JPS61176258U - - Google Patents

Info

Publication number
JPS61176258U
JPS61176258U JP5918185U JP5918185U JPS61176258U JP S61176258 U JPS61176258 U JP S61176258U JP 5918185 U JP5918185 U JP 5918185U JP 5918185 U JP5918185 U JP 5918185U JP S61176258 U JPS61176258 U JP S61176258U
Authority
JP
Japan
Prior art keywords
chamber
wafers
evacuated
vacuum
aerodynamic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5918185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5918185U priority Critical patent/JPS61176258U/ja
Publication of JPS61176258U publication Critical patent/JPS61176258U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP5918185U 1985-04-20 1985-04-20 Pending JPS61176258U (US08063081-20111122-C00044.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5918185U JPS61176258U (US08063081-20111122-C00044.png) 1985-04-20 1985-04-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5918185U JPS61176258U (US08063081-20111122-C00044.png) 1985-04-20 1985-04-20

Publications (1)

Publication Number Publication Date
JPS61176258U true JPS61176258U (US08063081-20111122-C00044.png) 1986-11-04

Family

ID=30585368

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5918185U Pending JPS61176258U (US08063081-20111122-C00044.png) 1985-04-20 1985-04-20

Country Status (1)

Country Link
JP (1) JPS61176258U (US08063081-20111122-C00044.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006103868A1 (ja) * 2005-03-25 2006-10-05 Kitagawa Seiki Kabushiki Kaisha プレス装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5385742A (en) * 1977-01-07 1978-07-28 Nippon Steel Corp Continuous vacuum evaporation plating method of steel band

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5385742A (en) * 1977-01-07 1978-07-28 Nippon Steel Corp Continuous vacuum evaporation plating method of steel band

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006103868A1 (ja) * 2005-03-25 2006-10-05 Kitagawa Seiki Kabushiki Kaisha プレス装置

Similar Documents

Publication Publication Date Title
JPH0167739U (US08063081-20111122-C00044.png)
JPS61176258U (US08063081-20111122-C00044.png)
JPS63127125U (US08063081-20111122-C00044.png)
JPH0211159U (US08063081-20111122-C00044.png)
JPH0348853U (US08063081-20111122-C00044.png)
JPS6336032U (US08063081-20111122-C00044.png)
JPH0220328U (US08063081-20111122-C00044.png)
JPH0163132U (US08063081-20111122-C00044.png)
JPS62197782U (US08063081-20111122-C00044.png)
JPH0158660U (US08063081-20111122-C00044.png)
JPS61136537U (US08063081-20111122-C00044.png)
JPH0170327U (US08063081-20111122-C00044.png)
JPH0229150U (US08063081-20111122-C00044.png)
JPS61121654U (US08063081-20111122-C00044.png)
JPH03111571U (US08063081-20111122-C00044.png)
JPH0170863U (US08063081-20111122-C00044.png)
JPS6364770U (US08063081-20111122-C00044.png)
JPS61190133U (US08063081-20111122-C00044.png)
JPS6198868U (US08063081-20111122-C00044.png)
JPH0275724U (US08063081-20111122-C00044.png)
JPS6387760U (US08063081-20111122-C00044.png)
JPS6430829U (US08063081-20111122-C00044.png)
JPS6413662U (US08063081-20111122-C00044.png)
JPS6284926U (US08063081-20111122-C00044.png)
JPS5987134U (ja) 半導体製造装置