JPS61173043U - - Google Patents

Info

Publication number

JPS61173043U

JPS61173043U JP5611985U JP5611985U JPS61173043U JP S61173043 U JPS61173043 U JP S61173043U JP 5611985 U JP5611985 U JP 5611985U JP 5611985 U JP5611985 U JP 5611985U JP S61173043 U JPS61173043 U JP S61173043U

Authority

JP

Japan

Prior art keywords

heat generating

resistor element

generating resistor

bridge circuit

thin film

Prior art date

1985-04-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010409 thin film Substances 0.000 claims 2
• 230000001681 protective effect Effects 0.000 claims 1
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 238000010438 heat treatment Methods 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1

Cited By (2)