JPS61177443U - - Google Patents

Info

Publication number
JPS61177443U
JPS61177443U JP6040985U JP6040985U JPS61177443U JP S61177443 U JPS61177443 U JP S61177443U JP 6040985 U JP6040985 U JP 6040985U JP 6040985 U JP6040985 U JP 6040985U JP S61177443 U JPS61177443 U JP S61177443U
Authority
JP
Japan
Prior art keywords
etching
etched
substrate
etching liquid
jetted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6040985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0143863Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985060409U priority Critical patent/JPH0143863Y2/ja
Publication of JPS61177443U publication Critical patent/JPS61177443U/ja
Application granted granted Critical
Publication of JPH0143863Y2 publication Critical patent/JPH0143863Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP1985060409U 1985-04-24 1985-04-24 Expired JPH0143863Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985060409U JPH0143863Y2 (enExample) 1985-04-24 1985-04-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985060409U JPH0143863Y2 (enExample) 1985-04-24 1985-04-24

Publications (2)

Publication Number Publication Date
JPS61177443U true JPS61177443U (enExample) 1986-11-05
JPH0143863Y2 JPH0143863Y2 (enExample) 1989-12-19

Family

ID=30587730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985060409U Expired JPH0143863Y2 (enExample) 1985-04-24 1985-04-24

Country Status (1)

Country Link
JP (1) JPH0143863Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015503240A (ja) * 2011-12-16 2015-01-29 エルジー シルトロン インコーポレイテッド 枚葉式ウェハエッチング装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS585342U (ja) * 1981-06-30 1983-01-13 富士通株式会社 ウェハ−表面処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS585342U (ja) * 1981-06-30 1983-01-13 富士通株式会社 ウェハ−表面処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015503240A (ja) * 2011-12-16 2015-01-29 エルジー シルトロン インコーポレイテッド 枚葉式ウェハエッチング装置

Also Published As

Publication number Publication date
JPH0143863Y2 (enExample) 1989-12-19

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