JPS61176554U - - Google Patents
Info
- Publication number
- JPS61176554U JPS61176554U JP13648884U JP13648884U JPS61176554U JP S61176554 U JPS61176554 U JP S61176554U JP 13648884 U JP13648884 U JP 13648884U JP 13648884 U JP13648884 U JP 13648884U JP S61176554 U JPS61176554 U JP S61176554U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- electrode
- cvd apparatus
- cylindrical
- cylindrical electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Photoreceptors In Electrophotography (AREA)
- Chemical Vapour Deposition (AREA)
Description
第１図ａおよびｂは本考案の第１の実施例を示
す上面図および平面図、第２図ａおよびｂは本考
案の第２の実施例を示す上面図および平面図、第
３図ａおよびｂは従来のＣＶＤ装置を示す上面図
および平面図である。
図中、２は密封容器、３は感光ドラム基体、４
は円筒状電極、５は隔壁、９は底板、１０は天板
、をそれぞれ示す。
Figures 1a and b are top views and plan views showing the first embodiment of the present invention; Figures 2a and b are top views and plan views showing the second embodiment of the invention; Figure 3a; and b are a top view and a plan view showing a conventional CVD apparatus. In the figure, 2 is a sealed container, 3 is a photosensitive drum base, and 4 is a sealed container.
denotes a cylindrical electrode, 5 a partition wall, 9 a bottom plate, and 10 a top plate, respectively.
Claims (1)
長させるためのＣＶＤ装置であつて、前記電極の
一方が円筒形状であるとともに、該円筒状電極の
上下端に天板および底板を設け、かつ該電極に設
けた多数の小孔を通して円筒状電極内部に反応ガ
スを流入・流出するように構成したことを特徴と
するＣＶＤ装置。 A CVD apparatus for chemical vapor deposition while generating glow discharge between electrodes, wherein one of the electrodes has a cylindrical shape, and a top plate and a bottom plate are provided at the upper and lower ends of the cylindrical electrode, and A CVD apparatus characterized in that a reaction gas is configured to flow into and out of a cylindrical electrode through a large number of small holes provided in the electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13648884U JPS61176554U (en) | 1984-09-07 | 1984-09-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13648884U JPS61176554U (en) | 1984-09-07 | 1984-09-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61176554U true JPS61176554U (en) | 1986-11-04 |
Family
ID=30694944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13648884U Pending JPS61176554U (en) | 1984-09-07 | 1984-09-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61176554U (en) |
-
1984
- 1984-09-07 JP JP13648884U patent/JPS61176554U/ja active Pending
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