JPS61176853A - Gas chromatographic analyzing instrument for silicon wafer - Google Patents

Gas chromatographic analyzing instrument for silicon wafer

Info

Publication number
JPS61176853A
JPS61176853A JP1731285A JP1731285A JPS61176853A JP S61176853 A JPS61176853 A JP S61176853A JP 1731285 A JP1731285 A JP 1731285A JP 1731285 A JP1731285 A JP 1731285A JP S61176853 A JPS61176853 A JP S61176853A
Authority
JP
Japan
Prior art keywords
pipe
silicon wafer
fixing member
hole
reinforcing plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1731285A
Other languages
Japanese (ja)
Inventor
Shiyousuke Hagiwara
萩原　▲金小▼介
Eiichi Yano
矢野　栄一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sord Computer Corp
Original Assignee
Sord Computer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sord Computer Corp filed Critical Sord Computer Corp
Priority to JP1731285A priority Critical patent/JPS61176853A/en
Publication of JPS61176853A publication Critical patent/JPS61176853A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/60—Construction of the column
    • G01N30/6034—Construction of the column joining multiple columns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/60—Construction of the column
    • G01N30/6004—Construction of the column end pieces

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

PURPOSE:To make easily attachable and detachable a pipe provided with a connecting and fixing member having the section made into a multi-layered mass shape near the top end by providing said pipe and an auxiliary plate which supports the pipe and the connecting and fixing member so as to penetrate the pipe. CONSTITUTION:The pipe 3 is provided with the silicon wafer through-hole 2a and the connecting and fixing member 4 having the section made into the multi-layered mass state in the part in tight contact with the hole. The shifting of the pipe in the vertical and lateral directions is further prevented by the reinforcing plate 5 and the pipe is securely connected to the silicon wafer through-hole via a fixing jig 620 penetrating through the hole bored to the corner part of the glass plate. The plate 5 is made triple, of which the 1st sheet 510 holds the member 4 provided to the pipe, the 2nd sheet 520 holds the glass plate 1 via a fixing jig 620 and the 3rd sheet 530 holds the 1st reinforcing plate and the 2nd reinforcing plate via a fixing jig 610. The top end of the connecting and fixing member provided to the pipe is thereby pressed.

Description

【発明の詳細な説明】 （産業上の利用分野） 本発明は、シリコン・ウェハーとガラス板を密着して成
るシリコン・ウェハーガス・クロマトグラフ分析装置に
関し、特に、シリコン・ウェハー貫通孔用パイプを交換
可能とした携帯用のコンパクト型シリコン・ウェハーガ
ス・クロマトグラフ分析装置に関する。Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a silicon wafer gas chromatography analyzer comprising a silicon wafer and a glass plate in close contact with each other. This invention relates to a portable and replaceable compact silicon wafer gas chromatography analyzer.

（従来技術及びその問題点） 表面のシリコン・ウェハーのキャピラリイ・カラム溝と
連通する貫通孔に直径約ｌｌｌｌ１１のステンレス製パ
イプを垂直方向に接続し、サンプル・ガスその他のガス
を注入または排気を行なう場合パイプと貫通孔の継ぎ目
周辺に接着剤を塗布することにより接続強度を高め、さ
らに接続強度を高める手段として、接着剤をゴムその他
の補強剤により覆う等の改良が行なわれていた。(Prior art and its problems) A stainless steel pipe with a diameter of about lll11 is vertically connected to a through hole communicating with a capillary column groove in a silicon wafer on the surface, and sample gas and other gases are injected or exhausted. In this case, an adhesive was applied around the joint between the pipe and the through hole to increase the connection strength, and as a means to further increase the connection strength, improvements were made such as covering the adhesive with rubber or other reinforcing agents.

しかるに、接続強度を高める手段として使用された接着
剤は、大量に塗布すると継ぎ目から通路に浸透し、通路
を塞ぐ問題を生じさせた。また、接着剤の塗布量を少な
くしてゴムその他の補強剤により固定することにより接
着剤の通路浸透を防ぐことは可能となったが、ステンレ
スパイプが上下左右方向にずれる問題とともに、シリコ
ン・ウェハーの貫通孔周辺とパイプの継ぎ目に接着剤を
一体的に塗布するため、キャピラリイ・カラムのコーテ
ィングの際にパイプの着脱交換ができない問題があった
。However, the adhesive used as a means to increase the strength of the connection, when applied in large quantities, has the problem of penetrating into the passage through the seam and blocking the passage. In addition, by reducing the amount of adhesive applied and fixing with rubber or other reinforcing agents, it has become possible to prevent the adhesive from penetrating into the passages, but this has caused problems such as the stainless steel pipes shifting vertically and horizontally, as well as problems with silicon wafers. Since adhesive is applied integrally around the through-hole and the joint of the pipe, there was a problem in that the pipe could not be attached or removed when coating the capillary column.

（発明の目的） 本発明は、このような問題を解消するものであり、シリ
コン・ウェハーの貫通孔とパイプの継ぎ目からガスその
他の流体物の漏れを解消し、着脱自在のパイプを具備し
た小型で携帯可能なシリコン・ウェハーガス・クロマト
グラフ分析装置を提供することを目的とする。(Purpose of the Invention) The present invention solves these problems, and eliminates the leakage of gas and other fluids from the joint between the through hole of the silicon wafer and the pipe, and provides a compact design equipped with a removable pipe. The purpose is to provide a portable silicon wafer gas chromatography analyzer.

（発明の概′ｇり 本発明の構成を概括すると、本発明は、シリコン・ウェ
ハーとがラス板を密着して成るシリコン・ウェハーがス
・クロマトグラフ分析装置であって、シリコン・ウェハ
ーの表面に形成したキャピラリイ・カラム溝と連通する
貫通孔へ接続する着脱自在のパイプと、パイプ補強板と
を具備するシリコン・ウェハーガス・クロマトグラフ分
析装置である。(Summary of the Invention) To summarize the structure of the present invention, the present invention is a chromatographic analyzer in which a silicon wafer and a lath plate are closely attached to each other. This silicon wafer gas chromatography analyzer is equipped with a removable pipe that connects to a through hole that communicates with a capillary column groove formed in the wafer, and a pipe reinforcing plate.

本発明に係るパイプは、シリコン・ウェハー貫通孔と密
着する部分゛に断面が多層塊状を呈する接続固定部材を
具備し、さらに、補強板により上下左右方向へずれるの
□を防止し、ガラス板のコーナ一部に穿孔した孔に貫通
する固定治具を介してシリコン・ウェハー貫通孔とを堅
固に接続する。The pipe according to the present invention is equipped with a connection fixing member having a multilayer block-like cross section in the part that comes into close contact with the silicon wafer through hole, and furthermore, the reinforcing plate prevents the pipe from shifting in the vertical and horizontal directions, and the glass plate The silicon wafer through hole is firmly connected to the silicon wafer through hole through a fixing jig that penetrates the hole drilled in a part of the corner.

本発明に係るパイプは外径がＩＩＩＩＩＩ１１内径が０
゜２５ｍｍであり、パイプ内に０．２φの細線を貫通し
、パイプ内の内容積を等価的に少なくし、ガス・クロマ
トグラムの立上げまたは立下げを鋭敏にする特徴を有す
る。The pipe according to the present invention has an outer diameter of IIIIII11 and an inner diameter of 0.
25mm, a thin wire of 0.2φ is passed through the pipe, which equivalently reduces the internal volume of the pipe, making the rise or fall of the gas chromatogram more sensitive.

本発明に係るパイプ補強板は、パイプが上下左右方向へ
ずれるのを防止するためにパイプ貫通用の孔を具備し、
かつ、固定治具を貫通するための孔を具備するとともに
、パイプ近接部を側断面テーパ状に加工する。パイプが
上下左右方向へずれるのを防止し、接続をさらに堅固に
するために、パイプ補強板を三重にし、補強板のうち一
枚目はパイプに具備した接続固定部材を保持し、二枚目
は、ガラス板と固定治具を介して保持し、三枚目は、一
枚目の補強板と二枚目の補強板を固定治具接続固定部材
の上端部を押圧する。三枚目の補強板のパイプ貫通孔の
側断面をテーパ状に形成することにより、接続固定部材
の押圧を増強する。The pipe reinforcing plate according to the present invention is provided with holes for penetrating the pipe in order to prevent the pipe from shifting in the vertical and horizontal directions,
In addition, a hole is provided for penetrating the fixing jig, and a portion adjacent to the pipe is processed to have a tapered side cross section. In order to prevent the pipe from shifting in the vertical and horizontal directions and to further strengthen the connection, the pipe reinforcement plates are triple-layered, the first of which holds the connection fixing member provided on the pipe, and the second is held via the glass plate and a fixing jig, and the third reinforcing plate is connected to the fixing jig by pressing the upper end of the fixing member. By forming the side cross section of the pipe through hole of the third reinforcing plate into a tapered shape, the pressing force of the connection fixing member is enhanced.

（実施例） 本発明の構成およＶ実施例を図面に基づいて説明する。(Example) The configuration and embodiments of the present invention will be described based on the drawings.

ｓｉ図は本発明の実施例を示す縦断面図である。si diagram is a longitudinal sectional view showing an embodiment of the present invention.

１はガラス板、２はガラス板に密着したシリコン・ウェ
ハー、２ａはシリコン・ウェハーに形成したキャピラリ
イ・カラム溝２ｂと連通する貫通孔、３は外径ｌｌｓ内
径０，２５ａ＋ｍのパイプであり、接続固定部材４を具
備する。５は、補強板であり、一枚目の補強板５１０に
より接続固定部材の凹部４１２を押圧し、三枚目の補強
板５３０により接続固定部材の頂部４１３を押圧する。1 is a glass plate, 2 is a silicon wafer in close contact with the glass plate, 2a is a through hole that communicates with a capillary column groove 2b formed in the silicon wafer, 3 is a pipe with an outer diameter of 1 and an inner diameter of 0.25a+m, A connection fixing member 4 is provided. 5 is a reinforcing plate, the first reinforcing plate 510 presses the recess 412 of the connection fixing member, and the third reinforcing plate 530 presses the top 413 of the connection fixing member.

補強板５１０．５３０は、二枚目の補強板５２０を介在
して固定治具（例えばボルト・ナラ）　）６１０により
固定される。The reinforcing plates 510 and 530 are fixed by a fixing jig (for example, bolts and nuts) 610 with a second reinforcing plate 520 interposed therebetween.

補強板５１０は、ガラス板１のコーナーに穿設置　ｋ＊
　７１１−　／鎗９隔鎗１＾Ｆ９１４ｋ　ｌｌｌ噌旨通
ナス田中冶具（例えばボルト・ナラ）　）６２０により
固定され、がラス板１とパイプ３が堅固に保持される。The reinforcing plate 510 is installed at the corner of the glass plate 1.
711-/Spear 9 Separate Spear 1^F914k llll 噌子通过斯子Jig (for example, bolts and oak)) 620, the lath plate 1 and pipe 3 are firmly held.

第２図は、本発明の他の実施例を示す縦断面図であり、
１はガラス板、２はガラス板に密着したシリコン・ウェ
ハー、２ａはシリコン・ウェハーに形成したキャピラリ
ィ・カラム溝２ｂと連通する貫通孔、３は外径１　ｆｉ
ｌｌ＠ｓ内径０．２５ｍｍのパイプであり、接続固定部
材４を具備する（以上は第１図と同じ構造である。）。FIG. 2 is a longitudinal sectional view showing another embodiment of the present invention,
1 is a glass plate, 2 is a silicon wafer in close contact with the glass plate, 2a is a through hole communicating with a capillary column groove 2b formed in the silicon wafer, 3 is an outer diameter of 1 fi
It is a pipe with an inner diameter of 0.25 mm, and is equipped with a connection fixing member 4 (the above is the same structure as in FIG. 1).

５は、補強板であり、−辺が８０＋ｍｍの正方形であり
、プラス板１と同一の大きさである。補強板５によりパ
イプ３に具備した接続固定部材４の段部４１２を押圧保
持し、ガラス板１と固定治具６２０により、堅固に保持
される。Reference numeral 5 denotes a reinforcing plate, which is a square with a negative side of 80+mm, and has the same size as the positive plate 1. The reinforcing plate 5 presses and holds the stepped portion 412 of the connection fixing member 4 provided on the pipe 3, and the glass plate 1 and the fixing jig 620 hold it firmly.

第３図は、第１図に示した本発明の実施例の分解構成図
であり、ガラス板１にシリコン・ウェハー２を密着した
状態を示す平面図である。ガラス板１のコーナーに固定
治具６２０（第１図および第１０図参照）の貫通用の孔
１ａを穿設する。ガラス板１は一辺が８０＋ｍの正方形
で厚さ１０ｍｍである。FIG. 3 is an exploded configuration diagram of the embodiment of the present invention shown in FIG. 1, and is a plan view showing a state in which a silicon wafer 2 is closely attached to a glass plate 1. A hole 1a for a fixing jig 620 (see FIGS. 1 and 10) to pass through is bored at a corner of the glass plate 1. The glass plate 1 has a square shape with a side of 80+m and a thickness of 10 mm.

第４図は、本発明に係る一枚目の補強板５１０の平面図
であり、補強板５１０には、固定治具６１０（第１図お
よび第１０図参照）の貫通用の孔５１１と、接続固定部
材４の段部４１２を押圧保持する孔５１２が穿設され、
孔５１２の断面はテーパ状にしてもよい（図示せず、）
。FIG. 4 is a plan view of the first reinforcing plate 510 according to the present invention. A hole 512 is formed to press and hold the stepped portion 412 of the connection fixing member 4,
The cross section of the hole 512 may be tapered (not shown).
.

第５図は、本発明に係る二枚目の補強板５２０の平面図
であり、補強板５２０には、固定治具６２０（第１図お
よび第１０図参照）の貫通用の孔５２１と、一枚目の補
強板５１０と三枚目の補強板５３０とを保持する固定治
具の貫通用の孔５２２と接続固定部材４の段部４１２を
保持する孔５２３を！４：備する。FIG. 5 is a plan view of a second reinforcing plate 520 according to the present invention. A hole 522 for penetrating the fixing jig that holds the first reinforcing plate 510 and the third reinforcing plate 530, and a hole 523 for holding the stepped portion 412 of the connection fixing member 4! 4: Prepare.

第６図は、本発明に係る三枚目の補強板５３０の平面図
である。補強板５３０は、補強板５１０と同一の大きさ
であり、固定治兵貫通用の孔５３２とパイプ３を貫通し
、接続固定部材４の頂部４１３を押圧する断面テーパ状
を呈する孔５３１を具備する。FIG. 6 is a plan view of a third reinforcing plate 530 according to the present invention. The reinforcing plate 530 has the same size as the reinforcing plate 510 and includes a hole 532 for penetrating the fixed guard and a hole 531 having a tapered cross section that passes through the pipe 3 and presses the top 413 of the connecting fixing member 4. do.

第７図は、パイプ３に具備する断面が多層塊状の接続固
定部材４の一部をなす外側固定部材４１０を１０倍に拡
大して示した断面図であり、この外側接続固定部材４１
０は、耐熱性のゴム注入口シリコンパッキング（島津製
作所製品）であり、シリコン・ウェハー２の貫通孔２ａ
（第１図および第２図参照）と接続する部分４１１を膨
出し、補強板５１０により抑圧保持される段部４１２と
頂部４１３とから成り、パイプ３とシリコン・ウェハー
貫通孔２ａとを接続する接続バッファ部４１４を５％備
する構造である。FIG. 7 is a 10-fold enlarged cross-sectional view of an outer fixing member 410 that is part of the connecting fixing member 4 with a multi-layer block-like cross section, which is provided on the pipe 3.
0 is a heat-resistant rubber injection port silicone packing (Shimadzu product), which is inserted into the through hole 2a of the silicon wafer 2.
(See FIGS. 1 and 2) The portion 411 that connects with the pipe 3 is expanded and consists of a stepped portion 412 and a top portion 413 that are suppressed and held by a reinforcing plate 510, and connects the pipe 3 and the silicon wafer through hole 2a. This structure has 5% connection buffer section 414.

第８図は、断面が多層塊状の接続固定部材４の一部をな
す内側接続固定部材４２０，４２１，４２２の２０倍の
拡大断面図である。パイプ３の先端部３１０から２０ｍ
ｍ乃至１５ＩＩＩ１１の間に細線４２１を巻回し、次に
パイプ３の先端から２５ｍｍ乃至１０ｍｍの間に銀ロウ
付けを行なって銀ロウバッキング４２０とし、その周辺
にテフロンテープ４２２（米国デュポン社製品）を巻き
つけて、内側接続面９　　Ｒｈｔ　　ａｔ　　■炙　＃
　　＆　　ｈ　　　　　々Ｌ　４Ｔｍ　　Ｍｈ　１ｔｈ
　　ＦＪ１９　　Ｍ　　五４１　　１　　ｎ？、ａ−。FIG. 8 is a 20 times enlarged cross-sectional view of inner connecting fixing members 420, 421, and 422, which are part of the connecting fixing member 4 having a multilayer block-like cross section. 20m from the tip 310 of pipe 3
A thin wire 421 is wound between m and 15III11, and then silver brazing is performed between 25 mm and 10 mm from the tip of the pipe 3 to form a silver solder backing 420, and Teflon tape 422 (product of DuPont, USA) is placed around it. Wrap it around the inner connecting surface 9 Rht at ■ Roasted #
& h t L 4Tm Mh 1th
FJ19 M 541 1 n? , a-.

７７部４１４ヘパイブ３の後端部３３０より強制的に挿
入して断面が多層塊状の接続固定部材４が形成される。77 section 414 is forcibly inserted from the rear end section 330 of the tube 3 to form the connecting and fixing member 4 having a multilayer block-like cross section.

第９図は、パイプ３の２０倍の一部切欠いて示した拡大
側面図である。外径１０−１内径０．２５−一のパイプ
の先端部３１０から０．５−輪に至る尖鋭部３２０を形
成し、シリコン・ウェハー２ａの貫通孔２ａへ挿入する
。パイプ３には、０．２φの細線３ａ（例えばステンレ
ス製のワイヤ線）を挿入し、内径０．２５ｍｍの内容積
を小さくして〃ス・クロマトグラフの分析精度を高める
。FIG. 9 is an enlarged side view of the pipe 3, partially cut away and 20 times larger. A sharpened portion 320 extending from the tip 310 of a pipe having an outer diameter of 10-1 and an inner diameter of 0.25-1 to a 0.5-ring is formed and inserted into the through hole 2a of the silicon wafer 2a. A thin wire 3a (for example, stainless steel wire) with a diameter of 0.2φ is inserted into the pipe 3 to reduce the internal volume with an inner diameter of 0.25 mm to improve the analytical accuracy of the chromatograph.

第１０図は、本発明に係る実施例第１図の分解構成斜視
図であり、固定治具６１０．６２０を外すことにより、
簡単に着脱または組立てができる。FIG. 10 is an exploded perspective view of the embodiment of FIG. 1 according to the present invention, and by removing the fixing jigs 610 and 620,
Easy to put on and take off or assemble.

（発明の効果） 本発明は、キャピラリィ・カラム溝と連通する貫通孔と
Ｉｌ続するパイプを着脱自在にしたことにより、シリコ
ン・ウェハーのキャピラリイ・カラムまたは貫通孔をコ
ーティングする際にパイプを簡便に着脱できる効果を奏
する。(Effects of the Invention) The present invention makes it possible to attach and detach the pipe connected to the through hole communicating with the capillary column groove, making it easy to use the pipe when coating the capillary column or through hole of a silicon wafer. It has the effect of being removable.

本発明に係るパイプに断面が積層構造を呈する接続固定
部材を具備することにより、シリコン・ウェハー貫通孔
とパイプの接続に際しての死空間（デッドボリュ−Ａ：
Ｄｅａｄ　　Ｖｏｌｕｍｅ）を減少するとともに接続固
定部材を固定治具を介して補強板により保持するため、
上下左右の方向へのパイプのずれを防止できる効果を奏
する。By providing the pipe according to the present invention with a connection fixing member whose cross section exhibits a laminated structure, dead space (dead volume A:
In order to reduce dead volume and hold the connection fixing member with a reinforcing plate via a fixing jig,
This has the effect of preventing the pipe from shifting in the vertical and horizontal directions.

本発明に係るパイプ内に細線を挿入するため、パイプ内
の断面積が小さくなり、ガス・クロマトグラフの分析の
立ち上げまたは立ち下げを鋭敏にし、分析精度を高める
効果を奏する。Since the thin wire is inserted into the pipe according to the present invention, the cross-sectional area inside the pipe is reduced, and this has the effect of making the startup or shutdown of gas chromatograph analysis more sensitive and improving the accuracy of analysis.

本発明に係る補強板を三重構造にし、パイプおよび接続
固定部材貫通用孔をテーパ状に形成することにより、接
続固定部材を押圧保持し、上下左右方向へのずれを完全
に防止で終る効果を奏する。By making the reinforcing plate according to the present invention have a triple structure and forming the holes for passing through the pipe and the connection fixing member in a tapered shape, the connection fixation member is held under pressure and completely prevented from shifting in the vertical and horizontal directions. play.

【図面の簡単な説明】[Brief explanation of the drawing]

＃１１図は、本発明の実施例を示す縦断面図、第２図は
、本発明の他の実施例を示す縦断面図、第３図は、本発
明に係るガラス板とシリコン・ウェハーを密着した状態
を示す平面図、＃＆４図乃至第６図は、本発明に係る補
強板の平面図、第７図および第８図は、接続固定部材の
拡大断面図、第９図は、本発明に係るパイプの拡大図、
第１０図は、本発明に係る実施例第１図の分解構成斜視
図であって、各図を通じて同一部分は同一符号で表わさ
れている。 １・・・ガラス板　　２・・・シリコン−ウェハー２ａ
・・・シリコン・ウェハー貫通孔 ２ｂ・・・キャピラリイ・カラムFigure #11 is a longitudinal sectional view showing an embodiment of the present invention, Figure 2 is a longitudinal sectional view showing another embodiment of the invention, and Figure 3 is a longitudinal sectional view showing a glass plate and silicon wafer according to the invention. Figures #&4 to 6 are plan views of the reinforcing plate according to the present invention, Figures 7 and 8 are enlarged sectional views of the connection fixing member, and Figure 9 is a plan view showing the state in which they are in close contact. An enlarged view of the pipe according to the invention,
FIG. 10 is an exploded perspective view of the embodiment shown in FIG. 1 according to the present invention, and the same parts are denoted by the same reference numerals throughout each figure. 1... Glass plate 2... Silicon wafer 2a
...Silicon wafer through hole 2b...Capillary column

Claims (5)

【特許請求の範囲】[Claims] （１）シリコン・ウェハーとガラス板を密着して成るシ
リコン・ウェハーガス・クロマトグラフ分析装置におい
て、 シリコン・ウェハーの表面に形成したキャピラリィ・カ
ラム溝と連通する貫通孔と接続するパイプの先端近傍に
断面が多層塊状の接続固定部材を具備するパイプと、 該パイプを貫通し、上記パイプおよび上記接続固定部材
を支持する複数の孔を具備する補強板と、該補強板を固
定する接続固定治具とを具備したことを特徴とするシリ
コン・ウェハーガス・クロマトグラフ分析装置。(1) In a silicon wafer gas chromatography analyzer consisting of a silicon wafer and a glass plate that are in close contact with each other, near the tip of the pipe that connects to the through hole communicating with the capillary column groove formed on the surface of the silicon wafer A pipe equipped with a connection fixing member having a multilayer block-like cross section, a reinforcing plate having a plurality of holes that penetrate the pipe and supporting the pipe and the connection fixing member, and a connection fixing jig for fixing the reinforcing plate. A silicon wafer gas chromatography analyzer characterized by comprising: （２）特許請求の範囲第１項記載の断面が多層塊状の接
続固定部材を、外側を耐熱性ゴム材、内側を銀ロウパッ
キングとしたことを特徴とするシリコン・ウェハーガス
・クロマトグラフ分析装置。(2) A silicon wafer gas chromatography analyzer characterized in that the connecting and fixing member having a multilayer block-like cross section as described in claim 1 is made of a heat-resistant rubber material on the outside and a silver wax packing on the inside. . （３）特許請求の範囲第１項記載の補強板を三重構造と
し、少なくとも一枚はガラス板と同一の大きさとしたこ
とを特徴とするシリコン・ウェハーガス・クロマトグラ
フ分析装置。(3) A silicon wafer gas chromatography analyzer characterized in that the reinforcing plate according to claim 1 has a triple structure, and at least one of the reinforcing plates has the same size as the glass plate. （４）特許請求の範囲第１項記載のガラス板のコーナー
に補強板を固定治具により貫通する孔を穿設したことを
特徴とするシリコン・ウェハーガス・クロマトグラフ分
析装置。(4) A silicon wafer gas chromatography analyzer, characterized in that a hole is bored through the reinforcing plate at a corner of the glass plate according to claim 1 using a fixing jig. （５）特許請求の範囲第１項記載のパイプに細線を挿入
してパイプ内の内容積を小さくしたことを特徴とするシ
リコン・ウェハーガス・クロマトグラフ分析装置。(5) A silicon wafer gas chromatography analyzer characterized in that a thin wire is inserted into the pipe according to claim 1 to reduce the internal volume of the pipe.
JP1731285A 1985-01-31 1985-01-31 Gas chromatographic analyzing instrument for silicon wafer Pending JPS61176853A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1731285A JPS61176853A (en) 1985-01-31 1985-01-31 Gas chromatographic analyzing instrument for silicon wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1731285A JPS61176853A (en) 1985-01-31 1985-01-31 Gas chromatographic analyzing instrument for silicon wafer

Publications (1)

Publication Number Publication Date
JPS61176853A true JPS61176853A (en) 1986-08-08

Family

ID=11940489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1731285A Pending JPS61176853A (en) 1985-01-31 1985-01-31 Gas chromatographic analyzing instrument for silicon wafer

Country Status (1)

Country Link
JP (1) JPS61176853A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4935040A (en) * 1989-03-29 1990-06-19 The Perkin-Elmer Corporation Miniature devices useful for gas chromatography
US5720798A (en) * 1996-04-30 1998-02-24 Hewlett-Packard Company Micromachined analyte trap for gas phase streams

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4935040A (en) * 1989-03-29 1990-06-19 The Perkin-Elmer Corporation Miniature devices useful for gas chromatography
US5720798A (en) * 1996-04-30 1998-02-24 Hewlett-Packard Company Micromachined analyte trap for gas phase streams

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