JPS61173010U - - Google Patents
Info
- Publication number
- JPS61173010U JPS61173010U JP5571985U JP5571985U JPS61173010U JP S61173010 U JPS61173010 U JP S61173010U JP 5571985 U JP5571985 U JP 5571985U JP 5571985 U JP5571985 U JP 5571985U JP S61173010 U JPS61173010 U JP S61173010U
- Authority
- JP
- Japan
- Prior art keywords
- optical micro
- beam spot
- reflected light
- cylindrical pins
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 2
- 238000000399 optical microscopy Methods 0.000 claims 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5571985U JPS61173010U ( ) | 1985-04-15 | 1985-04-15 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5571985U JPS61173010U ( ) | 1985-04-15 | 1985-04-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61173010U true JPS61173010U ( ) | 1986-10-28 |
Family
ID=30578657
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5571985U Pending JPS61173010U ( ) | 1985-04-15 | 1985-04-15 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61173010U ( ) |
-
1985
- 1985-04-15 JP JP5571985U patent/JPS61173010U/ja active Pending
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