã極
ããŠæå©ãªå·åŽæµäœã§ãããèžæ°ã¯ååãããã€
ç±ã¯ããããŠååãããããŠåå¿ç³»çµ±å ã§ããŸã
ã¯ãã©ã³ãã®ä»ã®éšåå ã§ã©ãã§ã§ãå©çšããã
ããšãã§ããã ä»ã®é©åœãªå·åŽæµäœã¯ççŒããå·åŽãããå»ã¬
ã¹ã§ããã該å»ã¬ã¹ã¯ãããã®ã·ãªã«ã®å«éãã
èªç±ã«ãããŠãããç±äº€æåšããã®é«ç±å»ã¬ã¹ã¯
ããŒã宀ã®å£ãåäžã«ããã®ã«äœ¿çšã§ãããã€ã
ãã«ããããŒãåå¿é åå ã®äºé žåã±ã€çŽ ã®æ²æŸ±
ãé»æ¢ããã ãããã®äºé žåã±ã€çŽ ã®å«éãæããããŒãã
ãã®é«ç±æã¬ã¹ã¯ããã¹ãã»ãã¬ãŒã¿ã«éã°ã
ãããã®åºåã«ãããŠã枩床ã¯ãå ¬ç¥ã®ããšãã
ããåæ°ŽçŽ é žãé²ç¹ä»¥äžã®æž©åºŠã§å®¹æã«åœ¢æãã
ããããããåæ°ŽçŽ é žã®åçž®ãé¿ããããã«çŽ
200âã«é©åã«ä¿æãããã ããåæ°ŽçŽ ãååããããã«ã»ãã¬ãŒã¿ããã®
ã¬ã¹ã¯éåžžã®åçž®åšã«å°å ¥ãããã€åçž®ãããã
ãã®ããã«ããŠåŸãããåçž®ããåæ°ŽçŽ é žã¯æ°ã
ãªéã®ã·ãªã«ã®åŠçã«ãããŠå䜿çšã®ããæ»ãã
ããæã¬ã¹ã¯å€§æ°ã«æŸåºããããããã§ãªããã°
ããåæ°ŽçŽ ã¯çŽ150âã«ãããŠåžåãããããå
ãããªãŠã ãå«æããåžåå¡ã«æ¡å ããã350â
ãŸãã¯ãã以äžã«å ç±ããããšã«ããåŸã§ææã®
ããšãæŸåºããããããŠããå€ãã®åããåã±ã€
çŽ ã圢æããããã«æ»ãããã ã¬ã¹åå¿çææ··åç©ãäºé žåã±ã€çŽ ããã³ãã
åæ°ŽçŽ ã®åé¢åã«å·åŽããããªãã°ãåå¿ã¯éã«
ããããããŠé«æž©ã§åœ¢æããã埮现åäºé žåã±ã€
çŽ ã¯ããåæ°ŽçŽ ãšåå¿ãã以äžã®åå¿åŒã«åŸã€ãŠ
åããåã±ã€çŽ ãåçºçããã SiO2ïŒ4HFããSiF4ïŒ2H2O ãã®éåå¿ã¯600â以äžã®æž©åºŠã«ãããŠé¡èã«
ãªãããããŠæž©åºŠãéäžãããšãçãå¢å€§ããã
極ããŠå€§ããªè¡šé¢ç©ãæãã埮现åäºé žåã±ã€çŽ
ã450â以äžã®æž©åºŠã§ããåæ°ŽçŽ ãšæ¥æ¿ã«åå¿ã
ãããšãå®éšã¯ç€ºãããåŸã€ãŠåå¿æ··åç©ãçŽæ¥
å·åŽã«ãã600â以äžã«äžããããå Žåã«ãäºé ž
åã±ã€çŽ ã®å€§éšåã¯åããåã±ã€çŽ ã«å€æããã
ããããŠäœåçã§ãã€äžçµæžãªæ¹æ³ãçµæãšããŠ
çããã åå¿ã600âããã³ãã以äžã«ãããŠäºé žåã±
ã€çŽ ã®åœ¢æã®æ¹åã«é²è¡ããããã§äºé žåã±ã€çŽ
ã®è¯å¥œãªåçãåŸãããšãã§ããããä»ã®å°é£ã
çèµ·ãããããåæ°ŽçŽ ãå«æããã¬ã¹ã¯ãã®ãã
ãªé«æž©ã«ãããŠéåžžã«äŸµé£æ§ã§ããããã€åŸã€ãŠ
åé¢åšçšã®é©å®ãªæ§é ææãèŠãåºãã®ãå°é£ã§
ãããå ããŠäºé žåã±ã€çŽ ç²åã¯é«æž©ã§æ¥æ¿ã«äž
ååããããã®çµæãã倧ããªç²åã¯ãã倧ãã
ãªããããå°ããªç²åãããå°ãããªãäžã€æåŸ
ã«æ¶å€±ãããã®çµæ掻æ§ãå°ãªããã€åŸã€ãŠäŸ¡å€
ã®äœããã倧ããªç²åºŠã®çæç©ãåŸãããã 1965幎ïŒæ31æ¥ä»ã®ãã¬ã¡ã«ãæ°ã®ç±³åœç¹èš±ç¬¬
3203759å·ã«ããã°ãããåã±ã€çŽ ååç©ããã³
æ°Žã®èžæ°çžåå¿ã«ãã€ãŠåŸããããããªäºé žåã±
ã€çŽ ã¯åå¿æ··åç©ã®æž©åºŠããäœã枩床ãæããäž
掻æ§ã¬ã¹ã«ããã¬ã¹å¯çç©ããã³æžæ¿äºé žåã±ã€
çŽ ãåžéããããšã«ãã倧ããïŒã200ÎŒã®ç²å
ãšããŠæŽ»æ§åœ¢ç¶ã«ãããŠåå¿æ··åç©æž©åºŠã600â
以äžã«ãã€å¥œãŸããã¯350ãã575âã®ç¯å²å ã§ã
ããåžéããæ··åç©ã®é²ç¹ä»¥äžã«æžå°ããã«åå
ãªéã«ç¶æãããããšãã§ãããäºé žåã±ã€çŽ ã¯
次ã«å·åŽåžéããæžæ¿æ¶²ããåé¢ããããè¯å¥œãª
åçã®é«å質ã®äºé žåã±ã€çŽ ãåŸããããããæž©
床ã§ã®åå¿ã®å¯éæ§ã«éã¿ãŠé©ãã¹ãçµæã§ã
ãã åå¿æ··åç©ãå·åŽããããã«ã¯ããããªãäžæŽ»
æ§ã¬ã¹ã䜿çšããããšãã§ãããå³ã¡ãã®ãããª
ã¬ã¹ã¯åå¿æ··åç©ããã®ååãæãŸãããããªã
æåãšãåå¿ãçããªããã®ã§ãããé©åœãªã¬ã¹
ã¯ç©ºæ°ãæ°Žèžæ°ãçªçŽ ãäºé žåççŽ ãããªã³ãã
ãªãŠã ãã¢ã«ãŽã³ããã³åæ§ãªçšã¬ã¹ããã³ççŒ
éçšããã®æã¬ã¹ã«ãã€ãŠäŸèšŒãããã奜é©ãªåž
éå€ã¯åŸ®çŽ°åäºé žåã±ã€çŽ ãåé¢ãããåŸã®åå¿
ããã®æã¬ã¹ãŸãã¯å¯çã¬ã¹ã§ããããããŠãã
ãã¯ãã¬ã¹æåã®åçž®ã®äœäžãçºçããªããšãã
çç±ã®ãããé©åœãªæž©åºŠã«å·åŽãããããã«ãã
ããåæ°ŽçŽ ã®ååããã³ãã®ããã«æãŸãããªã
ã°ãããããã®åå¿ããªãåããåã±ã€çŽ ã®åå
ã容æã«ããã æ··åãããå·åŽã¬ã¹ã®éããã³ãã®æž©åºŠã¯åå¿
æ··åç©ãããããããã¹ã枩床ãåŸãããã«èª¿æŽ
ãããŠãããåŸã€ãŠãããã®å€æ°ã¯ãææã®å·åŽ
çšåºŠã«å¿ããŠãåºãéçå ã§å¶åŸ¡ãããããšãã§
ãããå®éäžåå¿æ··åç©ã¬ã¹ã®å®¹ç©ã®ïŒåããïŒ
åãæé©äœæ¥ç¯å²ã§ãããæ··åãããã¬ã¹éã¯æž©
床ã600â以äžã§ãããåžéããæ··åç©ã®é²ç¹ä»¥
äžã«ããããã«é©çšãããããã®æž©åºŠç¯å²å ã«ã
ããŠãäŸãã°è é£ããã³æ©æ¢°ç匷床ã®åé¡ã®ããš
ãäºé žåã±ã€çŽ ã®åé¢æ®µéã«ãããŠãããããã
å®éäžã®åé¡ãæ¯èŒçå æãæãã å·åŽã¬ã¹ã®æ··åæ¹æ³ã¯éèŠã§ã¯ãªãããããŠ
çš®ã ã®æ¹æ³ã§è¡ãªãããšãã§ãããåŸã€ãŠç±³åœç¹
蚱第2819151å·æ现æžã®äŸãã°ç¬¬ïŒæ¬ã®ç¬¬67è¡ç®
ä¹è³ç¬¬ïŒæ¬ã®ç¬¬37è¡ç®ã«èšèŒãããæ¹æ³ããã³è£
眮ã®äœ¿çšã«ãããŠãã¬ã¹ã¯çãå²ç¹ããã¬ã¹ã®ã«
ãŒãã³ã圢æãããããªæ¹æ³ã«ãããŠçã®åŸãã«
å°å ¥ãããããã®ã«ãŒãã³ã¯çã®æµãã®æ¹åã«å¯Ÿ
ããŠå¹³è¡ã«ãåã¯ããã«å¯ŸããŠæ£æ¥ããŠåããã
ãšãã§ããçµæãšããŠããå·»ãäœçšãçããã
ãã åå¿é åã®çµç«¯ã«å·åŽã¬ã¹ãå°å ¥ãããšç¹ã«æ
å©ã§ãããããã¯åå¿é åèªäœã¯å·åŽãŸãã¯æ¹ä¹±
ãããªãããåå¿çæç©ãåå¿åŸæ¥éã«å·åŽãã
ããšããå©ç¹ãçãããæ倧ã®æå¹æ··åãåŸãã
ãã«ãå·åŽã¬ã¹ã¯é©åœã«æ圢ããããºã«ãéã€ãŠ
å°å ¥ãããŠãè¯ãã å·åŽã¬ã¹ãæ··åããåŸãäºé žåã±ã€çŽ ã®åé¢ã¯
æ©æ¢°çé塵åšã«ãã€ãŠè¡ãªãããšãã§ãããæ©æ¢°
çé塵åšã®çšèªã¯ããã§ãã€ã«ã¿ããã³éé»é塵
åšãé€ããã¹ãŠã®ååŒã®é塵åšã瀺ããæ©æ¢°çé
塵åšã®äŸãšããŠã¯ããµã€ã¯ãã³ããã³é å¿é塵
åšãè¡çªé塵åšããã³ééé塵宀ãæããããšã
ã§ããããã€ã«ã¿ãŸãã¯éé»é塵åšã«ãã€ãŠæ¬çº
æã«åŸã€ãŠå·åŽããã³åžéåŸåŸããã埮现åäºé ž
åã±ã€çŽ ãåé¢ããããšã¯ã§ããªãã€ããããã
ã³ïŒåããåãšãã¬ã³éåäœïŒãŸãã¯ã»ã©ããã¯
ãã€ã«ã¿ã¯ïŒã20ïŒ çšåºŠãšäœãäºé žåã±ã€çŽ ã®å
åã瀺ãããããŠãã®æ¹æ³ã¯ãããããããã®ã
ã€ã«ã¿ã䜿çšãããå Žåã«ã¯äžçµæžã§ãããéé»
é塵åšããŸãäžååãªäºé žåã±ã€çŽ ã®ååã瀺ã
ãã€åæ§ã«ãã®æ¹æ³ã¯äžçµæžã§ããã å»ã¬ã¹ã®ããçŽ å«éã¯1976幎ïŒæ30æ¥ä»ã®ãã¬
ã¡ã«ãã®ç±³åœç¹èš±ç¬¬3969485å·æ现æžã«èšèŒãã
ãæ¹æ³ã«åŸã€ãŠååããããšãã§ããã 第ïŒæ®µéã¯æ°Žäžã§ã®æã¬ã¹ããã®ã±ã€çŽ ããã³
ããçŽ å«æååç©ã®åžåã§ãããããåæ°ŽçŽ ã¯å š
ã氎溶æ§ã§ããããã€è¿ éã«æº¶è§£ãããåããå
ã±ã€çŽ ã¯ããåã±ã€çŽ é žã圢æããããã«å æ°Žå
解ããããå ããŠåããåã±ã€çŽ åçž®ãé«ããªã
ã°ã埮现ã§ã¯ããã溶解ããªãäºé žåã±ã€çŽ ãå
æ§ã«ããåã±ã€çŽ é žæ°Žæº¶æ¶²äžã«åœ¢æããããåŸã€
ãŠé«ã·ãªã«ã®ããåã±ã€çŽ é žã¯åæ§ã«ãã®æº¶æ¶²äž
ã«åœ¢æãããè¿äŒŒã®çµæç©H2SiF6SiF4ãæã
ããå»ã¬ã¹ã¯åæ§ã«ããåã±ã€çŽ é žæ°Žæº¶æ¶²äžã«æž
æ¿ããããŸãŸã§ããäºé žåã±ã€çŽ ã®æ¯çãå«æã
ãããšãã§ããã åžåã¯å®€æž©ã§è¡ãªãããšãã§ãããå»ã¬ã¹ã¯æ··
åãæ¹åããããã«ã奜ãŸããã¯ã¬ã¹æµã«å¯ŸããŠ
éã«æµããæ°Žã®åŽé§ãšæ¥è§Šãããããšãã§ããã
ãã®ååŒã®æäœã¯ãšãã«é£ç¶çæ¹æ³ã«é©åãã
ãã氎察å»ã¬ã¹ã®ååé«ãæ¯çãã±ã€çŽ ããã³ã
ãçŽ å«ææåã®ãã¹ãŠãå®è³ªäžé€å»ããã®ã«äœ¿çš
ãããã ãã®åžåæ¹æ³ã¯å ¬ç¥ã§ããããã€åŸã€ãŠããã«
詳现ã«ã¯èª¬æããªãã ã±ã€ããåæ°ŽçŽ é žããã³äºé žåã±ã€çŽ ãŸãã¯ã
ãåæ°ŽçŽ ã®æº¶æ¶²ã¯ããã§åããåã±ã€çŽ ããã³ã
ãåæ°ŽçŽ ã圢æããããã«ç¡«é žãšåå¿ããããå
äžçæç©ã¯åããåã±ã€çŽ ãšæ··åãããã±ã€ãã
åæ°ŽçŽ é žãçµæH2SiF6SiF4ã®é«ã·ãªã«ã®ã±ã€ã
ãåæ°ŽçŽ é žãã圢æããããããŠäºé žåã±ã€çŽ ã
åæ§ã«ååšãããšããå¯çç©ã¯ããåæ°ŽçŽ ã«ä»£ã€
ãŠæ°Žã§ããã äºå®äžãç¡«é žã¯ãã®åå¿ã«é¢äžããªãããåå¿
ã«æå©ã§ããé žæ§åå¿åªäœãçããå€ã¯ã圢æã
ããããšãã§ããããåæ°ŽçŽ ãŸãã¯æ°Žçšã®åžåå€
ãšããŠã®ã¿äœçšããã ãã®åå¿ã«ãããŠåœ¢æãããããåæ°ŽçŽ å¯Ÿåã
ãåã±ã€çŽ ã®æ¯çã¯åå¿æ··åç©äžã®ã±ã€ããåæ°Ž
çŽ é žããã³åããåã±ã€çŽ ã®çžå¯Ÿçæ¯çã«äŸåã
ããã±ã€ããåæ°ŽçŽ é žã¯ãçã¢ã«éã®ã±ã€ããå
æ°ŽçŽ é žããã³åããåã±ã€çŽ ã®ååšã«ãããŠãå
ããåã±ã€çŽ ã®åã¢ã«ã«å¯ŸããŠããåæ°ŽçŽ ïŒã¢ã«
ã圢æããããçã¢ã«éã®åããåã±ã€çŽ ããã³
ããåæ°ŽçŽ ã圢æãããäžæ¹ãSiO2ã®ååšã«ã
ããŠããåæ°ŽçŽ ã®åœ¢æãæå¶ããããããããŠã
åå¿æ··åç©äžã®ãããã®æåã®æ¯çãå€åããã
ãšã«ãããåããåã±ã€çŽ 察ããåã±ã€çŽ ã®ææ
æ¯ããã®åå¿æ®µéã«ãããŠçºçãããããšãã§ã
ããåŸã€ãŠåå¿çæç©äžã®åããåã±ã€çŽ 察ãã
åæ°ŽçŽ ã®æ¯çã¯ãæãŸããããã«å¯ã«å¶åŸ¡ããã
ããšãã§ããã ã±ã€ããåæ°ŽçŽ é žãšç¡«é žãšã®éã®åå¿ã¯æ¹æåš
ãåããåå¿çå ã§è¡ãªããããåçž®ãããç¡«é ž
ã®éã¯åå¿æ··åç©ãééïŒ ã§çŽ60ïŒ ããçŽ90ïŒ ã
奜ãŸããã¯çŽ66ïŒ ããçŽ75ïŒ ã®ç¡«é žãå«æããã
ãã«èª¿æŽãããããã®åå¿ã¯çŽ50âããçŽ150â
ã®ç¯å²å ã«äžæããã枩床ã§è¡ãªãããšãã§ã
ãã åããåã±ã€çŽ ã¯ãããåæ°ŽçŽ ã§ãããšåæ§ãª
ã¬ã¹ã§ããããããŠäž¡ã¬ã¹ã¯ããšãã«èšèŒããã
ç¯å²å ã«äžæããã枩床ã«ãããŠãåå¿æ°Žæº¶æ¶²ã
ã容æã«æŸåºããããåå¿æ··åç©ããæŸåºããã
ã¬ã¹æ··åç©ã¯åæ§ã«æ°Žèžæ°ãå«æããŠãããåã
ãåã±ã€çŽ ãããåæ°ŽçŽ ããã³æ°Žããåé¢ããã
ãã«ãåå¿æ··åç©ããã®ã¬ã¹ã¯é©å®ã«ã¬ã¹æŽæµè£
眮ãééãããããšãã§ãã該ã¬ã¹æŽæµè£ 眮å ã§
ã¬ã¹ãæµå ¥åçž®ãããç¡«é žãšæ¥è§Šããããããã
ãããã®åããåã±ã€çŽ ã¯æµå ¥é žäžã«æº¶è§£ããåŸ
ã€ãŠæµå ¥ç¡«é žã®åããåã±ã€çŽ ã®åçž®ãå¢å€§ãã
ããè©²é žã¯ãŸãã¬ã¹äžã®ããåæ°ŽçŽ ããã³æ°Žèžæ°
ã®å®è³ªäžå šéšãåžåãããããŠæ¯èŒççŽç²ãªåã
ãåã±ã€çŽ ã®æµããã¬ã¹æŽæµè£ 眮äžã®é žããåé¢
ããããšãã§ããã 次ã«ã第ïŒæ®µéã«ãããŠãåããåã±ã€çŽ ã¯å
埪ç°ããããããŠé«æŽ»æ§ã®äºé žåã±ã€çŽ ããã³ã¬
ã¹ç¶ããåæ°ŽçŽ ã圢æããããã«æ°çžã«ãããŠæ°Ž
ãšå æ°Žå解ãããã 以äžã«å³é¢ã«ã€ããŠèª¬æããã第ïŒå³ã«ç€ºãã
å·åŽããŒãéåäœã¯ããºã«ïŒãããªãéåžžã®ååŒ
ã®ããŒãïŒãå«ã¿ãããºã«ïŒå ã«ã¯ã©ã€ã³ïŒãé
ã€ãŠå¯çæ§ãŸãã¯çæã¬ã¹ãåããåã±ã€çŽ ãã
ã³äžæ¬¡ç©ºæ°ãäŸçµŠããããããŒãããºã«ïŒã¯äºæ¬¡
空æ°ãäŸçµŠãããç°ç¶ãžã€ã±ããïŒãåããŠã
ããããŒãããºã«ïŒã¯åå¿ã®çç¶å·åŽãžã€ã±ãã
ïŒå ã«å°å ¥ãããã©ã€ã³ïŒãéã€ãŠæµå ¥ãäžã€ã©
ã€ã³ïŒãéã€ãŠç±äº€æäžã«åœ¢æãããèžæ°ãšå ±ã«
æŸåºããã沞隰氎ããžã€ã±ããïŒãéã€ãŠåŸªç°ã
ããã ããŒãäžæ¹ã®çåå¿é åã«ãããŠçºçããã
ã¬ã¹ç¶åå¿æ··åç©ã¯ççŒããã®äžã€åããåã±ã€
çŽ ã®å æ°Žå解ããã®å»ã¬ã¹ãšãçåå¿é åãé
ãå»ã¬ã¹ã®äžæµå ã«æµ®éããäžã€é£è¡ããã極埮
现åäºé žåã±ã€çŽ ãšããæããåŸã€ãŠãããã¯äž
æ¹ã§ååããããããŠäºé žåã±ã€çŽ ã¯ãäŸãã°äž
è¿°ããæ¹æ³ã®ããããã䜿çšããŠååãããã 第ïŒå³ã«ç€ºããè£ çœ®ã¯è€æ°ã®ããŒãïŒïŒãããª
ãã該ããŒãã¯ïŒã€ãå³ç€ºãããŠããããããã¯
第ïŒå³ã«ç€ºãããã®ãšåãã§ããããå ±éã®åäž
å¿çã«é 眮ããçç¶å·åŽãžã€ã±ããïŒïŒå ã«å°å ¥
ãããŠããã該ãžã€ã±ããïŒïŒã¯ã©ã€ã³ïŒïŒãé
ããŠæ°ŽãäŸçµŠããã©ã€ã³ïŒïŒãéããŠæž©æ°Žããã³
èžæ°ãååããããšã«ããå·åŽããããåããŒã
ïŒïŒãå²ç¹ããçç¶ãžã€ã±ããïŒïŒã«ããã©ã€ã³
ïŒïŒããäºæ¬¡ç©ºæ°ãäŸçµŠãããççŒã¬ã¹ãåãã
åã±ã€çŽ ããã³äžæ¬¡ç©ºæ°ã¯ã©ã€ã³ïŒïŒãéããŠã
ãŒãã«çŽæ¥äŸçµŠãããã ããŒãããã®çåå¿é åäžã®ã¬ã¹ç¶åå¿æ··å
ç©ã¯ççŒããã®ããã³åããåã±ã€çŽ ã®å æ°Žå解
ããã®å»ã¬ã¹ãšãã¬ã¹ç¶åå¿æ··åç©äžã«æµ®éãã
äžã€é£è¡ããã埮现åã·ãªã«ãšãããªããã¬ã¹ã
ãã³ä»éããã·ãªã«ã¯å¥œãŸããã¯äžåºŠå·åŽããã
ããŠã·ãªã«ã¯æ¬¡ã«ãäŸãã°äžè¿°ããæ¹æ³ã䜿çšã
ãŠååãããã 第ïŒå³ã«ç€ºããè£ çœ®ã¯å€æ°ã®ããŒãïŒïŒãæ
ãã該ããŒãã®ååŒã¯åã 第ïŒå³ã«ç€ºãããã®
ã§ããã®å·åŽãžã€ã±ããïŒïŒå ã«å°å ¥ããããç±
湯ã¯ã©ã€ã³ïŒïŒãéããŠåŸªç°ããããããŠèžæ°ã
ãã³æ°Žã¯ã©ã€ã³ïŒïŒãéããŠååããããäºæ¬¡ç©º
æ°ã¯ããŒãã®ãžã€ã±ããïŒïŒã«ã©ã€ã³ïŒïŒãéã
ãŠäŸçµŠãããåããåã±ã€çŽ ãççŒã¬ã¹ããã³äž
次空æ°ã¯ããŒãããºã«ïŒïŒã«ã©ã€ã³ïŒïŒãéããŠ
äŸçµŠãããã çç¶åå¿çïŒïŒã¯ãã®å·åŽãžã€ã±ããïŒïŒã«ã
ãåå¿å®€ïŒïŒã圢æãã該åå¿çïŒïŒãéããŠå·
æ°ã埪ç°ãããã©ã€ã³ïŒïŒãéããŠååãããç±
æ°ãšå ±ã«ã©ã€ã³ïŒïŒãéã€ãŠæµå ¥ããã çåå¿é åããã®ã¬ã¹ç¶åå¿æ··åç©ã¯ççŒå»
ã¬ã¹ãšãåããåã±ã€çŽ ã®å æ°Žå解ããã®ã¬ã¹
ãšãã¬ã¹æµå ã«æµ®éããäžã€é£è¡ããã極埮现å
ã·ãªã«ãšãããªããã¬ã¹ããã³ä»éããã·ãªã«ã¯
è€æ°ã®ç®¡ïŒïŒãããªãå·åŽåšïŒïŒã«å ¥ãã該å·åŽ
åšã¯å€å²ç®¡ïŒïŒãéã€ãŠæµããã©ã€ã³ïŒïŒã§æµå ¥
ãäžã€ã©ã€ã³ïŒïŒã«ãããŠèžæ°ãšæ°Žã®æ··åç©ãšã
ãŠæµåºããæ°Žæµã«ãã€ãŠå·åŽãããããã®æ¹æ³ã«
ãããŠãã¬ã¹æž©åºŠã¯ã極ããŠè¿ éã«ãæ°ç§å ã§
600â以äžã«æžãããããã¬ã¹æµã¯éåžžã«éãã
ãããŠå·åŽãããã¬ã¹ç¶æ··åç©ã¯æ¬¡ãã§ç¬Šå·ïŒïŒ
ã«ããæåºãããã 次ã«ã埮现åäºé žåã±ã€çŽ ã¯ãµã€ã¯ãã³åé¢åš
ïŒå³ç€ºããïŒå ã§åé¢ãããäžæ¹ãççŒå»ã¬ã¹ã®
ããåæ°ŽçŽ å«éããäžè¿°ããæ¹æ³ã«åŸã€ãŠæ°Žäžã§
åžåã«ããååãããã 以äžã®äŸã¯æ¬çºæã®å¥œé©ãªå®æœäŸã瀺ããã®ã§
ããã ãããã®äŸã«ãããŠãäºé žåã±ã€çŽ åå¿çæç©
ã®åçµåºŠã¯ãæ«éå液äœããªãšã¹ãã«ãæ¿çž®ãã
ãããªäºé žåã±ã€çŽ ã®èœåã«åºç€ã眮ããŠã以äž
ã®å®éšãçšããŠæž¬å®ãããã ééã§äžéšã®äºé žåã±ã€çŽ ãééã§100éšã®ã
ãªãšã¹ãã«æ¶²ãšæ··åãã次ãã§äºé žåã±ã€çŽ ãã³
ãã€ããã«ã䜿çšããŠæ¶²äžã«å šäœçã«åæ£ããã
çµæãšããŠçããæ··åç©ã®ç²åºŠã25âã§12å転ïŒ
åã®ãã«ãã¯ãã€ãŒã«ãç²åºŠèšLVTã䜿çšããŠ
枬å®ããã ç±³åœç¹èš±ç¬¬ïŒïŒ819ïŒ151å·æ现æžã«èšèŒã®åŸæ¥
æè¡ã䜿çšããåããåã±ã€çŽ ã®ççŒã«ãã€ãŠåŸ
ãããæ£èŠã®ãŸãã¯æšæºã®äºé žåã±ã€çŽ ãšã®ããª
ãšã¹ãã«æ··åç©ã®ç²åºŠã¯åãæ¹æ³ã䜿çšããŠæž¬å®
ãããã è©Šéšè©Šæããã³æšæºè©Šæã®ç²åºŠãããè©Šéšè©Šæ
ã®æ¿åæ°ã以äžã®é¢ä¿ã«åŸã€ãŠæ±ºå®ãããã æ¿åæ°ïŒè©Šéšè©Šæã®ç²åºŠÃïŒïŒïŒïŒæšæºè©Šæã®ç²åºŠ åå¡©åã±ã€çŽ ã®çççŒã«ãã€ãŠè£œé ãããåæ¥
çã«å©çšãåŸãäºé žåã±ã€çŽ ã¯70ã160ã®éã®æ¿
åæ°ãæããŠããã200m2ïŒïœã®ç¹æ®ãªè¡šé¢ç©ã
ãã³äœåµ©å¯åºŠãæããäºé žåã±ã€çŽ ã¯éåžžæé«ã®
æ¿åæ°ãæããããããããã¯ããªãšã¹ãã«çµæ
ç©ãå¡æãã¯ãã¹ããã³ã©ãã«ãŒçšå¢ç²å€ãšããŠ
é垞䜿çšãããäºé žåã±ã€çŽ ã§ããã åããåã±ã€çŽ ã®èžæ°çžå æ°Žå解ã«ãã€ãŠè£œé
ãããäºé žåã±ã€çŽ ã¯70ã120ã®éã®æ¿åæ°ãæ
ããŠããŠãæ倧æ¿åå¹æã¯200ã250m2ïŒïœã®ç¹æ®
ãªè¡šé¢ç©ããã³çŽ50ïœïŒã®äœåµ©å¯åºŠãæããã·
ãªã«ã«ãã€ãŠèª¬æãããã ãããã«åããŠãæ¬çºæã®æ¹æ³ã«åŸã€ãŠè£œé ã
ãã200ã250m2ïŒïœã®è¡šé¢ç©ããã³çŽ50ïœïŒã®
äœåµ©å¯åºŠã®äºé žåã±ã€çŽ ã¯150ãã300ã®æ¿åæ°ã
æããŠããã å®æœäŸ ïŒ ïŒåã®ããºã«ãåããããŒãã䜿çšãã第ïŒå³
ã«ç€ºããè£ çœ®ã«ãããŠã以äžã®ã¬ã¹æµã20âåã³
ïŒããŒã«å§ã§ã©ã€ã³ïŒïŒãéããŠããºã«ã«äŸçµŠã
ããã çæã¬ã¹ïŒ89.0ïŒ H2ïŒ11.0ïŒ CH4ïŒ285m3ïŒïœ åããåã±ã€çŽ 49.7m3ïŒïœ äžæ¬¡ç©ºæ° 815m3ïŒïœ ã©ã€ã³ïŒïŒãéããŠ272m3ïŒïœã®æµéã§äºæ¬¡ç©º
æ°ãäŸçµŠããã ããŒãããºã«ããã³ã¬ã¹æµã¯é«ä¹±æµãæãã匷
åãªçãåŸãããã«èª¿æŽããããå·åŽãžã€ã±ãã
é¢ïŒïŒã¯ïŒããŒã«ã®éå§ã«ä¿æãã埪ç°ç±æ¹¯ã«ã
ã€ãŠçŽ160âã®æž©åºŠã«ä¿æãããã åå¿çïŒïŒã®ãžã€ã±ããå£ïŒïŒã¯ç©ºæ°ã䜿çšã
ãŠçŽ300âã®æž©åºŠã«å·åŽããããå·åŽåšïŒïŒå ã§
äºé žåã±ã€çŽ ãšã®ã¬ã¹ç¶åå¿æ··åç©ã¯ç±æ¹¯ã䜿çš
ããŠ610âã«å·åŽãããã åŸãããã·ãªã«ã¯å ±ã«çŽåã«æ¥ç¶ããïŒåã®ãµ
ã€ã¯ãã³äžã§åé¢ãããäžæ¹å»ã¬ã¹äžã®ããåæ°Ž
çŽ å«éããã³åããåã±ã€çŽ å«éã¯æ°Žäžã§åžåã«
ãã€ãŠååããããã·ãªã«ã¯ç§€éããäžã€åæã
ãããããŠç¹æ®ãªè¡šé¢ç©ããã³æ¿åæ°ã決å®ã
ããå®æœäŸïŒãšããŠè¡šïŒ©ã«ç€ºããçµæãæããã ã³ã³ãããŒã«ãšããŠãåäžåå¿ããå·åŽé¢ãå·
åŽããªãããšä»¥å€ã¯ãåäžè£ 眮ããã³åäžã¬ã¹é
ã䜿çšããŠç¹°ãè¿ããããåŸãããçµæã¯è¡šïŒ©ã«
ãããŠäžã«ã³ã³ãããŒã«ã«ãã€ãŠç€ºãããŠããã ãã®çµæãã瀺ãããé åå ã®çåå¿é åã®å·
åŽãäºé žåã±ã€çŽ ã®æ¿å容éã«ããªãã®æ¹åã瀺
ãããšãæçœã§ããã å®æœäŸ ïŒ åã å·åŽãžã€ã±ããã«ããåã ã«å²ç¹ããã12
åã®ããºã«ãåããããŒãã䜿çšãã第ïŒå³ã«ç€º
ãè£ çœ®ã«ãããŠã以äžã®ã¬ã¹æµã20âåã³ïŒããŒ
ã«å§ã§ã©ã€ã³ïŒïŒãéããŠäŸçµŠãããã çæã¬ã¹ïŒ89.0ïŒ H2ïŒ11.0ïŒ CH4ïŒ285m3ïŒïœ åããåã±ã€çŽ 49.7m3ïŒïœ äžæ¬¡ç©ºæ° 815m3ïŒïœ ã©ã€ã³ïŒïŒãéããŠ272m3ïŒïœã®æµéã§äºæ¬¡ç©º
æ°ãäŸçµŠããã ããŒãããºã«ããã³ã¬ã¹æµã¯é«ä¹±æµãæãã匷
åãªçãåŸãããã«èª¿æŽããããå·åŽé¢ã¯ïŒããŒ
ã«ã®éå§ã«ä¿æãããç±æ¹¯ã«ãã€ãŠçŽ160âã®æž©
床ã«ä¿æãããã åå¿çïŒïŒã®ãžã€ã±ããå£ïŒïŒã¯ç©ºæ°ã䜿çšã
ãŠçŽ300âã®æž©åºŠã«å·åŽããããå·åŽåšïŒïŒå
ã§ãäºé žåã±ã€çŽ ãšã®ã¬ã¹ç¶åå¿æ··åç©ãç±æ¹¯ã
䜿çšããŠ610âã«å·åŽãããã åŸãããã·ãªã«ã¯å ±ã«çŽåã«æ¥ç¶ããïŒåã®ãµ
ã€ã¯ãã³äžã§åé¢ãããäžæ¹å»ã¬ã¹äžã®ããåæ°Ž
çŽ å«éããã³åããåã±ã€çŽ å«éã¯æ°Žäžã§åžåã«
ãã€ãŠååããããã·ãªã«ã¯ç§€éãããã€åæã
ãããããŠç¹æ®ãªè¡šé¢ç©ããã³æ¿åæ°ã決å®ã
ããå®æœäŸïŒãšããŠè¡šïŒ©ã«ç€ºããçµæãæããã ã³ã³ãããŒã«ãšããŠãåäžåå¿ãå·åŽé¢ãå·åŽ
ããªãããšãé€ããŠåäžè£ 眮ããã³åäžã¬ã¹éã
䜿çšããŠç¹°ãè¿ããããåŸãããçµæã¯è¡šïŒ©ã«ã
ããŠäžã«ã³ã³ãããŒã«ã«ãã€ãŠç€ºãããŠããã ãã®çµæãã瀺ãããé åå ã®çåå¿é åã®å·
åŽãäºé žåã±ã€çŽ ã®æ¿å容éã«ããªãã®æ¹åã瀺
ãããšãæçœã§ããã å®æœäŸ ïŒ åã 第ïŒå³ã«ç€ºãããããª12åã®ãã€ããåã
ã12åã®ããŒãããºã«ãæããããŒãã䜿çšãã
第ïŒå³ã«ç€ºããè£ çœ®ã«ãããŠã以äžã®ã¬ã¹æµã20
âåã³ïŒããŒã«å§ã§ã©ã€ã³ïŒïŒãéããŠäŸçµŠãã
ãã çæã¬ã¹ïŒ89.0ïŒ H2ïŒ11.0ïŒ CH4ïŒ285m3ïŒïœ ããåã±ã€çŽ 49.7m3ïŒïœ äžæ¬¡ç©ºæ° 815m3ïŒïœ ã©ã€ã³ïŒïŒãéããŠ272m3ïŒïœã®æµéã§äºæ¬¡ç©º
æ°ãäŸçµŠããã ããŒãããºã«ããã³ã¬ã¹æµã¯é«ä¹±æµãæãã匷
åãªçãåŸãããã«èª¿æŽããããå·åŽé¢ã¯ïŒããŒ
ã«ã®éå§ã«ä¿æãããç±æ¹¯ã«ãã€ãŠçŽ160âã®æž©
床ã«ä¿æãããã åå¿çïŒïŒã®ãžã€ã±ããå£ïŒïŒã¯ç©ºæ°ã䜿çšã
ãŠçŽ300âã®æž©åºŠã«å·åŽããããå·åŽåšïŒïŒã«ã
ããŠäºé žåã±ã€çŽ ãšã®ã¬ã¹ç¶åå¿æ··åç©ãç±æ¹¯ã
䜿çšããŠ610âã«å·åŽãããã åŸãããã·ãªã«ã¯å ±ã«çŽåã«æ¥ç¶ãããïŒåã®
ãµã€ã¯ãã³äžã§åé¢ãããäžæ¹å»ã¬ã¹äžã®ããå
æ°ŽçŽ å«éããã³åããåã±ã€çŽ å«éã¯æ°Žäžã§åžå
ã«ããååããããã·ãªã«ã¯ç§€éããäžã€åæã
ãããããŠç¹æ®ãªè¡šé¢ç©ããã³æ¿åæ°ã決å®ã
ããå®æœäŸïŒãšããŠè¡šïŒ©ã«ç€ºãããçµæãæã
ãã å®æœäŸ ïŒ 20åã®ããºã«ãæããå®æœäŸïŒã§äœ¿çšããè£ çœ®
ã«ãããŠã以äžã®ã¬ã¹æµã20âä¹ã³ïŒããŒã«å§ã§
ã©ã€ã³ïŒïŒãéã€ãŠäŸçµŠãããã çæã¬ã¹ïŒ100ïŒ H2ïŒ11.0ïŒ CH4ïŒ384m3ïŒïœ åããåã±ã€çŽ 49.7m3ïŒïœ äžæ¬¡ç©ºæ° 825m3ïŒïœ ã©ã€ã³ïŒïŒãéããŠ275m3ïŒïœã®æµéã§äºæ¬¡ç©º
æ°ãäŸçµŠããã ããŒãããºã«ããã³ã¬ã¹æµã¯é«ä¹±æµãæãã匷
åãªçãåŸãããã«èª¿æŽããããå·åŽé¢ã¯ïŒããŒ
ã«ã®éå§ã«ä¿æãããç±æ¹¯ã«ãã€ãŠçŽ160âã®æž©
床ã«ä¿æãããã åå¿çã®ãžã€ã±ããå£ïŒïŒã¯ç©ºæ°ã䜿çšããŠçŽ
300âã«å·åŽããããå·åŽåšïŒïŒã«ãããŠäºé žå
ã±ã€çŽ ãšã®ã¬ã¹ç¶åå¿æ··åç©ãç±æ¹¯ã䜿çšããŠ
610âã«å·åŽãããã åŸãããã·ãªã«ã¯å ±ã«çŽåã«æ¥ç¶ãããïŒåã®
ãµã€ã¯ãã³äžã§åé¢ãããäžæ¹å»ã¬ã¹äžã®ããå
æ°ŽçŽ å«éããã³åããåã±ã€çŽ å«éã¯æ°Žäžã§åžå
ã«ããååããããã·ãªã«ã¯ç§€éããäžã€åæã
ãããããŠç¹æ®ãªè¡šé¢ç©ããã³æ¿åæ°ã決å®ã
ããå®æœäŸïŒã«ãã衚ã«ç€ºãããçµæãæã
ãã ãè¡šã
åäºé žåã±ã€çŽ ã補é ããæ¹æ³åã³ãã®è£ 眮ã«é¢
ãããã®ã§ããã çè²éæã®ã·ãªã«ã補é ããã«çšããããççŒ
æ¹æ³ã¯ç³çã¬ã¹ãŸãã¯æ°Žæ§ã¬ã¹ã®ããšãå¯çæ§ã¬
ã¹ã®çã«ãããŠç©ºæ°ãŸãã¯é žçŽ äžã§ã®æ®çºæ§ã±ã€
çŽ ååç©ã®ççŒã䌎ããé žçŽ ã¯ã±ã€çŽ ååç©ãé ž
åããã®ã«äœ¿çšãããããã®æ¹æ³ã¯1926幎ïŒæ15
æ¥ä»ã®è±åœç¹èš±ç¬¬258313å·ããã³1935幎11æ23æ¥
ä»ã®è±åœç¹èš±ç¬¬438782å·æ现æžã«èšèŒãããŠã
ããã·ãªã«ã¯ä»¥äžã®åå¿ã«åŸã€ãŠåœ¢æãããåã
ãåã±ã€çŽ ããã³ã¡ã¿ã³ãç³çã¬ã¹ã®æåã¯ä»£è¡š
çãªãã®ãšããŠç€ºãããŠããã SiF4ïŒCH4ïŒ2O2âSiO2ïŒCO2ïŒ4HF ãã®åå¿ã¯ãçºç±ã§ããççŒã«ããç±ãåå¿æ··
åç©ã«äŸçµŠãããã®ã§ãååé«ãåå¿æž©åºŠãéæ
ããèžæ°çžå æ°Žå解ã«ãããŠã¯å°é£ã瀺ãããšã¯
ãªãã ããããªããããã®ççŒåå¿ã«ãããŠã¯ãã·ãª
ã«ã®ç²åºŠãå¶åŸ¡ããããšã¯å°é£ã§ãããäºå®ççŒ
ãç匷床ãéåžžã®å¶åŸ¡ãã倧ããããªãã§éåžžã®
ç¶æ³äžã§å®æœããããšãã·ãªã«ã¯æ¯èŒçå¯ã«ãªã
ãããŠ100nmãå€å°è¶ããŠã400nmãŸã§ããã³ã
ã以äžã®å¹³åç²åºŠãæãããè±åœç¹èš±ç¬¬258313å·
æ现æžã«èšèŒãããæå°å¹³åç²åºŠã¯150nmã§ã
ãããã¡ãããããã¯ãŽã çšã®è£åŒ·å€ã«é¢ããŠã¯
倧ãéãããåæã«åçã¯çè«å€ã®10ã40çšåºŠãš
äœããããã¯ãåŸãããçæç©ããŽã å å¡«å€ãšã
ãŠãã€ã°ãªãŒã¹ãå¡æããã³ã©ãã«ãŒã«ãããå¢
ç²å€ãšããŠã®äœ¿çšã®ããšãæãéèŠãªçšéã«å¯Ÿã
ãŠäžæºè¶³ã§ãããåæã«äœåçã®ããäŸ¡æ Œãæ¯èŒ
çé«ãããšãæå³ããã 1950幎12æ25æ¥ä»ã®ãã©ããã³æ°ã®ç±³åœç¹èš±ç¬¬
2535036å·æ现æžã«ãããŠã¯ã以äžã®ååŠçåå¿
åŒ SiF4ïŒ2H2OããSiO2ïŒ4HF ã«åŸã€ãŠèžæ°çžå æ°Žå解ã䌎ãããããçè²éæ
ã®ç¡å®åœ¢åŸ®çŽ°åœ¢ç¶ã«ãããã·ãªã«ã®è£œé æ¹æ³ãèš
èŒãããŠããã èžæ°çžå æ°Žå解ã¯ãåèšãã©ããã³æ°ã®ç¹èš±ã
ææããããã«ã液çžå æ°Žå解以äžã®å¹Ÿã€ãã®å©
ç¹ãæããŠããããããªãããå æ°Žå解ã¯åžç±å
å¿ã§ããããããŠããåç©ãã·ãªã«ã«å€æããã«
ã¯ç±ã®å°å ¥ãå¿ èŠãšããããŸããè¯å¥œãªåå¿ãè¡
ãªãã«ã¯å°ãªããšãåå¿äœã450âã«ãããããš
ãäžå¯æ¬ ã§ããã ãã®åå¿ã«é¢ãã平衡å®æ°ã¯é·ãéç¥ãããŠã
ããããŠã¢æ°ã¯çµæ¶åž¯ç©çååŠ48ã®ç¬¬483é ã第
503é ïŒ1904幎ïŒã«ãããŠ104âããã³270âã§ã®
平衡ã«é¢ããå®éšããŒã¿ãå ±åãããåå¿çšå¹³è¡¡
å®æ°ã¯ã¬ã³ããšã¹ãã€æ°çã®å·¥æ¥æè¡ååŠ44ã®ç¬¬
1448é ã第1450é ïŒ1952幎ïŒã«ãã€ãŠ200ãã800
âã®ç¯å²ã«ããã幟ã€ãã®æž©åºŠã«ãããŠå®éšçã«
決å®ããããåå¿ã¯600âããã³ãã以äžã®æž©åºŠ
ã«ãããŠã®ã¿é¡èãªæ¹æ³ã§æ£ããçããããšãå
èšã¬ã³ããšã¹ãã€æ°çã®è³æããæããã§ããã
ãã®ãããªæž©åºŠã¯åå¿ç©è³ªå šäœã«ããã€ãŠåäžæ§
ãéæããããšãåºé£ã§ããã ãã®ç¹èš±çºæã«ãããŠã¯ãã·ãªã«ã®ç²åºŠãå¶åŸ¡
ããããšãã§ãããšãã瀺åã¯çŸãããŠããªãã
äºå®äžããã®åå¿ã«ãããŠã¯ããŸãçžåœçãéç
å ã«ã·ãªã«ã®ç²åºŠãå¶åŸ¡ããããšã¯å°é£ã§ããã
ãã®éçã¯ã·ãªã«ã該ã·ãªã«ãå¹³åç²åºŠ50nmãŸ
ãã¯ãã以äžãæãããŽã ååç©ã«ãããŠè£åŒ·å€
ãšããŠäœ¿çšãããšãæãŸããããã®èžæ°çžå æ°Žå
解ã«ãããŠåŸãããã·ãªã«ç²ã®å€§ããªæ¯çã¯éåžž
400nmçšåºŠãšå€§ããããããŠå¹³åç²åºŠã¯éåžž100
ã200nmçšåºŠã§ããã 1958幎ïŒæïŒæ¥ä»ã®ãã¬ã¡ã«ãæ°ã®ç±³åœç¹èš±ç¬¬
2819151å·ã«ããã°ãããåã±ã€çŽ ãå¯çæ§ã¬ã¹
ããã³é žçŽ ãçäžã§å ±ã«åå¿ãããããããã«ã
ãã·ãªã«ããã³ããåæ°ŽçŽ ã圢æãããç匷床ã¯
枩床ãå¢å€§ããã€å€ææéãæžå°ããããã«æ£èŠ
ã®åŒ·ããè¶ããŠå¢å€§ãããŠãããç匷床ã¯èª¬æã
ããçš®ã ã®æ¹æ³ã«ãã€ãŠå¢å€§ãããããšãã§ãã
ãããŠãã®åŒ·ãã¯çŽïŒãçŽ50nmã®ç¯å²å ã®ç®è¡
å¹³åçŽåŸãæããçç¶ç¡å®åœ¢ç²åã®åœ¢æ ã®ã·ãªã«
ãçããããã«ç¹å®ã®éçå ã«å¶åŸ¡ãããã åå¿ã¯å€åçã®å¹Ÿã€ãã®é åå ã§çããããã
ãã®åå¿é åäžã®çã®åŒ·åºŠã¯ã·ãªã«ã®ç²åºŠã決å®
ããããšã«ãããŠæãéèŠã§ããããã®çç±ã®ã
ãåå¿ã®åŒ·ãã«çãããšã¿ãªãããããšãã§ã
ããããããªãããåå¿é åã«ãããçã®åŒ·ã
ã¯ããã¡ããçã«ãã€ãŠæŸåºãããç±ã«æ£æ¯äŸã
ãåå¿ã«ãã€ãŠæŸåºãããç±ãé€ããŠæž¬å®ããã
ãšãå°é£ã§ãããããããæ¬çºæã®ç®çã®ãã
ã«ãåå¿ã®åŒ·ãã¯çèªäœã®åŒ·ãã«ãã€ãŠæž¬å®ãã
ãã çã®åŒ·ãã¯åäœå®¹ç©åœãã®ããã³åäœæéåœã
ã®æŸåºãããç±éã«é¢ããŠæž¬å®ãããããšãã§ã
ããå³ã¡ ïŒïœïŒïœïŒïŒïŒ£ïœïŒïœïŒïœïœïœïŒ æ¬çºæã®ç®çã®ãããããã®éã¯ã€ã®ãªã¹ç±å
äœãç¥ããŠB.t.uãããŠãŒããã¯ã»ãã€ãŒãã»ã
ãããã§æž¬å®ãããã衚瀺ã®å¥å®ã®ãããéæ°ã®
B.t.uåäœã䜿çšãããŠãããããªãã¡ãïŒïŒïŒ¢ïŒïœïŒ
ïœã ãŸãã¯B.t.u-1ã䜿çšããããããŠçšèªãéæ°ã®
B.t.uãããã³ãB.t.u-1ãã¯çäžã§ïŒåéåœãæŸ
åºãããB.t.uã«å¯ŸããCuïŒïœãã«ãããçã®
容ç©ã«é¢ãããã®ãšç解ãããŠããã åŸã€ãŠãã¬ããŒãæ°ã®æ¹æ³ã«ãããŠçã®åŒ·ãã¯
çŽ0.1ããçŽ1.3Ã10-5B.t.u-1ã®ç¯å²å ã«ç¶æãã
ãããã®ç¯å²ã¯æ¬è³ªçã«ã¯ããåã±ã€çŽ ãæ¬çºæ
ã«ããåå¿ãåããæ£èŠã®çã®åŒ·ã以äžã«ããã
ãããã®åŒ·ãã®éçã¯ããããã®éç以äžããã³
ãã以äžã®ç匷床ã«ãããŠã·ãªã«ã®ç²åºŠãåã³å¢
倧ããã®ã§éèŠã§ããã ãã®æ¹æ³ã¯ã50ãã400m2ïŒïœã®ç¹æ®ãªè¡šé¢ç©
ã«å¯Ÿå¿ããŠãïŒãã50nmã®å¹³åç²åºŠãæãã極
埮现åäºé žåã±ã€çŽ ãçããã ïŒã€ã®æã容æã«å©çšãåŸãåããã²ã³åã±ã€
çŽ ã®åææãåããåã±ã€çŽ ãŸãã¯åå¡©åã±ã€çŽ
ãããåããåã±ã€çŽ ã¯ã·ãªã«ã®å·¥æ¥èŠæš¡ã®çç£
ã«ããè¯ãé©åããå€ãã®å©ç¹ãæãããåãã
åã±ã€çŽ ã¯ãªã³é±ããã®ãªã³é žããã³éãªã³é žç³
ç°ã®è£œé ã«ãããŠå€éã«åŸãããå®äŸ¡ãªå»æ£ç©ã§
ããã±ã€ããåæ°ŽçŽ é žãã容æã«è£œé ããããšã
ã§ãããä»æ¹ãåå¡©åã±ã€çŽ ã¯ãéåžžã±ã€çŽ ãšå¡©
çŽ ã®åå¿ã«ãã€ãŠè£œé ãããæ¯èŒçé«äŸ¡ãªç©è³ªã§
ãããåã æ¯èŒçé«äŸ¡ãªç©è³ªã¯ãããã®è£œé ã«å€
éã®é»æ°çãšãã«ã®ãŒãå¿ èŠãšãããã€åå¡©åã±
ã€çŽ ã圢æããã®ã«åæ§ã«é«äŸ¡ãªåå¿ãå¿ èŠãšã
ãã ç±³åœç¹èš±ç¬¬2819151å·æ现æžã«ã¯äºé žåã±ã€çŽ
ã®ç¹æ®ãªè¡šé¢ç©ãšçäžã®ããåã±ã€çŽ åçž®ç©ãšã®
éã«é¢ä¿ãããããŸãç匷床ãšäºé žåã±ã€çŽ ã®ç²
床ãšã®éã«é¢ä¿ãããããšã瀺ããŠãããããã
ãªãããæå€ã«ããåºçºç©è³ªãåå¡©åã±ã€çŽ ããŸ
ãã¯åããåã±ã€çŽ ã«ãã€ãŠåŸãããã·ãªã«ã«å·®
ç°ãããã åå¡©åã±ã€çŽ ãã補é ãããã·ãªã«ã¯æ¶²äœããª
ãšã¹ãã«å¡æãææããã³ã©ãã«ãŒã®ããšã液äœ
補åçšã®æ¿åå€ãšããŠåããåã±ã€çŽ ãã補é ã
ããã·ãªã«ããã¯åªããŠãããããã¯åããåã±
ã€çŽ ãã補é ãããã·ãªã«ã®æ¹ãæµäœå ã§ææã®
ãããœããããŒå¹æããã³ææã®ç²æ§ãåŸããã
ã«åå¡©åã±ã€çŽ ãã補é ãããã·ãªã«ããå¿ èŠãš
ããããšããäºå®ããæçœã§ããã åæ§ãªå·®ç°ã¯ã·ãªã«ãåæãŽã ããã³ã·ãªã³ã³
ãŽã çµæç©ã«ãããŠè£åŒ·å å¡«å€ãšããŠäœ¿çšããã
ãšã泚ç®ããããåããåã±ã€çŽ ãã補é ããã
äºé žåã±ã€çŽ ã®ããé«ãæ¯çã¯åå¡©åã±ã€çŽ ãã
補é ãããã·ãªã«ã䜿çšãããšãããææã®ç¡¬ã
ããã³çãåŸãããšãèŠæ±ãããã ããå€ãã®ã·ãªã«ãèŠæ±ããããšããäºå®ã¯å€
æ°ã®åé¡ãæèµ·ãããšãããåé¡ã®ïŒã€ã¯å€å€§ã®
è²»çšã§ããããŸããã倧ããªæ¯çã®ã·ãªã«ã¯ãã
ãã也ç¥æ極ããŠå®¹ç©ã倧ããã®ã§ãã倧ããªæ··
ååšãå¿ èŠãšãããããã«ããé·ãæ··åæéãå¿
èŠãšããããã®çµæããé«ãšãã«ã®ãŒæ¶è²»ãæã
ããã·ãªã«ã®ååšã«ä»éããææããªãåŽé¢å¹æ
ã¯ãŸãã·ãªã«ã®éããã倧ãããšãå¢å€§ãããã
極埮现åã·ãªã«ã¯æ¯èŒçé«äŸ¡ãªææã§ããããã
ãããã®æ¬ ç¹ã¯åããåã±ã€çŽ ãã補é ãããã·
ãªã«ã®åžå Žã«é倧ãªåœ±é¿ãåãŒããŠããã æ¬çºæ以åã«ã¯ã·ãªã«ã®ç¹æ§äžã®å·®ç°ã®ããã®
çç±ã¯ç解ãããªãã€ããããããæ¬çºæã«ã
ãããã®çç±ã¯åŸæ¥ã®çåå¿æ¹æ³ã䜿çšããåã
ãåã±ã€çŽ ãã補é ãããã·ãªã«ã¯ããäœåºŠã®çµ
åã§ããããšãæãšãªããããªãã¡ã·ãªã«ç²åã¯
åããåã±ã€çŽ ãã補é ãããã·ãªã«ããå°ãªã
çšåºŠã«åºãåæãããéç¶åçž®ç©ã«çµåãããã
æ¬çºæã®æ¹æ³åã³è£ 眮ã§åŸãããã·ãªã«ã¯é«åºŠã®
åçž®ãæããåŸæ¥ã®æ¹æ³ã§åããåã±ã€çŽ ãã補
é ãããã·ãªã«ãåæ§ã«åå¡©åã±ã€çŽ ãã補é ã
ããã·ãªã«ãããåªããŠãã極ããŠè¯å¥œãªé«æ¿å
容éåã³è¯å¥œãªãããœããããŒæ§ãæããã æ¬çºæã«ããã°ãäºé žåã±ã€çŽ åã³ããåæ°ŽçŽ
ã圢æããããããå°ãªããšãäžã€ã®ããŒãã«ã
ãçºçãããçåå¿é åã«ãããŠããåã±ã€çŽ ã
èžæ°çžäžã§æ°Žèžæ°ãšãå¯çæ§ã¬ã¹ãšãèªç±é žçŽ å«
æã¬ã¹ãšã«åå¿ãããåå¿å®€ã®å£éšã®å·åŽã«å ã
ãŠ500â以äžã§ãããçåå¿ã«ãããŠçºçããå
å¿å»ã¬ã¹ã®é²ç¹ä»¥äžã®æž©åºŠã«ç¶æãããããŒãã
å å²ããå·åŽé¢ãšã®æ¥è§Šã«ããçã®åºéšã«é£æ¥ã
ãçåå¿é åã®éšåã«ãããŠã¬ã¹åå¿æ··åç©ãå·
åŽããŠãªãé«æ¿å容éã®è¯å¥œãªãããœããããŒæ§
ãæãã埮现åäºé žåã±ã€çŽ ã補é ããæ¹æ³ãæ
äŸãããã®ã§ããã æ¬çºæã«ããã°ã (1) èªç±é žçŽ å«æã¬ã¹ã§å¯çæ§ã¬ã¹ãççŒããã
ããšã«ããçåå¿é åã圢æããçãçºçãã
ãåå¿å®€å ã«é 眮ããå°ãªããšãïŒã€ã®ããŒã
ãšã (2) åããåã±ã€çŽ ãçã§ççŒãããããããŒã
ã«éãæµéæ©æ§ãšã (3) å¯çæ§ã¬ã¹åã³èªç±é žçŽ å«æã¬ã¹ãççºçã®
ããããŒãã«éãæµéæ©æ§ãšã (4) çåå¿é åããã¬ã¹åå¿æ··åç©ãååãäžã€
åæäºé žåã±ã€çŽ ãåé¢ååããååæ©æ§ãšã (5) åå¿å®€ã®å£éšãå·åŽãããããã®å·åŽæ©æ§
ãšã (6) æŽã«ãçåå¿é åã®åºéšãå·åŽããããããŒ
ãã«ããçºçãããçã®åºéšã«é£æ¥ããçåå¿
é åã«ãããŠã¬ã¹åå¿æ··åç©ãšæ¥è§Šããå·åŽé¢
ãåããå·åŽæ©æ§ãšã (7) å·åŽé¢ãçåå¿é åã«ãããŠçºçãããççŒ
åå¿å»ã¬ã¹ã®é²ç¹ä»¥äžã§ããã500â以äžã®æž©
床ã«ç¶æããç¶ææ©æ§ãšã ããæ§æããåããåã±ã€çŽ ã®èžæ°çžå æ°Žå解ã«
ãã€ãŠé«æ¿å容éã®è¯å¥œãªãããœããããŒæ§ãæ
ãã埮现åäºé žåã±ã€çŽ ã補é ããããã®è£ 眮ã
æäŸãããã®ã§ããã æ¬çºæã®è£ 眮ã®å¥œé©ãªå®æœäŸãæ·»ä»å³é¢ã«ç€ºã
ãŠããã çåå¿ã¯ïŒã€ãŸãã¯å¹Ÿã€ãã®çäžã§å®æœããã
ãšãã§ãããããããªãããå€æ°ã®å°ããªçãã
ïŒã€ãŸãã¯ãã®å€§ããªçã«å ã ã€ãŠã䜿çšããã
ãªãã°çã容æã«å·åŽãããããããã«ããåå¿
枩床ãå¶åŸ¡ããããããã çã®åºéšã«ãããŠãããªãã¡ããŒãããºã«ã«æ
ãè¿ãçã®éšåã«ãããŠçåå¿é åãå·åŽããã
ãšãéèŠã§ããããçã®å 端ãå·åŽããããã©ã
ãã¯éèŠã§ã¯ãªããçã倧ãããªãã°ãå 端ã®å·
åŽã¯ããäœã枩床ã«ç¶æããã®ã«æçšã§ãããç
ãå°ãããªãã°ãæ¹åã¯ã»ãšãã©ãªãããªãã æ¬çºæã®æ¹æ³ããã³è£ 眮ã«ãã€ãŠã·ãªã«ç²åã®
åéãå¢å€§ãããããšã¯çã®åºéšã«ãããçåå¿
é åã®å·åŽã«ãããçã®åºéšã«ãããŠçåå¿é å
ãå·åŽããããšãæ¯èŒçå°æ°ã®äºé žåã±ã€çŽ åçµ
æ¶ç²åãçã®åºéšã®çåå¿é åã«åœ¢æããããã
ããã®åçµæ¶ç²åãçã®åºéšããçã®å 端ãŸã§ã®
çåå¿é åãééäžæŒžæ¬¡æé·ãããããŠãããã®
ç²åãè¡çªãããšããããã¯äºãã«ä»çãããã
ãŠåå¿äžã®äºé žåã±ã€çŽ ã®é£ç¶æ²æŸ±ã«ããããšã
ã«æé·ããããã®çµæãäºé žåã±ã€çŽ ç²åã®æ¯èŒ
ç倧ããªéç¶éåäœãçåå¿é åããã®åå¿çæ
ç©ãšããŠåºçŸããã ããããåŸæ¥ã®æ¹æ³ã«ãããããã«çã®åºéšã«
ãããçåå¿é åãå·åŽãããªãå Žåã«ãå€æ°ã®
äºé žåã±ã€çŽ åçµæ¶ç²åã圢æããããããŠåå¿
äžã«å€§ããªäºé žåã±ã€çŽ ç²åã«æ¥éã«æé·ããã
å€æ°ã®åçµæ¶ç²ååã³ã·ãªã«ãåå¿äžã«æ²æŸ±ã§ã
ã倧ããªè¡šé¢ç©ã®ãããåããåã±ã€çŽ ã®åäžæ¿
床ã«ãããŠæ¯èŒçå°ãªãäºé žåã±ã€çŽ ãåç²åäž
ã«æ²ç©ããããããã倧ããªåéç©ã®åœ¢æãåæ§
ã«å°ãªããªãããã®çµæãåŸæ¥ã®çåå¿æ¹æ³ã«ã
ããŠåŸãããäºé žåã±ã€çŽ ã¯æ¯èŒçå°ããªç²åºŠã
å³ã¡é«ç¹æ®è¡šé¢ç©åã³äœåºŠã®åéãæããã æ¬çºæã«ãããŠã¯ïŒã€ã®ããŒãããºã«ãå·åŽé¢
ã«ããå å²ãããããåã¯äžçŸ€ã®ããŒãããºã«ã
å ±éã®å·åŽé¢ã«ããå å²ããããã®ããããã§å·
åŽé¢ãæ§æãããããšãã§ãããããŒããå å²ã
ãå·åŽé¢ã®æž©åºŠã¯çåå¿ã«ãããŠåœ¢æãããå»ã¬
ã¹ã®é²ç¹ä»¥äžã«ä¿æãããã°ãªããªãããã以äž
ã§ããã°ãåçž®ç©ãåçµããå·åŽé¢ã®è é£ãšäºé ž
åã±ã€çŽ ã®ç¹æ§ã®å£åãšãçããèãããããæž©
床ãé«ããã°ãå·åŽé¢ã®å·åŽå¹æãæžå°ããåŸã€
ãŠäºé žåã±ã€çŽ ã®æ¿å容éãæ¹åããå·åŽé¢ã®èœ
åãæžå°ããããã®ããå·åŽé¢ã®æž©åºŠã500â以
äžã«ä¿æãããã°ãªããªãã çåå¿é åã«ãããèžæ°çžå æ°Žå解åå¿ã¯ç±³åœ
ç¹èš±ç¬¬2819151å·æ现æžã«èšèŒãããæ¡ä»¶ã«ãã
è¡ãªãããã çã®åŒ·ããã€ããã«ããåå¿ã®åŒ·ãã¯å¹Ÿã€ãã®
æ¹çã«ããå¶åŸ¡ãããããšãã§ããã倧å€æ°ã®ã
ã®ã¯åœæ¥è ã«ã¯æçœã§ããã以äžã«ãã®å¥œé©ãªã
ã®ã説æããã éåžžã®æ¹æ³ã«ãããŠãå¯çæ§ã¬ã¹ããã³ããå
ã±ã€çŽ å«æã¬ã¹ã¯ççŒãæ¯æããã«ååãªé žçŽ ãš
çé åäžã§æ··åãããããã®æè¡ã¯ãïŒãŸãã¯ã
ã以äžã®ã¬ã¹ãäºãå ç±ãããå ŽåãããŸãã¯ã¬
ã¹ã倧ããªä¹±æµã§çåå¿é åã«ãããŠæ··åããã
å Žåã«ãæ¬çºæã«ãããŠäœ¿çšããããšãã§ããã
ä»ã®æ¹æ³ã§ã¯ãããåã±ã€çŽ ããã³å¯çæ§ã¬ã¹ã
ãšãã«çã«å°å ¥ããåã«é žçŽ å«æã¬ã¹ã®äžéšãŸã
ã¯å šéšãšæ··åããããšãæãŸãããäºã圢æãã
æ··åç©ã25ïŒ ã®é žçŽ å«æã¬ã¹ãå å«ãããšããç
ã®åŒ·ããå¢å€§ããã ããåã±ã€çŽ ãå¯çæ§ã¬ã¹ããã³é žçŽ å«æã¬ã¹
ã¯ã埮现ãžãšãããå©çšããã€ã¬ã¹ãå§åäžã§ç
äžã«æŸåºããããšã«ãããçé åäžã§ååã«æ··å
ãããããšãã§ããããžãšãããå°ããäžã€ïŒã€
åã¯è€æ°ã®å ±éçŠç¹ã«ã€ãåœãããã«åºå®ããã
å Žåã«æ··åãäºå®äžå®å šã«ãªããããè¯å¥œãªæ··å
ã確å®ã«ããããã«ã¬ã¹æ··åç©ã«æžŠå·»éåãä»äž
ããããšãã§ããã å¯çæ§ã¬ã¹ããã³åããåã±ã€çŽ ããã³é žçŽ å«
æã¬ã¹ã®äžéšããšãã«æ··åãã次ãã§ãã®æ··åç©
ãè€æ°ã®å°ãžãšããããçé åå ã«æŸåºããã®ã
æå©ã§ããããã®æ¹æ³ã«ãããŠå°åŒ·åºŠã®çãåãž
ãšããã«ãããŠåŸãããã ããåã±ã€çŽ 察å¯çæ§ã¬ã¹ã®æ¯çã¯ããé«ãé
ã®ããåã±ã€çŽ ãäœãç匷床ãäžããããã«çã®
匷ãã«åœ±é¿ãåãŒããããã«åããåã±ã€çŽ ã®é
ã¯å容ãããåã±ã€çŽ ã®éãå¢å ããããšã«ãã
æžå°ããããã«äºé žåã±ã€çŽ ã®åéã«çžåœãªåœ±é¿
ãåãŒãããããããããã¯ä»¥äžã«ç€ºãããäŸã
ãèŠãããããã«ãçžåœé床ã®å¯çæ§ã¬ã¹ã䜿çš
ããã®ã«é©ãããããããªãããããã®èŠå ãè
ãã«ãããŠãããåã±ã€çŽ ã®éã¯åºãéçå ã§å€
åãããããšãã§ãããå¯çæ§ã¬ã¹ãšããŠæ°ŽçŽ ã
çšããå Žåã«ãè¯å¥œãªåéã¯ïŒãªããã«ã®æ°ŽçŽ ã«
察ããŠåããåã±ã€çŽ çŽ0.5ïœä»¥äžã䜿çšãããš
ãã«åŸãããããŠåžè²©ãããã³ã¬ã¹ã䜿çšããã
ãšãã¬ã¹ã®ïŒãªããã«åœãçŽ1.5ïœä»¥äžã®åãã
åã±ã€çŽ ãæé©ã§ãããççŒãããã¬ã¹éã®ãã
ã®å®çšçãªæ¹æ³ã圢æããããã«å°éã®ããåç©
ã«ãã€ãŠå¹çãäœäžããããããçµæžççç±ã«ã
ãèŠå®ããããã®ãé€ãäœãé床ã¯ãªãã é žçŽ åã¯é žçŽ å«æã¬ã¹éã¯é床ã®é žçŽ ïŒçè«é
ã«æ¯ã¹ãŠïŒãé垞匷ããæ倧ã«å¢å€§ããããã®ç¹
ãè¶ãããšãããã«é床ã®é žçŽ å«æã¬ã¹ã¯çã®åŒ·
ããäœäžããã€çãããäžå®å®ã«ããããã«ãç
ã®åŒ·ãã«çžåœãªåœ±é¿ãåãŒããçäžã«å°å ¥ããã
ã¬ã¹ã®æ··åããã匷ããªãã»ã©ãæé©ãªçã®åŒ·ã
ãåŸãããã«å¿ èŠãªé床ã®é žçŽ ãäœäžãããå®é
äžã10ã75ïŒ ä»¥äžã®é žçŽ ã奜ãŸããããšãããã€
ãã åžéã¬ã¹ãäŸãã°çªçŽ ãããæ°ŽåçŽ ãŸãã¯æ°Žèž
æ°ã®çäžãžã®å°å ¥ã¯ç匷床ãããªãæžå°ãããã
ãããäžæŽ»çºãªã¬ã¹ãçäžã«å€å°ã®éã§ååšãã
ãšãã極ããŠåŒ·ãæ··åãäŸçµŠããã€ãŸãå€åææ
ãããçã®åŒ·åºŠãåŸãããã«äºãå ç±ãããã¬ã¹
ã䜿çšããããšãå¿ èŠã§ãããä»æ¹ãçäžã«å°å ¥
ãããã¬ã¹ãåžéãããªãããŸãã¯äžæŽ»çºãªã¬ã¹
ã«ããäžéšåã®ã¿åžéããããªãã°ãçã®åŒ·ãã¯
0.1Ã10-3B.t.u-1ãè¶ããããç¥ããã50nmãã
ç²ãå¹³åç²åºŠã瀺ãã äžè¿°ããéããçé åã«å°å ¥ããåã«ïŒãŸãã¯
ãã以äžã®ã¬ã¹ãŸãã¯ã¬ã¹æ··åç©ãäºãå ç±ãã
ããšãã§ããããã®éžæã¯äžè¿°ã®æ¹æ³ã®ãããã
ãšçµã¿åããããšãã§ããã枩床ãé«ããªãã°ãª
ãçšãäºç±å¹æã¯äžå±€å€§ãããªããããããªã
ããåããåã±ã€çŽ ããã³æ°Žèžæ°ãå«ãã¬ã¹æ··å
ç©ãäºãå ç±ãããšã枩床ã¯ã¬ã¹ãã·ãªã«ã圢æ
ããã®ã«åå¿ãã枩床以äžã«ãã¹ãã§ãããéåžž
400âããããåå¿ã«é¢ããéŸæž©åºŠã§ããã çã®ç±ããã³åŒ·ãã¯ç±åå°é¢å ã§çã®åºéšã«ã
ããŠå·åŽé¢ã®å€åŽã®çé åã®å šéšãŸãã¯äžéšãå²
ãããšã«ããããã«å¢å€§ãããããšãã§ãããäŸ
ãã°ã»ã©ããã¯ãè¡šé¢ã«åŒµã€ãã¬ã³ã¬ã䜿çšãã
ããšãã§ããã äžèšæ¹æ³ã®ïŒã€ãŸãã¯ãã以äžã®çµåãã¯ç匷
床ãããã«å¢å€§ããã å šäœã«ããã€ãŠäžæ§ãªåŒ·ãã®çãæããã®ãæ
ãŸããããã®ç®çã®ããã«ãè€æ°ã®å°ããªçãã
匷ããããå°ããªçã«ãããŠããäžæ§ã§ãããšã
ãåŸåãæããã®ã§ãïŒã€ã®å€§ããªçããããã
奜é©ã«äœ¿çšããããšãã§ãããé«ä¹±æµã§ã®ã倧ã
ãããŸãã¯å°ãããçäžãžã®ã¬ã¹æ··åç©ã®å°å ¥ã¯
ãŸãäžæ§æ§ãå¢å€§ãããããªåŸåããããçãã
ãäžæ§ã«ãªãã°ãªãã»ã©ã·ãªã«ã®ç²åºŠååžããã
äžå±€äžæ§ã«ãªããå³ã¡æ倧ããã³æå°ç²åãšå¹³å
ç²åºŠãšã®éã®å·®ãäžå±€å°ãããªããåœç¶ãªããã
ãã®ç²åã®äžæ§æ§ã¯äœ¿çšãããããŒãã®åã«å€å°
ã®ç¯å²ãŸã§äŸåããã æ¬çºæã«ãããç匷床ã®é åã瀺ãç±³åœç¹èš±ç¬¬
2819151å·ã®ç¬¬ïŒå³ã®ã°ã©ãã®ïŒã50mÎŒã®åºå
ã«ãããŠãé žçŽ å«æã¬ã¹ãåããåã±ã€çŽ ããã³
å¯çæ§ã¬ã¹ã®æ¯çã®å®¹ç©å€åã¯ç²åºŠã®åãªãå°ã
ãªå€åãè¡ãªããšããããšãææãããã¹ãã§ã
ããããããªããã1.3Ã10-5B.t.u-1以äžã®åºå
ã«ãããŠãå³ã¡å¿ èŠãšãããããäœã匷ããæã
ãçã«ãããŠã¯ããããæ¯çã®æ¯èŒçå°ããªå€å
ã¯ç²åºŠã®å€§ããªå€åãçãããããŠç²åºŠååžã¯ãŸ
ããã倧ããã ããåã±ã€çŽ ãšããŠã¯ãåããåã±ã€çŽ ãæ¬çº
æã«ãããŠã¯å¥œãŸããçšãããããã±ã€ããåæ°Ž
çŽ é žH2SiF6ããã³Si2F6ã®ããšãèžæ°çžäžã§åã
ãåç©ãçºçããååç©ããŸã䜿çšããããšãã§
ãããããŠããåæ°ŽçŽ ã±ã€çŽ ãHSiF3ïŒH2SiF2ã
ãã³H3SiFã¯ããããã容æã«å©çšã§ãããã€å
ããåç©ããäžå±€é«äŸ¡ã§ããããã©ããå¥ã®å¯èœ
æ§ã瀺ãã æ¬çºæã®æ¹æ³ãããŠäœ¿çšãããåããåã±ã€çŽ
ã¯çš®ã ã®å ¬ç¥ã®æ¹æ³ã®ããããã«ãã€ãŠçºçãã
ãããšãããã äžæ¹æ³ã¯æç®ã«ãããŠè¯ãç¥ããäžã€å ±åãã
ãŠããããã¿ã«ç³ãåæãšããŠäœ¿çšããããšãã§
ãããããã¯ä»¥äžã®åå¿ã«åŸã€ãŠç¡«é žæº¶æ¶²ããã³
ç ãšåå¿ããã 2CaF2ïŒSiO2ïŒ2H2SO4âSiF4ïŒ2CaSO4ïŒ
2H2O 70ïŒ ç¡«é žæº¶æ¶²ã䜿çšããäžã€ç©è³ªãæ··åããäž
ã€å ç±ããããšãåããåã±ã€çŽ ã¬ã¹ãæŸåºãã
ãã€ãããäžè¿°ããããããªå¯çã¬ã¹ããã³é žçŽ
å«æã¬ã¹ãšæ··åãããããšãã§ããã è±åœç¹èš±ç¬¬438782å·ã«èšèŒãããä»ã®æ¹æ³ã¯æ°Ž
æ§ããåæ°ŽçŽ é žã«ãããç²åãå»ã¬ã¹çã®ããšã
埮ç²ç åã¯ã±ã€ã€é žå¡©ã®åŠçã䌎ãããã®åŸãã
åã±ã€çŽ ãã¬ã¹ãšããŠçºçãããããã®æ¹æ³ã¯ã
åããåã±ã€çŽ ã圢æããããã«ç ãšåã³åå¿ã
ãã¹ãææã®ã±ã€çŽ 圢æåå¿ã®å¯çç©ãšããŠæŸåº
ãããããåæ°ŽçŽ ãå埪ç°ãã埪ç°æ¹æ³ã«ããã
æ¬çºæã®åå¿ã®å©çšãå¯èœã«ãããå®éã«ã¯ãã
ã®å Žåã«ãããæ¹æ³ã¯ç ããŽã åæç©ã«äœ¿çšãã
ã«æãŸããç¡å®åœ¢ç·ç²åºŠã«æžå°ããããã«ãã
ã³ã»ãããªãã·ã³ã°ã»ã«ã³ãããŒã1943幎çºè¡ã®
ãšãã¬ã€ã ã¹èç¡æ©ååŠç¬¬ïŒçã第774é ã第781
é åç §ã 埪ç°æ¹æ³ã«ãããŠæçšãªä»ã®æ¹æ³ã«ãããŠã¯ã
ããåæ°ŽçŽ é žã®æ°Žæº¶æ¶²ã¯ã·ãªã«ã§å å¡«ããã宀ã«
éããããïŒïŒïŒïŒïŒãŸãã¯ãã以äžã§ããã±
ã€ããåæ°ŽçŽ é žïŒïŒHFïŒXã»SiF4ïŒã®æº¶æ¶²ãçºçã
ããããã¯èšèŒã®ããšãèžçºããäžã€åå¿ãèµ·ã
ãããççŒåå¿ããã®æµåºæ¶²äžã®ããåæ°ŽçŽ ãã
ã³åããåã±ã€çŽ ã¯æ°ŽäžãŸãã¯è€åããåæ°ŽçŽ ã
ããªãŠã ã圢æããããã«åºäœã®ããåãããªãŠ
ã äžã«ãŸãã¯æ°Žæ§ã±ã€ããåæ°ŽçŽ é žäžããã³æç®
ã«é瀺ãããä»ã®ãã®ã®äžã«åžåããããããŠå¿
èŠãªãã°åçž®ããããã€æ¬¡ãã§åã³æ°ããªéã®ã±
ã€ããåæ°ŽçŽ é žã補é ããããã«å©çšãããããš
ãã§ããã åºäœã®ããåãããªãŠã ãå©çšãã埪ç°æ¹æ³ã«
ãããŠã以äžã®åå¿ãçããã çŽ300â以äžãã€ãŸã105âã§ã®åžå NaFïŒHFâNaHF2ïŒãŸãã¯NaH2FïŒ 2NaFïŒïŒéå°SiF4ïŒâNa2SiF6 çŽ325âãŸãã¯ãã以äžãã€ãŸã350âã§ã®è±ç NaHF2ïŒãŸãã¯NaH2FïŒâNaFïŒHF ããããŠåŸãããããåæ°ŽçŽ ã¯æ¬¡ãã§åŸªç°ãã
ãã€åããåã±ã€çŽ ã圢æããããã«ãé垞氎溶
液äžã§ã·ãªã«ãšåã³åå¿ãããããã æ¬çºæã®æ¹æ³ã«ãããå¯çæ§ã¬ã¹ãšããŠã¯æ°ŽçŽ
ãå«æããããèªäœæ°ŽçŽ ãå«ãããŸãã¯æ°ŽçŽ ãä»
ã®åœ¢æ ãäŸãã°ã±ã€ããåæ°ŽçŽ é žãŸãã¯æ°Žèžæ°ãš
ããŠçã«äŸçµŠããããªãã°ããããªãã¬ã¹ã䜿çš
ããããšãã§ããäžé žåççŽ ã®ããšãæ°ŽçŽ ãå«æ
ããªãä»ã®å¯çã¬ã¹ã䜿çšããããšãã§ãããæ®
çºæ§çåæ°ŽçŽ ããã³ãã®æ··åç©ã¯ããããè±å¯ã§
ãã€å®äŸ¡ã§ãããã奜éœåãªäŸçµŠæºã§ããããã
ãŠãããã®éã«èèªæãèç°åŒããã³è³éŠæçå
æ°ŽçŽ ãèšèŒããããšãã§ãããççŒã¬ã¹ã®äŸã¯ã
ãã¹ãŠèžæ°çžã«ãããŠã補é æ¥ã¬ã¹ã倩ç¶ã¬ã¹
ïŒäž»ãšããŠã¡ã¿ã³ããã³ãšã¿ã³ïŒãåæ¥çšãããã³
ã¬ã¹ïŒã¡ã¿ã³ããšã¿ã³ããããã³ããã³ãã¿ã³ã®
æ··åç©ïŒãåæ¥çšãã¿ã³ã¬ã¹ããã³ãŒã³ãæ°Žæ§ã¬
ã¹ïŒæ°ŽçŽ ãšäžé žåççŽ ã®æ··åç©ïŒãã±ãã·ã³ãã¡
ã¿ã³ããšã¿ã³ããããã³ããã³ã¬ãœãªã³ã§ããã
çã«èžæ°ãå ãããããªãã°ãäžé žåççŽ ã®ããš
ãæ°ŽçŽ ã®ãªãå¯çæ§ã¬ã¹ãåæ§ã«äœ¿çšã§ããããš
ãã«è¯å¥œãªã·ãªã«çæç©ã¯çŽç²ãªæ°ŽçŽ ã¬ã¹ãŸãã¯
æ°ŽçŽ ã¬ã¹ã容ç©ïŒ ã§60ïŒ ä»¥äžå«æããã¬ã¹æ··åç©
ã䜿çšãããšãåŸãããã å¯çæ§ã¬ã¹ã®æ§è³ªã¯ãæãããªããšããã¬ã¹ã®
ççŒã«æŸåºãããç±éãéèŠã§ã¯ããããé倧ã§
ã¯ãªããèšèŒãããç匷ãã®ç¯å²ã¯æ°ŽçŽ ãäžé žå
ççŽ ããã³äŸãšããŠçåæ°ŽçŽ ã®æ··åç©ã䜿çšããŠ
èšç®ããããå¯çæ§ã¬ã¹ãé žçŽ ãšã®ççŒã«ãããŠ
æŸåºãããç±éã«ãããŠãããã®ç©è³ªãã倧ãã
ç°ãªããªãã°ã瀺åãããäœæ¥æ¹æ³ã«å€æŽããªã
ãã°ãªããªããäŸãã°ãã®ç©è³ªããã倧ããç±é
ãæŸåºããç©è³ªãšæ··åããããšãæãŸããããã®
çµæå¹³åã¯ãããã³ãŸãã¯æ°ŽçŽ ã®ççŒã«ãããŠæŸ
åºããããã®ã«ã»ãšãã©è¿ããªãã äžèšã®æ¹æ³ã«ãããé žçŽ å«æã¬ã¹ãšããŠã¯ç©ºæ°
ãªãã³ã«çªçŽ ããã³äºé žåççŽ ã®ããšãäžæŽ»çºãª
ã¬ã¹ãšã®ä»ã®é žçŽ æ··åç©ããã³é žçŽ ããèªäœãå
æ§ã«äœ¿çšããããšãã§ãããçã®åŒ·ãã¯ããã空
æ°ã«ä»£ããŠçŽç²ãªé žçŽ ãŸãã¯é žçŽ ãå€ãå«ãã 空
æ°ã䜿çšããããªãã°åŒ·åã«å¢å€§ãããã ç ããã®åããåã±ã€çŽ ã®çºçãè¡ãªãã®ã«äœ¿
çšã§ããè£ çœ®ã¯ååŒã«ãããŠã¯éåžžã®ãã®ã§ã
ããåããåã±ã€çŽ çºçåšã¯æ¹æåšããã³å€éšå·
åŽãåããéåžžã®åå¿çã§ããããã®äžã«ããå
æ°ŽçŽ é žããã³ç ã®é£ç¶æµãå°å ¥ãããç ã¯å°ãªã
ãšã98ïŒ ã®äºé žåã±ã€çŽ ãé©åœã«å«æããŠããå
å¿çå ã®æº¶æ¶²ã¯éå°ã®æº¶è§£äºé žåã±ã€çŽ ãå«æã
ãŠããã溶液ã¯å¹Ÿããã®æ°Žèžæ°ããã³å¹Ÿããã®å
å¿ããªãããåæ°ŽçŽ ãšå ±ã«ãåããåã±ã€çŽ ãæŸ
åºããããã«å ç±ãããèžçºåšã«æ¡å ããããå
ããåã±ã€çŽ ãšæ°Žèžæ°ã®æ··åç©ã¯ãã€ããéã€ãŠ
ççŒå®€ã«éã°ããã ãã¿ã«ç³ãç ããã³ç¡«é žããåããåã±ã€çŽ ã
çºçãããã®ã«äœ¿çšããããšãã§ããè£ çœ®ã¯ååŒ
ã«ãããŠã¯éäŸã®ãã®ã§ãããåããåã±ã€çŽ çº
çåšã¯æ¹æåšããã³å€éšå ç±ãåããéåžžã®åå¿
çã§ããããããŠåããåã±ã€çŽ ã¯èžæ°çžäžã«çŽ
æ¥æŸåºãããã ã¬ã¹ã¯å€éšå ç±ã«ãã€ãŠäºãå ç±ããäžã€æåŸ
ã«ååã«åŒ·åãªçãåŸãããã«æ··åãããããšã
ã§ããã ççŒå®€ã¯çé åã®ç±ãå¢å€§ããããã«ã»ã©ãã
ã¯ãŸãã¯éå±åå°é¢ãæããèç«æ§ã¬ã³ã¬ã§è£æ
ã¡ãããéå±è£œã®å¯éåå¿å®€ã§ããããã®å®€ã®äž
ã«åæ§ã«ç©ºæ°ã®ããšãé žçŽ å«æã¬ã¹ããã³å€©ç¶ã¬
ã¹ãŸãã¯æ°ŽçŽ ã®ããšãå¯çã¬ã¹ãå°å ¥ãããã ååã«åŒ·åãªçãåŸãããã«å€æ°ã®çš®ã ã®ååŒ
ã®ããŒãã䜿çšããããšãã§ããå¿ é ã®èŠå ã¯å
å¿ã¬ã¹ãäºãã«å¯æ¥ããŠæ¥µããŠè¿ éã«ç§»åããã
ããšã«ãããããããŠæ¥µããŠåŒ·åãªåå¿ãå¯èœã«
ããã倧ããªããŒãã䜿çšããããªãã°ã該ããŒ
ãã¯æ倧ç匷床ã200KWã§ããçãçºçãã¹ã
ã§ãããå°ããªããŒãã䜿çšããããªãã°ã該ã
ãŒãã¯æ倧ç匷床ã10KWãè¶ããªãçãçºçã
ã¹ãã§ããã è¯å¥œãªçµæã¯çç¶æ··å宀ãããªãããŒãã«ãã
åŸãããåèšçç¶æ··å宀å ã§åããåã±ã€çŽ ãå¯
çæ§ã¬ã¹ããã³ç©ºæ°ãæ··åãããããŠæ··åç©ã¯ã¹
ã¯ãªãŒã³ãŸãã¯å€æ°ã®åŸ®çŽ°ãªåãæããåæãã
ã¬ãŒããééããã該混åç©ã¯çãæ··å宀å ã«é
æµããã®ãé»æ¢ããã¹ã¯ãªãŒã³ãŸãã¯ãã¬ãŒãã®
å€åŽã§ç¹ç«ãããã æºè¶³ã®ããä»ã®ååŒã®ããŒãã¯ïŒã€ã®åå¿ç®¡ã
åããé žçŽ å«æã¬ã¹ã¯æå æ¹ç®¡ããã³æå€æ¹ç®¡ã
éã€ãŠäŸçµŠãããå¯çã¬ã¹ããã³æãŸããã¯é žçŽ
å«æã¬ã¹ã®äžéšåãšã®åããåã±ã€çŽ ã®æ··åç©ã¯
äžé管ãéã€ãŠå°å ¥ãããã 第ïŒå³ããã³ç¬¬ïŒå³ããæãããªããã«ãå·åŽ
é¢ããããããã®ããŒãããºã«ãçç¶å·åŽæ©æ§ã«
ãã€ãŠå®å šã«å å²ããããããŸãã¯äžçŸ€ã®ããŒã
ããºã«ãå ±éã®å å²å·åŽæ©æ§ã«ãã€ãŠå²ç¹ããã
ããšãã§ããããã«é 眮ããããšãã§ãããå·åŽ
æ©æ§ã¯ãçåå¿é åã«åãåãé¢ãå·åŽä¿æãã
ããã«ãå·åŽæµäœãæµäœãŸãã¯ã¬ã¹ã埪ç°ããã
ãã€ã©ãŸãã¯ç±äº€æåšã®åœ¢ç¶ã«ãããããšãã§ã
ãã å·åŽé¢ã¯çåå¿é åãå šäœçãŸãã¯éšåçã«å²
ç¹ãŸãã¯å²ãããšãã§ãããå·åŽæ©æ§ã¯ã第ïŒå³
ã«ãããããã«ãå·åŽé¢ã®å€é¢äžã®åäžå¿ç®¡éã«
埪ç°ãããå·åŽç¡«äœãåããŠã管ç¶ã«ããããšã
ã§ãããå·åŽæ©æ§ã¯ãå€å²ç®¡ãåããŒãã®ãŸãã
ã®çåå¿é åã®å°ãªããšãåºéšéšåãå²ããããª
æ¹æ³ã§ãããŒããæ¿å ¥ãããå€å²ç®¡ã貫éããå€
æ°ã®éæŸç®¡ãæããæµäœããããéã€ãŠåŸªç°ãã
ãå€å²ç®¡ã®åœ¢ç¶ã«ãããããšãã§ããã å·åŽé¢ã®æž©åºŠã¯éèŠã§ããã該枩床ã¯çåå¿é
åã«åœ¢æãããççŒå»ã¬ã¹ã®é²ç¹ä»¥äžã«ãã¹ãã§
ãããä»ã®æ¹æ³ã§ã¯ãåçž®äœãå·åŽé¢äžã«ãè è
ãçºçããã€äºé žåã±ã€çŽ çæç©äžã®æ害ãªäœçš
ãæãããå·åŽç¹æ§ã®æ倱ã圢æããã ä»æ¹ã«ãããŠãå·åŽé¢ã®æž©åºŠãé«ããã°é«ãã»
ã©ãã·ãªã«ã®ç²åºŠããã³éå床ã«é¢ãã圱é¿ãã
ãäžå±€å°ãªããªããå·åŽå¹æãæžå°ãããšãåå¿
枩床ãå¢å€§ããã€ã·ãªã«ã®ç²åºŠãæžå°ãããåŸã€
ãŠå·åŽé¢ã¯500â以äžã®æž©åºŠã«ä¿æãããã¹ãã§
ããã çã®å·åŽã¯çããå·åŽé¢ãžã®ç±æŸå°ã«ãã€ãŠäž»
ãšããŠçãããããã¯çããã®å·åŽé¢ã®è·é¢ã¯é
èŠã§ãªãããšãæå³ãããããããªããéåžžãã®
è·é¢ã¯200nm以äžã«ä¿æãããã ãã¡ããçäžã®æž©åºŠã¯ããããªã枩床ã§ãäºå®
äžæž¬å®ããããšã¯ã§ããªããã500âããããªã
é«ããããããªããå·åŽé¢ã«ãããçåå¿é åã®
枩床ã¯ãã·ãªã«ã®ç²åºŠäžã®å¹æã®ãããããªãäœ
ãããšãæããã§ãããããããåå¿ãå¶åŸ¡ãã
ã€ã·ãªã«ã®åéãæ¹åããçã®æž©åºŠãããããå·
åŽé¢ã®æž©åºŠãå¶åŸ¡ããã«ååã§ããããããŠçè²
åå¿é åäžã®æž©åºŠã¯ã·ãªã«ã®åéãå¢å€§ãããã
ã«èŠæ±ããããšãåå¿ãå¶åŸ¡ããããã«ãã®æ段
ã«ãã€ãŠååæ£ç¢ºã«æž¬å®ãããããšãã§ããã ãã®ããã«äžæãã枩床ã«ãããå·åŽã¯ããã
ããªæ¶²äœããã®ãããªé«æž©ã«ãããŠæ¶²ç¶ã§ããã
ããäŸå€çãªå·åŽæµäœãå¿ èŠãšãããéåžžå·åŽã¬
ã¹ãŸãã¯æ²žéš°ããã®ãèªç±ã§äžã€å·åŽæ©æ§ã«ç¢ºç«
ãããå§åã«ãããŠãã®æ²žéš°ç¹ã®ããã«å·åŽæž©åºŠ
ã確ç«ããããšãèªç±ã§ãã液äœãå©çšããã
ããåŸã€ãŠãäŸãã°æ²žéš°æ°Žã¯ä»»æã®å§åäžã§ã極
ããŠæå©ãªå·åŽæµäœã§ãããèžæ°ã¯ååãããã€
ç±ã¯ããããŠååãããããŠåå¿ç³»çµ±å ã§ããŸã
ã¯ãã©ã³ãã®ä»ã®éšåå ã§ã©ãã§ã§ãå©çšããã
ããšãã§ããã ä»ã®é©åœãªå·åŽæµäœã¯ççŒããå·åŽãããå»ã¬
ã¹ã§ããã該å»ã¬ã¹ã¯ãããã®ã·ãªã«ã®å«éãã
èªç±ã«ãããŠãããç±äº€æåšããã®é«ç±å»ã¬ã¹ã¯
ããŒã宀ã®å£ãåäžã«ããã®ã«äœ¿çšã§ãããã€ã
ãã«ããããŒãåå¿é åå ã®äºé žåã±ã€çŽ ã®æ²æŸ±
ãé»æ¢ããã ãããã®äºé žåã±ã€çŽ ã®å«éãæããããŒãã
ãã®é«ç±æã¬ã¹ã¯ããã¹ãã»ãã¬ãŒã¿ã«éã°ã
ãããã®åºåã«ãããŠã枩床ã¯ãå ¬ç¥ã®ããšãã
ããåæ°ŽçŽ é žãé²ç¹ä»¥äžã®æž©åºŠã§å®¹æã«åœ¢æãã
ããããããåæ°ŽçŽ é žã®åçž®ãé¿ããããã«çŽ
200âã«é©åã«ä¿æãããã ããåæ°ŽçŽ ãååããããã«ã»ãã¬ãŒã¿ããã®
ã¬ã¹ã¯éåžžã®åçž®åšã«å°å ¥ãããã€åçž®ãããã
ãã®ããã«ããŠåŸãããåçž®ããåæ°ŽçŽ é žã¯æ°ã
ãªéã®ã·ãªã«ã®åŠçã«ãããŠå䜿çšã®ããæ»ãã
ããæã¬ã¹ã¯å€§æ°ã«æŸåºããããããã§ãªããã°
ããåæ°ŽçŽ ã¯çŽ150âã«ãããŠåžåãããããå
ãããªãŠã ãå«æããåžåå¡ã«æ¡å ããã350â
ãŸãã¯ãã以äžã«å ç±ããããšã«ããåŸã§ææã®
ããšãæŸåºããããããŠããå€ãã®åããåã±ã€
çŽ ã圢æããããã«æ»ãããã ã¬ã¹åå¿çææ··åç©ãäºé žåã±ã€çŽ ããã³ãã
åæ°ŽçŽ ã®åé¢åã«å·åŽããããªãã°ãåå¿ã¯éã«
ããããããŠé«æž©ã§åœ¢æããã埮现åäºé žåã±ã€
çŽ ã¯ããåæ°ŽçŽ ãšåå¿ãã以äžã®åå¿åŒã«åŸã€ãŠ
åããåã±ã€çŽ ãåçºçããã SiO2ïŒ4HFããSiF4ïŒ2H2O ãã®éåå¿ã¯600â以äžã®æž©åºŠã«ãããŠé¡èã«
ãªãããããŠæž©åºŠãéäžãããšãçãå¢å€§ããã
極ããŠå€§ããªè¡šé¢ç©ãæãã埮现åäºé žåã±ã€çŽ
ã450â以äžã®æž©åºŠã§ããåæ°ŽçŽ ãšæ¥æ¿ã«åå¿ã
ãããšãå®éšã¯ç€ºãããåŸã€ãŠåå¿æ··åç©ãçŽæ¥
å·åŽã«ãã600â以äžã«äžããããå Žåã«ãäºé ž
åã±ã€çŽ ã®å€§éšåã¯åããåã±ã€çŽ ã«å€æããã
ããããŠäœåçã§ãã€äžçµæžãªæ¹æ³ãçµæãšããŠ
çããã åå¿ã600âããã³ãã以äžã«ãããŠäºé žåã±
ã€çŽ ã®åœ¢æã®æ¹åã«é²è¡ããããã§äºé žåã±ã€çŽ
ã®è¯å¥œãªåçãåŸãããšãã§ããããä»ã®å°é£ã
çèµ·ãããããåæ°ŽçŽ ãå«æããã¬ã¹ã¯ãã®ãã
ãªé«æž©ã«ãããŠéåžžã«äŸµé£æ§ã§ããããã€åŸã€ãŠ
åé¢åšçšã®é©å®ãªæ§é ææãèŠãåºãã®ãå°é£ã§
ãããå ããŠäºé žåã±ã€çŽ ç²åã¯é«æž©ã§æ¥æ¿ã«äž
ååããããã®çµæãã倧ããªç²åã¯ãã倧ãã
ãªããããå°ããªç²åãããå°ãããªãäžã€æåŸ
ã«æ¶å€±ãããã®çµæ掻æ§ãå°ãªããã€åŸã€ãŠäŸ¡å€
ã®äœããã倧ããªç²åºŠã®çæç©ãåŸãããã 1965幎ïŒæ31æ¥ä»ã®ãã¬ã¡ã«ãæ°ã®ç±³åœç¹èš±ç¬¬
3203759å·ã«ããã°ãããåã±ã€çŽ ååç©ããã³
æ°Žã®èžæ°çžåå¿ã«ãã€ãŠåŸããããããªäºé žåã±
ã€çŽ ã¯åå¿æ··åç©ã®æž©åºŠããäœã枩床ãæããäž
掻æ§ã¬ã¹ã«ããã¬ã¹å¯çç©ããã³æžæ¿äºé žåã±ã€
çŽ ãåžéããããšã«ãã倧ããïŒã200ÎŒã®ç²å
ãšããŠæŽ»æ§åœ¢ç¶ã«ãããŠåå¿æ··åç©æž©åºŠã600â
以äžã«ãã€å¥œãŸããã¯350ãã575âã®ç¯å²å ã§ã
ããåžéããæ··åç©ã®é²ç¹ä»¥äžã«æžå°ããã«åå
ãªéã«ç¶æãããããšãã§ãããäºé žåã±ã€çŽ ã¯
次ã«å·åŽåžéããæžæ¿æ¶²ããåé¢ããããè¯å¥œãª
åçã®é«å質ã®äºé žåã±ã€çŽ ãåŸããããããæž©
床ã§ã®åå¿ã®å¯éæ§ã«éã¿ãŠé©ãã¹ãçµæã§ã
ãã åå¿æ··åç©ãå·åŽããããã«ã¯ããããªãäžæŽ»
æ§ã¬ã¹ã䜿çšããããšãã§ãããå³ã¡ãã®ãããª
ã¬ã¹ã¯åå¿æ··åç©ããã®ååãæãŸãããããªã
æåãšãåå¿ãçããªããã®ã§ãããé©åœãªã¬ã¹
ã¯ç©ºæ°ãæ°Žèžæ°ãçªçŽ ãäºé žåççŽ ãããªã³ãã
ãªãŠã ãã¢ã«ãŽã³ããã³åæ§ãªçšã¬ã¹ããã³ççŒ
éçšããã®æã¬ã¹ã«ãã€ãŠäŸèšŒãããã奜é©ãªåž
éå€ã¯åŸ®çŽ°åäºé žåã±ã€çŽ ãåé¢ãããåŸã®åå¿
ããã®æã¬ã¹ãŸãã¯å¯çã¬ã¹ã§ããããããŠãã
ãã¯ãã¬ã¹æåã®åçž®ã®äœäžãçºçããªããšãã
çç±ã®ãããé©åœãªæž©åºŠã«å·åŽãããããã«ãã
ããåæ°ŽçŽ ã®ååããã³ãã®ããã«æãŸãããªã
ã°ãããããã®åå¿ããªãåããåã±ã€çŽ ã®åå
ã容æã«ããã æ··åãããå·åŽã¬ã¹ã®éããã³ãã®æž©åºŠã¯åå¿
æ··åç©ãããããããã¹ã枩床ãåŸãããã«èª¿æŽ
ãããŠãããåŸã€ãŠãããã®å€æ°ã¯ãææã®å·åŽ
çšåºŠã«å¿ããŠãåºãéçå ã§å¶åŸ¡ãããããšãã§
ãããå®éäžåå¿æ··åç©ã¬ã¹ã®å®¹ç©ã®ïŒåããïŒ
åãæé©äœæ¥ç¯å²ã§ãããæ··åãããã¬ã¹éã¯æž©
床ã600â以äžã§ãããåžéããæ··åç©ã®é²ç¹ä»¥
äžã«ããããã«é©çšãããããã®æž©åºŠç¯å²å ã«ã
ããŠãäŸãã°è é£ããã³æ©æ¢°ç匷床ã®åé¡ã®ããš
ãäºé žåã±ã€çŽ ã®åé¢æ®µéã«ãããŠãããããã
å®éäžã®åé¡ãæ¯èŒçå æãæãã å·åŽã¬ã¹ã®æ··åæ¹æ³ã¯éèŠã§ã¯ãªãããããŠ
çš®ã ã®æ¹æ³ã§è¡ãªãããšãã§ãããåŸã€ãŠç±³åœç¹
蚱第2819151å·æ现æžã®äŸãã°ç¬¬ïŒæ¬ã®ç¬¬67è¡ç®
ä¹è³ç¬¬ïŒæ¬ã®ç¬¬37è¡ç®ã«èšèŒãããæ¹æ³ããã³è£
眮ã®äœ¿çšã«ãããŠãã¬ã¹ã¯çãå²ç¹ããã¬ã¹ã®ã«
ãŒãã³ã圢æãããããªæ¹æ³ã«ãããŠçã®åŸãã«
å°å ¥ãããããã®ã«ãŒãã³ã¯çã®æµãã®æ¹åã«å¯Ÿ
ããŠå¹³è¡ã«ãåã¯ããã«å¯ŸããŠæ£æ¥ããŠåããã
ãšãã§ããçµæãšããŠããå·»ãäœçšãçããã
ãã åå¿é åã®çµç«¯ã«å·åŽã¬ã¹ãå°å ¥ãããšç¹ã«æ
å©ã§ãããããã¯åå¿é åèªäœã¯å·åŽãŸãã¯æ¹ä¹±
ãããªãããåå¿çæç©ãåå¿åŸæ¥éã«å·åŽãã
ããšããå©ç¹ãçãããæ倧ã®æå¹æ··åãåŸãã
ãã«ãå·åŽã¬ã¹ã¯é©åœã«æ圢ããããºã«ãéã€ãŠ
å°å ¥ãããŠãè¯ãã å·åŽã¬ã¹ãæ··åããåŸãäºé žåã±ã€çŽ ã®åé¢ã¯
æ©æ¢°çé塵åšã«ãã€ãŠè¡ãªãããšãã§ãããæ©æ¢°
çé塵åšã®çšèªã¯ããã§ãã€ã«ã¿ããã³éé»é塵
åšãé€ããã¹ãŠã®ååŒã®é塵åšã瀺ããæ©æ¢°çé
塵åšã®äŸãšããŠã¯ããµã€ã¯ãã³ããã³é å¿é塵
åšãè¡çªé塵åšããã³ééé塵宀ãæããããšã
ã§ããããã€ã«ã¿ãŸãã¯éé»é塵åšã«ãã€ãŠæ¬çº
æã«åŸã€ãŠå·åŽããã³åžéåŸåŸããã埮现åäºé ž
åã±ã€çŽ ãåé¢ããããšã¯ã§ããªãã€ããããã
ã³ïŒåããåãšãã¬ã³éåäœïŒãŸãã¯ã»ã©ããã¯
ãã€ã«ã¿ã¯ïŒã20ïŒ çšåºŠãšäœãäºé žåã±ã€çŽ ã®å
åã瀺ãããããŠãã®æ¹æ³ã¯ãããããããã®ã
ã€ã«ã¿ã䜿çšãããå Žåã«ã¯äžçµæžã§ãããéé»
é塵åšããŸãäžååãªäºé žåã±ã€çŽ ã®ååã瀺ã
ãã€åæ§ã«ãã®æ¹æ³ã¯äžçµæžã§ããã å»ã¬ã¹ã®ããçŽ å«éã¯1976幎ïŒæ30æ¥ä»ã®ãã¬
ã¡ã«ãã®ç±³åœç¹èš±ç¬¬3969485å·æ现æžã«èšèŒãã
ãæ¹æ³ã«åŸã€ãŠååããããšãã§ããã 第ïŒæ®µéã¯æ°Žäžã§ã®æã¬ã¹ããã®ã±ã€çŽ ããã³
ããçŽ å«æååç©ã®åžåã§ãããããåæ°ŽçŽ ã¯å š
ã氎溶æ§ã§ããããã€è¿ éã«æº¶è§£ãããåããå
ã±ã€çŽ ã¯ããåã±ã€çŽ é žã圢æããããã«å æ°Žå
解ããããå ããŠåããåã±ã€çŽ åçž®ãé«ããªã
ã°ã埮现ã§ã¯ããã溶解ããªãäºé žåã±ã€çŽ ãå
æ§ã«ããåã±ã€çŽ é žæ°Žæº¶æ¶²äžã«åœ¢æããããåŸã€
ãŠé«ã·ãªã«ã®ããåã±ã€çŽ é žã¯åæ§ã«ãã®æº¶æ¶²äž
ã«åœ¢æãããè¿äŒŒã®çµæç©H2SiF6SiF4ãæã
ããå»ã¬ã¹ã¯åæ§ã«ããåã±ã€çŽ é žæ°Žæº¶æ¶²äžã«æž
æ¿ããããŸãŸã§ããäºé žåã±ã€çŽ ã®æ¯çãå«æã
ãããšãã§ããã åžåã¯å®€æž©ã§è¡ãªãããšãã§ãããå»ã¬ã¹ã¯æ··
åãæ¹åããããã«ã奜ãŸããã¯ã¬ã¹æµã«å¯ŸããŠ
éã«æµããæ°Žã®åŽé§ãšæ¥è§Šãããããšãã§ããã
ãã®ååŒã®æäœã¯ãšãã«é£ç¶çæ¹æ³ã«é©åãã
ãã氎察å»ã¬ã¹ã®ååé«ãæ¯çãã±ã€çŽ ããã³ã
ãçŽ å«ææåã®ãã¹ãŠãå®è³ªäžé€å»ããã®ã«äœ¿çš
ãããã ãã®åžåæ¹æ³ã¯å ¬ç¥ã§ããããã€åŸã€ãŠããã«
詳现ã«ã¯èª¬æããªãã ã±ã€ããåæ°ŽçŽ é žããã³äºé žåã±ã€çŽ ãŸãã¯ã
ãåæ°ŽçŽ ã®æº¶æ¶²ã¯ããã§åããåã±ã€çŽ ããã³ã
ãåæ°ŽçŽ ã圢æããããã«ç¡«é žãšåå¿ããããå
äžçæç©ã¯åããåã±ã€çŽ ãšæ··åãããã±ã€ãã
åæ°ŽçŽ é žãçµæH2SiF6SiF4ã®é«ã·ãªã«ã®ã±ã€ã
ãåæ°ŽçŽ é žãã圢æããããããŠäºé žåã±ã€çŽ ã
åæ§ã«ååšãããšããå¯çç©ã¯ããåæ°ŽçŽ ã«ä»£ã€
ãŠæ°Žã§ããã äºå®äžãç¡«é žã¯ãã®åå¿ã«é¢äžããªãããåå¿
ã«æå©ã§ããé žæ§åå¿åªäœãçããå€ã¯ã圢æã
ããããšãã§ããããåæ°ŽçŽ ãŸãã¯æ°Žçšã®åžåå€
ãšããŠã®ã¿äœçšããã ãã®åå¿ã«ãããŠåœ¢æãããããåæ°ŽçŽ å¯Ÿåã
ãåã±ã€çŽ ã®æ¯çã¯åå¿æ··åç©äžã®ã±ã€ããåæ°Ž
çŽ é žããã³åããåã±ã€çŽ ã®çžå¯Ÿçæ¯çã«äŸåã
ããã±ã€ããåæ°ŽçŽ é žã¯ãçã¢ã«éã®ã±ã€ããå
æ°ŽçŽ é žããã³åããåã±ã€çŽ ã®ååšã«ãããŠãå
ããåã±ã€çŽ ã®åã¢ã«ã«å¯ŸããŠããåæ°ŽçŽ ïŒã¢ã«
ã圢æããããçã¢ã«éã®åããåã±ã€çŽ ããã³
ããåæ°ŽçŽ ã圢æãããäžæ¹ãSiO2ã®ååšã«ã
ããŠããåæ°ŽçŽ ã®åœ¢æãæå¶ããããããããŠã
åå¿æ··åç©äžã®ãããã®æåã®æ¯çãå€åããã
ãšã«ãããåããåã±ã€çŽ 察ããåã±ã€çŽ ã®ææ
æ¯ããã®åå¿æ®µéã«ãããŠçºçãããããšãã§ã
ããåŸã€ãŠåå¿çæç©äžã®åããåã±ã€çŽ 察ãã
åæ°ŽçŽ ã®æ¯çã¯ãæãŸããããã«å¯ã«å¶åŸ¡ããã
ããšãã§ããã ã±ã€ããåæ°ŽçŽ é žãšç¡«é žãšã®éã®åå¿ã¯æ¹æåš
ãåããåå¿çå ã§è¡ãªããããåçž®ãããç¡«é ž
ã®éã¯åå¿æ··åç©ãééïŒ ã§çŽ60ïŒ ããçŽ90ïŒ ã
奜ãŸããã¯çŽ66ïŒ ããçŽ75ïŒ ã®ç¡«é žãå«æããã
ãã«èª¿æŽãããããã®åå¿ã¯çŽ50âããçŽ150â
ã®ç¯å²å ã«äžæããã枩床ã§è¡ãªãããšãã§ã
ãã åããåã±ã€çŽ ã¯ãããåæ°ŽçŽ ã§ãããšåæ§ãª
ã¬ã¹ã§ããããããŠäž¡ã¬ã¹ã¯ããšãã«èšèŒããã
ç¯å²å ã«äžæããã枩床ã«ãããŠãåå¿æ°Žæº¶æ¶²ã
ã容æã«æŸåºããããåå¿æ··åç©ããæŸåºããã
ã¬ã¹æ··åç©ã¯åæ§ã«æ°Žèžæ°ãå«æããŠãããåã
ãåã±ã€çŽ ãããåæ°ŽçŽ ããã³æ°Žããåé¢ããã
ãã«ãåå¿æ··åç©ããã®ã¬ã¹ã¯é©å®ã«ã¬ã¹æŽæµè£
眮ãééãããããšãã§ãã該ã¬ã¹æŽæµè£ 眮å ã§
ã¬ã¹ãæµå ¥åçž®ãããç¡«é žãšæ¥è§Šããããããã
ãããã®åããåã±ã€çŽ ã¯æµå ¥é žäžã«æº¶è§£ããåŸ
ã€ãŠæµå ¥ç¡«é žã®åããåã±ã€çŽ ã®åçž®ãå¢å€§ãã
ããè©²é žã¯ãŸãã¬ã¹äžã®ããåæ°ŽçŽ ããã³æ°Žèžæ°
ã®å®è³ªäžå šéšãåžåãããããŠæ¯èŒççŽç²ãªåã
ãåã±ã€çŽ ã®æµããã¬ã¹æŽæµè£ 眮äžã®é žããåé¢
ããããšãã§ããã 次ã«ã第ïŒæ®µéã«ãããŠãåããåã±ã€çŽ ã¯å
埪ç°ããããããŠé«æŽ»æ§ã®äºé žåã±ã€çŽ ããã³ã¬
ã¹ç¶ããåæ°ŽçŽ ã圢æããããã«æ°çžã«ãããŠæ°Ž
ãšå æ°Žå解ãããã 以äžã«å³é¢ã«ã€ããŠèª¬æããã第ïŒå³ã«ç€ºãã
å·åŽããŒãéåäœã¯ããºã«ïŒãããªãéåžžã®ååŒ
ã®ããŒãïŒãå«ã¿ãããºã«ïŒå ã«ã¯ã©ã€ã³ïŒãé
ã€ãŠå¯çæ§ãŸãã¯çæã¬ã¹ãåããåã±ã€çŽ ãã
ã³äžæ¬¡ç©ºæ°ãäŸçµŠããããããŒãããºã«ïŒã¯äºæ¬¡
空æ°ãäŸçµŠãããç°ç¶ãžã€ã±ããïŒãåããŠã
ããããŒãããºã«ïŒã¯åå¿ã®çç¶å·åŽãžã€ã±ãã
ïŒå ã«å°å ¥ãããã©ã€ã³ïŒãéã€ãŠæµå ¥ãäžã€ã©
ã€ã³ïŒãéã€ãŠç±äº€æäžã«åœ¢æãããèžæ°ãšå ±ã«
æŸåºããã沞隰氎ããžã€ã±ããïŒãéã€ãŠåŸªç°ã
ããã ããŒãäžæ¹ã®çåå¿é åã«ãããŠçºçããã
ã¬ã¹ç¶åå¿æ··åç©ã¯ççŒããã®äžã€åããåã±ã€
çŽ ã®å æ°Žå解ããã®å»ã¬ã¹ãšãçåå¿é åãé
ãå»ã¬ã¹ã®äžæµå ã«æµ®éããäžã€é£è¡ããã極埮
现åäºé žåã±ã€çŽ ãšããæããåŸã€ãŠãããã¯äž
æ¹ã§ååããããããŠäºé žåã±ã€çŽ ã¯ãäŸãã°äž
è¿°ããæ¹æ³ã®ããããã䜿çšããŠååãããã 第ïŒå³ã«ç€ºããè£ çœ®ã¯è€æ°ã®ããŒãïŒïŒãããª
ãã該ããŒãã¯ïŒã€ãå³ç€ºãããŠããããããã¯
第ïŒå³ã«ç€ºãããã®ãšåãã§ããããå ±éã®åäž
å¿çã«é 眮ããçç¶å·åŽãžã€ã±ããïŒïŒå ã«å°å ¥
ãããŠããã該ãžã€ã±ããïŒïŒã¯ã©ã€ã³ïŒïŒãé
ããŠæ°ŽãäŸçµŠããã©ã€ã³ïŒïŒãéããŠæž©æ°Žããã³
èžæ°ãååããããšã«ããå·åŽããããåããŒã
ïŒïŒãå²ç¹ããçç¶ãžã€ã±ããïŒïŒã«ããã©ã€ã³
ïŒïŒããäºæ¬¡ç©ºæ°ãäŸçµŠãããççŒã¬ã¹ãåãã
åã±ã€çŽ ããã³äžæ¬¡ç©ºæ°ã¯ã©ã€ã³ïŒïŒãéããŠã
ãŒãã«çŽæ¥äŸçµŠãããã ããŒãããã®çåå¿é åäžã®ã¬ã¹ç¶åå¿æ··å
ç©ã¯ççŒããã®ããã³åããåã±ã€çŽ ã®å æ°Žå解
ããã®å»ã¬ã¹ãšãã¬ã¹ç¶åå¿æ··åç©äžã«æµ®éãã
äžã€é£è¡ããã埮现åã·ãªã«ãšãããªããã¬ã¹ã
ãã³ä»éããã·ãªã«ã¯å¥œãŸããã¯äžåºŠå·åŽããã
ããŠã·ãªã«ã¯æ¬¡ã«ãäŸãã°äžè¿°ããæ¹æ³ã䜿çšã
ãŠååãããã 第ïŒå³ã«ç€ºããè£ çœ®ã¯å€æ°ã®ããŒãïŒïŒãæ
ãã該ããŒãã®ååŒã¯åã 第ïŒå³ã«ç€ºãããã®
ã§ããã®å·åŽãžã€ã±ããïŒïŒå ã«å°å ¥ããããç±
湯ã¯ã©ã€ã³ïŒïŒãéããŠåŸªç°ããããããŠèžæ°ã
ãã³æ°Žã¯ã©ã€ã³ïŒïŒãéããŠååããããäºæ¬¡ç©º
æ°ã¯ããŒãã®ãžã€ã±ããïŒïŒã«ã©ã€ã³ïŒïŒãéã
ãŠäŸçµŠãããåããåã±ã€çŽ ãççŒã¬ã¹ããã³äž
次空æ°ã¯ããŒãããºã«ïŒïŒã«ã©ã€ã³ïŒïŒãéããŠ
äŸçµŠãããã çç¶åå¿çïŒïŒã¯ãã®å·åŽãžã€ã±ããïŒïŒã«ã
ãåå¿å®€ïŒïŒã圢æãã該åå¿çïŒïŒãéããŠå·
æ°ã埪ç°ãããã©ã€ã³ïŒïŒãéããŠååãããç±
æ°ãšå ±ã«ã©ã€ã³ïŒïŒãéã€ãŠæµå ¥ããã çåå¿é åããã®ã¬ã¹ç¶åå¿æ··åç©ã¯ççŒå»
ã¬ã¹ãšãåããåã±ã€çŽ ã®å æ°Žå解ããã®ã¬ã¹
ãšãã¬ã¹æµå ã«æµ®éããäžã€é£è¡ããã極埮现å
ã·ãªã«ãšãããªããã¬ã¹ããã³ä»éããã·ãªã«ã¯
è€æ°ã®ç®¡ïŒïŒãããªãå·åŽåšïŒïŒã«å ¥ãã該å·åŽ
åšã¯å€å²ç®¡ïŒïŒãéã€ãŠæµããã©ã€ã³ïŒïŒã§æµå ¥
ãäžã€ã©ã€ã³ïŒïŒã«ãããŠèžæ°ãšæ°Žã®æ··åç©ãšã
ãŠæµåºããæ°Žæµã«ãã€ãŠå·åŽãããããã®æ¹æ³ã«
ãããŠãã¬ã¹æž©åºŠã¯ã極ããŠè¿ éã«ãæ°ç§å ã§
600â以äžã«æžãããããã¬ã¹æµã¯éåžžã«éãã
ãããŠå·åŽãããã¬ã¹ç¶æ··åç©ã¯æ¬¡ãã§ç¬Šå·ïŒïŒ
ã«ããæåºãããã 次ã«ã埮现åäºé žåã±ã€çŽ ã¯ãµã€ã¯ãã³åé¢åš
ïŒå³ç€ºããïŒå ã§åé¢ãããäžæ¹ãççŒå»ã¬ã¹ã®
ããåæ°ŽçŽ å«éããäžè¿°ããæ¹æ³ã«åŸã€ãŠæ°Žäžã§
åžåã«ããååãããã 以äžã®äŸã¯æ¬çºæã®å¥œé©ãªå®æœäŸã瀺ããã®ã§
ããã ãããã®äŸã«ãããŠãäºé žåã±ã€çŽ åå¿çæç©
ã®åçµåºŠã¯ãæ«éå液äœããªãšã¹ãã«ãæ¿çž®ãã
ãããªäºé žåã±ã€çŽ ã®èœåã«åºç€ã眮ããŠã以äž
ã®å®éšãçšããŠæž¬å®ãããã ééã§äžéšã®äºé žåã±ã€çŽ ãééã§100éšã®ã
ãªãšã¹ãã«æ¶²ãšæ··åãã次ãã§äºé žåã±ã€çŽ ãã³
ãã€ããã«ã䜿çšããŠæ¶²äžã«å šäœçã«åæ£ããã
çµæãšããŠçããæ··åç©ã®ç²åºŠã25âã§12å転ïŒ
åã®ãã«ãã¯ãã€ãŒã«ãç²åºŠèšLVTã䜿çšããŠ
枬å®ããã ç±³åœç¹èš±ç¬¬ïŒïŒ819ïŒ151å·æ现æžã«èšèŒã®åŸæ¥
æè¡ã䜿çšããåããåã±ã€çŽ ã®ççŒã«ãã€ãŠåŸ
ãããæ£èŠã®ãŸãã¯æšæºã®äºé žåã±ã€çŽ ãšã®ããª
ãšã¹ãã«æ··åç©ã®ç²åºŠã¯åãæ¹æ³ã䜿çšããŠæž¬å®
ãããã è©Šéšè©Šæããã³æšæºè©Šæã®ç²åºŠãããè©Šéšè©Šæ
ã®æ¿åæ°ã以äžã®é¢ä¿ã«åŸã€ãŠæ±ºå®ãããã æ¿åæ°ïŒè©Šéšè©Šæã®ç²åºŠÃïŒïŒïŒïŒæšæºè©Šæã®ç²åºŠ åå¡©åã±ã€çŽ ã®çççŒã«ãã€ãŠè£œé ãããåæ¥
çã«å©çšãåŸãäºé žåã±ã€çŽ ã¯70ã160ã®éã®æ¿
åæ°ãæããŠããã200m2ïŒïœã®ç¹æ®ãªè¡šé¢ç©ã
ãã³äœåµ©å¯åºŠãæããäºé žåã±ã€çŽ ã¯éåžžæé«ã®
æ¿åæ°ãæããããããããã¯ããªãšã¹ãã«çµæ
ç©ãå¡æãã¯ãã¹ããã³ã©ãã«ãŒçšå¢ç²å€ãšããŠ
é垞䜿çšãããäºé žåã±ã€çŽ ã§ããã åããåã±ã€çŽ ã®èžæ°çžå æ°Žå解ã«ãã€ãŠè£œé
ãããäºé žåã±ã€çŽ ã¯70ã120ã®éã®æ¿åæ°ãæ
ããŠããŠãæ倧æ¿åå¹æã¯200ã250m2ïŒïœã®ç¹æ®
ãªè¡šé¢ç©ããã³çŽ50ïœïŒã®äœåµ©å¯åºŠãæããã·
ãªã«ã«ãã€ãŠèª¬æãããã ãããã«åããŠãæ¬çºæã®æ¹æ³ã«åŸã€ãŠè£œé ã
ãã200ã250m2ïŒïœã®è¡šé¢ç©ããã³çŽ50ïœïŒã®
äœåµ©å¯åºŠã®äºé žåã±ã€çŽ ã¯150ãã300ã®æ¿åæ°ã
æããŠããã å®æœäŸ ïŒ ïŒåã®ããºã«ãåããããŒãã䜿çšãã第ïŒå³
ã«ç€ºããè£ çœ®ã«ãããŠã以äžã®ã¬ã¹æµã20âåã³
ïŒããŒã«å§ã§ã©ã€ã³ïŒïŒãéããŠããºã«ã«äŸçµŠã
ããã çæã¬ã¹ïŒ89.0ïŒ H2ïŒ11.0ïŒ CH4ïŒ285m3ïŒïœ åããåã±ã€çŽ 49.7m3ïŒïœ äžæ¬¡ç©ºæ° 815m3ïŒïœ ã©ã€ã³ïŒïŒãéããŠ272m3ïŒïœã®æµéã§äºæ¬¡ç©º
æ°ãäŸçµŠããã ããŒãããºã«ããã³ã¬ã¹æµã¯é«ä¹±æµãæãã匷
åãªçãåŸãããã«èª¿æŽããããå·åŽãžã€ã±ãã
é¢ïŒïŒã¯ïŒããŒã«ã®éå§ã«ä¿æãã埪ç°ç±æ¹¯ã«ã
ã€ãŠçŽ160âã®æž©åºŠã«ä¿æãããã åå¿çïŒïŒã®ãžã€ã±ããå£ïŒïŒã¯ç©ºæ°ã䜿çšã
ãŠçŽ300âã®æž©åºŠã«å·åŽããããå·åŽåšïŒïŒå ã§
äºé žåã±ã€çŽ ãšã®ã¬ã¹ç¶åå¿æ··åç©ã¯ç±æ¹¯ã䜿çš
ããŠ610âã«å·åŽãããã åŸãããã·ãªã«ã¯å ±ã«çŽåã«æ¥ç¶ããïŒåã®ãµ
ã€ã¯ãã³äžã§åé¢ãããäžæ¹å»ã¬ã¹äžã®ããåæ°Ž
çŽ å«éããã³åããåã±ã€çŽ å«éã¯æ°Žäžã§åžåã«
ãã€ãŠååããããã·ãªã«ã¯ç§€éããäžã€åæã
ãããããŠç¹æ®ãªè¡šé¢ç©ããã³æ¿åæ°ã決å®ã
ããå®æœäŸïŒãšããŠè¡šïŒ©ã«ç€ºããçµæãæããã ã³ã³ãããŒã«ãšããŠãåäžåå¿ããå·åŽé¢ãå·
åŽããªãããšä»¥å€ã¯ãåäžè£ 眮ããã³åäžã¬ã¹é
ã䜿çšããŠç¹°ãè¿ããããåŸãããçµæã¯è¡šïŒ©ã«
ãããŠäžã«ã³ã³ãããŒã«ã«ãã€ãŠç€ºãããŠããã ãã®çµæãã瀺ãããé åå ã®çåå¿é åã®å·
åŽãäºé žåã±ã€çŽ ã®æ¿å容éã«ããªãã®æ¹åã瀺
ãããšãæçœã§ããã å®æœäŸ ïŒ åã å·åŽãžã€ã±ããã«ããåã ã«å²ç¹ããã12
åã®ããºã«ãåããããŒãã䜿çšãã第ïŒå³ã«ç€º
ãè£ çœ®ã«ãããŠã以äžã®ã¬ã¹æµã20âåã³ïŒããŒ
ã«å§ã§ã©ã€ã³ïŒïŒãéããŠäŸçµŠãããã çæã¬ã¹ïŒ89.0ïŒ H2ïŒ11.0ïŒ CH4ïŒ285m3ïŒïœ åããåã±ã€çŽ 49.7m3ïŒïœ äžæ¬¡ç©ºæ° 815m3ïŒïœ ã©ã€ã³ïŒïŒãéããŠ272m3ïŒïœã®æµéã§äºæ¬¡ç©º
æ°ãäŸçµŠããã ããŒãããºã«ããã³ã¬ã¹æµã¯é«ä¹±æµãæãã匷
åãªçãåŸãããã«èª¿æŽããããå·åŽé¢ã¯ïŒããŒ
ã«ã®éå§ã«ä¿æãããç±æ¹¯ã«ãã€ãŠçŽ160âã®æž©
床ã«ä¿æãããã åå¿çïŒïŒã®ãžã€ã±ããå£ïŒïŒã¯ç©ºæ°ã䜿çšã
ãŠçŽ300âã®æž©åºŠã«å·åŽããããå·åŽåšïŒïŒå
ã§ãäºé žåã±ã€çŽ ãšã®ã¬ã¹ç¶åå¿æ··åç©ãç±æ¹¯ã
䜿çšããŠ610âã«å·åŽãããã åŸãããã·ãªã«ã¯å ±ã«çŽåã«æ¥ç¶ããïŒåã®ãµ
ã€ã¯ãã³äžã§åé¢ãããäžæ¹å»ã¬ã¹äžã®ããåæ°Ž
çŽ å«éããã³åããåã±ã€çŽ å«éã¯æ°Žäžã§åžåã«
ãã€ãŠååããããã·ãªã«ã¯ç§€éãããã€åæã
ãããããŠç¹æ®ãªè¡šé¢ç©ããã³æ¿åæ°ã決å®ã
ããå®æœäŸïŒãšããŠè¡šïŒ©ã«ç€ºããçµæãæããã ã³ã³ãããŒã«ãšããŠãåäžåå¿ãå·åŽé¢ãå·åŽ
ããªãããšãé€ããŠåäžè£ 眮ããã³åäžã¬ã¹éã
䜿çšããŠç¹°ãè¿ããããåŸãããçµæã¯è¡šïŒ©ã«ã
ããŠäžã«ã³ã³ãããŒã«ã«ãã€ãŠç€ºãããŠããã ãã®çµæãã瀺ãããé åå ã®çåå¿é åã®å·
åŽãäºé žåã±ã€çŽ ã®æ¿å容éã«ããªãã®æ¹åã瀺
ãããšãæçœã§ããã å®æœäŸ ïŒ åã 第ïŒå³ã«ç€ºãããããª12åã®ãã€ããåã
ã12åã®ããŒãããºã«ãæããããŒãã䜿çšãã
第ïŒå³ã«ç€ºããè£ çœ®ã«ãããŠã以äžã®ã¬ã¹æµã20
âåã³ïŒããŒã«å§ã§ã©ã€ã³ïŒïŒãéããŠäŸçµŠãã
ãã çæã¬ã¹ïŒ89.0ïŒ H2ïŒ11.0ïŒ CH4ïŒ285m3ïŒïœ ããåã±ã€çŽ 49.7m3ïŒïœ äžæ¬¡ç©ºæ° 815m3ïŒïœ ã©ã€ã³ïŒïŒãéããŠ272m3ïŒïœã®æµéã§äºæ¬¡ç©º
æ°ãäŸçµŠããã ããŒãããºã«ããã³ã¬ã¹æµã¯é«ä¹±æµãæãã匷
åãªçãåŸãããã«èª¿æŽããããå·åŽé¢ã¯ïŒããŒ
ã«ã®éå§ã«ä¿æãããç±æ¹¯ã«ãã€ãŠçŽ160âã®æž©
床ã«ä¿æãããã åå¿çïŒïŒã®ãžã€ã±ããå£ïŒïŒã¯ç©ºæ°ã䜿çšã
ãŠçŽ300âã®æž©åºŠã«å·åŽããããå·åŽåšïŒïŒã«ã
ããŠäºé žåã±ã€çŽ ãšã®ã¬ã¹ç¶åå¿æ··åç©ãç±æ¹¯ã
䜿çšããŠ610âã«å·åŽãããã åŸãããã·ãªã«ã¯å ±ã«çŽåã«æ¥ç¶ãããïŒåã®
ãµã€ã¯ãã³äžã§åé¢ãããäžæ¹å»ã¬ã¹äžã®ããå
æ°ŽçŽ å«éããã³åããåã±ã€çŽ å«éã¯æ°Žäžã§åžå
ã«ããååããããã·ãªã«ã¯ç§€éããäžã€åæã
ãããããŠç¹æ®ãªè¡šé¢ç©ããã³æ¿åæ°ã決å®ã
ããå®æœäŸïŒãšããŠè¡šïŒ©ã«ç€ºãããçµæãæã
ãã å®æœäŸ ïŒ 20åã®ããºã«ãæããå®æœäŸïŒã§äœ¿çšããè£ çœ®
ã«ãããŠã以äžã®ã¬ã¹æµã20âä¹ã³ïŒããŒã«å§ã§
ã©ã€ã³ïŒïŒãéã€ãŠäŸçµŠãããã çæã¬ã¹ïŒ100ïŒ H2ïŒ11.0ïŒ CH4ïŒ384m3ïŒïœ åããåã±ã€çŽ 49.7m3ïŒïœ äžæ¬¡ç©ºæ° 825m3ïŒïœ ã©ã€ã³ïŒïŒãéããŠ275m3ïŒïœã®æµéã§äºæ¬¡ç©º
æ°ãäŸçµŠããã ããŒãããºã«ããã³ã¬ã¹æµã¯é«ä¹±æµãæãã匷
åãªçãåŸãããã«èª¿æŽããããå·åŽé¢ã¯ïŒããŒ
ã«ã®éå§ã«ä¿æãããç±æ¹¯ã«ãã€ãŠçŽ160âã®æž©
床ã«ä¿æãããã åå¿çã®ãžã€ã±ããå£ïŒïŒã¯ç©ºæ°ã䜿çšããŠçŽ
300âã«å·åŽããããå·åŽåšïŒïŒã«ãããŠäºé žå
ã±ã€çŽ ãšã®ã¬ã¹ç¶åå¿æ··åç©ãç±æ¹¯ã䜿çšããŠ
610âã«å·åŽãããã åŸãããã·ãªã«ã¯å ±ã«çŽåã«æ¥ç¶ãããïŒåã®
ãµã€ã¯ãã³äžã§åé¢ãããäžæ¹å»ã¬ã¹äžã®ããå
æ°ŽçŽ å«éããã³åããåã±ã€çŽ å«éã¯æ°Žäžã§åžå
ã«ããååããããã·ãªã«ã¯ç§€éããäžã€åæã
ãããããŠç¹æ®ãªè¡šé¢ç©ããã³æ¿åæ°ã決å®ã
ããå®æœäŸïŒã«ãã衚ã«ç€ºãããçµæãæã
ãã ãè¡šã
å³ã¯æ¬çºæã®æ¹æ³ãå®æœããè£
眮ã®å®æœäŸã瀺
ãããã®ã§ã第ïŒå³ã¯çç¶å·åŽé¢ã«ãã€ãŠå å²ã
ããæ¯èŒç倧åã®åäžããŒãããºã«ã瀺ãæé¢
å³ã第ïŒå³ã¯çç¶å·åŽé¢ã«ãã€ãŠå å²ãããå šäœ
é åãæããããå°ããªããºã«ã®é åã瀺ãæé¢
å³ã第ïŒå³ã¯åã ã®ããŒãããºã«ããã®å·åŽãžã€
ã±ããã«ãã€ãŠå å²ãããŠããããŒãããºã«ã®é
åãšäºé žåã±ã€çŽ ç²åãåå¿ã®é転ã«ããåå¿ç
æç©ã®æ倱ãæžããããã«çããåºããšããã®äº
é žåã±ã€çŽ ç²åãå·åŽããããã®ç®¡ç¶å·åŽåšã瀺
ãæé¢å³ã§ããã å³äžã笊å·ïŒŠã¯çåå¿é åãïŒïŒïŒïŒïŒïŒïŒã¯
ããŒããïŒã¯ããºã«ãïŒïŒïŒïŒïŒïŒïŒã¯å·åŽãžã€
ã±ãããïŒïŒïŒïŒïŒïŒïŒã¯ã©ã€ã³ãïŒïŒïŒïŒïŒïŒ
ïŒã¯ã©ã€ã³ãïŒïŒã¯å·åŽåšãïŒïŒã¯åå¿çãïŒïŒ
ã¯åå¿å®€ã§ããã
ãããã®ã§ã第ïŒå³ã¯çç¶å·åŽé¢ã«ãã€ãŠå å²ã
ããæ¯èŒç倧åã®åäžããŒãããºã«ã瀺ãæé¢
å³ã第ïŒå³ã¯çç¶å·åŽé¢ã«ãã€ãŠå å²ãããå šäœ
é åãæããããå°ããªããºã«ã®é åã瀺ãæé¢
å³ã第ïŒå³ã¯åã ã®ããŒãããºã«ããã®å·åŽãžã€
ã±ããã«ãã€ãŠå å²ãããŠããããŒãããºã«ã®é
åãšäºé žåã±ã€çŽ ç²åãåå¿ã®é転ã«ããåå¿ç
æç©ã®æ倱ãæžããããã«çããåºããšããã®äº
é žåã±ã€çŽ ç²åãå·åŽããããã®ç®¡ç¶å·åŽåšã瀺
ãæé¢å³ã§ããã å³äžã笊å·ïŒŠã¯çåå¿é åãïŒïŒïŒïŒïŒïŒïŒã¯
ããŒããïŒã¯ããºã«ãïŒïŒïŒïŒïŒïŒïŒã¯å·åŽãžã€
ã±ãããïŒïŒïŒïŒïŒïŒïŒã¯ã©ã€ã³ãïŒïŒïŒïŒïŒïŒ
ïŒã¯ã©ã€ã³ãïŒïŒã¯å·åŽåšãïŒïŒã¯åå¿çãïŒïŒ
ã¯åå¿å®€ã§ããã
Claims (1)
- ãç¹èš±è«æ±ã®ç¯å²ã ïŒ äºé žåã±ã€çŽ ãšããåæ°ŽçŽ ã圢æããããã
å°ãªããšãïŒã€ã®ããŒãã«ããçºçãããçåå¿
é åã«ãããŠããåã±ã€çŽ ãèžæ°çžã§æ°Žèžæ°ãšã
å¯çæ§ã¬ã¹ãšãèªç±é žçŽ å«æã¬ã¹ãšã«åå¿ããã
åå¿å®€ã®å£éšã®å·åŽã«å ããŠã500â以äžã§ãã
ãçåå¿ã«ãããŠçºçããåå¿å»ã¬ã¹ã®é²ç¹ä»¥äž
ã®æž©åºŠã«ç¶æãããããŒããå å²ããå·åŽé¢ãšæ¥
觊ãããããšã«ããçã®åºéšã«é£æ¥ããçåå¿é
åã®éšåã«ãããŠã¬ã¹åå¿æ··åç©ãå·åŽããããš
ãç¹åŸŽãšããé«æ¿å容éã®è¯å¥œãªãããœããããŒ
æ§ãæãã埮现åäºé žåã±ã€çŽ ã®è£œé æ¹æ³ã ïŒ ããåã±ã€çŽ ãåããåã±ã€çŽ ã«ããããšã
ç¹åŸŽãšããç¹èš±è«æ±ã®ç¯å²ç¬¬ïŒé ã«èšèŒã®è£œé æ¹
æ³ã ïŒ çåå¿é åã200KWã®ç匷床ãæããçã«
ãã€ãŠçºçãããããšãç¹åŸŽãšããç¹èš±è«æ±ã®ç¯
å²ç¬¬ïŒé ã«èšèŒã®è£œé æ¹æ³ã ïŒ çåå¿é åãåã 10KWã®æ倧ç匷床ãæã
ãè€æ°ã®å°çã«ãã€ãŠçºçãããããšãç¹åŸŽãšã
ãç¹èš±è«æ±ã®ç¯å²ç¬¬ïŒé ã«èšèŒã®è£œé æ¹æ³ã ïŒ å¯çæ§ã¬ã¹ã«ã¯å°ãªããšã60容éïŒ ã®æ°ŽçŽ ã
å«ãŸããããšãç¹åŸŽãšããç¹èš±è«æ±ã®ç¯å²ç¬¬ïŒé
ã«èšèŒã®è£œé æ¹æ³ã ïŒ å·åŽé¢ã«ããçã®åºéšãå šãŠã®é¢ããå å²ã
ããããšãç¹åŸŽãšããç¹èš±è«æ±ã®ç¯å²ç¬¬ïŒé ã«èš
èŒã®è£œé æ¹æ³ã ïŒ çåå¿é åãè€æ°ã®çåå¿é åããæ§æãã
åé åãå·åŽé¢ã«ããå šãŠã®é¢ããå å²ãããã
ãšãç¹åŸŽãšããç¹èš±è«æ±ã®ç¯å²ç¬¬ïŒé ã«èšèŒã®è£œ
é æ¹æ³ã ïŒ (a) èªç±é žçŽ å«æã¬ã¹ã§å¯çæ§ã¬ã¹ãççŒã
ããããšã«ããçåå¿é åã圢æããçãçºç
ãããåå¿å®€å ã«é 眮ããå°ãªããšãïŒã€ã®ã
ãŒããšã (b) åããåã±ã€çŽ ãçã§ççŒãããããããŒã
ã«éãæµéæ©æ§ãšã (c) å¯çæ§ã¬ã¹åã³èªç±é žçŽ å«æã¬ã¹ãççºçã®
ããããŒãã«éãæµéæ©æ§ãšã (d) çåå¿é åããã¬ã¹åå¿æ··åç©ãååãäžã€
åæäºé žåã±ã€çŽ ãåé¢ååããååæ©æ§ãšã (e) åå¿å®€ã®å£éšãå·åŽããå·åŽæ©æ§ãšã (f) æŽã«ãçåå¿é åã®åºéšãå·åŽããããã«ã
ãŒãã«ããçºçãããçã®åºéšã«é£æ¥ããçå
å¿é åã«ãããŠã¬ã¹åå¿æ··åç©ãšæ¥è§Šããå·åŽ
é¢ãåããå·åŽæ©æ§ãšã (g) å·åŽé¢ãçåå¿é åã«ãããŠçºçãããççŒ
åå¿å»ã¬ã¹ã®é²ç¹ä»¥äžã§ããã500â以äžã®æž©
床ã«ç¶æããç¶ææ©æ§ãšã ããæ§æããããšãç¹åŸŽãšããåããåã±ã€çŽ ã®
èžæ°çžå æ°Žå解ã«ããé«æ¿å容éã®è¯å¥œãªãããœ
ããããŒæ§ãæãã埮现åäºé žåã±ã€çŽ ã®è£œé è£
眮ã ïŒ å°ãªããšãïŒã€ã®ããŒããçç¶å·åŽé¢ã«ãã
å å²ãããããšãç¹åŸŽãšããç¹èš±è«æ±ã®ç¯å²ç¬¬ïŒ
é ã«èšèŒã®è£œé è£ çœ®ã ïŒïŒ äžåã®ããŒãããºã«ãèšããåããŒãããº
ã«ã«ã¯10KWã®æ倧ç匷床ãæããçãåããå š
ãŠã®ããŒãããºã«ãçç¶å·åŽé¢ã«ããå å²ããã
ããšãç¹åŸŽãšããç¹èš±è«æ±ã®ç¯å²ç¬¬ïŒé ã«èšèŒã®
補é è£ çœ®ã ïŒïŒ å·åŽæ©æ§ãå·åŽæµäœã埪ç°ãããžã€ã±ãã
ä»ããã€ã©ããæ§æããããšãç¹åŸŽãšããç¹èš±è«
æ±ã®ç¯å²ç¬¬ïŒé ã«èšèŒã®è£œé è£ çœ®ã ïŒïŒ ãžã€ã±ããä»ããã€ã©ã«ã¯å·åŽæµäœãšããŠ
éå§äžã®ç±æ¹¯ãå«æãããããšãç¹åŸŽãšããç¹èš±
è«æ±ã®ç¯å²ç¬¬ïŒïŒé ã«èšèŒã®è£œé è£ çœ®ã
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE8008768A SE431196B (sv) | 1980-12-12 | 1980-12-12 | Sett att genom hydrolys av kiseltetrafluorid i en laga framstella finfordelad kiseloxid |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57140313A JPS57140313A (en) | 1982-08-30 |
| JPS6117766B2 true JPS6117766B2 (ja) | 1986-05-09 |
Family
ID=20342462
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56199972A Granted JPS57140313A (en) | 1980-12-12 | 1981-12-11 | Manufacture of fine silicon dioxide having highly thickened volume-good thixotropy and apparatus |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4559218A (ja) |
| EP (1) | EP0054530B1 (ja) |
| JP (1) | JPS57140313A (ja) |
| CA (1) | CA1175637A (ja) |
| DE (1) | DE3169468D1 (ja) |
| SE (1) | SE431196B (ja) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4801437A (en) * | 1985-12-04 | 1989-01-31 | Japan Oxygen Co., Ltd. | Process for treating combustible exhaust gases containing silane and the like |
| GB9410782D0 (en) * | 1994-05-28 | 1994-07-27 | British Nuclear Fuels Plc | The reaction of gases |
| DE19511643A1 (de) * | 1995-03-30 | 1996-10-02 | Das Duennschicht Anlagen Sys | Verfahren und Einrichtung zur Reinigung von schadstoffhaltigen Abgasen durch chemische Umsetzung |
| US6193944B1 (en) | 1995-12-08 | 2001-02-27 | Goldendale Aluminum Company | Method of recovering fumed silica from spent potliner |
| US6217840B1 (en) | 1995-12-08 | 2001-04-17 | Goldendale Aluminum Company | Production of fumed silica |
| US6248302B1 (en) | 2000-02-04 | 2001-06-19 | Goldendale Aluminum Company | Process for treating red mud to recover metal values therefrom |
| US7022299B2 (en) * | 2002-10-15 | 2006-04-04 | National Chung-Hsing University | Exfoliative clay and derivative thereof and method for producing the same |
| DE10340884A1 (de) * | 2003-09-04 | 2005-03-31 | Riebel, Ulrich, Prof. Dr.-Ing. | Verfahren zur Herstellung von Ruà oder anderen Flammenaerosolen und Vorrichtung zur DurchfÌhrung des Verfahrens |
| DE102004019575A1 (de) * | 2004-04-20 | 2005-11-24 | Innovent E.V. Technologieentwicklung | Verfahren zur Herstellung von transmissionsverbessernden und/oder reflexionsmindernden optischen Schichten |
| DE102006054156A1 (de) * | 2006-11-16 | 2008-05-21 | Wacker Chemie Ag | Pyrogene KieselsÀure hergestellt in einer Produktions-Anlage mit groÃer KapazitÀt |
| DE102008054592A1 (de) * | 2008-12-12 | 2010-06-17 | Wacker Chemie Ag | Pyrogene KieselsÀure hergestellt in einer Produktions-Anlage mit kleiner KapazitÀt |
| CN105110344B (zh) * | 2015-08-19 | 2017-02-01 | å çæ°ŽåžèåŠé¢ | äžç§ç €çžç³å¶æ°çžäºæ°§åç¡ çæ¹æ³äžè£ 眮 |
| US11014118B2 (en) * | 2015-12-11 | 2021-05-25 | Vitro Flat Glass Llc | Float bath coating system |
| CN112194359A (zh) * | 2019-08-13 | 2021-01-08 | æ¯ç¹éç¹ææ¯æéå ¬åž | ç»çé¢å¶ä»¶çå¶é æ¹æ³ |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2535036A (en) * | 1946-09-03 | 1950-12-26 | Cabot Godfrey L Inc | Manufacture of finely divided silica |
| DE974793C (de) * | 1952-04-02 | 1961-04-27 | Degussa | Verfahren zur Herstellung von feinverteilten Oxyden |
| US2819151A (en) * | 1954-03-02 | 1958-01-07 | Flemmert Gosta Lennart | Process for burning silicon fluorides to form silica |
| BE609721A (fr) * | 1960-11-03 | 1962-02-15 | Goesta Lennart Flemmert | Méthode de récupération du bioxyde de silicium finement divisé obtenu en faisant réagir en phase gazeuse des composés de silicium et de fluor avec de l'eau |
| US3233969A (en) * | 1961-05-29 | 1966-02-08 | Columbian Carbon | Process for producing pigmentary silica |
| US3361525A (en) * | 1961-11-03 | 1968-01-02 | Laporte Titanium Ltd | Manufacture of oxides of the elements titanium, zirconium, iron, aluminum and silicon |
| US3660025A (en) * | 1970-07-01 | 1972-05-02 | Cities Service Co | Manufacture of pigmentary silica |
| US3969485A (en) * | 1971-10-28 | 1976-07-13 | Flemmert Goesta Lennart | Process for converting silicon-and-fluorine-containing waste gases into silicon dioxide and hydrogen fluoride |
| US4292290A (en) * | 1980-04-16 | 1981-09-29 | Cabot Corporation | Process for the production of finely-divided metal and metalloid oxides |
-
1980
- 1980-12-12 SE SE8008768A patent/SE431196B/sv not_active IP Right Cessation
-
1981
- 1981-12-08 CA CA000391730A patent/CA1175637A/en not_active Expired
- 1981-12-11 EP EP81850241A patent/EP0054530B1/en not_active Expired
- 1981-12-11 DE DE8181850241T patent/DE3169468D1/de not_active Expired
- 1981-12-11 JP JP56199972A patent/JPS57140313A/ja active Granted
-
1984
- 1984-01-30 US US06/575,476 patent/US4559218A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP0054530A1 (en) | 1982-06-23 |
| SE8008768L (sv) | 1982-06-13 |
| US4559218A (en) | 1985-12-17 |
| DE3169468D1 (en) | 1985-04-25 |
| SE431196B (sv) | 1984-01-23 |
| CA1175637A (en) | 1984-10-09 |
| EP0054530B1 (en) | 1985-03-20 |
| JPS57140313A (en) | 1982-08-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US2819151A (en) | Process for burning silicon fluorides to form silica | |
| JPS6117766B2 (ja) | ||
| US3486913A (en) | Process for the production of finely divided oxides from halides | |
| KR100440517B1 (ko) | ìŽì°íí°íì ì ì¡°íë ë°©ë² | |
| US5266291A (en) | Packed bed arrangement for oxidation reaction system | |
| US3803297A (en) | Production of sulfur trioxide and sulfuric acid | |
| US3403001A (en) | Process and apparatus for the production of metal oxides | |
| US3203759A (en) | Method of preparing silicon dioxide | |
| EP0218411B1 (en) | Sulphuric acid | |
| US3233969A (en) | Process for producing pigmentary silica | |
| EP0054531B1 (en) | Process and apparatus for preparing finely-divided silicon dioxide in good yield | |
| US3087787A (en) | Process for the production of hydrogen fluoride | |
| US2631083A (en) | Production of calcium fluoride and silica | |
| US3988478A (en) | Carbon black | |
| JPS61501773A (ja) | å€ææ¹æ³ | |
| US4362701A (en) | Rotating apparatus for manufacturing hydrogen fluoride | |
| US3273963A (en) | Process for generating silicon tetrafluoride | |
| US3105742A (en) | Process for producing titanium oxide pigments | |
| US3674430A (en) | Process for the pyrogenic making of highly dispersed silicon dioxide | |
| US5360603A (en) | Packed bed arrangement useful for mixing and/or oxidation | |
| JP3775750B2 (ja) | â²äžïŒâŒïœããã®ïœïœã®è£œé | |
| US3661519A (en) | Hydrolysis of silicon tetrafluoride | |
| US3878294A (en) | Production of hydrogen fluoride | |
| US3689039A (en) | Method of heating oxygen-containing gases | |
| CN1548369A (zh) | èŸ å©çç§ååºåšåå ¶åšæ°çžæ³å¶å€çº³ç±³äºæ°§åç¡ äžåºçš |